JPS5322763A - Method of measuring surface with interference - Google Patents
Method of measuring surface with interferenceInfo
- Publication number
- JPS5322763A JPS5322763A JP8573977A JP8573977A JPS5322763A JP S5322763 A JPS5322763 A JP S5322763A JP 8573977 A JP8573977 A JP 8573977A JP 8573977 A JP8573977 A JP 8573977A JP S5322763 A JPS5322763 A JP S5322763A
- Authority
- JP
- Japan
- Prior art keywords
- interference
- measuring surface
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762636498 DE2636498C2 (en) | 1976-08-13 | 1976-08-13 | Method for interferometric surface brass |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5322763A true JPS5322763A (en) | 1978-03-02 |
JPS616921B2 JPS616921B2 (en) | 1986-03-03 |
Family
ID=5985380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8573977A Granted JPS5322763A (en) | 1976-08-13 | 1977-07-19 | Method of measuring surface with interference |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5322763A (en) |
DE (1) | DE2636498C2 (en) |
FR (1) | FR2361630A1 (en) |
GB (1) | GB1538811A (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2758149C2 (en) * | 1977-12-27 | 1979-10-04 | Ibm Deutschland Gmbh, 7000 Stuttgart | Interferometric method with λ / 4 resolution for distance, thickness and / or flatness measurement |
DE2946493A1 (en) | 1979-11-17 | 1981-05-21 | Wolfgang Prof. Dipl.-Phys. Dr. Dreybrodt | Automatic contactless optical evaluation of reflecting surface quality - using photoelectric transducers and point or laser illumination source |
EP0066030B1 (en) * | 1981-05-29 | 1986-08-27 | Ibm Deutschland Gmbh | Process and device for interferometric evenness measurement |
EP0075032B1 (en) * | 1981-09-17 | 1986-01-08 | Ibm Deutschland Gmbh | Method for interferometric surface topography |
DE3174649D1 (en) * | 1981-11-25 | 1986-06-19 | Ibm Deutschland | Phase balancing of an optical wave front |
DE4318739C2 (en) * | 1993-06-05 | 1997-07-03 | Lamtech Lasermestechnik Gmbh | Interferometer and method for measuring the topography of test specimen surfaces |
DE10303364A1 (en) * | 2003-01-29 | 2004-08-05 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg | Device for determining the height profile of an object |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4962160A (en) * | 1972-10-16 | 1974-06-17 |
-
1976
- 1976-08-13 DE DE19762636498 patent/DE2636498C2/en not_active Expired
-
1977
- 1977-06-21 FR FR7720043A patent/FR2361630A1/en active Granted
- 1977-07-19 JP JP8573977A patent/JPS5322763A/en active Granted
- 1977-08-10 GB GB3355377A patent/GB1538811A/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4962160A (en) * | 1972-10-16 | 1974-06-17 |
Also Published As
Publication number | Publication date |
---|---|
FR2361630B1 (en) | 1980-12-19 |
GB1538811A (en) | 1979-01-24 |
DE2636498C2 (en) | 1979-02-01 |
JPS616921B2 (en) | 1986-03-03 |
FR2361630A1 (en) | 1978-03-10 |
DE2636498B1 (en) | 1977-05-12 |
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