FR2361475A1 - Procede de fabrication continue de barreaux ou de tubes de silicium - Google Patents

Procede de fabrication continue de barreaux ou de tubes de silicium

Info

Publication number
FR2361475A1
FR2361475A1 FR7712733A FR7712733A FR2361475A1 FR 2361475 A1 FR2361475 A1 FR 2361475A1 FR 7712733 A FR7712733 A FR 7712733A FR 7712733 A FR7712733 A FR 7712733A FR 2361475 A1 FR2361475 A1 FR 2361475A1
Authority
FR
France
Prior art keywords
tubes
silicon
manufacturing process
bars
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7712733A
Other languages
English (en)
Other versions
FR2361475B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siltronic AG
Original Assignee
Wacker Siltronic AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic AG filed Critical Wacker Siltronic AG
Publication of FR2361475A1 publication Critical patent/FR2361475A1/fr
Application granted granted Critical
Publication of FR2361475B1 publication Critical patent/FR2361475B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)

Abstract

Procédé de fabrication continue de barreaux ou de tubes de silicium par dépôt à partir d'un gaz à l'intérieur d'un tube-support. On enroule sur un cylindre 2 en métal creux refroidi, placé dans un réacteur 1 et ouvert à une extrémité, un ruban souple 6 en une matière résistant au silicium de manière à former un tube, ce ruban étant séparé dudit cylindre par un mouvement de rotation-traction; on chauffe la partie en aval par un dispositif Il pour provoquer le dépôt du silicium à partir d'un gaz introduit en 15. Fabrication de tubes et barres microcristallines utilisables pour la fabrication de monocristaux.
FR7712733A 1976-04-27 1977-04-27 Procede de fabrication continue de barreaux ou de tubes de silicium Granted FR2361475A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2618398A DE2618398C3 (de) 1976-04-27 1976-04-27 Verfahren zur kontinuierlichen Herstellung von Siliciumstäben oder -rohren

Publications (2)

Publication Number Publication Date
FR2361475A1 true FR2361475A1 (fr) 1978-03-10
FR2361475B1 FR2361475B1 (fr) 1981-01-09

Family

ID=5976384

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7712733A Granted FR2361475A1 (fr) 1976-04-27 1977-04-27 Procede de fabrication continue de barreaux ou de tubes de silicium

Country Status (9)

Country Link
US (1) US4065533A (fr)
JP (1) JPS52151617A (fr)
BE (1) BE853958A (fr)
DE (1) DE2618398C3 (fr)
DK (1) DK182177A (fr)
FR (1) FR2361475A1 (fr)
GB (1) GB1569652A (fr)
IT (1) IT1086647B (fr)
NL (1) NL7702072A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2618293A1 (de) * 1976-04-27 1977-11-17 Papst Motoren Kg Kollektorloser gleichstrommotor
JPS591177B2 (ja) * 1978-01-20 1984-01-10 積水化学工業株式会社 複合管の製造方法
US4292264A (en) * 1978-07-18 1981-09-29 Motorola, Inc. Method for producing polycrystalline ribbon
US4250148A (en) * 1978-07-18 1981-02-10 Motorola, Inc. Apparatus and method for producing polycrystalline ribbon
US4238436A (en) * 1979-05-10 1980-12-09 General Instrument Corporation Method of obtaining polycrystalline silicon
JPS5876478U (ja) * 1981-11-20 1983-05-24 セイレイ工業株式会社 トラクタの原動機部ケ−シング機枠構造
US5862744A (en) * 1996-09-27 1999-01-26 The Pillsbury Company System for applying fluid strip to dough
US6257127B1 (en) * 2001-01-30 2001-07-10 Chao-Hung Lin Apparatus for making spring-roll skin from dough

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH527564A (de) * 1970-12-17 1972-09-15 Haas Franz Verfahren und Vorrichtung zur Herstellung von Waffelhülsen
DE2253411C3 (de) * 1972-10-31 1978-06-08 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen von aus Halbleitermaterial bestehenden, direkt beheizbaren Hohlkörpern für Diffusionszwecke

Also Published As

Publication number Publication date
DE2618398B2 (de) 1978-02-23
US4065533A (en) 1977-12-27
GB1569652A (en) 1980-06-18
DK182177A (da) 1977-10-28
BE853958A (fr) 1977-10-26
IT1086647B (it) 1985-05-28
FR2361475B1 (fr) 1981-01-09
DE2618398C3 (de) 1978-10-19
NL7702072A (nl) 1977-10-31
DE2618398A1 (de) 1977-11-03
JPS5550887B2 (fr) 1980-12-20
JPS52151617A (en) 1977-12-16

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Legal Events

Date Code Title Description
ST Notification of lapse