FR2337702A1 - Procede de fabrication de corps en nitrure de silicium et corps obtenus - Google Patents
Procede de fabrication de corps en nitrure de silicium et corps obtenusInfo
- Publication number
- FR2337702A1 FR2337702A1 FR7639365A FR7639365A FR2337702A1 FR 2337702 A1 FR2337702 A1 FR 2337702A1 FR 7639365 A FR7639365 A FR 7639365A FR 7639365 A FR7639365 A FR 7639365A FR 2337702 A1 FR2337702 A1 FR 2337702A1
- Authority
- FR
- France
- Prior art keywords
- bodies
- silicon nitride
- manufacturing silicon
- manufacturing
- nitride bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/591—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US64676476A | 1976-01-06 | 1976-01-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2337702A1 true FR2337702A1 (fr) | 1977-08-05 |
| FR2337702B1 FR2337702B1 (OSRAM) | 1982-05-14 |
Family
ID=24594371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7639365A Granted FR2337702A1 (fr) | 1976-01-06 | 1976-12-29 | Procede de fabrication de corps en nitrure de silicium et corps obtenus |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS52121613A (OSRAM) |
| BE (1) | BE850106A (OSRAM) |
| CA (1) | CA1093589A (OSRAM) |
| DE (1) | DE2700208A1 (OSRAM) |
| FR (1) | FR2337702A1 (OSRAM) |
| GB (1) | GB1546928A (OSRAM) |
| NL (1) | NL7700044A (OSRAM) |
| NO (1) | NO145432C (OSRAM) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2444087A1 (fr) * | 1978-12-15 | 1980-07-11 | Mtu Muenchen Gmbh | Procede pour la nitruration de structures de silicium |
| CH654564A5 (en) * | 1983-09-14 | 1986-02-28 | Ver Drahtwerke Ag | Process for making a shaped object from nitride of elements selected from groups III, IV, V or VI of the Periodic Table, in particular from silicon nitride |
| EP0377408A1 (de) * | 1989-01-04 | 1990-07-11 | Htm Ag | Verfahren zur Herstellung von Siliziumnitrid-Formkörpern |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE438849B (sv) * | 1981-05-25 | 1985-05-13 | Svenska Silikatforskning | Forfarande vid framstellning av formkroppar av kiselnitridbaserade material |
| DE3337025A1 (de) * | 1983-10-12 | 1985-05-02 | Feldmühle AG, 4000 Düsseldorf | Verfahren zur herstellung eines siliziumnitridbauteils |
| DE3514284A1 (de) * | 1985-04-19 | 1986-10-23 | Elektroschmelzwerk Kempten GmbH, 8000 München | Verfahren zur herstellung von formkoerpern aus reaktionsgebundenem siliciumnitrid durch nitridierung unter hohem stickstoffgasdruck |
| US5275985A (en) * | 1987-10-22 | 1994-01-04 | Cooper Industries, Inc. | Production of a sintered reaction bonded silicon nitride insulator |
| DE4102628A1 (de) * | 1991-01-30 | 1992-08-06 | Bayer Ag | Verfahren zur herstellung eines werkstoffes auf si(pfeil abwaerts)3(pfeil abwaerts)n(pfeil abwaerts)4(pfeil abwaerts)-basis, so hergestellte werkstoffe sowie deren verwendung |
| JP4574044B2 (ja) * | 2001-03-26 | 2010-11-04 | 日本碍子株式会社 | 窒化珪素多孔体及びその製造方法 |
| JP4473463B2 (ja) | 2001-03-26 | 2010-06-02 | 日本碍子株式会社 | 窒化珪素多孔体及びその製造方法 |
| EP1498400A3 (en) | 2003-07-17 | 2006-06-07 | Asahi Glass Co., Ltd. | Method for producing a silicon nitride filter |
| CN100343198C (zh) | 2003-07-29 | 2007-10-17 | 旭硝子株式会社 | 氮化硅质蜂窝式过滤器及其制造方法 |
| CN105503200A (zh) * | 2016-01-12 | 2016-04-20 | 中钢集团洛阳耐火材料研究院有限公司 | 一种氮化硅纤维过滤材料的制备方法 |
| JP7143960B1 (ja) * | 2022-02-25 | 2022-09-29 | 日立金属株式会社 | 窒化珪素基板およびその製造方法 |
| JP7760934B2 (ja) * | 2022-02-25 | 2025-10-28 | 株式会社プロテリアル | 窒化珪素基板およびその製造方法 |
| JP7188633B1 (ja) * | 2022-03-11 | 2022-12-13 | 日立金属株式会社 | 窒化珪素基板およびその製造方法 |
-
1976
- 1976-09-28 GB GB40230/76A patent/GB1546928A/en not_active Expired
- 1976-12-29 FR FR7639365A patent/FR2337702A1/fr active Granted
-
1977
- 1977-01-04 NL NL7700044A patent/NL7700044A/xx not_active Application Discontinuation
- 1977-01-05 BE BE173853A patent/BE850106A/xx not_active IP Right Cessation
- 1977-01-05 DE DE19772700208 patent/DE2700208A1/de not_active Withdrawn
- 1977-01-05 NO NO770025A patent/NO145432C/no unknown
- 1977-01-06 JP JP25077A patent/JPS52121613A/ja active Pending
- 1977-01-06 CA CA269,251A patent/CA1093589A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2444087A1 (fr) * | 1978-12-15 | 1980-07-11 | Mtu Muenchen Gmbh | Procede pour la nitruration de structures de silicium |
| CH654564A5 (en) * | 1983-09-14 | 1986-02-28 | Ver Drahtwerke Ag | Process for making a shaped object from nitride of elements selected from groups III, IV, V or VI of the Periodic Table, in particular from silicon nitride |
| EP0377408A1 (de) * | 1989-01-04 | 1990-07-11 | Htm Ag | Verfahren zur Herstellung von Siliziumnitrid-Formkörpern |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52121613A (en) | 1977-10-13 |
| CA1093589A (en) | 1981-01-13 |
| FR2337702B1 (OSRAM) | 1982-05-14 |
| NO145432B (no) | 1981-12-14 |
| NL7700044A (nl) | 1977-07-08 |
| NO770025L (no) | 1977-07-07 |
| DE2700208A1 (de) | 1977-07-14 |
| GB1546928A (en) | 1979-05-31 |
| NO145432C (no) | 1982-03-24 |
| BE850106A (fr) | 1977-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FR2337702A1 (fr) | Procede de fabrication de corps en nitrure de silicium et corps obtenus | |
| BE868263A (fr) | Procede de fabrication de miroirs et miroirs ainsi obtenus | |
| IT7831213A0 (it) | Processo di fabbricazione di sottili pellicole epitassiali. | |
| IT1056750B (it) | Processo per formare aperture in corpi di silicio | |
| FR2347183A1 (fr) | Procede de fabrication de composants d'insonorisation et composants obtenus | |
| FR2280979A1 (fr) | Structure de semi-conducteur et procede de fabrication | |
| FR2290407A1 (fr) | Procede pour la fabrication de corps en nitrure de silicium | |
| IT1165429B (it) | Processo di fabbricazione di dispositivi mos | |
| IT1158723B (it) | Processo di fabbricazione di dispositivi semiconduttori | |
| FR2330149A1 (fr) | Photodiode a semi-conducteur et procede de fabrication | |
| FR2340619A1 (fr) | Perfectionnement au procede de fabrication de dispositifs semiconducteurs et dispositifs ainsi obtenus | |
| PL200127A1 (pl) | Sposob wytwarzania przyrzadu polprzewodnikowego | |
| FR2339954A1 (fr) | Procede de fabrication de dispositifs mos | |
| IT1123672B (it) | Processo per la fabbricazione di uno strato di mascheramento per corpi di silicio | |
| BE858704A (fr) | Procede de fabrication de nitrures de silicium modifies | |
| GB2043042B (en) | Production of semiconductor bodies made of amorphous silicon | |
| FR2463509B1 (fr) | Procede de fabrication de dispositifs semi-conducteurs et dispositifs obtenus par ce procede | |
| BR7705750A (pt) | Processo de fabricacao de um dispositivo semicondutor e dispositivo semicondutor fabricado pelo processo | |
| FR2339582A1 (fr) | Procede pour la fabrication d'un objet en nitrure de silicium | |
| BR7901976A (pt) | Processo para fabricar corpos de carbureto de silicio | |
| BE846213A (fr) | Procede de fabrication de corps creux en silicium | |
| FR2308199A1 (fr) | Procede de fabrication de composants semi-conducteurs et composants obtenus | |
| FR2351051A1 (fr) | Procede de preparation de silicium tres pur | |
| PT75974A (fr) | Procede de fabrication de dispositifs semi-conducteurs et dispositifs semi-conducteurs ainsi obtenus | |
| BE866738A (fr) | Procede et dispositif de fabrication de corps creux et corps creux obtenus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |