FR2266301A1 - - Google Patents
Info
- Publication number
- FR2266301A1 FR2266301A1 FR7509475A FR7509475A FR2266301A1 FR 2266301 A1 FR2266301 A1 FR 2266301A1 FR 7509475 A FR7509475 A FR 7509475A FR 7509475 A FR7509475 A FR 7509475A FR 2266301 A1 FR2266301 A1 FR 2266301A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/298—Semiconductor material, e.g. amorphous silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/905—Plural dram cells share common contact or common trench
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Formation Of Insulating Films (AREA)
- Bipolar Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Element Separation (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3617574A JPS532552B2 (fr) | 1974-03-30 | 1974-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2266301A1 true FR2266301A1 (fr) | 1975-10-24 |
| FR2266301B1 FR2266301B1 (fr) | 1980-04-11 |
Family
ID=12462395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7509475A Expired FR2266301B1 (fr) | 1974-03-30 | 1975-03-26 |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US4014037A (fr) |
| JP (1) | JPS532552B2 (fr) |
| AT (1) | AT370559B (fr) |
| AU (1) | AU502578B2 (fr) |
| CA (1) | CA1029475A (fr) |
| CH (1) | CH583461A5 (fr) |
| DE (1) | DE2513459B2 (fr) |
| ES (1) | ES436123A1 (fr) |
| FR (1) | FR2266301B1 (fr) |
| GB (1) | GB1496814A (fr) |
| IT (1) | IT1034720B (fr) |
| NL (1) | NL182681C (fr) |
| SE (1) | SE406249C (fr) |
| SU (1) | SU638289A3 (fr) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2290040A1 (fr) * | 1974-10-26 | 1976-05-28 | Sony Corp | Composant semi-conducteur, circuit integre comprenant de tels composants et procede de fabrication |
| FR2309042A1 (fr) * | 1975-04-25 | 1976-11-19 | Sony Corp | Dispositif semi-conducteur du type a barriere de schottky |
| FR2309039A1 (fr) * | 1975-04-21 | 1976-11-19 | Sony Corp | Dispositif semi-conducteur et procede pour realiser dans celui-ci une couche semi-isolante en silicium |
| FR2335951A1 (fr) * | 1975-12-19 | 1977-07-15 | Radiotechnique Compelec | Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation |
| FR2382094A1 (fr) * | 1977-02-24 | 1978-09-22 | Rca Corp | Passivation d'une interception de surface d'une jonction pn |
| FR2382095A1 (fr) * | 1977-02-24 | 1978-09-22 | Rca Corp | Structure de passivation en plusieurs couches et procede de fabrication |
| EP0137319A2 (fr) * | 1983-09-26 | 1985-04-17 | Kabushiki Kaisha Toshiba | Dispositif semi-conducteur et procédé de fabrication |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5193874A (en) | 1975-02-15 | 1976-08-17 | Handotaisochino seizohoho | |
| JPS6041458B2 (ja) * | 1975-04-21 | 1985-09-17 | ソニー株式会社 | 半導体装置の製造方法 |
| JPS51128269A (en) * | 1975-04-30 | 1976-11-09 | Sony Corp | Semiconductor unit |
| DE2713647C2 (de) * | 1977-03-28 | 1984-11-29 | Tokyo Shibaura Electric Co., Ltd., Kawasaki, Kanagawa | Halbleitervorrichtung, bestehend aus einem Halbleitersubstrat und aus einem Oberflächenschutzfilm |
| US4194934A (en) * | 1977-05-23 | 1980-03-25 | Varo Semiconductor, Inc. | Method of passivating a semiconductor device utilizing dual polycrystalline layers |
| DE2730367A1 (de) * | 1977-07-05 | 1979-01-18 | Siemens Ag | Verfahren zum passivieren von halbleiterelementen |
| US4174252A (en) * | 1978-07-26 | 1979-11-13 | Rca Corporation | Method of defining contact openings in insulating layers on semiconductor devices without the formation of undesirable pinholes |
| US4191788A (en) * | 1978-11-13 | 1980-03-04 | Trw Inc. | Method to reduce breakage of V-grooved <100> silicon substrate |
| US4199384A (en) * | 1979-01-29 | 1980-04-22 | Rca Corporation | Method of making a planar semiconductor on insulating substrate device utilizing the deposition of a dual dielectric layer between device islands |
| JPS5627935A (en) * | 1979-08-15 | 1981-03-18 | Toshiba Corp | Semiconductor device |
| US4803528A (en) * | 1980-07-28 | 1989-02-07 | General Electric Company | Insulating film having electrically conducting portions |
| US4339285A (en) * | 1980-07-28 | 1982-07-13 | Rca Corporation | Method for fabricating adjacent conducting and insulating regions in a film by laser irradiation |
| US4344985A (en) * | 1981-03-27 | 1982-08-17 | Rca Corporation | Method of passivating a semiconductor device with a multi-layer passivant system by thermally growing a layer of oxide on an oxygen doped polycrystalline silicon layer |
| US4420765A (en) * | 1981-05-29 | 1983-12-13 | Rca Corporation | Multi-layer passivant system |
| US4537813A (en) * | 1982-09-27 | 1985-08-27 | At&T Technologies, Inc. | Photomask encapsulation |
| US4965173A (en) * | 1982-12-08 | 1990-10-23 | International Rectifier Corporation | Metallizing process and structure for semiconductor devices |
| US4489103A (en) * | 1983-09-16 | 1984-12-18 | Rca Corporation | SIPOS Deposition method |
| EP0160941A3 (fr) * | 1984-05-07 | 1987-03-25 | General Electric Company | Système d'interconnexion à haute tension pour un circuit intégré semi-conducteur |
| US4663820A (en) * | 1984-06-11 | 1987-05-12 | International Rectifier Corporation | Metallizing process for semiconductor devices |
| DE3520599A1 (de) * | 1984-06-15 | 1985-12-19 | Rca Corp., Princeton, N.J. | Halbleiterbauelement |
| JPS6276673A (ja) * | 1985-09-30 | 1987-04-08 | Toshiba Corp | 高耐圧半導体装置 |
| KR900005038B1 (ko) * | 1987-07-31 | 1990-07-18 | 삼성전자 주식회사 | 고저항 다결정 실리콘의 제조방법 |
| US5192993A (en) * | 1988-09-27 | 1993-03-09 | Kabushiki Kaisha Toshiba | Semiconductor device having improved element isolation area |
| DE69014359T2 (de) * | 1989-03-24 | 1995-05-24 | Ibm | Halbleitervorrichtung mit einem relativ zu einem vergrabenen Subkollektor selbstausgerichteten Kontakt. |
| DE4119904A1 (de) * | 1991-06-17 | 1992-12-24 | Telefunken Electronic Gmbh | Halbleiteranordnung |
| JP5311791B2 (ja) * | 2007-10-12 | 2013-10-09 | 東京エレクトロン株式会社 | ポリシリコン膜の形成方法 |
| JP5195186B2 (ja) * | 2008-09-05 | 2013-05-08 | 三菱電機株式会社 | 半導体装置の製造方法 |
| US11171039B2 (en) * | 2018-03-29 | 2021-11-09 | Taiwan Semiconductor Manufacturing Company Ltd. | Composite semiconductor substrate, semiconductor device and method for manufacturing the same |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE300472B (fr) * | 1965-03-31 | 1968-04-29 | Asea Ab | |
| US3391287A (en) * | 1965-07-30 | 1968-07-02 | Westinghouse Electric Corp | Guard junctions for p-nu junction semiconductor devices |
| US3710204A (en) * | 1967-05-20 | 1973-01-09 | Telefunken Patent | A semiconductor device having a screen electrode of intrinsic semiconductor material |
| JPS497870B1 (fr) * | 1969-06-06 | 1974-02-22 | ||
| US3755721A (en) * | 1970-06-15 | 1973-08-28 | Intel Corp | Floating gate solid state storage device and method for charging and discharging same |
| US3878549A (en) * | 1970-10-27 | 1975-04-15 | Shumpei Yamazaki | Semiconductor memories |
| JPS5044209Y2 (fr) * | 1971-04-20 | 1975-12-17 |
-
1974
- 1974-03-30 JP JP3617574A patent/JPS532552B2/ja not_active Expired
-
1975
- 1975-03-08 AT AT0243075A patent/AT370559B/de not_active IP Right Cessation
- 1975-03-18 AU AU79189/75A patent/AU502578B2/en not_active Expired
- 1975-03-20 GB GB11691/75A patent/GB1496814A/en not_active Expired
- 1975-03-24 US US05/561,532 patent/US4014037A/en not_active Expired - Lifetime
- 1975-03-25 CH CH381875A patent/CH583461A5/xx not_active IP Right Cessation
- 1975-03-26 DE DE2513459A patent/DE2513459B2/de not_active Ceased
- 1975-03-26 FR FR7509475A patent/FR2266301B1/fr not_active Expired
- 1975-03-27 SE SE7503614A patent/SE406249C/xx not_active IP Right Cessation
- 1975-03-27 ES ES436123A patent/ES436123A1/es not_active Expired
- 1975-03-28 SU SU752121500A patent/SU638289A3/ru active
- 1975-03-28 IT IT21844/75A patent/IT1034720B/it active
- 1975-04-01 NL NLAANVRAGE7503870,A patent/NL182681C/xx not_active IP Right Cessation
- 1975-04-01 CA CA223,550A patent/CA1029475A/fr not_active Expired
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2290040A1 (fr) * | 1974-10-26 | 1976-05-28 | Sony Corp | Composant semi-conducteur, circuit integre comprenant de tels composants et procede de fabrication |
| FR2309039A1 (fr) * | 1975-04-21 | 1976-11-19 | Sony Corp | Dispositif semi-conducteur et procede pour realiser dans celui-ci une couche semi-isolante en silicium |
| FR2309042A1 (fr) * | 1975-04-25 | 1976-11-19 | Sony Corp | Dispositif semi-conducteur du type a barriere de schottky |
| FR2335951A1 (fr) * | 1975-12-19 | 1977-07-15 | Radiotechnique Compelec | Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation |
| FR2382094A1 (fr) * | 1977-02-24 | 1978-09-22 | Rca Corp | Passivation d'une interception de surface d'une jonction pn |
| FR2382095A1 (fr) * | 1977-02-24 | 1978-09-22 | Rca Corp | Structure de passivation en plusieurs couches et procede de fabrication |
| EP0137319A2 (fr) * | 1983-09-26 | 1985-04-17 | Kabushiki Kaisha Toshiba | Dispositif semi-conducteur et procédé de fabrication |
| EP0137319A3 (en) * | 1983-09-26 | 1985-08-14 | Kabushiki Kaisha Toshiba | Semiconductor device and a method of manufacturing the same |
| US4585489A (en) * | 1983-09-26 | 1986-04-29 | Kabushiki Kaisha Toshiba | Method of controlling lifetime of minority carriers by electron beam irradiation through semi-insulating layer |
Also Published As
| Publication number | Publication date |
|---|---|
| CA1029475A (fr) | 1978-04-11 |
| SE406249B (sv) | 1979-01-29 |
| GB1496814A (en) | 1978-01-05 |
| DE2513459B2 (de) | 1981-01-08 |
| US4014037A (en) | 1977-03-22 |
| NL182681C (nl) | 1988-04-18 |
| CH583461A5 (fr) | 1976-12-31 |
| NL182681B (nl) | 1987-11-16 |
| SU638289A3 (ru) | 1978-12-15 |
| DE2513459A1 (de) | 1975-10-09 |
| AT370559B (de) | 1983-04-11 |
| NL7503870A (nl) | 1975-10-02 |
| JPS50130368A (fr) | 1975-10-15 |
| AU502578B2 (en) | 1979-08-02 |
| ES436123A1 (es) | 1977-04-16 |
| SE7503614L (fr) | 1975-10-01 |
| JPS532552B2 (fr) | 1978-01-28 |
| SE406249C (sv) | 1979-01-29 |
| AU7918975A (en) | 1976-09-23 |
| ATA243075A (de) | 1982-08-15 |
| IT1034720B (it) | 1979-10-10 |
| FR2266301B1 (fr) | 1980-04-11 |