FR2261347A1 - Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum - Google Patents

Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Info

Publication number
FR2261347A1
FR2261347A1 FR7405593A FR7405593A FR2261347A1 FR 2261347 A1 FR2261347 A1 FR 2261347A1 FR 7405593 A FR7405593 A FR 7405593A FR 7405593 A FR7405593 A FR 7405593A FR 2261347 A1 FR2261347 A1 FR 2261347A1
Authority
FR
France
Prior art keywords
target
tubes
esp
cathodic sputtering
fused silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7405593A
Other languages
English (en)
French (fr)
Other versions
FR2261347B1 (https=
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7405593A priority Critical patent/FR2261347A1/fr
Publication of FR2261347A1 publication Critical patent/FR2261347A1/fr
Application granted granted Critical
Publication of FR2261347B1 publication Critical patent/FR2261347B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/25—Metals
    • C03C2217/251—Al, Cu, Mg or noble metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
FR7405593A 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum Granted FR2261347A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7405593A FR2261347A1 (en) 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7405593A FR2261347A1 (en) 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Publications (2)

Publication Number Publication Date
FR2261347A1 true FR2261347A1 (en) 1975-09-12
FR2261347B1 FR2261347B1 (https=) 1976-12-03

Family

ID=9135114

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7405593A Granted FR2261347A1 (en) 1974-02-19 1974-02-19 Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum

Country Status (1)

Country Link
FR (1) FR2261347A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103938266A (zh) * 2013-01-18 2014-07-23 广东先导稀材股份有限公司 复合坩埚及其制备方法以及采用其生长锗酸铋晶体的方法
CN105921192A (zh) * 2016-07-19 2016-09-07 苏州普京真空技术有限公司 一种防止打滑的坩埚

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103938266A (zh) * 2013-01-18 2014-07-23 广东先导稀材股份有限公司 复合坩埚及其制备方法以及采用其生长锗酸铋晶体的方法
CN105921192A (zh) * 2016-07-19 2016-09-07 苏州普京真空技术有限公司 一种防止打滑的坩埚

Also Published As

Publication number Publication date
FR2261347B1 (https=) 1976-12-03

Similar Documents

Publication Publication Date Title
ATE67523T1 (de) Vorrichtung zum aufbringen duenner schichten auf ein substrat.
GB1258301A (https=)
JPS5916970A (ja) イオンプレ−テイングにおける蒸発材の蒸発量検知及び制御方法
FR2261347A1 (en) Coating bores of small tubes by cathodic sputtering - esp for mfr of fused silica tubes coated with platinum
US4244798A (en) Exhaust electrode process for exhaust gas oxygen sensor
GB762565A (en) Improvements in or relating to delay lines for travelling-wave tubes
JPS5736758A (en) Image tube
GB1357347A (en) Permeable membranes
GB1133402A (en) Improvements relating to stable nickel-chromium resistance films
JPS52119246A (en) Production of electrode substrate for display elements
GB683808A (en) Method of making selenium coated electrophotographic plates
JPS5342009A (en) Preparation of magnetic recording medium
JPS57169286A (en) Manufacture of piezoelectric or pyroelectric film
JPS55115336A (en) Plasma cvd electrode
JPS5374294A (en) Production method of thin film resistor
SU110729A1 (ru) Способ увеличени модул ции электронного пучка в трубках типа суперортикон
GB800591A (en) Electrical pulse distributing devices
GB931384A (en) Cold cathode electron discharge device
SU582100A1 (ru) Способ изготовлени из пленочных материалов изделий с цилиндрической отбортовкой типа мембран
GB895247A (en) Improvements relating to magnetic storage devices
JPS5497363A (en) Direct viewing storage tube
JPS52117148A (en) Production of electrode substrate for display elements
JPS6227568A (ja) スパツタリング装置
GB621536A (en) Improvements in electron-beam tubes
GB643819A (en) Improvements in ionisation counter tubes

Legal Events

Date Code Title Description
ST Notification of lapse