FR2187375A1 - Semi-conductor mfre employing pure steam - produced by an infra-red thin film evaporator - Google Patents

Semi-conductor mfre employing pure steam - produced by an infra-red thin film evaporator

Info

Publication number
FR2187375A1
FR2187375A1 FR7220511A FR7220511A FR2187375A1 FR 2187375 A1 FR2187375 A1 FR 2187375A1 FR 7220511 A FR7220511 A FR 7220511A FR 7220511 A FR7220511 A FR 7220511A FR 2187375 A1 FR2187375 A1 FR 2187375A1
Authority
FR
France
Prior art keywords
semi
thin film
mfre
infra
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7220511A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie IBM France SAS
Original Assignee
Compagnie IBM France SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie IBM France SAS filed Critical Compagnie IBM France SAS
Priority to FR7220511A priority Critical patent/FR2187375A1/en
Publication of FR2187375A1 publication Critical patent/FR2187375A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F22B1/281—Methods of steam generation characterised by form of heating method in boilers heated electrically other than by electrical resistances or electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/14—Investigating or analyzing materials by the use of thermal means by using distillation, extraction, sublimation, condensation, freezing, or crystallisation
    • G01N25/145—Accessories, e.g. cooling devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

IR radiation is used to vaporise a very thin film of water to produce the extremely pure steam required to oxidise silicon in the mfr. of semi-conductors, particularly transistors and integrated circuits. Because the water passes from liquid to vapour phase without turbulence, the final steam is purer than that obtainable from double-distillation processes, and the new plant will produce steam in 2 mins. compared with 30 mins. The radiation source can be an electric element inside a quartz sleeve which, in turn, is encased in silica wool to support a thin, calm film of water to be evapd.
FR7220511A 1972-06-01 1972-06-01 Semi-conductor mfre employing pure steam - produced by an infra-red thin film evaporator Withdrawn FR2187375A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7220511A FR2187375A1 (en) 1972-06-01 1972-06-01 Semi-conductor mfre employing pure steam - produced by an infra-red thin film evaporator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7220511A FR2187375A1 (en) 1972-06-01 1972-06-01 Semi-conductor mfre employing pure steam - produced by an infra-red thin film evaporator

Publications (1)

Publication Number Publication Date
FR2187375A1 true FR2187375A1 (en) 1974-01-18

Family

ID=9099832

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7220511A Withdrawn FR2187375A1 (en) 1972-06-01 1972-06-01 Semi-conductor mfre employing pure steam - produced by an infra-red thin film evaporator

Country Status (1)

Country Link
FR (1) FR2187375A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184817A2 (en) * 1984-12-10 1986-06-18 Spadimwis, S.A. Distillation apparatus and use thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184817A2 (en) * 1984-12-10 1986-06-18 Spadimwis, S.A. Distillation apparatus and use thereof
EP0184817A3 (en) * 1984-12-10 1987-09-23 Spadimwis, S.A. Distillation apparatus and use thereof

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Legal Events

Date Code Title Description
ST Notification of lapse