FR2252860A1 - Vaporisation of liq., partic. water - esp. for giving the humidity required in coating operations in semi-conductor mfr. - Google Patents

Vaporisation of liq., partic. water - esp. for giving the humidity required in coating operations in semi-conductor mfr.

Info

Publication number
FR2252860A1
FR2252860A1 FR7342851A FR7342851A FR2252860A1 FR 2252860 A1 FR2252860 A1 FR 2252860A1 FR 7342851 A FR7342851 A FR 7342851A FR 7342851 A FR7342851 A FR 7342851A FR 2252860 A1 FR2252860 A1 FR 2252860A1
Authority
FR
France
Prior art keywords
liq
water
appts
mfr
vaporisation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7342851A
Other languages
French (fr)
Other versions
FR2252860B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cegelec SA
Original Assignee
Cegelec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cegelec SA filed Critical Cegelec SA
Priority to FR7342851A priority Critical patent/FR2252860A1/en
Publication of FR2252860A1 publication Critical patent/FR2252860A1/en
Application granted granted Critical
Publication of FR2252860B1 publication Critical patent/FR2252860B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F22B1/281—Methods of steam generation characterised by form of heating method in boilers heated electrically other than by electrical resistances or electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B01D1/0029—Use of radiation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F22—STEAM GENERATION
    • F22B—METHODS OF STEAM GENERATION; STEAM BOILERS
    • F22B1/00—Methods of steam generation characterised by form of heating method
    • F22B1/28—Methods of steam generation characterised by form of heating method in boilers heated electrically
    • F22B1/284—Methods of steam generation characterised by form of heating method in boilers heated electrically with water in reservoirs

Abstract

Appts. for vaporising a liq., partic. water, consists of a quartz vessel in which the liq. is put, and which has a heater which heats by infra-red radiation. Used esp. for supplying the humidity necessary in the mfr. of certain semi-conductors, in which a layer of silicon oxide is formed on the surface of a silicon platelet. The use of infra-red heat gives a smoother vaporisation at a constant rate with less consumption of water than existing vaporisers, requiring less frequent re-filling. In addn., it is not necessary to regulate the feed to the heater, and the appts. is smaller and cheaper to make than existing appts. and it can be easily put into a diffusion assembly for semiconductor mfr. In operation, all the vessel, except a thin layer at the liq. surface, is at ambient temp. and impurities from the quartz do not contaminate the water and the cylindrical form makes the appts. easier to handle than existing spherical vaporisers.
FR7342851A 1973-11-30 1973-11-30 Vaporisation of liq., partic. water - esp. for giving the humidity required in coating operations in semi-conductor mfr. Granted FR2252860A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7342851A FR2252860A1 (en) 1973-11-30 1973-11-30 Vaporisation of liq., partic. water - esp. for giving the humidity required in coating operations in semi-conductor mfr.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7342851A FR2252860A1 (en) 1973-11-30 1973-11-30 Vaporisation of liq., partic. water - esp. for giving the humidity required in coating operations in semi-conductor mfr.

Publications (2)

Publication Number Publication Date
FR2252860A1 true FR2252860A1 (en) 1975-06-27
FR2252860B1 FR2252860B1 (en) 1978-03-24

Family

ID=9128562

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7342851A Granted FR2252860A1 (en) 1973-11-30 1973-11-30 Vaporisation of liq., partic. water - esp. for giving the humidity required in coating operations in semi-conductor mfr.

Country Status (1)

Country Link
FR (1) FR2252860A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0834339A1 (en) * 1996-09-23 1998-04-08 Mikrowellen-Systeme MWS GmbH Method and apparatus for producing highly purified chemical liquids

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0834339A1 (en) * 1996-09-23 1998-04-08 Mikrowellen-Systeme MWS GmbH Method and apparatus for producing highly purified chemical liquids
US6303005B1 (en) 1996-09-23 2001-10-16 Mikrowellen-Systeme Mws Gmbh Process and device for producing high-purity liquid chemicals

Also Published As

Publication number Publication date
FR2252860B1 (en) 1978-03-24

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Legal Events

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ST Notification of lapse