GB1340464A - Production of tubes of semiconductor material closed at one end - Google Patents
Production of tubes of semiconductor material closed at one endInfo
- Publication number
- GB1340464A GB1340464A GB1612072A GB1612072A GB1340464A GB 1340464 A GB1340464 A GB 1340464A GB 1612072 A GB1612072 A GB 1612072A GB 1612072 A GB1612072 A GB 1612072A GB 1340464 A GB1340464 A GB 1340464A
- Authority
- GB
- United Kingdom
- Prior art keywords
- carrier
- carrier body
- screwed
- pressed
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
1340464 Semi-conductor tubes SIEMENS AG 7 April 1972 [19 May 1971] 16120/72 Heading C1A A layer of semi-conductor material is deposited from a gaseous compound thereof on to the heated outer surface of a hollow tubular body closed at one end and heated by direct flow of current therethrough, one of the electrodes used to supply current being in the form of a rod of graphite, glass carbon, spectral carbon or pyrographite arranged with the said carrier body and connected electrically thereto at the closed end, and subsequently removing said carrier body without damaging the deposited layer. The rod may be screwed or pressed into a recess provided in the inner face of the closed end of the carrier, which closed end may itself be screwed or pressed into the open end of the carrier body. Alternatively the cap closing the end of the carrier may be of mushroom shape, the rod being screwed or pressed into the stem, the cap being substantially of the same diameter as the carrier body if desired. Other features of the apparatus and the manner of its use are of the usual Siemens type. Silicon may be deposited from the vapour phase reaction of silicochloroform and hydrogen.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2125085A DE2125085C3 (en) | 1971-05-19 | 1971-05-19 | Device for manufacturing tubes closed on one side from semiconductor material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1340464A true GB1340464A (en) | 1973-12-12 |
Family
ID=5808445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1612072A Expired GB1340464A (en) | 1971-05-19 | 1972-04-07 | Production of tubes of semiconductor material closed at one end |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US3747559A (en) |
| JP (1) | JPS5540528B1 (en) |
| AT (1) | AT336682B (en) |
| BE (1) | BE778749A (en) |
| CA (1) | CA968673A (en) |
| CH (1) | CH537214A (en) |
| CS (1) | CS167349B2 (en) |
| DD (1) | DD96853A5 (en) |
| DE (1) | DE2125085C3 (en) |
| DK (1) | DK137550C (en) |
| FR (1) | FR2138099B1 (en) |
| GB (1) | GB1340464A (en) |
| IT (1) | IT955601B (en) |
| NL (1) | NL7202997A (en) |
| PL (1) | PL82569B1 (en) |
| SE (1) | SE367216B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3979490A (en) * | 1970-12-09 | 1976-09-07 | Siemens Aktiengesellschaft | Method for the manufacture of tubular bodies of semiconductor material |
| US4015922A (en) * | 1970-12-09 | 1977-04-05 | Siemens Aktiengesellschaft | Apparatus for the manufacture of tubular bodies of semiconductor material |
| US4034705A (en) * | 1972-05-16 | 1977-07-12 | Siemens Aktiengesellschaft | Shaped bodies and production of semiconductor material |
| US4035460A (en) * | 1972-05-16 | 1977-07-12 | Siemens Aktiengesellschaft | Shaped bodies and production of semiconductor material |
| DE2322952C3 (en) * | 1973-05-07 | 1979-04-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Process for the production of trays for holding crystal disks in diffusion and tempering processes |
| JP2888253B2 (en) * | 1989-07-20 | 1999-05-10 | 富士通株式会社 | Chemical vapor deposition and apparatus for its implementation |
| EP1014455B1 (en) | 1997-07-25 | 2006-07-12 | Nichia Corporation | Nitride semiconductor device |
| DE19738234C1 (en) * | 1997-09-02 | 1998-10-22 | Fraunhofer Ges Forschung | Apparatus for producing sputtered coatings consisting of hard substances |
| JP3770014B2 (en) | 1999-02-09 | 2006-04-26 | 日亜化学工業株式会社 | Nitride semiconductor device |
| DE60043536D1 (en) | 1999-03-04 | 2010-01-28 | Nichia Corp | NITRIDHALBLEITERLASERELEMENT |
| TWI362769B (en) | 2008-05-09 | 2012-04-21 | Univ Nat Chiao Tung | Light emitting device and fabrication method therefor |
| CN111734950A (en) * | 2020-07-01 | 2020-10-02 | 西安维国电子科技有限公司 | Method and device for filling and recovering electric insulating gas in closed space |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2955566A (en) * | 1957-04-16 | 1960-10-11 | Chilean Nitrate Sales Corp | Dissociation-deposition unit for the production of chromium |
| GB944009A (en) * | 1960-01-04 | 1963-12-11 | Texas Instruments Ltd | Improvements in or relating to the deposition of silicon on a tantalum article |
| US3451772A (en) * | 1967-06-14 | 1969-06-24 | Air Reduction | Production of ultrapure titanium nitride refractory articles |
| US3547530A (en) * | 1968-11-12 | 1970-12-15 | Bell Telephone Labor Inc | Overhead projector |
-
1971
- 1971-05-19 DE DE2125085A patent/DE2125085C3/en not_active Expired
-
1972
- 1972-01-31 BE BE778749A patent/BE778749A/en not_active IP Right Cessation
- 1972-03-07 NL NL7202997A patent/NL7202997A/xx not_active Application Discontinuation
- 1972-03-07 CH CH329072A patent/CH537214A/en not_active IP Right Cessation
- 1972-03-21 AT AT241272A patent/AT336682B/en active
- 1972-04-07 GB GB1612072A patent/GB1340464A/en not_active Expired
- 1972-05-15 US US00253629A patent/US3747559A/en not_active Expired - Lifetime
- 1972-05-16 PL PL1972155413A patent/PL82569B1/pl unknown
- 1972-05-17 IT IT24456/72A patent/IT955601B/en active
- 1972-05-17 DD DD163029A patent/DD96853A5/xx unknown
- 1972-05-17 CS CS3363A patent/CS167349B2/cs unknown
- 1972-05-18 CA CA142,467A patent/CA968673A/en not_active Expired
- 1972-05-18 DK DK249772A patent/DK137550C/en active
- 1972-05-18 FR FR727217841A patent/FR2138099B1/fr not_active Expired
- 1972-05-19 JP JP4980572A patent/JPS5540528B1/ja active Pending
- 1972-05-19 SE SE06636/72A patent/SE367216B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CS167349B2 (en) | 1976-04-29 |
| DE2125085B2 (en) | 1978-06-29 |
| ATA241272A (en) | 1976-09-15 |
| PL82569B1 (en) | 1975-10-31 |
| BE778749A (en) | 1972-05-16 |
| AT336682B (en) | 1977-05-25 |
| US3747559A (en) | 1973-07-24 |
| DE2125085C3 (en) | 1979-02-22 |
| SE367216B (en) | 1974-05-20 |
| FR2138099B1 (en) | 1974-07-26 |
| FR2138099A1 (en) | 1972-12-29 |
| DK137550C (en) | 1978-09-04 |
| DE2125085A1 (en) | 1972-12-07 |
| IT955601B (en) | 1973-09-29 |
| CH537214A (en) | 1973-05-31 |
| DD96853A5 (en) | 1973-04-12 |
| CA968673A (en) | 1975-06-03 |
| NL7202997A (en) | 1972-11-21 |
| JPS5540528B1 (en) | 1980-10-18 |
| DK137550B (en) | 1978-03-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |