AT336682B - ARRANGEMENT FOR THE MANUFACTURING OF SINGLE-SIDED TUBES FROM SEMICONDUCTOR MATERIAL - Google Patents

ARRANGEMENT FOR THE MANUFACTURING OF SINGLE-SIDED TUBES FROM SEMICONDUCTOR MATERIAL

Info

Publication number
AT336682B
AT336682B AT241272A AT241272A AT336682B AT 336682 B AT336682 B AT 336682B AT 241272 A AT241272 A AT 241272A AT 241272 A AT241272 A AT 241272A AT 336682 B AT336682 B AT 336682B
Authority
AT
Austria
Prior art keywords
arrangement
manufacturing
semiconductor material
sided tubes
sided
Prior art date
Application number
AT241272A
Other languages
German (de)
Other versions
ATA241272A (en
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA241272A publication Critical patent/ATA241272A/en
Application granted granted Critical
Publication of AT336682B publication Critical patent/AT336682B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
AT241272A 1971-05-19 1972-03-21 ARRANGEMENT FOR THE MANUFACTURING OF SINGLE-SIDED TUBES FROM SEMICONDUCTOR MATERIAL AT336682B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2125085A DE2125085C3 (en) 1971-05-19 1971-05-19 Device for manufacturing tubes closed on one side from semiconductor material

Publications (2)

Publication Number Publication Date
ATA241272A ATA241272A (en) 1976-09-15
AT336682B true AT336682B (en) 1977-05-25

Family

ID=5808445

Family Applications (1)

Application Number Title Priority Date Filing Date
AT241272A AT336682B (en) 1971-05-19 1972-03-21 ARRANGEMENT FOR THE MANUFACTURING OF SINGLE-SIDED TUBES FROM SEMICONDUCTOR MATERIAL

Country Status (16)

Country Link
US (1) US3747559A (en)
JP (1) JPS5540528B1 (en)
AT (1) AT336682B (en)
BE (1) BE778749A (en)
CA (1) CA968673A (en)
CH (1) CH537214A (en)
CS (1) CS167349B2 (en)
DD (1) DD96853A5 (en)
DE (1) DE2125085C3 (en)
DK (1) DK137550C (en)
FR (1) FR2138099B1 (en)
GB (1) GB1340464A (en)
IT (1) IT955601B (en)
NL (1) NL7202997A (en)
PL (1) PL82569B1 (en)
SE (1) SE367216B (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3979490A (en) * 1970-12-09 1976-09-07 Siemens Aktiengesellschaft Method for the manufacture of tubular bodies of semiconductor material
US4015922A (en) * 1970-12-09 1977-04-05 Siemens Aktiengesellschaft Apparatus for the manufacture of tubular bodies of semiconductor material
US4035460A (en) * 1972-05-16 1977-07-12 Siemens Aktiengesellschaft Shaped bodies and production of semiconductor material
US4034705A (en) * 1972-05-16 1977-07-12 Siemens Aktiengesellschaft Shaped bodies and production of semiconductor material
DE2322952C3 (en) * 1973-05-07 1979-04-19 Siemens Ag, 1000 Berlin Und 8000 Muenchen Process for the production of trays for holding crystal disks in diffusion and tempering processes
JP2888253B2 (en) * 1989-07-20 1999-05-10 富士通株式会社 Chemical vapor deposition and apparatus for its implementation
AU747260B2 (en) 1997-07-25 2002-05-09 Nichia Chemical Industries, Ltd. Nitride semiconductor device
DE19738234C1 (en) * 1997-09-02 1998-10-22 Fraunhofer Ges Forschung Apparatus for producing sputtered coatings consisting of hard substances
JP3770014B2 (en) 1999-02-09 2006-04-26 日亜化学工業株式会社 Nitride semiconductor device
EP1168539B1 (en) 1999-03-04 2009-12-16 Nichia Corporation Nitride semiconductor laser device
TWI362769B (en) 2008-05-09 2012-04-21 Univ Nat Chiao Tung Light emitting device and fabrication method therefor
CN111734950A (en) * 2020-07-01 2020-10-02 西安维国电子科技有限公司 Method and device for filling and recovering electric insulating gas in closed space

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2955566A (en) * 1957-04-16 1960-10-11 Chilean Nitrate Sales Corp Dissociation-deposition unit for the production of chromium
GB944009A (en) * 1960-01-04 1963-12-11 Texas Instruments Ltd Improvements in or relating to the deposition of silicon on a tantalum article
US3451772A (en) * 1967-06-14 1969-06-24 Air Reduction Production of ultrapure titanium nitride refractory articles
US3547530A (en) * 1968-11-12 1970-12-15 Bell Telephone Labor Inc Overhead projector

Also Published As

Publication number Publication date
IT955601B (en) 1973-09-29
DE2125085C3 (en) 1979-02-22
US3747559A (en) 1973-07-24
DE2125085B2 (en) 1978-06-29
DD96853A5 (en) 1973-04-12
JPS5540528B1 (en) 1980-10-18
DK137550B (en) 1978-03-20
FR2138099A1 (en) 1972-12-29
BE778749A (en) 1972-05-16
DK137550C (en) 1978-09-04
ATA241272A (en) 1976-09-15
PL82569B1 (en) 1975-10-31
DE2125085A1 (en) 1972-12-07
CS167349B2 (en) 1976-04-29
SE367216B (en) 1974-05-20
GB1340464A (en) 1973-12-12
CH537214A (en) 1973-05-31
CA968673A (en) 1975-06-03
FR2138099B1 (en) 1974-07-26
NL7202997A (en) 1972-11-21

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