GB1091627A - Crystal growing surface - Google Patents

Crystal growing surface

Info

Publication number
GB1091627A
GB1091627A GB10149/66A GB1014966A GB1091627A GB 1091627 A GB1091627 A GB 1091627A GB 10149/66 A GB10149/66 A GB 10149/66A GB 1014966 A GB1014966 A GB 1014966A GB 1091627 A GB1091627 A GB 1091627A
Authority
GB
United Kingdom
Prior art keywords
window
tube
quartz
crucible
lip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB10149/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elmat Corp
Original Assignee
Elmat Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elmat Corp filed Critical Elmat Corp
Publication of GB1091627A publication Critical patent/GB1091627A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20Controlling or regulating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1004Apparatus with means for measuring, testing, or sensing
    • Y10T117/1012Apparatus with means for measuring, testing, or sensing with a window or port for visual observation or examination
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1056Seed pulling including details of precursor replenishment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1,091,627. Crucible furnaces. ELMAT CORPORATION. March 8, 1966 [March 15, 1965], No. 10149/66. Heading F4B. A crucible furnace for producing a single crystal of germanium or silicon comprises a quartz crucible 75 in a graphite holder 77 surrounded by a resistance heating element 103 in a water-jacketed container 57 having a neck portion 59 forming an air lock closed by a clamped top 188 and by a lower window element 155 rotatable either simply free of the air lock or to form the lower element of a double window 151. Member 155 has a groove 159 containing a sealing gasket 165 engaging either a lip 161 on the neck 59 or a lip 163 on the window aperture 152, which latter is also engaged by a rim 171 on an upper window element 157. Window elements 155 and 157 have a centre transparent area of quartz. Neutral gas, e.g. argon, is supplied to both sections of the furnace through valves 71A and 71B and exhausted through lines 73 and 190. A quartz sampling tube 177 with compressible bulb 179 may be lowered into the melt through a sealing bushing 189 in the top 188. For charging purposes, tube 177 may be replaced by a stainless steel tube (191) having a central rod (192) biased by spring (195) and terminating in fingers (194) grasping a piece of charge material, Fig. 5 (not shown). Thereafter, the tube is replaced by the conventional seed rod.
GB10149/66A 1965-03-15 1966-03-08 Crystal growing surface Expired GB1091627A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US439813A US3337304A (en) 1965-03-15 1965-03-15 Crystal growth sampler

Publications (1)

Publication Number Publication Date
GB1091627A true GB1091627A (en) 1967-11-22

Family

ID=23746236

Family Applications (1)

Application Number Title Priority Date Filing Date
GB10149/66A Expired GB1091627A (en) 1965-03-15 1966-03-08 Crystal growing surface

Country Status (3)

Country Link
US (1) US3337304A (en)
DE (1) DE1519793A1 (en)
GB (1) GB1091627A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0631193B2 (en) * 1988-10-27 1994-04-27 信越半導体株式会社 Recharge device
JP2628370B2 (en) * 1989-03-24 1997-07-09 信越半導体 株式会社 Single crystal pulling device
US5288366A (en) * 1992-04-24 1994-02-22 Memc Electronic Materials, Inc. Method for growing multiple single crystals and apparatus for use therein
US7118626B2 (en) * 2003-08-29 2006-10-10 University Of Alabama In Huntsville Crystallization cassette for the growth and analysis of macromolecular crystals and an associated method
CN114459829B (en) * 2022-01-26 2024-02-06 国电长源汉川第一发电有限公司 Online sampling device and method for air-powder tube suitable for optical detection technology

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2908254A (en) * 1955-12-02 1959-10-13 Nat Lead Co Shutter assembly
US3145705A (en) * 1962-10-25 1964-08-25 Riley Stoker Corp Furnace observation window
DE1235264B (en) * 1963-02-27 1967-03-02 Yissum Res Dev Company Opening for muffle ovens

Also Published As

Publication number Publication date
DE1519793A1 (en) 1971-01-21
US3337304A (en) 1967-08-22

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