FR2170689A5 - - Google Patents

Info

Publication number
FR2170689A5
FR2170689A5 FR7303037A FR7303037A FR2170689A5 FR 2170689 A5 FR2170689 A5 FR 2170689A5 FR 7303037 A FR7303037 A FR 7303037A FR 7303037 A FR7303037 A FR 7303037A FR 2170689 A5 FR2170689 A5 FR 2170689A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7303037A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of FR2170689A5 publication Critical patent/FR2170689A5/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
FR7303037A 1972-02-01 1973-01-29 Expired FR2170689A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722204581 DE2204581B2 (de) 1972-02-01 1972-02-01 Steuereinrichtung fuer den bearbeitungsdruck einer laepp- oder honmaschine

Publications (1)

Publication Number Publication Date
FR2170689A5 true FR2170689A5 (de) 1973-09-14

Family

ID=5834643

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7303037A Expired FR2170689A5 (de) 1972-02-01 1973-01-29

Country Status (7)

Country Link
US (1) US3848365A (de)
JP (1) JPS5113919B2 (de)
DD (1) DD103843A5 (de)
DE (1) DE2204581B2 (de)
FR (1) FR2170689A5 (de)
GB (1) GB1386041A (de)
IT (1) IT974177B (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
JPS54105710U (de) * 1977-12-29 1979-07-25
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
US4194322A (en) * 1978-06-05 1980-03-25 Ford Motor Company Constant force sheet glass cutting drill assembly
JPS5645365A (en) * 1979-09-14 1981-04-25 Ichikawa Seisakusho:Kk Double-face lapping machine
DE2950881C2 (de) * 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
JPS56146666A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping device
JPS56146665A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping process and its device
DE3520713A1 (de) * 1985-06-10 1986-12-11 Fa. Peter Wolters, 2370 Rendsburg Steuervorrichtung fuer den bearbeitungsdruck an laepp-, hon- und poliermaschinen
DE3600364A1 (de) * 1986-01-09 1987-07-16 Rexroth Mannesmann Gmbh Verfahren und vorrichtung zum ausgleich des auf einen hydraulischen antrieb wirkenden veraenderlichen gewichtes einer masse, insbesondere fuer den senkrecht stehenden antriebszylinder einer laeppmaschine
JPS62120972A (ja) * 1986-11-06 1987-06-02 Supiide Fuamu Kk 加圧装置
US4837979A (en) * 1987-03-17 1989-06-13 Sintobrator, Ltd. Polishing device
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
US4974370A (en) * 1988-12-07 1990-12-04 General Signal Corp. Lapping and polishing machine
DE69116901T2 (de) * 1990-02-27 1996-07-18 Toshiba Kawasaki Kk Robotersteuerung
US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
US5573446A (en) * 1995-02-16 1996-11-12 Eastman Kodak Company Abrasive air spray shaping of optical surfaces
US5653622A (en) * 1995-07-25 1997-08-05 Vlsi Technology, Inc. Chemical mechanical polishing system and method for optimization and control of film removal uniformity
CZ102596A3 (en) * 1996-04-09 1997-10-15 Vladimir Ing Hrazdil Apparatus for grinding and/or polishing metallographic patterns
JPH1034529A (ja) * 1996-07-18 1998-02-10 Speedfam Co Ltd 自動定寸装置
DE69811420T2 (de) * 1997-03-31 2003-07-17 Nippei Toyama Corp., Tokio/Tokyo Schleifmaschine und Verfahren
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
JPH11207610A (ja) * 1998-01-26 1999-08-03 Speedfam Co Ltd 研磨量制御システム及びその方法
WO1999056910A1 (en) * 1998-05-01 1999-11-11 Speedfam Corporation Polishing apparatus
JP2002154049A (ja) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp 研磨方法
JP4273056B2 (ja) * 2004-08-12 2009-06-03 不二越機械工業株式会社 研磨装置
KR100702015B1 (ko) * 2005-08-04 2007-03-30 삼성전자주식회사 웨이퍼 연마장치 및 이를 이용한 웨이퍼 연마방법
KR20110056976A (ko) * 2009-11-23 2011-05-31 삼성전자주식회사 휠 팁의 높이를 조절할 수 있는 웨이퍼 연마 장치
US10335919B2 (en) * 2015-03-13 2019-07-02 Struers ApS Specimen mover and a method of placing specimens in a specimen mover
CN107116370B (zh) * 2016-10-25 2019-02-22 浦江县杰浩进出口有限公司 一种稳定的板材加工装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB901875A (en) * 1958-12-22 1962-07-25 Hans Friedrich Bovensiepen An improved lapping machine
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
US3691697A (en) * 1970-09-21 1972-09-19 Hamco Mach & Elect Co Pressure control for lapping device

Also Published As

Publication number Publication date
GB1386041A (en) 1975-03-05
US3848365A (en) 1974-11-19
JPS5113919B2 (de) 1976-05-04
DE2204581A1 (de) 1973-08-16
DD103843A5 (de) 1974-02-12
IT974177B (it) 1974-06-20
DE2204581B2 (de) 1977-12-08
JPS4884991A (de) 1973-11-10

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Legal Events

Date Code Title Description
ST Notification of lapse