FR2146384A1 - Electrochemical polishing device - to thin microscopic sections of metal or semiconductors - Google Patents

Electrochemical polishing device - to thin microscopic sections of metal or semiconductors

Info

Publication number
FR2146384A1
FR2146384A1 FR7226019A FR7226019A FR2146384A1 FR 2146384 A1 FR2146384 A1 FR 2146384A1 FR 7226019 A FR7226019 A FR 7226019A FR 7226019 A FR7226019 A FR 7226019A FR 2146384 A1 FR2146384 A1 FR 2146384A1
Authority
FR
France
Prior art keywords
masks
polishing
semiconductors
nozzle
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7226019A
Other languages
English (en)
French (fr)
Other versions
FR2146384B1 (ref
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rathenower Optische Werke VEB
Original Assignee
Rathenower Optische Werke VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rathenower Optische Werke VEB filed Critical Rathenower Optische Werke VEB
Publication of FR2146384A1 publication Critical patent/FR2146384A1/fr
Application granted granted Critical
Publication of FR2146384B1 publication Critical patent/FR2146384B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/14—Making holes
    • B23H9/16—Making holes using an electrolytic jet

Landscapes

  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
FR7226019A 1971-07-21 1972-07-19 Electrochemical polishing device - to thin microscopic sections of metal or semiconductors Granted FR2146384A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD15662371 1971-07-21

Publications (2)

Publication Number Publication Date
FR2146384A1 true FR2146384A1 (en) 1973-03-02
FR2146384B1 FR2146384B1 (ref) 1976-05-14

Family

ID=5484100

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7226019A Granted FR2146384A1 (en) 1971-07-21 1972-07-19 Electrochemical polishing device - to thin microscopic sections of metal or semiconductors

Country Status (1)

Country Link
FR (1) FR2146384A1 (ref)

Also Published As

Publication number Publication date
FR2146384B1 (ref) 1976-05-14

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Legal Events

Date Code Title Description
ST Notification of lapse