FR2066204A5 - Coating treatment process control - Google Patents

Coating treatment process control

Info

Publication number
FR2066204A5
FR2066204A5 FR7037721A FR7037721A FR2066204A5 FR 2066204 A5 FR2066204 A5 FR 2066204A5 FR 7037721 A FR7037721 A FR 7037721A FR 7037721 A FR7037721 A FR 7037721A FR 2066204 A5 FR2066204 A5 FR 2066204A5
Authority
FR
France
Prior art keywords
treatment process
process control
coating treatment
coating
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7037721A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre de Recherches Metallurgiques CRM ASBL
Original Assignee
Centre de Recherches Metallurgiques CRM ASBL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre de Recherches Metallurgiques CRM ASBL filed Critical Centre de Recherches Metallurgiques CRM ASBL
Application granted granted Critical
Publication of FR2066204A5 publication Critical patent/FR2066204A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7037721A 1969-10-17 1970-10-13 Coating treatment process control Expired FR2066204A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU59669 1969-10-17

Publications (1)

Publication Number Publication Date
FR2066204A5 true FR2066204A5 (en) 1971-08-06

Family

ID=19726179

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7037721A Expired FR2066204A5 (en) 1969-10-17 1970-10-13 Coating treatment process control

Country Status (4)

Country Link
BE (1) BE757017A (enrdf_load_stackoverflow)
FR (1) FR2066204A5 (enrdf_load_stackoverflow)
LU (1) LU59669A1 (enrdf_load_stackoverflow)
NL (1) NL7015206A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2339857A1 (fr) * 1976-01-30 1977-08-26 Leybold Heraeus Inficon Methode et dispositif de controle de processus d'evaporation
WO1995012008A1 (de) * 1993-10-27 1995-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum elektronenstrahlbedampfen mit mehrkomponentigem verdampfungsmaterial

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2339857A1 (fr) * 1976-01-30 1977-08-26 Leybold Heraeus Inficon Methode et dispositif de controle de processus d'evaporation
WO1995012008A1 (de) * 1993-10-27 1995-05-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum elektronenstrahlbedampfen mit mehrkomponentigem verdampfungsmaterial

Also Published As

Publication number Publication date
NL7015206A (enrdf_load_stackoverflow) 1971-04-20
LU59669A1 (enrdf_load_stackoverflow) 1971-08-10
BE757017A (enrdf_load_stackoverflow) 1971-04-02

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Legal Events

Date Code Title Description
ST Notification of lapse