FR2066204A5 - Coating treatment process control - Google Patents
Coating treatment process controlInfo
- Publication number
- FR2066204A5 FR2066204A5 FR7037721A FR7037721A FR2066204A5 FR 2066204 A5 FR2066204 A5 FR 2066204A5 FR 7037721 A FR7037721 A FR 7037721A FR 7037721 A FR7037721 A FR 7037721A FR 2066204 A5 FR2066204 A5 FR 2066204A5
- Authority
- FR
- France
- Prior art keywords
- treatment process
- process control
- coating treatment
- coating
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The object to be coated and the metal or alloy used for coating are placed in a vacuum chamber and the latter is bombarded with electrons. On transference to the metal object, the vapour emits, on passing through the electron field, a characteristic radiation, which is analysed by a spectroscope, the reading of which having been previously calibrated experimentally to give a determination of coating thickness, may be used to effect an instantaneous control over the coating process.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LU59669 | 1969-10-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2066204A5 true FR2066204A5 (en) | 1971-08-06 |
Family
ID=19726179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7037721A Expired FR2066204A5 (en) | 1969-10-17 | 1970-10-13 | Coating treatment process control |
Country Status (4)
Country | Link |
---|---|
BE (1) | BE757017A (en) |
FR (1) | FR2066204A5 (en) |
LU (1) | LU59669A1 (en) |
NL (1) | NL7015206A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2339857A1 (en) * | 1976-01-30 | 1977-08-26 | Leybold Heraeus Inficon | EVAPORATION PROCESS CONTROL METHOD AND DEVICE |
WO1995012008A1 (en) * | 1993-10-27 | 1995-05-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for electron beam vapour deposition with a multi-component deposition material |
-
1969
- 1969-10-17 LU LU59669D patent/LU59669A1/xx unknown
-
1970
- 1970-10-02 BE BE757017D patent/BE757017A/xx unknown
- 1970-10-13 FR FR7037721A patent/FR2066204A5/en not_active Expired
- 1970-10-16 NL NL7015206A patent/NL7015206A/xx unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2339857A1 (en) * | 1976-01-30 | 1977-08-26 | Leybold Heraeus Inficon | EVAPORATION PROCESS CONTROL METHOD AND DEVICE |
WO1995012008A1 (en) * | 1993-10-27 | 1995-05-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for electron beam vapour deposition with a multi-component deposition material |
Also Published As
Publication number | Publication date |
---|---|
LU59669A1 (en) | 1971-08-10 |
BE757017A (en) | 1971-04-02 |
NL7015206A (en) | 1971-04-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |