CH515609A - Vorrichtung zur Herstellung dünner isolierender Schichten mittels Ionenzerstäubung - Google Patents

Vorrichtung zur Herstellung dünner isolierender Schichten mittels Ionenzerstäubung

Info

Publication number
CH515609A
CH515609A CH1512769A CH1512769A CH515609A CH 515609 A CH515609 A CH 515609A CH 1512769 A CH1512769 A CH 1512769A CH 1512769 A CH1512769 A CH 1512769A CH 515609 A CH515609 A CH 515609A
Authority
CH
Switzerland
Prior art keywords
thin film
sputtering method
ion sputtering
prodn
film prodn
Prior art date
Application number
CH1512769A
Other languages
English (en)
Inventor
Nat Fiedler Otto Dr Rer
Guenter Dipl Phys Reisse
Weissmantel Christian Dr Prof
Original Assignee
Inst Elektronische Bauelemente
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR6930468A external-priority patent/FR2063255A5/fr
Application filed by Inst Elektronische Bauelemente filed Critical Inst Elektronische Bauelemente
Publication of CH515609A publication Critical patent/CH515609A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1512769A 1968-11-22 1969-10-08 Vorrichtung zur Herstellung dünner isolierender Schichten mittels Ionenzerstäubung CH515609A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD13616168 1968-11-22
FR6930468A FR2063255A5 (de) 1968-11-22 1969-09-08

Publications (1)

Publication Number Publication Date
CH515609A true CH515609A (de) 1971-11-15

Family

ID=33453291

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1512769A CH515609A (de) 1968-11-22 1969-10-08 Vorrichtung zur Herstellung dünner isolierender Schichten mittels Ionenzerstäubung

Country Status (1)

Country Link
CH (1) CH515609A (de)

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Legal Events

Date Code Title Description
PL Patent ceased