FR1431669A - Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs - Google Patents

Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs

Info

Publication number
FR1431669A
FR1431669A FR968395A FR968395A FR1431669A FR 1431669 A FR1431669 A FR 1431669A FR 968395 A FR968395 A FR 968395A FR 968395 A FR968395 A FR 968395A FR 1431669 A FR1431669 A FR 1431669A
Authority
FR
France
Prior art keywords
crucible
semiconductor materials
free zone
zone melting
melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR968395A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Application granted granted Critical
Publication of FR1431669A publication Critical patent/FR1431669A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/30—Arrangements for remelting or zone melting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1016—Apparatus with means for treating single-crystal [e.g., heat treating]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • General Induction Heating (AREA)
FR968395A 1963-03-29 1964-03-23 Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs Expired FR1431669A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES84442A DE1208292B (de) 1963-03-29 1963-03-29 Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial
DES91638A DE1230763B (de) 1963-03-29 1964-06-20 Vorrichtung zum tiegelfreien Zonenschmelzen

Publications (1)

Publication Number Publication Date
FR1431669A true FR1431669A (fr) 1966-03-18

Family

ID=25997180

Family Applications (2)

Application Number Title Priority Date Filing Date
FR968395A Expired FR1431669A (fr) 1963-03-29 1964-03-23 Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs
FR21300A Expired FR88198E (fr) 1963-03-29 1965-06-17 Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR21300A Expired FR88198E (fr) 1963-03-29 1965-06-17 Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs

Country Status (6)

Country Link
US (1) US3271115A (de)
BE (2) BE645736A (de)
CH (1) CH416558A (de)
DE (2) DE1208292B (de)
FR (2) FR1431669A (de)
GB (2) GB986748A (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1275996B (de) * 1965-07-10 1968-08-29 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen
US3432753A (en) * 1966-09-30 1969-03-11 Gen Electric Method of analyzing materials to determine the impurity content thereof
DE1519908A1 (de) * 1966-12-30 1970-07-02 Siemens Ag Vorrichtung zum Herstellen eines kristallinen Stabes durch tiegelfreies Zonenschmelzen
DE1960088C3 (de) * 1969-11-29 1974-07-25 Siemens Ag, 1000 Berlin Und 8000 Muenchen Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
US4140570A (en) * 1973-11-19 1979-02-20 Texas Instruments Incorporated Method of growing single crystal silicon by the Czochralski method which eliminates the need for post growth annealing for resistivity stabilization
US3848107A (en) * 1973-12-26 1974-11-12 Park Ohio Industries Inc Inductor for heating elongated metal workpieces
DE2538854B2 (de) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Einwindige Induktionsheizspule zum tiegelfreien Zonenschmelzen
US4501943A (en) * 1983-09-19 1985-02-26 Gnb Batteries Inc. Apparatus and method for fusing battery terminals with improved induction heating power control
EP0292920B1 (de) * 1987-05-25 1992-07-29 Shin-Etsu Handotai Company Limited Vorrichtung für HF-Induktionsheizung
EP0641146B1 (de) * 1993-08-26 1999-10-06 Inductotherm Corp. Induktionsschmelzofen mit magnetischer Aufhängung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2419116A (en) * 1944-04-20 1947-04-15 Westinghouse Electric Corp Apparatus for high-frequency induction heating of strips
US2708704A (en) * 1952-04-23 1955-05-17 Lindberg Eng Co Electric heating coil structure
DE1062847B (de) * 1955-08-04 1959-08-06 Friedrich Kocks Dr Ing Induktor zum Erhitzen der Kanten ebener Bleche oder Baender
US2935386A (en) * 1956-01-03 1960-05-03 Clevite Corp Method of producing small semiconductor silicon crystals
DE1045011B (de) * 1956-03-15 1958-11-27 Asea Ab Einphasiger Querfeldofen fuer die induktive Erwaermung von Werkstuecken
NL235481A (de) * 1958-02-19
US2990259A (en) * 1959-09-03 1961-06-27 Paul L Moody Syringe-type single-crystal furnace
US3101400A (en) * 1961-02-23 1963-08-20 Induction Heating Corp Hardening coil and method of heat treatment of toothed metal strips

Also Published As

Publication number Publication date
DE1230763B (de) 1966-12-22
US3271115A (en) 1966-09-06
DE1208292B (de) 1966-01-05
CH416558A (de) 1966-07-15
BE665626A (de) 1965-12-20
GB1035090A (en) 1966-07-06
BE645736A (de) 1964-09-28
GB986748A (en) 1965-03-24
FR88198E (fr) 1966-12-23

Similar Documents

Publication Publication Date Title
FR88198E (fr) Dispositif pour la fusion par zone sans creuset de matériaux semi-conducteurs
FR1445481A (fr) Dispositif de fusion par zone sans creuset
FR1231481A (fr) Dispositif pour la fusion par zones, sans creuset
BE787668A (fr) Dispositif de fusion par zones sans creuset
FR1503077A (fr) Dispositif de fusion de zone sans creuset
CH417440A (fr) Dispositif pour la manutention de matériaux
FR1482659A (fr) Dispositif pour la fusion de zone sans creuset
FR1420234A (fr) Creuset de quartz pour la fusion du silicium
FR1374085A (fr) Dispositif pour la fusion de matériaux semi-conducteurs
FR1486156A (fr) Dispositif pour fusion de zone sans creuset
FR91258E (fr) Dispositif de fusion par zone sans creuset
FR1436563A (fr) Dispositif de fusion par zone sans creuset
CH407062A (de) Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial
FR1470104A (fr) Dispositif pour la fusion par zone sous vide
BE825058A (fr) Dispositif de fusion par zones sans creuset de barreaux de matiere semi-conductrices
FR1353423A (fr) Procédé et dispositif pour la fabrication de sacs-cabas
FR1445480A (fr) Procédé pour la fusion par zone et sans creuset d'éléments semi-conducteurs
FR1477016A (fr) Procédé et dispositif de préparation de matériaux pour la construction des routes
FR1445008A (fr) Dispositif pour la fusion de zone sans creuset
FR1380637A (fr) Hublot pour four de fusion
FR1491537A (fr) Dispositif pour la granulation de matières plastifiées
CH420069A (de) Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial
FR1488225A (fr) Appareil pour l'affinage de matières semi-conductrices par fusion de zone
FR1419139A (fr) Procédé et appareil pour la fusion par zone flottante notamment de matériaux semiconducteurs
FR1444375A (fr) Procédé de fusion de zone sans creuset et dispositif pour sa réalisation