FR1422539A - Dispositif pour établir des couches minces sur un support par pulvérisation d'un jet d'ions - Google Patents

Dispositif pour établir des couches minces sur un support par pulvérisation d'un jet d'ions

Info

Publication number
FR1422539A
FR1422539A FR2487A FR2487A FR1422539A FR 1422539 A FR1422539 A FR 1422539A FR 2487 A FR2487 A FR 2487A FR 2487 A FR2487 A FR 2487A FR 1422539 A FR1422539 A FR 1422539A
Authority
FR
France
Prior art keywords
spraying
support
thin layers
ion jet
establishing thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR2487A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Original Assignee
HERMSDORF KERAMIK VEB
Keramische Werke Hermsdorf VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HERMSDORF KERAMIK VEB, Keramische Werke Hermsdorf VEB filed Critical HERMSDORF KERAMIK VEB
Application granted granted Critical
Publication of FR1422539A publication Critical patent/FR1422539A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
FR2487A 1964-12-28 1965-01-19 Dispositif pour établir des couches minces sur un support par pulvérisation d'un jet d'ions Expired FR1422539A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEV0027457 1964-12-28

Publications (1)

Publication Number Publication Date
FR1422539A true FR1422539A (fr) 1965-12-24

Family

ID=7583408

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2487A Expired FR1422539A (fr) 1964-12-28 1965-01-19 Dispositif pour établir des couches minces sur un support par pulvérisation d'un jet d'ions

Country Status (3)

Country Link
DE (1) DE1515318A1 (fr)
FR (1) FR1422539A (fr)
GB (1) GB1089967A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2204709A1 (en) * 1972-10-27 1974-05-24 Anvar Deposition of thin layers under vacuum - by ion bombardment of high melting point materials e.g. platinum
FR2218652A1 (fr) * 1973-02-20 1974-09-13 Thomson Csf
FR2422729A1 (fr) * 1978-04-13 1979-11-09 Litton Systems Inc Procede de realisation de revetements optiques multicouches

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1597822A (en) * 1976-06-19 1981-09-09 Planer Ltd G V Chemical synthesis
US4108751A (en) * 1977-06-06 1978-08-22 King William J Ion beam implantation-sputtering
DE2830134C2 (de) 1978-07-08 1983-12-08 Wolfgang Ing.(grad.) 7981 Grünkraut Kieferle Verfahren zum Ablagern einer Metall- oder Legierungsschicht auf ein elektrisch leitendes Werkstück
DE2857102C2 (de) * 1978-07-08 1983-12-01 Wolfgang Ing.(grad.) 7981 Grünkraut Kieferle Vorrichtung zum Eindiffundieren und Auflagern einer Metall- oder Legierungsschicht auf ein elektrisch leitendes Werkstück
GB8417040D0 (en) * 1984-07-04 1984-08-08 Salford University Of Modifying properties of material
US4888202A (en) * 1986-07-31 1989-12-19 Nippon Telegraph And Telephone Corporation Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film
GB8719794D0 (en) * 1987-08-21 1987-09-30 Scient Coatings Uk Ltd Depositing surface layers on substrates
GB2213501A (en) * 1987-12-11 1989-08-16 Plessey Co Plc Production of superconducting thin films by ion beam sputtering from a single ceramic target
DE3904991A1 (de) * 1989-02-18 1990-08-23 Leybold Ag Kathodenzerstaeubungsvorrichtung
UA73290C2 (uk) * 1999-08-04 2005-07-15 Дженерал Електрік Компані Електронно-променевий пристрій для нанесення покриття шляхом конденсації з парової фази (варіанти)
KR20060093070A (ko) * 2005-02-18 2006-08-23 세이코 엡슨 가부시키가이샤 무기 배향막의 형성 방법, 무기 배향막, 전자 장치용 기판,액정 패널 및 전자기기

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2204709A1 (en) * 1972-10-27 1974-05-24 Anvar Deposition of thin layers under vacuum - by ion bombardment of high melting point materials e.g. platinum
FR2218652A1 (fr) * 1973-02-20 1974-09-13 Thomson Csf
FR2422729A1 (fr) * 1978-04-13 1979-11-09 Litton Systems Inc Procede de realisation de revetements optiques multicouches

Also Published As

Publication number Publication date
GB1089967A (en) 1967-11-08
DE1515318A1 (de) 1969-07-31

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