FI93680B - Stödkonstruktion för tunnfilm och förfarande för framställning av den - Google Patents

Stödkonstruktion för tunnfilm och förfarande för framställning av den Download PDF

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Publication number
FI93680B
FI93680B FI922060A FI922060A FI93680B FI 93680 B FI93680 B FI 93680B FI 922060 A FI922060 A FI 922060A FI 922060 A FI922060 A FI 922060A FI 93680 B FI93680 B FI 93680B
Authority
FI
Finland
Prior art keywords
support structure
thin film
film
ultra
substrate
Prior art date
Application number
FI922060A
Other languages
English (en)
Finnish (fi)
Other versions
FI922060A (sv
FI922060A0 (sv
FI93680C (sv
Inventor
Veli-Pekka Viitanen
Original Assignee
Outokumpu Instr Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Outokumpu Instr Oy filed Critical Outokumpu Instr Oy
Priority to FI922060A priority Critical patent/FI93680C/sv
Publication of FI922060A0 publication Critical patent/FI922060A0/sv
Priority to FR9305427A priority patent/FR2691011B1/fr
Priority to DE4315240A priority patent/DE4315240A1/de
Priority to GB9309399A priority patent/GB2266787B/en
Publication of FI922060A publication Critical patent/FI922060A/sv
Publication of FI93680B publication Critical patent/FI93680B/sv
Application granted granted Critical
Publication of FI93680C publication Critical patent/FI93680C/sv
Priority to US08/447,737 priority patent/US5578360A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/001—Details
    • H01J47/002—Vessels or containers
    • H01J47/004—Windows permeable to X-rays, gamma-rays, or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24298—Noncircular aperture [e.g., slit, diamond, rectangular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
    • Y10T428/24322—Composite web or sheet
    • Y10T428/24331—Composite web or sheet including nonapertured component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31721—Of polyimide

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Materials For Photolithography (AREA)
  • Laminated Bodies (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Claims (8)

1. Stödkonstruktion för ett tunnmembran, särskilt ett röntgen-och ultraviolett straining genomsläppande ultratunt membran vars tjocklek understiger 5 mikrometer, kännetecknad av att pä mem-branets yta har bildats en gallerformig stödkonstruktion av ljuskänsligt material.
2. Stödkonstruktion för ett tunnmembran enligt patentkravet 1, kännetecknad av att stödkonstruktionen har framställts av polymer.
3. Stödkonstruktion för ett tunnmembran enligt patentkravet 1 eller 2, kännetecknad av att stödkonstruktionen har framställts av polyimid.
4. Förfarande för framställning av en stödkonstruktion för ett tunnmembran enligt patentkravet 1, kännetecknat av att förfa-randet omfattar följande steg: a) stödkonstruktionsmaterialet appliceras pä ett underlag bestä-ende av ett ultratunt membran och ett substrat och förhärdas i ugn, b) pä det förhärdade stödkonstruktionsmaterialet anbringas en exponeringsmask av samma form som stödkonstruktionen som skall bildas, och stödkonstruktionsmaterialet exponeras, • | c) det exponerade stödkonstruktionsmaterialet framkallas och den sä bildade stödkonstruktionen av önskad form polymeriseras med härdningsbehandling i ätminstone ett steg, d) substratet som utgjort bakgrunden tili tunnmembranet avlägs-'* nas genom etsning.
5. Förfarande enligt patentkravet 4, kännetecknat av att stödkonstruktionen polymeriseras genom härdningsbehandling i ett steg vid en temperatur av 400 °C.
6. Förfarande enligt patentkravet 4, kännetecknat av att stöd 93680 ( konstruktionen polymeriseras med härdningsbehandling i tvä steg vid en temperatur av 400 °C.
7. Förfarande enligt nägot av patentkraven 4-6, kännetecknat av att som substrat används en formkropp framställd av kisel.
8. Förfarande enligt nägot av patentkraven 4-6, kännetecknat av att som substrat används en formkropp framställd av metall.
FI922060A 1992-05-07 1992-05-07 Stödkonstruktion för tunnfilm och förfarande för framställning av den FI93680C (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI922060A FI93680C (sv) 1992-05-07 1992-05-07 Stödkonstruktion för tunnfilm och förfarande för framställning av den
FR9305427A FR2691011B1 (fr) 1992-05-07 1993-05-06 Structure de renfort pour une pellicule mince et procede pour fabriquer cette structure.
DE4315240A DE4315240A1 (de) 1992-05-07 1993-05-07 Verstärkungsstruktur für dünne Filme und Verfahren zu deren Herstellung
GB9309399A GB2266787B (en) 1992-05-07 1993-05-07 Thin film reinforcing structure and method for manufacturing the same
US08/447,737 US5578360A (en) 1992-05-07 1995-05-23 Thin film reinforcing structure and method for manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI922060A FI93680C (sv) 1992-05-07 1992-05-07 Stödkonstruktion för tunnfilm och förfarande för framställning av den
FI922060 1992-05-07

Publications (4)

Publication Number Publication Date
FI922060A0 FI922060A0 (sv) 1992-05-07
FI922060A FI922060A (sv) 1993-11-08
FI93680B true FI93680B (sv) 1995-01-31
FI93680C FI93680C (sv) 1995-05-10

Family

ID=8535241

Family Applications (1)

Application Number Title Priority Date Filing Date
FI922060A FI93680C (sv) 1992-05-07 1992-05-07 Stödkonstruktion för tunnfilm och förfarande för framställning av den

Country Status (5)

Country Link
US (1) US5578360A (sv)
DE (1) DE4315240A1 (sv)
FI (1) FI93680C (sv)
FR (1) FR2691011B1 (sv)
GB (1) GB2266787B (sv)

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EP0748512A1 (en) * 1995-01-04 1996-12-18 Koninklijke Philips Electronics N.V. Method of manufacturing a thin, radiotransparent window
WO1998025292A1 (en) * 1996-12-06 1998-06-11 Koninklijke Philips Electronics N.V. X-ray tube having an internal window shield
JP2000347054A (ja) * 1999-03-31 2000-12-15 Sharp Corp 光デバイス及びその製造方法、並びに、ポリイミド膜の製造方法
US7618906B2 (en) * 2005-11-17 2009-11-17 Oxford Instruments Analytical Oy Window membrane for detector and analyser devices, and a method for manufacturing a window membrane
US7474730B2 (en) * 2006-10-17 2009-01-06 Oxford Instruments Analytical Oy Compensation for fluctuations over time in the radiation characteristics of the X-ray source in an XRF analyser
US7737424B2 (en) * 2007-06-01 2010-06-15 Moxtek, Inc. X-ray window with grid structure
US7709820B2 (en) * 2007-06-01 2010-05-04 Moxtek, Inc. Radiation window with coated silicon support structure
US7660393B2 (en) 2007-06-19 2010-02-09 Oxford Instruments Analytical Oy Gas tight radiation window, and a method for its manufacturing
US8498381B2 (en) * 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
EP2190778A4 (en) 2007-09-28 2014-08-13 Univ Brigham Young CARBON NANOTUBES ASSEMBLY
US7684545B2 (en) * 2007-10-30 2010-03-23 Rigaku Innovative Technologies, Inc. X-ray window and resistive heater
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US7983394B2 (en) 2009-12-17 2011-07-19 Moxtek, Inc. Multiple wavelength X-ray source
FI20105626A0 (sv) 2010-06-03 2010-06-03 Hs Foils Oy Ultratunn berylliumfönster och metod för dess tillverkning
US8526574B2 (en) 2010-09-24 2013-09-03 Moxtek, Inc. Capacitor AC power coupling across high DC voltage differential
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8989354B2 (en) * 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US8761344B2 (en) 2011-12-29 2014-06-24 Moxtek, Inc. Small x-ray tube with electron beam control optics
GB2514984B (en) 2012-03-11 2015-09-30 Mark Larson Improved Radiation Window With Support Structure
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth
US10258930B2 (en) 2015-06-19 2019-04-16 Mark Larson High-performance, low-stress support structure with membrane

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Also Published As

Publication number Publication date
US5578360A (en) 1996-11-26
FR2691011A1 (fr) 1993-11-12
FI922060A (sv) 1993-11-08
GB9309399D0 (en) 1993-06-23
GB2266787A (en) 1993-11-10
FR2691011B1 (fr) 1996-01-05
DE4315240A1 (de) 1993-11-11
GB2266787B (en) 1995-10-04
FI922060A0 (sv) 1992-05-07
FI93680C (sv) 1995-05-10

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Owner name: OUTOKUMPU INSTRUMENTS OY

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