FI895719A7 - Turbomolekyläärinen tyhjöpumppu - Google Patents

Turbomolekyläärinen tyhjöpumppu Download PDF

Info

Publication number
FI895719A7
FI895719A7 FI895719A FI895719A FI895719A7 FI 895719 A7 FI895719 A7 FI 895719A7 FI 895719 A FI895719 A FI 895719A FI 895719 A FI895719 A FI 895719A FI 895719 A7 FI895719 A7 FI 895719A7
Authority
FI
Finland
Prior art keywords
vacuum pump
turbomolecular vacuum
turbomolecular
pump
vacuum
Prior art date
Application number
FI895719A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI895719A0 (fi
Inventor
Valdimir Iliich Vikhrev
Vladimir Pavlovich Sergeev
Valery Borisovich Sholokhov
Sergei Nikolaevich Sharshin
Original Assignee
Sholokhov Valery B
Sergeev Vladimir P
Vikhrev Vladimir I
Sharshin Sergei N
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sholokhov Valery B, Sergeev Vladimir P, Vikhrev Vladimir I, Sharshin Sergei N filed Critical Sholokhov Valery B
Publication of FI895719A0 publication Critical patent/FI895719A0/fi
Publication of FI895719A7 publication Critical patent/FI895719A7/fi

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Junction Field-Effect Transistors (AREA)
FI895719A 1988-03-30 1988-03-30 Turbomolekyläärinen tyhjöpumppu FI895719A7 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (fr) 1988-03-30 1988-03-30 Pompe a vide turbomoleculaire

Publications (2)

Publication Number Publication Date
FI895719A0 FI895719A0 (fi) 1989-11-29
FI895719A7 true FI895719A7 (fi) 1989-11-29

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
FI895719A FI895719A7 (fi) 1988-03-30 1988-03-30 Turbomolekyläärinen tyhjöpumppu

Country Status (7)

Country Link
JP (1) JPH02503703A (cg-RX-API-DMAC7.html)
CH (1) CH676378A5 (cg-RX-API-DMAC7.html)
DE (1) DE3891280T1 (cg-RX-API-DMAC7.html)
FI (1) FI895719A7 (cg-RX-API-DMAC7.html)
FR (1) FR2632361B1 (cg-RX-API-DMAC7.html)
GB (1) GB2230562B (cg-RX-API-DMAC7.html)
WO (1) WO1989009341A1 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2224009A5 (cg-RX-API-DMAC7.html) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (cg-RX-API-DMAC7.html) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
JPH02503703A (ja) 1990-11-01
FI895719A0 (fi) 1989-11-29
GB8926400D0 (en) 1990-08-01
CH676378A5 (cg-RX-API-DMAC7.html) 1991-01-15
GB2230562B (en) 1991-09-11
FR2632361A1 (fr) 1989-12-08
FR2632361B1 (fr) 1992-05-07
GB2230562A (en) 1990-10-24
DE3891280T1 (de) 1990-04-05
WO1989009341A1 (fr) 1989-10-05

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Legal Events

Date Code Title Description
FA Application withdrawn [patent]

Owner name: SHARSHIN, SERGEI NIKOLAEVICH

Owner name: SHOLOKHOV, VALERY BORISOVICH

Owner name: VIKHREV, VLADIMIR ILIICH

Owner name: SERGEEV, VLADIMIR PAVLOVICH