FI880206A0 - Tryckgivarkonstruktion och foerfarande foer framstaellning daerav. - Google Patents

Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.

Info

Publication number
FI880206A0
FI880206A0 FI880206A FI880206A FI880206A0 FI 880206 A0 FI880206 A0 FI 880206A0 FI 880206 A FI880206 A FI 880206A FI 880206 A FI880206 A FI 880206A FI 880206 A0 FI880206 A0 FI 880206A0
Authority
FI
Finland
Prior art keywords
tryckgivarkonstruktion
foerfarande foer
foer framstaellning
och foerfarande
framstaellning daerav
Prior art date
Application number
FI880206A
Other languages
English (en)
Other versions
FI78784C (fi
FI78784B (fi
Inventor
Heikki Kuisma
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Priority to FI880206A priority Critical patent/FI78784C/fi
Publication of FI880206A0 publication Critical patent/FI880206A0/fi
Priority to GB8900235A priority patent/GB2214350B/en
Priority to US07/294,799 priority patent/US4875134A/en
Priority to DE3900654A priority patent/DE3900654C2/de
Priority to FR8900383A priority patent/FR2626073B1/fr
Priority to JP1009626A priority patent/JP2574443B2/ja
Application granted granted Critical
Publication of FI78784B publication Critical patent/FI78784B/fi
Publication of FI78784C publication Critical patent/FI78784C/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type
FI880206A 1988-01-18 1988-01-18 Tryckgivarkonstruktion och foerfarande foer framstaellning daerav. FI78784C (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI880206A FI78784C (fi) 1988-01-18 1988-01-18 Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
GB8900235A GB2214350B (en) 1988-01-18 1989-01-06 Capacitive pressure sensor and method for its fabrication
US07/294,799 US4875134A (en) 1988-01-18 1989-01-09 Pressure sensor construction and method for its fabrication
DE3900654A DE3900654C2 (de) 1988-01-18 1989-01-11 Drucksensoranordnung und Verfahren zu deren Herstellung
FR8900383A FR2626073B1 (fr) 1988-01-18 1989-01-13 Structure de capteur de pression capacitif et procede pour fabriquer une telle structure
JP1009626A JP2574443B2 (ja) 1988-01-18 1989-01-18 圧力センサ構造およびその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI880206 1988-01-18
FI880206A FI78784C (fi) 1988-01-18 1988-01-18 Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.

Publications (3)

Publication Number Publication Date
FI880206A0 true FI880206A0 (fi) 1988-01-18
FI78784B FI78784B (fi) 1989-05-31
FI78784C FI78784C (fi) 1989-09-11

Family

ID=8525738

Family Applications (1)

Application Number Title Priority Date Filing Date
FI880206A FI78784C (fi) 1988-01-18 1988-01-18 Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.

Country Status (6)

Country Link
US (1) US4875134A (fi)
JP (1) JP2574443B2 (fi)
DE (1) DE3900654C2 (fi)
FI (1) FI78784C (fi)
FR (1) FR2626073B1 (fi)
GB (1) GB2214350B (fi)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE459887B (sv) * 1987-02-12 1989-08-14 Hydrolab Ab Tryckgivare
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
FI893874A (fi) * 1989-08-17 1991-02-18 Vaisala Oy Kontaktfoersedd givare med skiktstruktur samt foerfarande foer utfoerande av kontakteringen.
US5165281A (en) * 1989-09-22 1992-11-24 Bell Robert L High pressure capacitive transducer
DE3937529A1 (de) * 1989-11-08 1991-05-16 Siemens Ag Verfahren zum verbinden eines siliziumteiles mit einem glasteil
DE4006108A1 (de) * 1990-02-27 1991-08-29 Bosch Gmbh Robert Verfahren zum aufbau von mikromechanischen bauelementen in dickschichttechnik
JPH04268725A (ja) * 1991-02-25 1992-09-24 Canon Inc 力学量検出センサおよびその製造方法
FR2687779B1 (fr) * 1992-02-20 1995-11-10 Sextant Avionique Micro-capteur capacitif a protection laterale et procede de fabrication.
US5173836A (en) * 1992-03-05 1992-12-22 Motorola, Inc. Hermetically sealed interface
US5365790A (en) * 1992-04-02 1994-11-22 Motorola, Inc. Device with bonded conductive and insulating substrates and method therefore
JP3300060B2 (ja) * 1992-10-22 2002-07-08 キヤノン株式会社 加速度センサー及びその製造方法
DE4311762C2 (de) * 1993-04-08 1995-02-02 Josef Dr Kemmer Verfahren zur Verbindung elektrischer Kontaktstellen
US5744725A (en) * 1994-04-18 1998-04-28 Motorola Inc. Capacitive pressure sensor and method of fabricating same
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
EP1371092B2 (de) † 2001-03-14 2010-11-03 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur strukturierung eines aus glasartigen material bestehenden flächensubstrats
US7045868B2 (en) * 2003-07-31 2006-05-16 Motorola, Inc. Wafer-level sealed microdevice having trench isolation and methods for making the same
JP2006047279A (ja) * 2004-07-02 2006-02-16 Alps Electric Co Ltd ガラス基板及びそれを用いた静電容量型圧力センサ
JP2006170893A (ja) * 2004-12-17 2006-06-29 Alps Electric Co Ltd 静電容量型圧力センサ
JP2007085837A (ja) * 2005-09-21 2007-04-05 Alps Electric Co Ltd 静電容量型圧力センサ
JP4585426B2 (ja) * 2005-10-31 2010-11-24 アルプス電気株式会社 静電容量型圧力センサ
US7539003B2 (en) * 2005-12-01 2009-05-26 Lv Sensors, Inc. Capacitive micro-electro-mechanical sensors with single crystal silicon electrodes
SE530415C2 (sv) * 2006-09-04 2008-05-27 Nanospace Ab Gastrustor
EP2377809A1 (en) 2010-04-16 2011-10-19 SensoNor Technologies AS Method for Manufacturing a Hermetically Sealed Structure
US8578795B2 (en) 2011-03-31 2013-11-12 DePuy Synthes Products, LLC Monitoring and recording implantable silicon active pressure transducer
US8590387B2 (en) 2011-03-31 2013-11-26 DePuy Synthes Products, LLC Absolute capacitive micro pressure sensor
US9249008B2 (en) 2012-12-20 2016-02-02 Industrial Technology Research Institute MEMS device with multiple electrodes and fabricating method thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
JPS5855732A (ja) * 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
FI842307A (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4625561A (en) * 1984-12-06 1986-12-02 Ford Motor Company Silicon capacitive pressure sensor and method of making
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
US4701826A (en) * 1986-10-30 1987-10-20 Ford Motor Company High temperature pressure sensor with low parasitic capacitance

Also Published As

Publication number Publication date
GB8900235D0 (en) 1989-03-08
DE3900654A1 (de) 1989-07-27
US4875134A (en) 1989-10-17
JPH01288747A (ja) 1989-11-21
FR2626073B1 (fr) 1993-09-10
JP2574443B2 (ja) 1997-01-22
FI78784C (fi) 1989-09-11
DE3900654C2 (de) 1997-05-22
GB2214350A (en) 1989-08-31
GB2214350B (en) 1991-06-05
FR2626073A1 (fr) 1989-07-21
FI78784B (fi) 1989-05-31

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Legal Events

Date Code Title Description
FG Patent granted

Owner name: VAISALA OY

MA Patent expired