FI20165553A - Mikromekaaninen resonaattori - Google Patents
Mikromekaaninen resonaattoriInfo
- Publication number
- FI20165553A FI20165553A FI20165553A FI20165553A FI20165553A FI 20165553 A FI20165553 A FI 20165553A FI 20165553 A FI20165553 A FI 20165553A FI 20165553 A FI20165553 A FI 20165553A FI 20165553 A FI20165553 A FI 20165553A
- Authority
- FI
- Finland
- Prior art keywords
- location
- resonator element
- length
- width
- smaller portion
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
- H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0081—Thermal properties
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2436—Disk resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
- H03H2009/02385—Anchors for square resonators, i.e. resonators comprising a square vibrating membrane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02527—Combined
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H2009/2442—Square resonators
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20165553A FI127787B (fi) | 2016-07-01 | 2016-07-01 | Mikromekaaninen resonaattori |
PCT/FI2017/050486 WO2018002439A1 (en) | 2016-07-01 | 2017-06-29 | Micromechanical resonator |
EP17746152.2A EP3479477B1 (en) | 2016-07-01 | 2017-06-29 | Micromechanical resonator |
US16/313,655 US10931255B2 (en) | 2016-07-01 | 2017-06-29 | Micromechanical resonator |
JP2018568200A JP7069056B2 (ja) | 2016-07-01 | 2017-06-29 | マイクロメカニカル共振器 |
CN201780040389.4A CN109417373B (zh) | 2016-07-01 | 2017-06-29 | 微机械谐振器 |
KR1020197002410A KR102408336B1 (ko) | 2016-07-01 | 2017-06-29 | 마이크로기계식 공진기 |
JP2021165989A JP7266077B2 (ja) | 2016-07-01 | 2021-10-08 | マイクロメカニカル共振器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20165553A FI127787B (fi) | 2016-07-01 | 2016-07-01 | Mikromekaaninen resonaattori |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20165553A true FI20165553A (fi) | 2018-01-02 |
FI127787B FI127787B (fi) | 2019-02-28 |
Family
ID=59501478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20165553A FI127787B (fi) | 2016-07-01 | 2016-07-01 | Mikromekaaninen resonaattori |
Country Status (7)
Country | Link |
---|---|
US (1) | US10931255B2 (fi) |
EP (1) | EP3479477B1 (fi) |
JP (2) | JP7069056B2 (fi) |
KR (1) | KR102408336B1 (fi) |
CN (1) | CN109417373B (fi) |
FI (1) | FI127787B (fi) |
WO (1) | WO2018002439A1 (fi) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019048737A1 (en) | 2017-09-05 | 2019-03-14 | Tikitin Oy | FREQUENCY REFERENCE OSCILLATOR WITH REGULATED TEMPERATURE ENCLOSURE AND METHOD FOR MANUFACTURING THE SAME |
WO2019048736A1 (en) | 2017-09-05 | 2019-03-14 | Tikitin Oy | FREQUENCY REFERENCE OSCILLATOR DEVICE AND METHOD FOR STABILIZING FREQUENCY REFERENCE SIGNAL |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11533042B2 (en) * | 2018-01-16 | 2022-12-20 | Georgia Tech Research Corporation | Distributed-mode beam and frame resonators for high frequency timing circuits |
FI128208B (fi) | 2018-02-08 | 2019-12-31 | Tikitin Oy | Kytketty MEMS-resonaattori |
US10476480B1 (en) * | 2018-07-06 | 2019-11-12 | Globalfoundries Singapore Pte. Ltd. | Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making |
US11637540B2 (en) | 2019-10-30 | 2023-04-25 | X-Celeprint Limited | Non-linear tethers for suspended devices |
US11626856B2 (en) * | 2019-10-30 | 2023-04-11 | X-Celeprint Limited | Non-linear tethers for suspended devices |
WO2023162301A1 (ja) * | 2022-02-28 | 2023-08-31 | 株式会社村田製作所 | 共振子、共振装置、及び共振子製造方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459278U (fi) * | 1977-10-03 | 1979-04-24 | ||
US6710680B2 (en) * | 2001-12-20 | 2004-03-23 | Motorola, Inc. | Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges |
US8058769B2 (en) * | 2008-12-17 | 2011-11-15 | Sand9, Inc. | Mechanical resonating structures including a temperature compensation structure |
WO2010077311A1 (en) * | 2008-12-17 | 2010-07-08 | Sand9, Inc. | Multi-port mechanical resonating devices and related methods |
FR2946479A1 (fr) * | 2009-06-09 | 2010-12-10 | Commissariat Energie Atomique | Resonateur electromecanique a ancrage resonant. |
JP2012531097A (ja) * | 2009-06-19 | 2012-12-06 | ジョージア・テック・リサーチ・コーポレイション | 受動温度補償を提供する高密度トレンチアレイを有するマイクロメカニカル共振器を形成する方法 |
FI124453B (fi) * | 2010-08-13 | 2014-09-15 | Valtion Teknillinen | Mikromekaaninen resonaattorijärjestelmä ja menetelmä sen valmistamiseksi |
FI20105851A (fi) | 2010-08-13 | 2012-02-14 | Valtion Teknillinen | Mikromekaaninen resonaattori ja menetelmä sen valmistamiseksi |
EP2479891A1 (en) | 2011-01-21 | 2012-07-25 | Imec | MEMS resonator with optimized support anchoring |
FI126586B (fi) | 2011-02-17 | 2017-02-28 | Teknologian Tutkimuskeskus Vtt Oy | Uudet mikromekaaniset laitteet |
FI123933B (fi) * | 2011-05-13 | 2013-12-31 | Teknologian Tutkimuskeskus Vtt | Mikromekaaninen laite ja menetelmä sen suunnittelemiseksi |
US9431993B1 (en) * | 2011-09-26 | 2016-08-30 | Micrel, Incorporated | Temperature compensated resonator with a pair of spaced apart internal dielectric layers |
US9299910B1 (en) * | 2012-05-17 | 2016-03-29 | Analog Devices, Inc. | Resonator anchors and related apparatus and methods |
US9954513B1 (en) * | 2012-12-21 | 2018-04-24 | Analog Devices, Inc. | Methods and apparatus for anchoring resonators |
SG11201508862UA (en) | 2013-05-13 | 2015-11-27 | Murata Manufacturing Co | Vibrating device |
JP6213563B2 (ja) | 2013-07-04 | 2017-10-18 | 株式会社村田製作所 | 振動装置 |
WO2016006433A1 (ja) * | 2014-07-10 | 2016-01-14 | 株式会社村田製作所 | 振動装置 |
JP6615191B2 (ja) | 2014-10-03 | 2019-12-04 | テクノロギアン トゥトキムスケスクス ヴェーテーテー オイ | 温度補償された複合共振器 |
CN107005224B (zh) | 2014-10-03 | 2021-06-15 | 芬兰国家技术研究中心股份公司 | 温度补偿板谐振器 |
CN109075767B (zh) | 2016-05-26 | 2022-04-29 | 株式会社村田制作所 | 谐振子以及谐振装置 |
US10367469B2 (en) * | 2016-12-22 | 2019-07-30 | Murata Manufacturing Co., Ltd. | Corner coupling resonator array |
-
2016
- 2016-07-01 FI FI20165553A patent/FI127787B/fi active IP Right Grant
-
2017
- 2017-06-29 WO PCT/FI2017/050486 patent/WO2018002439A1/en unknown
- 2017-06-29 EP EP17746152.2A patent/EP3479477B1/en active Active
- 2017-06-29 US US16/313,655 patent/US10931255B2/en active Active
- 2017-06-29 KR KR1020197002410A patent/KR102408336B1/ko active IP Right Grant
- 2017-06-29 JP JP2018568200A patent/JP7069056B2/ja active Active
- 2017-06-29 CN CN201780040389.4A patent/CN109417373B/zh active Active
-
2021
- 2021-10-08 JP JP2021165989A patent/JP7266077B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019048737A1 (en) | 2017-09-05 | 2019-03-14 | Tikitin Oy | FREQUENCY REFERENCE OSCILLATOR WITH REGULATED TEMPERATURE ENCLOSURE AND METHOD FOR MANUFACTURING THE SAME |
WO2019048736A1 (en) | 2017-09-05 | 2019-03-14 | Tikitin Oy | FREQUENCY REFERENCE OSCILLATOR DEVICE AND METHOD FOR STABILIZING FREQUENCY REFERENCE SIGNAL |
Also Published As
Publication number | Publication date |
---|---|
EP3479477A1 (en) | 2019-05-08 |
JP7069056B2 (ja) | 2022-05-17 |
KR20190026784A (ko) | 2019-03-13 |
JP2019525548A (ja) | 2019-09-05 |
CN109417373B (zh) | 2023-04-04 |
US10931255B2 (en) | 2021-02-23 |
WO2018002439A1 (en) | 2018-01-04 |
CN109417373A (zh) | 2019-03-01 |
FI127787B (fi) | 2019-02-28 |
JP7266077B2 (ja) | 2023-04-27 |
US20190173450A1 (en) | 2019-06-06 |
JP2022003827A (ja) | 2022-01-11 |
EP3479477B1 (en) | 2019-12-04 |
KR102408336B1 (ko) | 2022-06-14 |
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