JP2019525548A - マイクロメカニカル共振器 - Google Patents
マイクロメカニカル共振器 Download PDFInfo
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- JP2019525548A JP2019525548A JP2018568200A JP2018568200A JP2019525548A JP 2019525548 A JP2019525548 A JP 2019525548A JP 2018568200 A JP2018568200 A JP 2018568200A JP 2018568200 A JP2018568200 A JP 2018568200A JP 2019525548 A JP2019525548 A JP 2019525548A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 12
- 239000002131 composite material Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 5
- 239000002019 doping agent Substances 0.000 claims description 2
- 230000008878 coupling Effects 0.000 description 12
- 238000010168 coupling process Methods 0.000 description 12
- 238000005859 coupling reaction Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
- H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0081—Thermal properties
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1057—Mounting in enclosures for microelectro-mechanical devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2436—Disk resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
- H03H2009/02385—Anchors for square resonators, i.e. resonators comprising a square vibrating membrane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02527—Combined
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H2009/2442—Square resonators
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Thermal Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (6)
- 長さと、前記長さに垂直な幅とを有する共振器素子を備えるマイクロメカニカル共振器であって、
前記共振器素子は、半導体材料から作られたベース層を備える第1の層構造を備え、
前記共振器素子の前記長さは、前記半導体材料の[100]結晶方向に沿って延伸し、
前記共振器素子は、1.8〜2.2の範囲の長さ対幅のアスペクト比を有し、
前記共振器素子は、2つ以上のアンカーを有する支持構造に吊られ、前記2つ以上のアンカーの各々は、
a)前記共振器素子のより短い幅方向側面の第1の位置であって、前記第1の位置は、前記共振器素子の前記幅を大きい部分と小さい部分とに分割して、前記小さい部分と全幅との間の比は、0.10〜0.28の範囲にある、第1の位置、又は
b)前記共振器のより長い長さ方向側面の第2の位置であって、前記第2の位置は、前記共振器素子の前記長さを大きい部分と小さい部分とに分割して、前記小さい部分と全長との間の比は、0.36〜0.50の範囲にある、第2の位置
に取り付けられていることを特徴とする、マイクロメカニカル共振器。 - 前記2つ以上のアンカーは、1対以上のアンカーを備え、各対の前記アンカーは、前記共振器素子において2回回転対称にある、請求項1に記載の共振器。
- 前記共振器素子は複合構造であって、前記複合構造は、前記第1の層構造の上に第2の層構造を更に備え、前記第1の層構造及び前記第2の層構造の線形温度係数は、反対の符号を有する、請求項1又は2に記載の共振器。
- 前記半導体材料はシリコンである、請求項1〜3の何れか一項に記載の共振器。
- 前記シリコンはn型ドーパントでドープされている、請求項4に記載の共振器。
- 前記シリコンのドーピング濃度は、2×1019cm−3、好ましくは1×1020cm−3より大きい、請求項5に記載の共振器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021165989A JP7266077B2 (ja) | 2016-07-01 | 2021-10-08 | マイクロメカニカル共振器 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20165553A FI127787B (en) | 2016-07-01 | 2016-07-01 | Micromechanical resonator |
FI20165553 | 2016-07-01 | ||
PCT/FI2017/050486 WO2018002439A1 (en) | 2016-07-01 | 2017-06-29 | Micromechanical resonator |
Related Child Applications (1)
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JP2021165989A Division JP7266077B2 (ja) | 2016-07-01 | 2021-10-08 | マイクロメカニカル共振器 |
Publications (2)
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JP2019525548A true JP2019525548A (ja) | 2019-09-05 |
JP7069056B2 JP7069056B2 (ja) | 2022-05-17 |
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JP2018568200A Active JP7069056B2 (ja) | 2016-07-01 | 2017-06-29 | マイクロメカニカル共振器 |
JP2021165989A Active JP7266077B2 (ja) | 2016-07-01 | 2021-10-08 | マイクロメカニカル共振器 |
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Country Status (7)
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US (1) | US10931255B2 (ja) |
EP (1) | EP3479477B1 (ja) |
JP (2) | JP7069056B2 (ja) |
KR (1) | KR102408336B1 (ja) |
CN (1) | CN109417373B (ja) |
FI (1) | FI127787B (ja) |
WO (1) | WO2018002439A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023162301A1 (ja) * | 2022-02-28 | 2023-08-31 | 株式会社村田製作所 | 共振子、共振装置、及び共振子製造方法 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI128032B (en) | 2017-09-05 | 2019-08-15 | Tikitin Oy | Oven-controlled frequency reference oscillator and method for its manufacture |
FI128195B (en) | 2017-09-05 | 2019-12-13 | Tikitin Oy | Frequency reference oscillator device and method for stabilizing a frequency reference signal |
US11533042B2 (en) * | 2018-01-16 | 2022-12-20 | Georgia Tech Research Corporation | Distributed-mode beam and frame resonators for high frequency timing circuits |
FI128208B (en) | 2018-02-08 | 2019-12-31 | Tikitin Oy | Connected MEMS resonator |
US10476480B1 (en) * | 2018-07-06 | 2019-11-12 | Globalfoundries Singapore Pte. Ltd. | Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making |
US11626856B2 (en) * | 2019-10-30 | 2023-04-11 | X-Celeprint Limited | Non-linear tethers for suspended devices |
US11637540B2 (en) | 2019-10-30 | 2023-04-25 | X-Celeprint Limited | Non-linear tethers for suspended devices |
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2016
- 2016-07-01 FI FI20165553A patent/FI127787B/en active IP Right Grant
-
2017
- 2017-06-29 EP EP17746152.2A patent/EP3479477B1/en active Active
- 2017-06-29 KR KR1020197002410A patent/KR102408336B1/ko active IP Right Grant
- 2017-06-29 US US16/313,655 patent/US10931255B2/en active Active
- 2017-06-29 WO PCT/FI2017/050486 patent/WO2018002439A1/en unknown
- 2017-06-29 JP JP2018568200A patent/JP7069056B2/ja active Active
- 2017-06-29 CN CN201780040389.4A patent/CN109417373B/zh active Active
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2021
- 2021-10-08 JP JP2021165989A patent/JP7266077B2/ja active Active
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Also Published As
Publication number | Publication date |
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FI20165553A (fi) | 2018-01-02 |
KR20190026784A (ko) | 2019-03-13 |
EP3479477B1 (en) | 2019-12-04 |
US10931255B2 (en) | 2021-02-23 |
CN109417373A (zh) | 2019-03-01 |
KR102408336B1 (ko) | 2022-06-14 |
JP7069056B2 (ja) | 2022-05-17 |
EP3479477A1 (en) | 2019-05-08 |
WO2018002439A1 (en) | 2018-01-04 |
US20190173450A1 (en) | 2019-06-06 |
CN109417373B (zh) | 2023-04-04 |
FI127787B (en) | 2019-02-28 |
JP2022003827A (ja) | 2022-01-11 |
JP7266077B2 (ja) | 2023-04-27 |
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