SG11201508862UA - Vibrating device - Google Patents

Vibrating device

Info

Publication number
SG11201508862UA
SG11201508862UA SG11201508862UA SG11201508862UA SG11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA
Authority
SG
Singapore
Prior art keywords
vibrating device
vibrating
Prior art date
Application number
SG11201508862UA
Inventor
Toshio Nishimura
Keiichi Umeda
Takashi Hase
Keisuke Takeyama
Takehiko Kishi
Hiroshi Yamada
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of SG11201508862UA publication Critical patent/SG11201508862UA/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2452—Free-free beam resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
SG11201508862UA 2013-05-13 2014-05-01 Vibrating device SG11201508862UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013101301 2013-05-13
PCT/JP2014/062078 WO2014185280A1 (en) 2013-05-13 2014-05-01 Vibrating device

Publications (1)

Publication Number Publication Date
SG11201508862UA true SG11201508862UA (en) 2015-11-27

Family

ID=51898260

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201508862UA SG11201508862UA (en) 2013-05-13 2014-05-01 Vibrating device

Country Status (5)

Country Link
US (1) US9905748B2 (en)
JP (1) JP6094671B2 (en)
CN (1) CN105210294B (en)
SG (1) SG11201508862UA (en)
WO (1) WO2014185280A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014042020A2 (en) * 2012-09-13 2014-03-20 株式会社村田製作所 Oscillating device and manufacturing method therefor
CN107005223B (en) * 2014-10-03 2021-06-04 芬兰国家技术研究中心股份公司 Temperature compensation beam resonator
CN106797207B (en) * 2014-12-17 2021-04-20 株式会社村田制作所 Piezoelectric vibrator and piezoelectric vibration device
WO2016104004A1 (en) 2014-12-26 2016-06-30 株式会社村田製作所 Resonator manufacturing method
US20160352307A1 (en) * 2015-05-27 2016-12-01 Murata Manufacturing Co., Ltd. Mems resonator with high quality factor
EP3829060A1 (en) * 2015-06-19 2021-06-02 SiTime Corporation Microelectromechanical resonator
CN109075767B (en) * 2016-05-26 2022-04-29 株式会社村田制作所 Harmonic oscillator and resonance device
FI127940B (en) * 2016-07-01 2019-05-31 Teknologian Tutkimuskeskus Vtt Oy Micromechanical resonator and method for trimming micromechanical resonator
FI127787B (en) * 2016-07-01 2019-02-28 Teknologian Tutkimuskeskus Vtt Oy Micromechanical resonator
US10291203B2 (en) * 2016-07-12 2019-05-14 Murata Manufacturing Co., Ltd. Piezoelectric MEMS resonator with a high quality factor
CN112352143A (en) * 2018-06-29 2021-02-09 斯塔特拉Ip控股公司 Dual output microelectromechanical resonator and methods of making and operating same
US10958235B2 (en) * 2019-08-21 2021-03-23 Murata Manufacturing Co., Ltd. Thickness mode resonator

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07226648A (en) * 1994-02-15 1995-08-22 Murata Mfg Co Ltd Resonance frequency variable resonator
JPH08186467A (en) * 1994-12-29 1996-07-16 Murata Mfg Co Ltd Divergent oscillation type piezoelectric oscillator and its production
JP2001168675A (en) * 1999-12-08 2001-06-22 Mitsubishi Electric Corp Piezoelectric resonator, piezoelectric oscillator using this and method for manufacturing piezoelectric resonator
JP2001188675A (en) 1999-12-28 2001-07-10 Nec Eng Ltd Data transfer device
JP3703773B2 (en) 2002-03-28 2005-10-05 株式会社ヒューモラボラトリー Manufacturing method of crystal unit
JP2004080468A (en) * 2002-08-20 2004-03-11 Victor Co Of Japan Ltd Sound transducer
JP2006270360A (en) * 2005-03-23 2006-10-05 Seiko Epson Corp Surface acoustic wave element
US7847649B2 (en) * 2005-12-23 2010-12-07 Nxp B.V. MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
CN100570755C (en) * 2006-04-26 2009-12-16 中国计量学院 A kind of micro-cantilever resonator of low temperature cross sensitivity
JP4917396B2 (en) * 2006-09-25 2012-04-18 太陽誘電株式会社 Filters and duplexers
CH700716B1 (en) 2006-10-09 2010-10-15 Suisse Electronique Microtech Tuning fork resonator type silicon.
WO2010004741A1 (en) * 2008-07-11 2010-01-14 パナソニック株式会社 Plate wave element and electronic equipment using same
WO2010062647A2 (en) 2008-10-28 2010-06-03 Pixtronix, Inc. System and method for selecting display modes
FI126586B (en) 2011-02-17 2017-02-28 Teknologian Tutkimuskeskus Vtt Oy New micromechanical devices
FI123933B (en) * 2011-05-13 2013-12-31 Teknologian Tutkimuskeskus Vtt A micromechanical device and method for its design
US9590587B1 (en) * 2011-07-07 2017-03-07 Analog Devices, Inc. Compensation of second order temperature dependence of mechanical resonator frequency
US8593230B2 (en) * 2011-10-14 2013-11-26 Nxp, B.V. Circuit and method for correcting temperature dependence of frequency for piezoresistive oscillators

Also Published As

Publication number Publication date
WO2014185280A1 (en) 2014-11-20
CN105210294A (en) 2015-12-30
JP6094671B2 (en) 2017-03-15
US9905748B2 (en) 2018-02-27
CN105210294B (en) 2017-09-29
JPWO2014185280A1 (en) 2017-02-23
US20160064642A1 (en) 2016-03-03

Similar Documents

Publication Publication Date Title
IL256021B (en) Walker-assist device
HK1214224A1 (en) Novel device
SG11201508861WA (en) Vibrating device
SG11201508862UA (en) Vibrating device
SG11201508860QA (en) Vibrating device
EP2988582A4 (en) Substrate-clamp device
GB201317499D0 (en) Naso-Oral Device
GB201314474D0 (en) MOS-Bipolar device
EP2991369A4 (en) Acoustic device
EP2947000A4 (en) Airship-mooring device
IL227858A0 (en) Device
GB201315649D0 (en) Device
GB201310610D0 (en) Object-handling device
GB201303718D0 (en) Device
GB201315508D0 (en) State-changeable device
LU92261B1 (en) Sinterstrand-charging device
GB201312493D0 (en) Stopperr device
GB201307466D0 (en) Device
HK1201056A1 (en) Bend-breaking device
GB201322360D0 (en) Grippling device
TWM475276U (en) Vibrating apparatus
GB201316749D0 (en) Device
GB201311454D0 (en) Envelope-outlining device
IL245207A (en) Walker-assist device
GB201406464D0 (en) Device