FI20030946A0 - Kapasitiivinen kiihtyvyysanturijärjestely - Google Patents

Kapasitiivinen kiihtyvyysanturijärjestely

Info

Publication number
FI20030946A0
FI20030946A0 FI20030946A FI20030946A FI20030946A0 FI 20030946 A0 FI20030946 A0 FI 20030946A0 FI 20030946 A FI20030946 A FI 20030946A FI 20030946 A FI20030946 A FI 20030946A FI 20030946 A0 FI20030946 A0 FI 20030946A0
Authority
FI
Finland
Prior art keywords
acceleration sensor
sensor arrangement
capacitive acceleration
capacitive
arrangement
Prior art date
Application number
FI20030946A
Other languages
English (en)
Swedish (sv)
Other versions
FI116584B (fi
Inventor
Hannu Manninen
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20030946A priority Critical patent/FI116584B/fi
Publication of FI20030946A0 publication Critical patent/FI20030946A0/fi
Priority to PCT/FI2004/000367 priority patent/WO2004113930A1/en
Priority to DE112004001082T priority patent/DE112004001082T5/de
Priority to US10/873,614 priority patent/US7340955B2/en
Application granted granted Critical
Publication of FI116584B publication Critical patent/FI116584B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Analogue/Digital Conversion (AREA)
FI20030946A 2003-06-25 2003-06-25 Kapasitiivinen kiihtyvyysanturijärjestely FI116584B (fi)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI20030946A FI116584B (fi) 2003-06-25 2003-06-25 Kapasitiivinen kiihtyvyysanturijärjestely
PCT/FI2004/000367 WO2004113930A1 (en) 2003-06-25 2004-06-15 Capacitive acceleration sensor arrangement
DE112004001082T DE112004001082T5 (de) 2003-06-25 2004-06-15 Kapazitive Beschleunigungssensoranordnung
US10/873,614 US7340955B2 (en) 2003-06-25 2004-06-23 Capacitive acceleration sensor arrangement

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20030946 2003-06-25
FI20030946A FI116584B (fi) 2003-06-25 2003-06-25 Kapasitiivinen kiihtyvyysanturijärjestely

Publications (2)

Publication Number Publication Date
FI20030946A0 true FI20030946A0 (fi) 2003-06-25
FI116584B FI116584B (fi) 2005-12-30

Family

ID=8566298

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20030946A FI116584B (fi) 2003-06-25 2003-06-25 Kapasitiivinen kiihtyvyysanturijärjestely

Country Status (4)

Country Link
US (1) US7340955B2 (fi)
DE (1) DE112004001082T5 (fi)
FI (1) FI116584B (fi)
WO (1) WO2004113930A1 (fi)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100259285A1 (en) * 2007-03-05 2010-10-14 Nokia Corporation Providing feedback in an electronic circuit
US7528755B2 (en) * 2007-09-06 2009-05-05 Infineon Technologies Ag Sigma-delta modulator for operating sensors
US7956621B2 (en) * 2008-06-11 2011-06-07 Analog Devices, Inc. Anti-capture method and apparatus for micromachined devices
EP2343507B1 (fr) 2009-12-24 2012-11-28 EM Microelectronic-Marin SA Procédé de mesure d'un paramètre physique et circuit électronique d'interface d'un capteur capacitif pour sa mise en oeuvre
JP5104936B2 (ja) * 2010-11-22 2012-12-19 株式会社デンソー 加速度および角速度検出装置
EP2541213B1 (fr) 2011-07-01 2017-03-08 EM Microelectronic-Marin SA Procédé pour réduire la non linéarité pendant la mesure d'un paramètre physique et circuit électronique pour sa mise en oeuvre
EP2618163B1 (fr) 2012-01-20 2014-09-17 EM Microelectronic-Marin SA Procédé de mesure d'un paramètre physique et circuit électronique d'interface d'un capteur capacitif pour sa mise en oeuvre
EP2618164B1 (fr) 2012-01-20 2014-07-16 EM Microelectronic-Marin SA Procédé de mesure d'un paramètre physique et circuit électronique d'interface d'un capteur capacitif pour sa mise en oeuvre
EP2662667B1 (fr) 2012-05-10 2016-01-06 EM Microelectronic-Marin SA Procédé de mesure d'un paramètre physique et circuit électronique d'interface d'un capteur capacitif pour sa mise en oeuvre
US9810583B2 (en) * 2013-05-17 2017-11-07 Analog Devices, Inc. Encoder circuit with feedback DAC
US9689889B1 (en) * 2013-07-24 2017-06-27 Hanking Electronics, Ltd. Systems and methods to stabilize high-Q MEMS sensors
US9939290B1 (en) * 2013-09-16 2018-04-10 Panasonic Corporation Method for calibration of a system with time-multiplexed sensors
CN116817993A (zh) * 2018-09-26 2023-09-29 德克萨斯仪器股份有限公司 具有集成校准机制的方法和传感器系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046269B2 (ja) * 1980-04-23 1985-10-15 三菱電機株式会社 内燃機関の点火時期制御装置
JPS63212768A (ja) 1987-02-27 1988-09-05 Mitsubishi Motors Corp 内燃機関の点火時期制御装置
US4860232A (en) * 1987-04-22 1989-08-22 Massachusetts Institute Of Technology Digital technique for precise measurement of variable capacitance
JPH01115718A (ja) 1987-10-30 1989-05-09 Nec Home Electron Ltd 緩衝器制御装置
JP3262013B2 (ja) * 1997-02-24 2002-03-04 三菱電機株式会社 容量型センサインターフェース回路
DE19846461B4 (de) * 1997-10-08 2006-05-11 Hitachi, Ltd. Sensoreinstellschaltung
US6901801B2 (en) * 2003-07-28 2005-06-07 The Boeing Company Capacitance acceleration derivative detector
US7124634B2 (en) * 2003-07-29 2006-10-24 The Boeing Company Single plate capacitive acceleration derivative detector

Also Published As

Publication number Publication date
WO2004113930A1 (en) 2004-12-29
US7340955B2 (en) 2008-03-11
US20060162454A1 (en) 2006-07-27
FI116584B (fi) 2005-12-30
DE112004001082T5 (de) 2006-10-26

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