FI119528B - Kapasitiivinen kiihtyvyysanturirakenne - Google Patents

Kapasitiivinen kiihtyvyysanturirakenne Download PDF

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Publication number
FI119528B
FI119528B FI20030206A FI20030206A FI119528B FI 119528 B FI119528 B FI 119528B FI 20030206 A FI20030206 A FI 20030206A FI 20030206 A FI20030206 A FI 20030206A FI 119528 B FI119528 B FI 119528B
Authority
FI
Finland
Prior art keywords
electrode
pair
electrodes
movable electrode
accelerometer
Prior art date
Application number
FI20030206A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20030206A0 (fi
Inventor
Tuomo Lehtonen
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Priority to FI20030206A priority Critical patent/FI119528B/fi
Publication of FI20030206A0 publication Critical patent/FI20030206A0/fi
Priority to KR1020057014708A priority patent/KR20050088364A/ko
Priority to EP04706700A priority patent/EP1606634A1/en
Priority to PCT/FI2004/000046 priority patent/WO2004072655A1/en
Priority to CNA2004800039504A priority patent/CN1748148A/zh
Priority to JP2006502057A priority patent/JP2006517660A/ja
Priority to US10/774,695 priority patent/US7716983B2/en
Application granted granted Critical
Publication of FI119528B publication Critical patent/FI119528B/fi

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
FI20030206A 2003-02-11 2003-02-11 Kapasitiivinen kiihtyvyysanturirakenne FI119528B (fi)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI20030206A FI119528B (fi) 2003-02-11 2003-02-11 Kapasitiivinen kiihtyvyysanturirakenne
KR1020057014708A KR20050088364A (ko) 2003-02-11 2004-01-30 용량형 가속도 센서
EP04706700A EP1606634A1 (en) 2003-02-11 2004-01-30 Capacitive acceleration sensor
PCT/FI2004/000046 WO2004072655A1 (en) 2003-02-11 2004-01-30 Capacitive acceleration sensor
CNA2004800039504A CN1748148A (zh) 2003-02-11 2004-01-30 电容性加速度传感器
JP2006502057A JP2006517660A (ja) 2003-02-11 2004-01-30 容量型加速度センサー
US10/774,695 US7716983B2 (en) 2003-02-11 2004-02-10 Capacitive acceleration sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20030206A FI119528B (fi) 2003-02-11 2003-02-11 Kapasitiivinen kiihtyvyysanturirakenne
FI20030206 2003-02-11

Publications (2)

Publication Number Publication Date
FI20030206A0 FI20030206A0 (fi) 2003-02-11
FI119528B true FI119528B (fi) 2008-12-15

Family

ID=8565597

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20030206A FI119528B (fi) 2003-02-11 2003-02-11 Kapasitiivinen kiihtyvyysanturirakenne

Country Status (7)

Country Link
US (1) US7716983B2 (zh)
EP (1) EP1606634A1 (zh)
JP (1) JP2006517660A (zh)
KR (1) KR20050088364A (zh)
CN (1) CN1748148A (zh)
FI (1) FI119528B (zh)
WO (1) WO2004072655A1 (zh)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119785B (fi) 2004-09-23 2009-03-13 Vti Technologies Oy Kapasitiivinen anturi ja menetelmä kapasitiivisen anturin valmistamiseksi
FI119299B (fi) 2005-06-17 2008-09-30 Vti Technologies Oy Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi
FI118930B (fi) 2005-09-16 2008-05-15 Vti Technologies Oy Menetelmä kiihtyvyyden mikromekaaniseen mittaamiseen ja mikromekaaninen kiihtyvyysanturi
KR100768620B1 (ko) 2006-04-06 2007-10-18 학교법인 포항공과대학교 회전 측정용 전기적 용량 센서
US8079262B2 (en) * 2007-10-26 2011-12-20 Rosemount Aerospace Inc. Pendulous accelerometer with balanced gas damping
US20110113880A1 (en) * 2008-05-15 2011-05-19 Continental Teves Ag & Co. Ohg Micromechanical acceleration sensor
DE102009000594A1 (de) * 2009-02-04 2010-08-05 Robert Bosch Gmbh Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors
US7736931B1 (en) 2009-07-20 2010-06-15 Rosemount Aerospace Inc. Wafer process flow for a high performance MEMS accelerometer
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
WO2011130941A1 (zh) * 2010-04-20 2011-10-27 浙江大学 变面积电容结构、梳状栅电容加速度计以及梳状栅电容陀螺
TWI452297B (zh) * 2011-09-26 2014-09-11 Richwave Technology Corp 電容式加速度計
US8991251B1 (en) 2011-11-21 2015-03-31 Western Digital (Fremont), Llc Hybrid capacitive and piezoelectric motion sensing transducer
US9423308B2 (en) * 2012-01-12 2016-08-23 Universiteit Twente Six-axis force-torque sensor
US10712360B2 (en) 2017-09-27 2020-07-14 Azoteq (Pty) Ltd Differential charge transfer based accelerometer

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6293668A (ja) 1985-10-21 1987-04-30 Hitachi Ltd 角速度・加速度検出器
DE3741036A1 (de) 1987-12-03 1989-06-15 Fraunhofer Ges Forschung Mikromechanischer beschleunigungsmesser
DE69116435T2 (de) * 1990-05-30 1996-08-14 Hitachi Automotive Eng Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
JP2938989B2 (ja) 1991-01-29 1999-08-25 キヤノン株式会社 角加速度センサ
JPH05142251A (ja) 1991-11-22 1993-06-08 Omron Corp 角加速度センサ
CA2149933A1 (en) * 1994-06-29 1995-12-30 Robert M. Boysel Micro-mechanical accelerometers with improved detection circuitry
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US5831164A (en) 1997-01-21 1998-11-03 Conrad Technologies, Inc. Linear and rotational accelerometer
JPH1114658A (ja) * 1997-06-25 1999-01-22 Mitsubishi Electric Corp 静電容量式加速度センサ
US6000287A (en) * 1998-08-28 1999-12-14 Ford Motor Company Capacitor center of area sensitivity in angular motion micro-electromechanical systems
EP1410047B1 (de) 2001-07-26 2007-02-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement
US6829937B2 (en) * 2002-06-17 2004-12-14 Vti Holding Oy Monolithic silicon acceleration sensor
US6765160B1 (en) * 2002-08-21 2004-07-20 The United States Of America As Represented By The Secetary Of The Army Omnidirectional microscale impact switch

Also Published As

Publication number Publication date
CN1748148A (zh) 2006-03-15
KR20050088364A (ko) 2005-09-05
US7716983B2 (en) 2010-05-18
EP1606634A1 (en) 2005-12-21
US20040221650A1 (en) 2004-11-11
WO2004072655A1 (en) 2004-08-26
JP2006517660A (ja) 2006-07-27
FI20030206A0 (fi) 2003-02-11

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