FI119528B - Kapacitiv accelerationsgivarkonstruktion - Google Patents
Kapacitiv accelerationsgivarkonstruktion Download PDFInfo
- Publication number
- FI119528B FI119528B FI20030206A FI20030206A FI119528B FI 119528 B FI119528 B FI 119528B FI 20030206 A FI20030206 A FI 20030206A FI 20030206 A FI20030206 A FI 20030206A FI 119528 B FI119528 B FI 119528B
- Authority
- FI
- Finland
- Prior art keywords
- electrode
- pair
- electrodes
- movable electrode
- accelerometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
- G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
- G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
Claims (11)
1. En kapacitiv accelerationsgivare, som omfattar minst ett par elektroder sälunda, att varje elektrodpar omfattar 5 en rörlig elektrod (5), som reagerar för acceleration, och minst en fast skivdel (6), och att varje elektrodpar ytterligare omfattar en rotationsaxel (7), som bildar väsentligen samma axel sä, att accelerationsgivarens rörliga elektrod (5) uppbärs fast vid rotationsaxeln (7) 10 sä, att den rörliga elektroden (5) kan svänga i rotationsrörelse omkring rotationsaxeln (7), kännetecknad av, att den rörliga elektroden (5) har väsentligen tvä stödpunkter, där torsionsfjädrar i anslutning tili stödpunkterna, vilka torsionsfjädrar uppbär den rörliga 15 elektroden (5) vid särskilda utskott och/eller inifrän, mojliggör en rotationsfrihetsgrad för den rörliga elektroden (5) omkring rotationsaxeln (7), och att en kapacitansförändring mellan den i rotationsrörelse befintliga rörliga elektroden (5) och skivdelen (6) 20 förstoras pä ätminstone ett av följande sätt: - med hjälp av elektrodernas (5), (6) form, • ·1· - med hjälp av ytbeläggning pä elektroderna (5), (6), och • M .'1'j - med hjälp av elektrodernas (5), (6) elektrodgap. • · • t » • 1« • ·
2. Kapacitiv accelerationsgivare enligt patentkrav 1, ···1 kännetecknad av, att elektrodparet är utformat med hjälp a · • · .···, av den rörliga elektroden (5) sä, att en avsevärd del av • t ·«· elektrodparets area ligger sä längt ifrän den rörliga elektrodens rotationsaxel (!) som möjligt. ♦ 1 1 .1··. 30 • e
3. Kapacitiv accelerationsgivare enligt patentkrav 1, ··· • 1 *···1 kännetecknad av, att elektrodparet är utformat med hjälp * av den minst ena fasta skivdelen (6) sä, att en avsevärd del av elektrodparets area ligger sä längt ifrän den i\j 35 rörliga elektrodens rotationsaxel (7) som möjligt. 119528
4. Kapacitiv accelerationsgivare enligt patentkrav 1, kannetecknad av, att elektrodparet är utformat med hjälp av den rörliga elektroden (5) och den minst ena fasta skivdelen (6) sä, att en avsevärd del av elektrodparets 5 area ligger sä langt ifran den rörliga elektrodens rotationsaxel (7) som möjligt.
5. Kapacitiv accelerationsgivare enligt nägot av de föregäende patentkraven 1-4, kännetecknad av, att den 10 rörliga elektroden (5) uppbärs av torsionsfjädrar i kantens närhet.
6. Kapacitiv accelerationsgivare enligt nägot av de föregäende patentkraven 1-4, kännetecknad av, att den 15 rörliga elektroden (5) uppbärs av fjädrar med böj- och rotationsfrihetsgrader av sairana storleksordning.
7. Kapacitiv accelerationsgivare enligt nägot av de föregäende patentkraven 1-4, kännetecknad av, att den 20 rörliga elektroden (5) har minst tre stödpunkter av vilka tvä utgör väsentliga stödpunkter. • · · • * · • •t ***'.
8. Kapacitiv accelerationsgivare enligt nägot av de • te »‘•fi föregäende patentkraven 1-7, kännetecknad av, att • * 25 elektrodparet utformats i form av en triangel. ··· M · • · · • I • · ,***.
9. Kapacitiv accelerationsgivare enligt nägot av de ··· föregäende patentkraven 1-7, kännetecknad av, att elektrodparet utformats i form av en droppe. • · I 30 • · ··· t*t
10. Kapacitiv accelerationsgivare enligt nägot av de • · *···] föregäende patentkraven 1-7, kännetecknad av, att elektrodparet utformats i form av en hammare. ··· • # · • * f • · i/.i 35
11. Kapacitiv accelerationsgivare enligt nägot av de föregäende patentkraven 1-10, kännetecknad av, att 119528 accelerationsgivarkonstruktionen omfattar en andra fast elektrod pä den motsatta sidan av varje rorlig elektrod, • · · • 1 · ··· Mt « · • · »·1 • · • · · • 14 « 1 444 • · * · 44 4 ·1 · • · · • ft • ft 444 • ft • ft ·· ft · • · ft • ft ft • ft 44ft • ft • ft ·· • • ft· « ft • ft 414 ft • ft ft 414 • · ft • ft ft ft • · ft • ·· ft ft
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20030206A FI119528B (sv) | 2003-02-11 | 2003-02-11 | Kapacitiv accelerationsgivarkonstruktion |
EP04706700A EP1606634A1 (en) | 2003-02-11 | 2004-01-30 | Capacitive acceleration sensor |
KR1020057014708A KR20050088364A (ko) | 2003-02-11 | 2004-01-30 | 용량형 가속도 센서 |
JP2006502057A JP2006517660A (ja) | 2003-02-11 | 2004-01-30 | 容量型加速度センサー |
PCT/FI2004/000046 WO2004072655A1 (en) | 2003-02-11 | 2004-01-30 | Capacitive acceleration sensor |
CNA2004800039504A CN1748148A (zh) | 2003-02-11 | 2004-01-30 | 电容性加速度传感器 |
US10/774,695 US7716983B2 (en) | 2003-02-11 | 2004-02-10 | Capacitive acceleration sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20030206 | 2003-02-11 | ||
FI20030206A FI119528B (sv) | 2003-02-11 | 2003-02-11 | Kapacitiv accelerationsgivarkonstruktion |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20030206A0 FI20030206A0 (sv) | 2003-02-11 |
FI119528B true FI119528B (sv) | 2008-12-15 |
Family
ID=8565597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20030206A FI119528B (sv) | 2003-02-11 | 2003-02-11 | Kapacitiv accelerationsgivarkonstruktion |
Country Status (7)
Country | Link |
---|---|
US (1) | US7716983B2 (sv) |
EP (1) | EP1606634A1 (sv) |
JP (1) | JP2006517660A (sv) |
KR (1) | KR20050088364A (sv) |
CN (1) | CN1748148A (sv) |
FI (1) | FI119528B (sv) |
WO (1) | WO2004072655A1 (sv) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI119785B (sv) | 2004-09-23 | 2009-03-13 | Vti Technologies Oy | Kapacitiv sensor och förfarande för framställning av kapacitiv sensor |
FI119299B (sv) | 2005-06-17 | 2008-09-30 | Vti Technologies Oy | Förfarande för framställning av kapacitiv accelerationssensor och kapacitiv accelerationssensor |
FI118930B (sv) | 2005-09-16 | 2008-05-15 | Vti Technologies Oy | Förfarande för mikromekanisk mätning av acceleration och mikromekanisk accelerationssensor |
KR100768620B1 (ko) | 2006-04-06 | 2007-10-18 | 학교법인 포항공과대학교 | 회전 측정용 전기적 용량 센서 |
US8079262B2 (en) * | 2007-10-26 | 2011-12-20 | Rosemount Aerospace Inc. | Pendulous accelerometer with balanced gas damping |
EP2279422A1 (de) * | 2008-05-15 | 2011-02-02 | Continental Teves AG & Co. oHG | Mikromechanischer beschleunigungssensor |
DE102009000594A1 (de) * | 2009-02-04 | 2010-08-05 | Robert Bosch Gmbh | Beschleunigungssensor und Verfahren zum Betreiben eines Beschleunigungssensors |
US7736931B1 (en) | 2009-07-20 | 2010-06-15 | Rosemount Aerospace Inc. | Wafer process flow for a high performance MEMS accelerometer |
US8322216B2 (en) * | 2009-09-22 | 2012-12-04 | Duli Yu | Micromachined accelerometer with monolithic electrodes and method of making the same |
WO2011130941A1 (zh) * | 2010-04-20 | 2011-10-27 | 浙江大学 | 变面积电容结构、梳状栅电容加速度计以及梳状栅电容陀螺 |
TWI452297B (zh) * | 2011-09-26 | 2014-09-11 | Richwave Technology Corp | 電容式加速度計 |
US8991251B1 (en) | 2011-11-21 | 2015-03-31 | Western Digital (Fremont), Llc | Hybrid capacitive and piezoelectric motion sensing transducer |
US9423308B2 (en) * | 2012-01-12 | 2016-08-23 | Universiteit Twente | Six-axis force-torque sensor |
US10712360B2 (en) | 2017-09-27 | 2020-07-14 | Azoteq (Pty) Ltd | Differential charge transfer based accelerometer |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH642461A5 (fr) | 1981-07-02 | 1984-04-13 | Centre Electron Horloger | Accelerometre. |
JPS6293668A (ja) | 1985-10-21 | 1987-04-30 | Hitachi Ltd | 角速度・加速度検出器 |
DE3741036A1 (de) | 1987-12-03 | 1989-06-15 | Fraunhofer Ges Forschung | Mikromechanischer beschleunigungsmesser |
DE69116435T2 (de) * | 1990-05-30 | 1996-08-14 | Hitachi Automotive Eng | Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen |
JP2938989B2 (ja) | 1991-01-29 | 1999-08-25 | キヤノン株式会社 | 角加速度センサ |
JPH05142251A (ja) | 1991-11-22 | 1993-06-08 | Omron Corp | 角加速度センサ |
CA2149933A1 (en) * | 1994-06-29 | 1995-12-30 | Robert M. Boysel | Micro-mechanical accelerometers with improved detection circuitry |
DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
US5831164A (en) | 1997-01-21 | 1998-11-03 | Conrad Technologies, Inc. | Linear and rotational accelerometer |
JPH1114658A (ja) * | 1997-06-25 | 1999-01-22 | Mitsubishi Electric Corp | 静電容量式加速度センサ |
US6000287A (en) * | 1998-08-28 | 1999-12-14 | Ford Motor Company | Capacitor center of area sensitivity in angular motion micro-electromechanical systems |
ATE355530T1 (de) | 2001-07-26 | 2006-03-15 | Fraunhofer Ges Forschung | Mikromechanisches bauelement |
US6829937B2 (en) * | 2002-06-17 | 2004-12-14 | Vti Holding Oy | Monolithic silicon acceleration sensor |
US6765160B1 (en) * | 2002-08-21 | 2004-07-20 | The United States Of America As Represented By The Secetary Of The Army | Omnidirectional microscale impact switch |
-
2003
- 2003-02-11 FI FI20030206A patent/FI119528B/sv not_active IP Right Cessation
-
2004
- 2004-01-30 JP JP2006502057A patent/JP2006517660A/ja active Pending
- 2004-01-30 KR KR1020057014708A patent/KR20050088364A/ko not_active Application Discontinuation
- 2004-01-30 WO PCT/FI2004/000046 patent/WO2004072655A1/en active Application Filing
- 2004-01-30 EP EP04706700A patent/EP1606634A1/en not_active Withdrawn
- 2004-01-30 CN CNA2004800039504A patent/CN1748148A/zh active Pending
- 2004-02-10 US US10/774,695 patent/US7716983B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2004072655A1 (en) | 2004-08-26 |
FI20030206A0 (sv) | 2003-02-11 |
CN1748148A (zh) | 2006-03-15 |
EP1606634A1 (en) | 2005-12-21 |
US20040221650A1 (en) | 2004-11-11 |
JP2006517660A (ja) | 2006-07-27 |
US7716983B2 (en) | 2010-05-18 |
KR20050088364A (ko) | 2005-09-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FI119528B (sv) | Kapacitiv accelerationsgivarkonstruktion | |
FI119159B (sv) | Kapacitiv accelerationsgivarkonstruktion | |
JP5215847B2 (ja) | 容量性加速度センサーを製造する方法、および、容量性加速度センサー | |
JP6328823B2 (ja) | 加速度センサー構造体およびその用途 | |
US9513310B2 (en) | High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer | |
TWI292825B (en) | Multiple axis acceleration sensor | |
US6854330B2 (en) | Accelerometer and methods thereof | |
JP4063057B2 (ja) | 容量式加速度センサ | |
US20130042684A1 (en) | Physical quantity sensor and electronic apparatus | |
US20190100426A1 (en) | Mems sensor with dual pendulous proof masses | |
JP2010506182A (ja) | 加速度検出センサー | |
JP2018531377A6 (ja) | 改良型微小電気機械加速度測定装置 | |
CN109798886A (zh) | 一种陀螺仪结构 | |
US20160097641A1 (en) | Sensors Including Ionic Liquids and Methods of Making and Using the Same | |
CN104764904B (zh) | 一种三轴压电加速度计 | |
JP2004333372A (ja) | 静電容量式液体センサ | |
JP7245693B2 (ja) | センサ及びその製造方法 | |
CN102507979A (zh) | 一种接触式电容微加速度传感器 | |
Nesterenko et al. | Metrological performance of integrated multiple axis MEMS accelerometers under thermal effect | |
KR101182531B1 (ko) | 층구조 전극을 포함한 커패시터 센서 및 이를 이용한 힘의 크기 및 방향을 얻는 방법 | |
JP2003279349A5 (sv) | ||
JP2004020518A (ja) | 静電容量式液体センサ | |
Peng et al. | Liquid Droplet for Motion Sensing | |
RU192953U1 (ru) | Мэмс-акселерометр | |
KR101863959B1 (ko) | 센서 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Patent granted |
Ref document number: 119528 Country of ref document: FI |
|
PC | Transfer of assignment of patent |
Owner name: MURATA ELECTRONICS OY |
|
MM | Patent lapsed |