ES8601531A1 - Procedimiento para la fabricacion de un detector de gas silano - Google Patents

Procedimiento para la fabricacion de un detector de gas silano

Info

Publication number
ES8601531A1
ES8601531A1 ES535776A ES535776A ES8601531A1 ES 8601531 A1 ES8601531 A1 ES 8601531A1 ES 535776 A ES535776 A ES 535776A ES 535776 A ES535776 A ES 535776A ES 8601531 A1 ES8601531 A1 ES 8601531A1
Authority
ES
Spain
Prior art keywords
mol
ratio
pref
sih4
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES535776A
Other languages
English (en)
Other versions
ES535776A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Publication of ES8601531A1 publication Critical patent/ES8601531A1/es
Publication of ES535776A0 publication Critical patent/ES535776A0/es
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PROCEDIMIENTO PARA LA FABRICACION DE UN DETECTOR DE GAS SILANO PARTICULARMENTE PARA LA DETECCION DE BAJAS CONCENTRACIONES DE GAS SILANO. COMPRENDE LAS SIGUIENTES OPERACIONES: PRIMERA SE AÑADE SNO2 A UNA SOLUCION ACUOSA DE PTCL Y DESPUES DE DISPERSADO EL SNO2 SE CONGELA Y SECA BAJO VACIO LA MEZCLA RESULTANTE; SEGUNDA SE AÑADE A LA MEZCLA FORMADA UNA CANTIDAD DE SBOCL Y UN DISOLVENTE ORGANICO TRANSFORMANDO LA MEZCLA RESULTANTE EN UNA PASTA; TERCERA SE APLICA DICHA PASTA SOBRE UN AISLADOR ELECTRICO DOTADO DE ELECTRODOS Y SE SECA Y CALCINA DICHO AISLADOR REVESTIDO; Y POR ULTIMO SE EXPONE EL AISLADOR CALCINADO A UNA ATMOSFERA DE SILANO Y A CONTINUACION SE INTRODUCE EN EL AISLADOR RESULTANTE UN ELEMENTO CALEFACTOR PARA SU CALENTAMIENTO A LA TEMPERATURA DESEADA.
ES535776A 1983-08-31 1984-08-28 Procedimiento para la fabricacion de un detector de gas silano Granted ES535776A0 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58157931A JPS6050446A (ja) 1983-08-31 1983-08-31 ガス検出素子とその製造方法

Publications (2)

Publication Number Publication Date
ES8601531A1 true ES8601531A1 (es) 1985-11-01
ES535776A0 ES535776A0 (es) 1985-11-01

Family

ID=15660600

Family Applications (1)

Application Number Title Priority Date Filing Date
ES535776A Granted ES535776A0 (es) 1983-08-31 1984-08-28 Procedimiento para la fabricacion de un detector de gas silano

Country Status (5)

Country Link
US (1) US4583070A (es)
EP (1) EP0139139B1 (es)
JP (1) JPS6050446A (es)
DE (1) DE3485153D1 (es)
ES (1) ES535776A0 (es)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61223643A (ja) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd 水素ガス検出素子及びその製法
JPS61223642A (ja) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd 水素ガス検出素子及びその製法
JPS61223644A (ja) * 1985-03-29 1986-10-04 Nohmi Bosai Kogyo Co Ltd 水素ガス検出素子及びその製法
US5777207A (en) * 1995-11-27 1998-07-07 Lg Electronics Inc. Gas sensor and method for fabricating the same
DE102005024394B4 (de) * 2005-05-27 2015-08-27 Dräger Safety AG & Co. KGaA Verfahren zur Konzentrationsmessung von Gasen
US9395344B2 (en) 2013-02-06 2016-07-19 Veris Industries, Llc Gas sensor with thermal measurement compensation

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514380B2 (es) * 1973-06-12 1980-04-16
FR2273275B1 (es) * 1974-05-27 1977-03-11 Radiotechnique Compelec
JPS5119592A (en) * 1974-08-09 1976-02-16 Nissan Motor Gasunodo kenshutsuki
US4001758A (en) * 1975-09-02 1977-01-04 Ford Motor Company Stoichiometric air/fuel ratio exhaust gas sensor
JPS5276991A (en) * 1975-12-23 1977-06-28 Nippon Soken Detector for gas composition
FR2341859A1 (fr) * 1976-02-18 1977-09-16 Radiotechnique Compelec Sonde pour la detection selective de vapeurs, notamment pour la detection de la vapeur d'eau
JPS53143298A (en) * 1977-05-19 1978-12-13 Nohmi Bosai Kogyo Co Ltd Carbon monoxide sensor element
JPS5421398A (en) * 1977-07-18 1979-02-17 Fuji Electric Co Ltd Carbon monoxide detector
US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device
US4242303A (en) * 1978-05-02 1980-12-30 Tokyo Shibaura Denki Kabushiki Kaisha Gas detecting element
JPS6051888B2 (ja) * 1978-10-04 1985-11-16 日本発条株式会社 リクライニング座席
US4359709A (en) * 1979-07-06 1982-11-16 Matsushita Electric Industrial Co., Ltd. Combustible gas sensor
JPS5710446A (en) * 1980-06-20 1982-01-20 Nec Corp Gas detecting element
JPS57179152U (es) * 1981-05-08 1982-11-13
JPS589052A (ja) * 1981-07-08 1983-01-19 Nichicon Capacitor Ltd 複合ガス検知素子
EP0102067B1 (en) * 1982-08-27 1988-08-17 Kabushiki Kaisha Toshiba Co gas detecting device and circuit for driving the same
JPS59119249A (ja) * 1982-12-25 1984-07-10 Nohmi Bosai Kogyo Co Ltd 一酸化炭素の検出素子とその製造方法

Also Published As

Publication number Publication date
EP0139139A3 (en) 1986-09-10
EP0139139B1 (en) 1991-10-09
US4583070A (en) 1986-04-15
DE3485153D1 (de) 1991-11-14
ES535776A0 (es) 1985-11-01
JPS6050446A (ja) 1985-03-20
EP0139139A2 (en) 1985-05-02
JPH0468587B2 (es) 1992-11-02

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20001102