ES362230A1 - Procedimiento para la obtencion de una placa de impresion fotolitografica. - Google Patents

Procedimiento para la obtencion de una placa de impresion fotolitografica.

Info

Publication number
ES362230A1
ES362230A1 ES362230A ES362230A ES362230A1 ES 362230 A1 ES362230 A1 ES 362230A1 ES 362230 A ES362230 A ES 362230A ES 362230 A ES362230 A ES 362230A ES 362230 A1 ES362230 A1 ES 362230A1
Authority
ES
Spain
Prior art keywords
photo
resist
ambient temperature
coating
printing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES362230A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FMC Corp
Original Assignee
FMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FMC Corp filed Critical FMC Corp
Publication of ES362230A1 publication Critical patent/ES362230A1/es
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Printing Plates And Materials Therefor (AREA)
ES362230A 1968-01-08 1969-01-07 Procedimiento para la obtencion de una placa de impresion fotolitografica. Expired ES362230A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US69613268A 1968-01-08 1968-01-08

Publications (1)

Publication Number Publication Date
ES362230A1 true ES362230A1 (es) 1970-11-01

Family

ID=24795843

Family Applications (1)

Application Number Title Priority Date Filing Date
ES362230A Expired ES362230A1 (es) 1968-01-08 1969-01-07 Procedimiento para la obtencion de una placa de impresion fotolitografica.

Country Status (9)

Country Link
AT (1) AT290570B (es)
BE (1) BE725691A (es)
CH (1) CH519736A (es)
DE (1) DE1900599A1 (es)
ES (1) ES362230A1 (es)
FR (1) FR1595145A (es)
GB (1) GB1217757A (es)
IL (1) IL31103A (es)
NL (1) NL6900160A (es)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3657197A (en) * 1970-05-07 1972-04-18 Gaf Corp Photosensitive propargyl polymer derivatives
DE102004004865B4 (de) * 2004-01-30 2008-01-10 Qimonda Ag Antireflexschicht, die mit einem Photoresist beschichtet ist, enthaltend Polymere auf der Basis von Zimtsäure für die 157 nm Photolithographie
GB2436329B (en) * 2006-03-24 2011-07-27 Curwen Chilford Prints Ltd Screenless photolithography

Also Published As

Publication number Publication date
IL31103A (en) 1972-05-30
IL31103A0 (en) 1969-01-29
GB1217757A (en) 1970-12-31
NL6900160A (es) 1969-07-10
FR1595145A (es) 1970-06-08
AT290570B (de) 1971-06-11
BE725691A (es) 1969-05-29
CH519736A (de) 1972-02-29
DE1900599A1 (de) 1969-07-31

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