ES2181327T3 - Aparato de cvd de plasma. - Google Patents

Aparato de cvd de plasma.

Info

Publication number
ES2181327T3
ES2181327T3 ES99102642T ES99102642T ES2181327T3 ES 2181327 T3 ES2181327 T3 ES 2181327T3 ES 99102642 T ES99102642 T ES 99102642T ES 99102642 T ES99102642 T ES 99102642T ES 2181327 T3 ES2181327 T3 ES 2181327T3
Authority
ES
Spain
Prior art keywords
electrode
scaliform
download
reaction container
fine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99102642T
Other languages
English (en)
Inventor
Masayoshi Murata
Yoshiaki Takeuchi
Satoru Serizawa
Yoshikazu Nawata
Kazuhiko Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Application granted granted Critical
Publication of ES2181327T3 publication Critical patent/ES2181327T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

LA INVENCION SE REFIERE A UN APARATO DE DEPOSICION QUIMICA EN FASE DE VAPOR DE PLASMA, DESTINADO A FORMAR UNA PELICULA FINA AMORFA, UNA PELICULA FINA MICROCRISTALINA O UNA PELICULA FINA POLICRISTALINA SOBRE LA SUPERFICIE DE UN SUSTRATO (33). DICHO APARATO COMPRENDE UN RECIPIENTE DE REACCION (31) EN EL QUE SE DISPONE EL SUSTRATO (33); MEDIOS PARA INTRODUCIR UN GAS REACTIVO EN DICHO RECIPIENTE (31) Y PARA DESCARGAR EL GAS RESIDUAL DESDE EL RECIPIENTE DE REACCION (31); UN ELECTRODO ESCALIFORME (32), ES DECIR UN ELECTRODO DE ANTENA ESCALIFORME O UN ELECTRODO DE ESPIRA PLANA ESCALIFORME, ALBERGADO EN EL RECIPIENTE DE REACCION (31) PARA GENERAR UNA DESCARGA LUMINISCENTE; Y UNA FUENTE DE ENERGIA (36) PARA SUMINISTRAR ENERGIA ELECTRICA AL ELECTRODO ESCALIFORME (32), PARA PERMITIR QUE DICHO ELECTRODO GENERE UNA DESCARGA LUMINISCENTE. EN DICHO DISPOSITIVO, SE FORMA UNA LINEA DE SUMINISTRO DE ENERGIA QUE UNE EL ELECTRODO EN FORMA DE ANTENA (32) Y LA FUENTE DE ENERGIA (36), CONSTITUIDA POR UN CABLE COAXIAL, Y EL ELECTRODO ESCALIFORME (32) NO ESTA CONECTADO A TIERRA A TRAVES DE UN HILO DE MASA.
ES99102642T 1998-04-08 1999-02-12 Aparato de cvd de plasma. Expired - Lifetime ES2181327T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9598998 1998-04-08

Publications (1)

Publication Number Publication Date
ES2181327T3 true ES2181327T3 (es) 2003-02-16

Family

ID=14152553

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99102642T Expired - Lifetime ES2181327T3 (es) 1998-04-08 1999-02-12 Aparato de cvd de plasma.

Country Status (4)

Country Link
EP (1) EP0949352B1 (es)
AU (1) AU726151B2 (es)
DE (1) DE69902311T2 (es)
ES (1) ES2181327T3 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2961103B1 (ja) 1998-04-28 1999-10-12 三菱重工業株式会社 プラズマ化学蒸着装置
AU725612B2 (en) * 1998-05-29 2000-10-12 Mitsubishi Heavy Industries, Ltd. Plasma CVD apparatus
JP3276346B2 (ja) * 1999-06-17 2002-04-22 三菱重工業株式会社 放電電極、高周波プラズマ発生装置、給電方法および半導体製造方法
TW507256B (en) * 2000-03-13 2002-10-21 Mitsubishi Heavy Ind Ltd Discharge plasma generating method, discharge plasma generating apparatus, semiconductor device fabrication method, and semiconductor device fabrication apparatus
KR100797423B1 (ko) * 2000-05-17 2008-01-23 가부시키가이샤 아이에이치아이 플라즈마 ｃｖｄ 장치 및 방법
KR20030028296A (ko) * 2001-09-28 2003-04-08 학교법인 한양학원 플라즈마 화학기상증착 장치 및 이를 이용한 탄소나노튜브제조방법
US8409991B2 (en) 2007-12-20 2013-04-02 Oerlikon Solar Ag, Trubbach Method for manufacturing large-area vacuum plasma treated substrates and vacuum plasma treatment apparatus
TWI429098B (zh) * 2008-06-06 2014-03-01 Ulvac Inc 薄膜太陽能電池製造裝置
CA2752183C (en) 2009-02-10 2018-12-11 Helyssen Sarl Apparatus for large area plasma processing

Also Published As

Publication number Publication date
EP0949352A1 (en) 1999-10-13
AU726151B2 (en) 2000-11-02
DE69902311T2 (de) 2003-03-13
EP0949352B1 (en) 2002-07-31
AU1638799A (en) 1999-10-21
DE69902311D1 (de) 2002-09-05

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