ES2151158T3 - Procedimiento y aparato para el tratamiento de circuitos impresos. - Google Patents

Procedimiento y aparato para el tratamiento de circuitos impresos.

Info

Publication number
ES2151158T3
ES2151158T3 ES96911476T ES96911476T ES2151158T3 ES 2151158 T3 ES2151158 T3 ES 2151158T3 ES 96911476 T ES96911476 T ES 96911476T ES 96911476 T ES96911476 T ES 96911476T ES 2151158 T3 ES2151158 T3 ES 2151158T3
Authority
ES
Spain
Prior art keywords
treatment
procedure
rotation
printed circuits
thin materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96911476T
Other languages
English (en)
Inventor
Stanley Bryan Smith
G Allen Blakeslee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech USA LLC
Original Assignee
Atotech USA LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech USA LLC filed Critical Atotech USA LLC
Application granted granted Critical
Publication of ES2151158T3 publication Critical patent/ES2151158T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H05K13/0069—Holders for printed circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Specific Conveyance Elements (AREA)
  • Chemically Coating (AREA)

Abstract

UN METODO Y APARATO PARA TRANSPORTAR MATERIALES DELGADOS, COMO POR EJEMPLO PLACAS (24) DE CIRCUITO, A TRAVES DE UN APARATO PARA EL TRATAMIENTO DE DICHAS PLACAS CON UNA SOLUCION DE ATAQUE, DE ACLARADO U OTRA ETAPA DE UN PROCESO QUIMICO, INCLUYENDO UNA CINTA TRANSPORTADORA CON UNA PLURALIDAD DE MIEMBROS (31) DE ROTACION CON UN CANTO (34) ESPECIALMENTE CONFIGURADO PARA HACER CONTACTO CON LOS MATERIALES DELGADOS Y DESPLAZARLOS A TRAVES DEL APARATO CON UN RECORRIDO DE CONTACTO MAS LARGO EN CADA ROTACION DE UN MIEMBRO ROTATORIO QUE LA CIRCUNFERENCIA DEL MIEMBRO ROTATORIO.
ES96911476T 1995-04-10 1996-04-02 Procedimiento y aparato para el tratamiento de circuitos impresos. Expired - Lifetime ES2151158T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/419,717 US5553700A (en) 1995-04-10 1995-04-10 Treatment method and apparatus for printed circuit boards and the like

Publications (1)

Publication Number Publication Date
ES2151158T3 true ES2151158T3 (es) 2000-12-16

Family

ID=23663451

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96911476T Expired - Lifetime ES2151158T3 (es) 1995-04-10 1996-04-02 Procedimiento y aparato para el tratamiento de circuitos impresos.

Country Status (12)

Country Link
US (2) US5553700A (es)
EP (1) EP0820359B1 (es)
JP (1) JPH11509822A (es)
KR (1) KR19980703771A (es)
CN (1) CN1096310C (es)
AT (1) ATE196266T1 (es)
DE (1) DE69610299T2 (es)
DK (1) DK0820359T3 (es)
ES (1) ES2151158T3 (es)
HK (1) HK1009771A1 (es)
MY (1) MY123057A (es)
WO (1) WO1996032209A1 (es)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5720813A (en) 1995-06-07 1998-02-24 Eamon P. McDonald Thin sheet handling system
FR2737507B1 (fr) * 1995-08-04 1997-09-26 Scps Structures poreuses complexes metallisees ou metalliques, premetallisees par depot d'un polymere conducteur
US5762177A (en) * 1997-01-14 1998-06-09 International Business Machines Corporation Method and apparatus to convey flat products of different widths
DE19748337A1 (de) * 1997-11-01 1999-05-06 Schmid Gmbh & Co Geb Leiterplatten-Transportvorrichtung
US5975094A (en) * 1997-11-26 1999-11-02 Speedfam Corporation Method and apparatus for enhanced cleaning of a workpiece with mechanical energy
US5954888A (en) * 1998-02-09 1999-09-21 Speedfam Corporation Post-CMP wet-HF cleaning station
EP1541719A3 (en) 1998-05-20 2006-05-31 Process Automation International Limited An electroplating machine
US6261425B1 (en) 1998-08-28 2001-07-17 Process Automation International, Ltd. Electroplating machine
DE19842974A1 (de) * 1998-09-19 2000-03-23 Schmid Gmbh & Co Geb Einrichtung zur Behandlung von Gegenständen, insbesondere Galvanisiereinrichtung für Leiterplatten
DE19934300C2 (de) * 1999-07-21 2002-02-07 Steag Micro Tech Gmbh Vorrichtung zum Behandeln von Substraten
US6294060B1 (en) 1999-10-21 2001-09-25 Ati Properties, Inc. Conveyorized electroplating device
US6788078B2 (en) * 2001-11-16 2004-09-07 Delaware Capital Formation, Inc. Apparatus for scan testing printed circuit boards
JP2006306541A (ja) * 2005-04-27 2006-11-09 San Techno System Kk 基板搬送用ローラ、及び、基板処理装置
DE102006051040B4 (de) * 2006-10-26 2008-08-07 Schott Ag Transportvorrichtung für Flachglasscheiben und deren Verwendung
JP5239044B2 (ja) * 2011-02-01 2013-07-17 郭 明宏 垂直搬送式エッチング装置
JP5785454B2 (ja) * 2011-07-29 2015-09-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
EP3354604A1 (en) * 2017-01-27 2018-08-01 Schott AG Roller, especially for roller conveyors
DE102017216590A1 (de) * 2017-09-19 2019-03-21 Thyssenkrupp Ag Ofenrolle, Transportvorrichtung mit derartiger Ofenrolle und Verfahren zur deren Betrieb
CN110614246A (zh) * 2019-10-17 2019-12-27 金陵科技学院 一种建筑施工用板材清洗烘干一体化设备

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975708A (en) * 1934-10-02 Method and apparatus fob drying
DE248760C (es) *
US771340A (en) * 1903-07-24 1904-10-04 Thomas C Van Housen Process of etching.
US1383010A (en) * 1916-05-29 1921-06-28 Philip Becker Etching-machine
US1447648A (en) * 1921-12-09 1923-03-06 Libbeyowens Sheet Glass Compan Leer conveyer for continuous-sheet glass
US2474717A (en) * 1947-06-21 1949-06-28 Rodney Hunt Machine Co Process and apparatus for tensionless handling of running lengths of materials
US2592581A (en) * 1950-01-13 1952-04-15 United States Steel Corp Method and apparatus for positioning strip
FR1296065A (fr) * 1961-05-05 1962-06-15 Choquenet Fond Atel Perfectionnement apporté aux transporteurs à rouleaux et ses applications
US3348657A (en) * 1966-03-23 1967-10-24 Dea Products Inc Spray etching device
US3964588A (en) * 1967-09-13 1976-06-22 Kornylak Corporation Conveyor having provision for discharging loads at an angle generally transverse to the line of travel or the conveyor
US3935041A (en) * 1971-10-18 1976-01-27 Chemcut Corporation Method for treatment fluid application and removal
US4015706A (en) * 1971-11-15 1977-04-05 Chemcut Corporation Connecting modules for an etching system
SE371585B (es) * 1972-05-05 1974-11-25 Transaco Machine Ab
US3952482A (en) * 1973-10-13 1976-04-27 Massey-Ferguson Services N.V. Butt lifting roller for sugar cane harvesters
US4046248A (en) * 1974-01-15 1977-09-06 Chemcut Corporation Connecting and alignment means for modular chemical treatment system
SE390155B (sv) * 1974-03-19 1976-12-06 Eriksson B E Matarverk
US3964558A (en) * 1974-11-13 1976-06-22 Texas Dynamatics, Inc. Fluid actuated downhole drilling device
US4017982A (en) * 1975-07-28 1977-04-19 Chemcut Corporation Drying apparatus
AT348568B (de) * 1975-09-25 1979-02-26 Siemens Ag Oesterreich Foerderrolle fuer rollenherdoefen
DE3201417C2 (de) * 1981-01-22 1986-01-16 Nippon Steel Corp., Tokio/Tokyo Massive Walze aus Metall zum Transport von heißem Material
US4781205A (en) * 1987-05-27 1988-11-01 Chemcut Corporation Product guide for processing equipment
US4911284A (en) * 1987-06-16 1990-03-27 Den Mar Corporation Whisker driven conveyor system
US4999079A (en) * 1989-06-02 1991-03-12 Chemcut Corporation Process and apparatus for treating articles and preventing their wrap around a roller
US5176158A (en) * 1991-10-29 1993-01-05 Chemcut Corporation Apparatus and method for transporting materials which are to be chemically treated

Also Published As

Publication number Publication date
ATE196266T1 (de) 2000-09-15
CN1185761A (zh) 1998-06-24
CN1096310C (zh) 2002-12-18
EP0820359B1 (en) 2000-09-13
KR19980703771A (ko) 1998-12-05
DE69610299D1 (de) 2000-10-19
JPH11509822A (ja) 1999-08-31
EP0820359A1 (en) 1998-01-28
US5553700A (en) 1996-09-10
HK1009771A1 (en) 1999-09-17
DE69610299T2 (de) 2001-03-01
WO1996032209A1 (en) 1996-10-17
DK0820359T3 (da) 2000-12-11
MY123057A (en) 2006-05-31
US5766685A (en) 1998-06-16
EP0820359A4 (en) 1999-01-27

Similar Documents

Publication Publication Date Title
ES2151158T3 (es) Procedimiento y aparato para el tratamiento de circuitos impresos.
DE50301940D1 (de) Beschichtungsvorrichtung mit transporteinrichtung
DE50203459D1 (de) Zwischenspeichervorrichtung und ein verfahren zum transport von gegenständen
DK0762837T3 (da) Fremgangsmåde til forbedring af holdbarheden og stabilisering af produkter, der kan fordærves af mikroorganismer
IL132165A0 (en) Article method and apparatus for electrochemical fabrication
MY122866A (en) Apparatus and method for testing semiconductor devices
ATE133531T1 (de) Verfahren und vorrichtung zur beidseitigen beschichtung von plattenförmigem stückgut
ATE204697T1 (de) Verfahren und vorrichtung zum behandeln von plattenförmigem gut, insbesondere von leiterplatten
DK1321410T3 (da) Fremgangsmåde og anordning til transport af flade produkter
ATE60528T1 (de) Vorrichtung zur elektrostatischen spruehbeschichtung von plattenfoermigen werkstuecken.
TW372929B (en) Transport apparatus for thin, board-shaped substrates
DE69711577T2 (de) Substrat mit Elektronenquelle, Elektronenquelle, Bilderzeugungsgerät mit solchem Substrat und Herstellungsverfahren
DE59301279D1 (de) Einrichtung zur Behandlung von Gegenständen, insbesondere Galvanisiereinrichtungen für Leiterplatten
DE69802676T2 (de) Vorrichtung zum beschichten von plattenförmigen substraten, insbesondere von leiterplatten
DE59909758D1 (de) Vorrichtung zum laserbearbeiten von werkstücken
DE50209606D1 (de) Vorrichtung zum transport von flexiblem flachmaterial, insbesondere leiterplatten
DE68909262D1 (de) Vorrichtung für RF-Plasma-Verarbeitung.
DE3862516D1 (de) Vorrichtung zum positionstreuen transport von behaeltnissen.
TW200616012A (en) Method of processing substrate and chemical used in the same (Ⅰ)
EP1032023A3 (de) Verfahren sowie Anordnung zum kontinuierlichen Behandeln von Gegenständen
DE50014324D1 (de) Vorrichtung zum be- und entladen von substraten
ATE29863T1 (de) Verfahren und vorrichtung zum foerdern von gegenstaenden.
JPH06286844A (ja) 位置決め装置
FI933128A0 (fi) Menetelmä ja laite kontaktinystyjen muodostamiseksi kemiallisesti puolijohdekiekoille
KR980005333A (ko) 기판처리장치 및 기판처리시스템

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 820359

Country of ref document: ES