ES2079866T3 - Metodo para la fabricacion de celulas solares. - Google Patents

Metodo para la fabricacion de celulas solares.

Info

Publication number
ES2079866T3
ES2079866T3 ES92909375T ES92909375T ES2079866T3 ES 2079866 T3 ES2079866 T3 ES 2079866T3 ES 92909375 T ES92909375 T ES 92909375T ES 92909375 T ES92909375 T ES 92909375T ES 2079866 T3 ES2079866 T3 ES 2079866T3
Authority
ES
Spain
Prior art keywords
substrate
pct
solar cells
basic substances
carrier device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92909375T
Other languages
English (en)
Inventor
Jonas Hedstrom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institutet fur Mikroelectronik IM
Original Assignee
Institutet fur Mikroelectronik IM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institutet fur Mikroelectronik IM filed Critical Institutet fur Mikroelectronik IM
Application granted granted Critical
Publication of ES2079866T3 publication Critical patent/ES2079866T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0749Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • H01L31/0322Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

SE PRESENTA UN METODO PARA MANUFACTURAR CELULAS SOLARES, MAS ESPECIFICAMENTE CELULAS SOLARES DE PELICULA FINA, QUE COMPRENDEN UN SUBSTRATO SOBRE EL CUAL SE FORMA UNA ESTRUCTURA MULTICAPA QUE COMPRENDE LA DEPOSITACION DE UNA CAPA QUE CONSTA DE UN COMPUESTO DE VARIAS SUBSTANCIAS BASICAS, TALES COMO COBRE-INDIO-DISELINURO (CUINSE2) O UN COMPUESTO ESTRECHAMENTE RELACIONADO EN EL QUE EL COBRE (CU) Y EL INDIO (IN) PUEDAN REEMPLAZARSE TOTAL O PARCIALMENTE CON PLATA (AG) Y GALIO (GA) RESPECTIVAMENTE, Y EN EL QUE SE PUEDA REEMPLAZARSE TOTAL O PARCIALMENTE CON AZUFRE (S) Y TELERIO (TE), Y EN EL QUE LA CONCENTRACION DE LAS SUBSTANCIAS BASICAS EN DICHA CAPA PUEDE VARIAR. LA INVENCION SE CARACTERIZA EN QUE EL SUBSTRATO (1) SE COLOCA SOBRE EL INTERIOR (11) DE UN DISPOSITIVO PORTADOR GENERALMENTE CILINDRICO (11); EN QUE EL SUBSTRATO SE CALIENTE; EN QUE SE SUMINISTRAN FUENTES DE SUBSTANCIAS (13, 14, 15) PARA DEPOSITAR DICHAS SUBSTANCIAS BASICAS SOBRE EL SUBSTRATO; Y EN EL QUE UNO O MAS DE LAS SUBSTANCIAS BASICAS SE DEPOSITA HACIENDO PASAR LAS FUENTES RESPECTIVAS (14, 15) DE FORMA AXIAL A TRAVES DEL DISPOSITIVO PORTADOR CILINDRICO (10), MOVIENDO EL DISPOSITIVO PORTADOR CILINDRICO Y/O LAS FUENTES RESPECTIVAS (14 Y 15) MIENTRAS QUE SE HACE GIRAR EL DISPOSITIVO PORTADOR CILINDRICO. PARTICULARMENTE ADECUADAS SON LAS CELULAS SOLARES DE PELICULA FINA SOBRE LAS CUALES SE DEPOSITA CUINSE2.
ES92909375T 1991-04-24 1992-04-22 Metodo para la fabricacion de celulas solares. Expired - Lifetime ES2079866T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9101246A SE468372B (sv) 1991-04-24 1991-04-24 Foerfarande foer tillverkning av tunnfilmssolceller varvid deponering av skikt paa substrat sker i roterbar (cylindrisk) baeranordning

Publications (1)

Publication Number Publication Date
ES2079866T3 true ES2079866T3 (es) 1996-01-16

Family

ID=20382556

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92909375T Expired - Lifetime ES2079866T3 (es) 1991-04-24 1992-04-22 Metodo para la fabricacion de celulas solares.

Country Status (9)

Country Link
US (1) US5445973A (es)
EP (1) EP0581833B1 (es)
JP (1) JP3285353B2 (es)
AT (1) ATE130467T1 (es)
AU (1) AU1673992A (es)
DE (1) DE69206142T2 (es)
ES (1) ES2079866T3 (es)
SE (1) SE468372B (es)
WO (1) WO1992020103A1 (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6096998A (en) 1996-09-17 2000-08-01 Micron Technology, Inc. Method and apparatus for performing thermal reflow operations under high gravity conditions
JP3249408B2 (ja) * 1996-10-25 2002-01-21 昭和シェル石油株式会社 薄膜太陽電池の薄膜光吸収層の製造方法及び製造装置
IL125690A0 (en) * 1998-08-06 1999-04-11 Reiser Raphael Joshua Furnace for processing semiconductor wafers
DE19956735B4 (de) 1999-11-25 2008-08-21 Shell Erneuerbare Energien Gmbh Dünnfilmsolarzelle mit einer Chalkopyritverbindung und einer Titan und Sauerstoff enthaltenden Verbindung
US7194197B1 (en) * 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
FR2820241B1 (fr) * 2001-01-31 2003-09-19 Saint Gobain Substrat transparent muni d'une electrode
WO2005098968A1 (ja) * 2004-04-09 2005-10-20 Honda Motor Co., Ltd. カルコパイライト型薄膜太陽電池用光吸収層の製造方法
EP1880037B1 (en) * 2005-04-26 2022-06-15 First Solar, Inc. System and method for depositing a material on a substrate
US7931937B2 (en) * 2005-04-26 2011-04-26 First Solar, Inc. System and method for depositing a material on a substrate
US7910166B2 (en) * 2005-04-26 2011-03-22 First Solar, Inc. System and method for depositing a material on a substrate
US7968145B2 (en) * 2005-04-26 2011-06-28 First Solar, Inc. System and method for depositing a material on a substrate
US7927659B2 (en) * 2005-04-26 2011-04-19 First Solar, Inc. System and method for depositing a material on a substrate
US20060261817A1 (en) * 2005-05-02 2006-11-23 Poddany James J System and method for testing a photovoltaic module
US7968353B2 (en) 2008-04-15 2011-06-28 Global Solar Energy, Inc. Apparatus and methods for manufacturing thin-film solar cells
WO2011082179A1 (en) * 2009-12-28 2011-07-07 Global Solar Energy, Inc. Apparatus and methods of mixing and depositing thin film photovoltaic compositions
US10371244B2 (en) 2015-04-09 2019-08-06 United Technologies Corporation Additive manufactured gear for a geared architecture gas turbine engine

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1551850A (en) * 1924-08-29 1925-09-01 Georg E Schmidmer Device for metallizing textile fabrics and the like by means of disintegration of cathodes
US2729190A (en) * 1951-10-08 1956-01-03 Pawlyk Peter Apparatus for plating the interior of hollow objects
US2885997A (en) * 1956-02-06 1959-05-12 Heraeus Gmbh W C Vacuum coating
JPS52113379A (en) * 1976-03-19 1977-09-22 Hitachi Ltd Vacuum evaporation
PT73364B (en) * 1980-07-15 1982-08-19 Israel Melcer Sole of rigid material specially wood and shoes and boots equipped therewith
US4335266A (en) * 1980-12-31 1982-06-15 The Boeing Company Methods for forming thin-film heterojunction solar cells from I-III-VI.sub.2
CA1155798A (en) * 1981-03-30 1983-10-25 Shmuel Maniv Reactive deposition method and apparatus
US4508748A (en) * 1983-01-05 1985-04-02 Xis, Incorporated Manufacturing process for selenium photoreceptors
US4583488A (en) * 1984-03-23 1986-04-22 International Business Machines Corporation Variable axis rotary drive vacuum deposition system
SE456812B (sv) * 1986-01-09 1988-11-07 Ttn Ab Foerfarande och anordning foer att reducera friktionen mellan ett paa foeretraedesvis snoe och is glidande fordon och underlaget
US4904362A (en) * 1987-07-24 1990-02-27 Miba Gleitlager Aktiengesellschaft Bar-shaped magnetron or sputter cathode arrangement
DE3887689T2 (de) * 1987-07-24 1994-09-08 Amorphous Silicon Inc Substrat für solarzelle und herstellungsverfahren.
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US5154810A (en) * 1991-01-29 1992-10-13 Optical Coating Laboratory, Inc. Thin film coating and method

Also Published As

Publication number Publication date
EP0581833A1 (en) 1994-02-09
SE9101246D0 (sv) 1991-04-24
SE9101246L (sv) 1992-10-25
WO1992020103A1 (en) 1992-11-12
JPH06509213A (ja) 1994-10-13
ATE130467T1 (de) 1995-12-15
EP0581833B1 (en) 1995-11-15
US5445973A (en) 1995-08-29
AU1673992A (en) 1992-12-21
JP3285353B2 (ja) 2002-05-27
SE468372B (sv) 1992-12-21
DE69206142D1 (de) 1995-12-21
DE69206142T2 (de) 1996-05-30

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