ES2061399B1 - Procedimiento para la obtencion de capas finas de oxidos mediante bombardeo ionico y el uso de precursores metalicos volatiles - Google Patents

Procedimiento para la obtencion de capas finas de oxidos mediante bombardeo ionico y el uso de precursores metalicos volatiles

Info

Publication number
ES2061399B1
ES2061399B1 ES9300661A ES9300661A ES2061399B1 ES 2061399 B1 ES2061399 B1 ES 2061399B1 ES 9300661 A ES9300661 A ES 9300661A ES 9300661 A ES9300661 A ES 9300661A ES 2061399 B1 ES2061399 B1 ES 2061399B1
Authority
ES
Spain
Prior art keywords
procedure
oxides
thin layers
metal precursors
volatile metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES9300661A
Other languages
English (en)
Other versions
ES2061399A1 (es
Inventor
A R Gonzalez-Elipe
J P Espinos
A Fernandez
D Leinen
T R Beldarrain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Priority to ES9300661A priority Critical patent/ES2061399B1/es
Publication of ES2061399A1 publication Critical patent/ES2061399A1/es
Application granted granted Critical
Publication of ES2061399B1 publication Critical patent/ES2061399B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5027—Oxide ceramics in general; Specific oxide ceramics not covered by C04B41/5029 - C04B41/5051

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Secondary Cells (AREA)
  • Laminated Bodies (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

PROCEDIMIENTO PARA LA OBTENCION DE CAPAS FINAS DE OXIDOS MEDIANTE BOMBARDEO IONICO Y EL USO DE PRECURSORES METALICOS VOLATILES. PROCEDIMIENTO PARA LA OBTENCION DE CAPAS FINAS DE OXIDOS MEDIANTE BOMBARDEO CON ESPECIES IONICAS DE OXIGENO Y EL USO DE PRECURSORES VOLATILES, CONSISTENTE EN HACER LLEGAR SIMULTANEAMENTE SOBRE EL SUSTRATO DESEADO UN FLUJO DE UN VAPOR DEL METAL CUYO OXIDO SE QUIERE OBTENER Y UN HAZ DE ESPECIES OXIGENO IONIZADAS Y ACELERADAS HASTA CONSEGUIR LA ENERGIA CINETICA DESEADA. CON ESTE PROCEDIMIENTO PUEDEN OBTENERSE CAPAS DE ESPESOR CONTROLADO DE CUALQUIER TIPO DE OXIDO.
ES9300661A 1993-03-31 1993-03-31 Procedimiento para la obtencion de capas finas de oxidos mediante bombardeo ionico y el uso de precursores metalicos volatiles Expired - Fee Related ES2061399B1 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9300661A ES2061399B1 (es) 1993-03-31 1993-03-31 Procedimiento para la obtencion de capas finas de oxidos mediante bombardeo ionico y el uso de precursores metalicos volatiles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9300661A ES2061399B1 (es) 1993-03-31 1993-03-31 Procedimiento para la obtencion de capas finas de oxidos mediante bombardeo ionico y el uso de precursores metalicos volatiles

Publications (2)

Publication Number Publication Date
ES2061399A1 ES2061399A1 (es) 1994-12-01
ES2061399B1 true ES2061399B1 (es) 1995-06-16

Family

ID=8281306

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9300661A Expired - Fee Related ES2061399B1 (es) 1993-03-31 1993-03-31 Procedimiento para la obtencion de capas finas de oxidos mediante bombardeo ionico y el uso de precursores metalicos volatiles

Country Status (1)

Country Link
ES (1) ES2061399B1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SI23002A (sl) 2009-03-30 2010-09-30 Kemijski@inštitut Postopek za sol gel pripravo korozijsko zaščitnih prevlek za sončne zbiralnike

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0594568A1 (en) * 1989-08-07 1994-05-04 The Boc Group, Inc. Method of depositing optical oxide coatings at enhanced rates
JP2605148B2 (ja) * 1989-10-20 1997-04-30 財団法人国際超電導産業技術研究センター 酸化物薄膜の製造方法
JP3078853B2 (ja) * 1991-01-01 2000-08-21 忠弘 大見 酸化膜形成方法

Also Published As

Publication number Publication date
ES2061399A1 (es) 1994-12-01

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20000707