ES2056847T3 - Procedimiento para ensayar redes de lineas. - Google Patents

Procedimiento para ensayar redes de lineas.

Info

Publication number
ES2056847T3
ES2056847T3 ES88104509T ES88104509T ES2056847T3 ES 2056847 T3 ES2056847 T3 ES 2056847T3 ES 88104509 T ES88104509 T ES 88104509T ES 88104509 T ES88104509 T ES 88104509T ES 2056847 T3 ES2056847 T3 ES 2056847T3
Authority
ES
Spain
Prior art keywords
network
procedure
conductor
line networks
testing line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES88104509T
Other languages
English (en)
Inventor
Matthias Dr Brunner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of ES2056847T3 publication Critical patent/ES2056847T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G01R31/306—Contactless testing using electron beams of printed or hybrid circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Data Exchanges In Wide-Area Networks (AREA)
  • Two-Way Televisions, Distribution Of Moving Picture Or The Like (AREA)
  • Maintenance And Management Of Digital Transmission (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PROCEDIMIENTO CONOCIDO PARA LA PRUEBA DE ESTRUCTURAS DE CONDUCTORES ESTAN UTILIZABLE SIN ERROR SOLO CUANDO LA CARGA PRODUCIDA CON ASISTENCIA DE UN HAZ DE ELECTRONES QUEDA ACUMULADO EN LA ESTRUCTURA DURANTE EL PROCEDIMIENTO DE MEDICION COMPLETO. PORQUE NO TODAS LAS PLACAS DE CIRCUITO IMPRESO Y MODULOS DE CABLEADO MUESTRAN RESISTENCIAS DEL AISLAMIENTO SUFICIENTES / ALTOS, SE PUEDEN DESCARGAR PARTES DE LA ESTRUCTURA A TRAVES DE CORRIENTES DE FUGA HASTA QUE UNA SEÑAL DE ELECTRONES SECUNDARIOS MEDIDO EN LOS CAMPOS EN RESPECTO, ENGAÑAR UNA INTERRUPCION QUE NO EXISTE EN EFECTIVO. PARA LA COMPENSACION DE LA PERDIDA DE CARGA SE PROPONE CONFORME AL INVENTO, QUE SE EXPLORE LA ESTRUCTURA DE CONDUCTOR CON UN SEGUNDO HAZ DE ELECTRONES CON UNA SUPERFICIE GRANDE DURANTE LA MEDICION.
ES88104509T 1987-04-10 1988-03-21 Procedimiento para ensayar redes de lineas. Expired - Lifetime ES2056847T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3712176 1987-04-10

Publications (1)

Publication Number Publication Date
ES2056847T3 true ES2056847T3 (es) 1994-10-16

Family

ID=6325322

Family Applications (1)

Application Number Title Priority Date Filing Date
ES88104509T Expired - Lifetime ES2056847T3 (es) 1987-04-10 1988-03-21 Procedimiento para ensayar redes de lineas.

Country Status (7)

Country Link
US (1) US4841242A (es)
EP (1) EP0285896B1 (es)
JP (1) JPS63262573A (es)
AT (1) ATE109570T1 (es)
CA (1) CA1277773C (es)
DE (1) DE3850900D1 (es)
ES (1) ES2056847T3 (es)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4943769A (en) * 1989-03-21 1990-07-24 International Business Machines Corporation Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
US5159752A (en) * 1989-03-22 1992-11-03 Texas Instruments Incorporated Scanning electron microscope based parametric testing method and apparatus
US4978908A (en) * 1989-03-22 1990-12-18 Texas Instruments Incorporated Scanning electron microscope based parametric testing method and apparatus
EP0402499A1 (de) * 1989-06-13 1990-12-19 Siemens Aktiengesellschaft Verfahren zur Prüfung einer Leiterplatte mit einer Teilchensonde
EP0429739B1 (en) * 1989-11-28 1993-10-27 International Business Machines Corporation Method for photoemission inspection of via studs in integrated circuit packages
US5039938A (en) * 1990-06-21 1991-08-13 Hughes Aircraft Company Phosphor glow testing of hybrid substrates
EP0490154A3 (en) * 1990-12-07 1992-09-30 Siemens Aktiengesellschaft Method for determining the charge of a sample region
US5258706A (en) * 1991-10-16 1993-11-02 Siemens Aktiengesellschaft Method for the recognition of testing errors in the test of microwirings
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination
DE4305672A1 (de) * 1993-02-24 1994-08-25 Integrated Circuit Testing Verfahren und Vorrichtung zum Testen von Netzwerken auf Kurzschlüsse und/oder Unterbrechungen
US8921406B2 (en) 2005-08-21 2014-12-30 AbbVie Deutschland GmbH & Co. KG 5-ring heteroaromatic compounds and their use as binding partners for 5-HT5 receptors

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618424A (en) * 1979-07-23 1981-02-21 Nippon Telegr & Teleph Corp <Ntt> Apparatus for electron beam lithography
US4417203A (en) * 1981-05-26 1983-11-22 International Business Machines Corporation System for contactless electrical property testing of multi-layer ceramics
JPS60741A (ja) * 1983-06-16 1985-01-05 Toshiba Mach Co Ltd 電子線露光方法
JPS60130121A (ja) * 1983-12-16 1985-07-11 Toshiba Mach Co Ltd 電子ビ−ム露光方法
JPS60173834A (ja) * 1984-02-14 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> マルチ荷電ビ−ム露光装置
EP0166912B1 (de) * 1984-06-01 1990-08-29 Siemens Aktiengesellschaft Verfahren zur elektrischen Prüfung von Mikroverdrahtungen mit Hilfe von Korpuskularsonden
US4985681A (en) * 1985-01-18 1991-01-15 Siemens Aktiengesellschaft Particle beam measuring method for non-contact testing of interconnect networks
US4707609A (en) * 1985-01-31 1987-11-17 Canon Kabushiki Kaisha Exposure apparatus and method
US4755748A (en) * 1985-06-05 1988-07-05 Bell Communications Research, Inc. Method and apparatus for analyzing semiconductor devices using charge-sensitive electron-beam-injected-carrier microscopy
US4733174A (en) * 1986-03-10 1988-03-22 Textronix, Inc. Circuit testing method and apparatus

Also Published As

Publication number Publication date
EP0285896A2 (de) 1988-10-12
DE3850900D1 (de) 1994-09-08
EP0285896A3 (en) 1990-08-29
US4841242A (en) 1989-06-20
ATE109570T1 (de) 1994-08-15
EP0285896B1 (de) 1994-08-03
JPS63262573A (ja) 1988-10-28
CA1277773C (en) 1990-12-11

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