ES2046653T3 - Vaporizador en serie para instalaciones de metalizacion en vacio. - Google Patents

Vaporizador en serie para instalaciones de metalizacion en vacio.

Info

Publication number
ES2046653T3
ES2046653T3 ES199090122831T ES90122831T ES2046653T3 ES 2046653 T3 ES2046653 T3 ES 2046653T3 ES 199090122831 T ES199090122831 T ES 199090122831T ES 90122831 T ES90122831 T ES 90122831T ES 2046653 T3 ES2046653 T3 ES 2046653T3
Authority
ES
Spain
Prior art keywords
ducts
support body
evaporators
pipe
series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES199090122831T
Other languages
English (en)
Inventor
Jochen Heinz
Thomas Dr. Krug
Klemens Ruebsam
Hans Kessler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of ES2046653T3 publication Critical patent/ES2046653T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chair Legs, Seat Parts, And Backrests (AREA)

Abstract

EN UN EVAPORADOR EN SERIE PARA INSTALACIONES DE EVAPORACION EN VACIO, CON VARIOS EVAPORADORES (5) CONTROLABLES EN LA POTENCIA, CALENTADOS MEDIANTE EL PASO DE CORRIENTE, FIJADOS SOBRE CONDUCTOS DE ALIMENTACION ELECTRICA (3, 4) CONFIGURADOS EN FORMA DE TUBO, ESTANDO RETENIDOS LOS CONDUCTOS (3, 4) EN FORMA DE TUBO POR UN CUERPO DE SOPORTE (6) CONDUCTOR ELECTRICO, QUE SE EXTIENDE SOBRE TODA LA LONGITUD DEL EVAPORADOR EN SERIE Y ESTANDO CONECTADOS LOS CONDUCTOS DE UNA POLARIDAD DE FORMA CONDUCTORA ELECTRICA CON EL CUERPO DE SOPORTE (6), MIENTRAS QUE LOS CONDUCTOS (4) DE LA OTRA POLARIDAD ESTAN CONDUCIDOS AISLADOS POR EL CUERPO DE SOPORTE (6) Y ESTAN CONECTADOS CON ALAMBRES CONDUCTORES (7) DISPUESTOS AISLADOS, LOS CONDUCTOS (4) EN FORMA DE TUBO CONDUCIDOS CON JUEGO (A, B) A TRAVES DEL CUERPO (6) SON IMPULSADOS POR ELEMENTOS DE RESORTE (8), QUE ACTUAN APROXIMADAMENTE PARALELOS A LAS EXTENSIONES LONGITUDINALES DE LOS EVAPORADORES (5) Y PRESIONAN A LAS PARTES DE CABEZA (9) DE LOS CONDUCTOS (4) EN LAS SUPERFICIES FRONTALES (10) DE LOS EVAPORADORES (5) DIRIGIDAS HACIA AQUELLOS, ESTANDO LOS ELEMENTOS DE RESORTE (8) MISMOS RETENIDOS Y CONDUCIDOS AISLADOS ELECTRICAMENTE FRENTE AL CUERPO DE SOPORTE (6) O ESTANDO FORMADOS POR MATERIAL AISLANTE, Y LOS ALAMBRES CONDUCTORES (7) CONECTADOS CON ESTOS CONDUCTOS (4) SON CONDUCTORES RECORRIDOS POR REFRIGERANTE O ESTAN CONFIGURADOS COMO MANGUERAS DE REFRIGERACION (11) O TUBOS DE REFRIGERACION, QUE ESTAN TENDIDOS PARALELOS A LOS ALAMBRES DE LA LINEA (7) Y DESEMBOCAN EN CAMARAS O CANALES (12), QUE ESTAN PREVISTOS EN LOS CONDUCTOS (4).
ES199090122831T 1990-05-14 1990-11-29 Vaporizador en serie para instalaciones de metalizacion en vacio. Expired - Lifetime ES2046653T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4015385A DE4015385A1 (de) 1990-05-14 1990-05-14 Reihenverdampfer fuer vakuumbedampfungsanlagen

Publications (1)

Publication Number Publication Date
ES2046653T3 true ES2046653T3 (es) 1994-02-01

Family

ID=6406320

Family Applications (1)

Application Number Title Priority Date Filing Date
ES199090122831T Expired - Lifetime ES2046653T3 (es) 1990-05-14 1990-11-29 Vaporizador en serie para instalaciones de metalizacion en vacio.

Country Status (5)

Country Link
US (1) US5068915A (es)
EP (1) EP0456892B1 (es)
JP (1) JPH04228563A (es)
DE (2) DE4015385A1 (es)
ES (1) ES2046653T3 (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4123342C2 (de) * 1991-07-15 1999-08-19 Leybold Ag Reihenverdampfer für Vakuumbedampfungsanlagen
DE19632581B4 (de) * 1996-08-13 2007-11-22 Applied Materials Gmbh & Co. Kg Reihenverdampfer für Vakuumbedampfungsanlagen
DE19735352A1 (de) * 1997-03-06 1998-09-10 Kempten Elektroschmelz Gmbh Keramischer Verdampfer mit einer Verjüngung der Verdampferenden
WO2007012342A1 (de) * 2005-07-27 2007-02-01 Applied Materials Gmbh & Co. Kg Vorrichtung zum einspannen und positionieren eines verdampferschiffchens
KR101353567B1 (ko) * 2006-04-28 2014-01-22 가부시키가이샤 한도오따이 에네루기 켄큐쇼 전극 커버 및 증착장치
DE102012108441A1 (de) * 2012-09-11 2014-03-13 Schmid Vacuum Technology Gmbh Folienbeschichtungsanlage
KR102086549B1 (ko) * 2013-05-06 2020-03-10 삼성디스플레이 주식회사 증착원 어셈블리

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2554902A (en) * 1948-03-25 1951-05-29 Nat Res Corp Thermionic discharge device control
US2996418A (en) * 1957-06-05 1961-08-15 Gen Motors Corp Method and apparatus for vapor depositing thin films
US2969448A (en) * 1959-03-03 1961-01-24 Continental Can Co Heater vaporizer element support
DE1237401B (de) * 1960-11-15 1967-03-23 Philips Nv Einklemmvorrichtung zum Einklemmen der Enden eines aus hochschmelzendem sproedem Material bestehenden langgestreckten Gegenstandes, der hohen Temperaturen ausgesetzt wird, vorzugsweise eines stabfoermigen Heizelementes zum Vakuumaufdampfen von Metallschichten
US3117887A (en) * 1961-11-13 1964-01-14 Republic Steel Corp Apparatus and procedure for evaporating metal in vacuum metalizing
US3231846A (en) * 1964-01-06 1966-01-25 Richard P Radke Support apparatus for resistance heated source holders
US3372671A (en) * 1965-05-26 1968-03-12 Westinghouse Electric Corp Apparatus for producing vapor growth of silicon crystals
US3387116A (en) * 1965-10-08 1968-06-04 Contiental Can Company Inc Contacts for vaporizers employed in vacuum metallizing
DE2402111C3 (de) * 1974-01-17 1979-01-11 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Reihenverdampfer für Vakuumbedampfungsanlagen
DE3316554C1 (de) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien

Also Published As

Publication number Publication date
DE4015385A1 (de) 1991-11-21
EP0456892B1 (de) 1993-10-20
US5068915A (en) 1991-11-26
JPH04228563A (ja) 1992-08-18
DE59003159D1 (de) 1993-11-25
EP0456892A1 (de) 1991-11-21

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