US3231846A - Support apparatus for resistance heated source holders - Google Patents

Support apparatus for resistance heated source holders Download PDF

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US3231846A
US3231846A US335913A US33591364A US3231846A US 3231846 A US3231846 A US 3231846A US 335913 A US335913 A US 335913A US 33591364 A US33591364 A US 33591364A US 3231846 A US3231846 A US 3231846A
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source
clamping block
clamping blocks
holders
stationary
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US335913A
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Richard P Radke
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Definitions

  • source holder varies in configuration with the particular operation to be performed. For example, most manufacturers of source holders ofier more than 100 different types of source holders.
  • the source holder in turn must be supported and means must be provided to connect the source holder in series with an electrical power supply.
  • Prior art support or clamping devices for the source holders have been custom made to accommodate only 'one or a very limited number of source holders.
  • the prior art supports for source holders generally have been constructed by "bending heavy copper straps in the appropriate configuration and then bolting them directly to the electrical leads passing through the vacuum chamber. The ends of the heavy copper straps that are to support the source holder are then drilled and tapped to accommodate individual appropriate clamps and the source holder is supported by the clamps.
  • The'support for source holders is usable only for the size source holder for which it is de signed and it is generally restricted to the vacuum system in which it is mounted.
  • the present invention overcomes the disadvantages and limitations of the prior art supports for source holders by utilizing a stationary clamping block fixed to one end of a base block and at least one movable clamping block capable of being positioned opposite the stationary clamping block at various distances from the stationary clamping block. Both the stationary and the movable clamping blocks have means for clamping one end of the source holder in a variety of positions on the top and side of the clamping blocks.
  • FIGURE 1 is a perspective view of the present invention
  • FIGURE 2 is a perspective view of the present invention with two source holders in position;
  • FIGURE 3 is a perspective view of the present invention with one of the movable clamping blocks moved toward the stationary block to accommodate an upright source holder.
  • the base preferably is metal.
  • a stationary clamping block 11 is fixed to one end of the base 18.
  • the clamping block 11 is constructed of an electrically conductive material and has V grooves 12 in the top and side thereof. The grooves 12 are cut to accommodate the wire type source holders (shown in FIGURE 2).
  • Clamps 13, 14, 15 and 16 are removably positioned on the top and sides of clamping block 11.
  • the method of positioning the clamps is a matter of choice, however, metal screws inserted in tapped holes in the clamping block 11 have proven to be very satisfactory. It should be noted that clamps 13 and 16 may be lowered by utilizing the two lowest tapped holes in the stationary block 11.
  • Movable clamping blocks 17 and 18 are separated from the base 19 by the supporting spacers 19.
  • the spacers 19 are electrical insulating supports commonly used in the art.
  • the base 10 has holes 20 to accommodatescrews (not shown) which pass through the holes 20 into tapped holes (not shown) in the bottom of the spacers 19. Therefore, the spacers 19 and consequently the clamping blocks 17 and 18 can be moved to change the distance between the movable clamping blocks 17 and 18 and the stationary block 11.
  • the clamping blocks 17 and 18 also have V grooves on the top and sides thereof to accommodate the wire type holders.
  • Clamping blocks 17 and 18 have clamps 2t 21, 22 and 23, which are similar to clamps 13, 14.15 and 16.
  • the clamps on the movable clamping blocks 17 and 18 can be held in position in the same manner that the clamps on the stationary clamping block 11 are held in position.
  • a shield 24 is positioned between the two movable clamping blocks and extends from one end of the base 10 to the slot provided in the stationary clamping block 11.
  • a slot is provided in the base plate to accommodate the shield 24.
  • the base can have three slots in each side to allow the positioning of the movable clamping blocks 17 and 18. Also the number of spacers 19 is optional.
  • a tapped hole 25 is provided in the stationary clamping block 11 such that an electrical connection can be made to the clamping block 11. Similar tapped holes (not shown) can be provided in the movable clamping blocks 17 and 18 to accommodate other electrical connections. The electrical connection can be made also directly to one or more of the clamps on each of the clamping blocks.
  • a typical dimple type source holder 26 has one clamped to the stationary clamping block 11 and the other end clamped to the movable clamping block 17. Also a typical wire type source holder 27 has one end clamped to the stationary clamping block 11 and the other end clamped to the movable clamping block 18.
  • one material can be evaporated from the source holder 26 and another material evaporated from the source holder 27.
  • the shield 24 shields the material in one source holder from the vapors given oii by the material in the other source holder.
  • the material in the source holders 26 and 27 can be evaporated at the same time or at different times.
  • the shield 24 can be removed and both movable clamping blocks 17 and 18 used to support one end of the Wide source holder. In such case only one electrical connection need be made to either one of the movable clamping blocks.
  • a single source holder 28 is held by the side clamps 13 and 20. Note thatclamp 13 is in the lower position to receive and make electrical connection with the bottom lead 29 from the source holder 28 and clamping block 17 has been moved closer to the stationary clamping block 11 in order to support and make electrical connection with the top lead 30 from the source holder 28. Also a boat type source holder 31 is held by the side clamps 16 and 31.
  • the present invention can support many different types of source holders yet the present invention is very inexpensive to manufacture. Also the present invention can be transferred from one vacuum system to another merely by disconnecting the 3 electrical leads (not shown) to the clamping blocks 11, 17 and 18.
  • the materials used to construct the present invention can be any of the normal materials used inside of vacuum chambers. These materials are well known to those skilled in the art.
  • a device for holding a resistance heated source holder comprising:
  • said base having openings selectively therein, thereby permitting said movable clamping blocks to be fastened to said base in a variety of locations;

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

Jan. 25, 1966 v R. P. RADKE SUPPORT APPARATUS FOR RESISTANCE HEATED SOURCE HOLDERS Filed Jan. 6, 1964 2 Sheets-Sheet 1 INVENTOR. RICHARD P RADKE R. P. RADKE Jan. 25, 1966 SUPPORT APPARATUS FOR RESISTANCE HEATED SOURCE HOLDERS 2 Sheets-Sheet 2 Filed Jan. 6, 1964 INVENTOR. RICHARD P RADKE AGENT United States Patent u 3,231,846 SUPPGRT APPARATUS FUR RESISTANCE HEATED SQURCE HOLDERS Richard P. Radke, 108 18 Reseda Blvd, Northridge, Calif. Filed Jan. 6, 1964, Ser. No. 335,913 1 Claim. (Cl. 339-32) This invention relates to vacuum evaporation apparatus and more particularly to a versatile support apparatus for resistance heated source holders.
The art of vacuum evaporation requires a means of providing extremely high temperatures to a source of material to be evaporated. Therefore, a resistance type source holder is employed for many applications. The
source holder varies in configuration with the particular operation to be performed. For example, most manufacturers of source holders ofier more than 100 different types of source holders. The source holder in turn must be supported and means must be provided to connect the source holder in series with an electrical power supply.
Prior art support or clamping devices for the source holders have been custom made to accommodate only 'one or a very limited number of source holders. The prior art supports for source holders generally have been constructed by "bending heavy copper straps in the appropriate configuration and then bolting them directly to the electrical leads passing through the vacuum chamber. The ends of the heavy copper straps that are to support the source holder are then drilled and tapped to accommodate individual appropriate clamps and the source holder is supported by the clamps.
The'support for source holders, described above, is usable only for the size source holder for which it is de signed and it is generally restricted to the vacuum system in which it is mounted.
The present invention overcomes the disadvantages and limitations of the prior art supports for source holders by utilizing a stationary clamping block fixed to one end of a base block and at least one movable clamping block capable of being positioned opposite the stationary clamping block at various distances from the stationary clamping block. Both the stationary and the movable clamping blocks have means for clamping one end of the source holder in a variety of positions on the top and side of the clamping blocks.
The objects and advantages of the present invention will be more fully explained in the following description, with reference to the accompanying drawings, in which:
FIGURE 1 is a perspective view of the present invention;
FIGURE 2 is a perspective view of the present invention with two source holders in position; and
FIGURE 3 is a perspective view of the present invention with one of the movable clamping blocks moved toward the stationary block to accommodate an upright source holder.
Referring now to FIGURE 1, there is shown a base 10. The base preferably is metal. A stationary clamping block 11 is fixed to one end of the base 18. The clamping block 11 is constructed of an electrically conductive material and has V grooves 12 in the top and side thereof. The grooves 12 are cut to accommodate the wire type source holders (shown in FIGURE 2).
Clamps 13, 14, 15 and 16 are removably positioned on the top and sides of clamping block 11. The method of positioning the clamps is a matter of choice, however, metal screws inserted in tapped holes in the clamping block 11 have proven to be very satisfactory. It should be noted that clamps 13 and 16 may be lowered by utilizing the two lowest tapped holes in the stationary block 11.
3,231,845 Patented Jan. 25, 1966 Movable clamping blocks 17 and 18 are separated from the base 19 by the supporting spacers 19. The spacers 19 are electrical insulating supports commonly used in the art.
The base 10 has holes 20 to accommodatescrews (not shown) which pass through the holes 20 into tapped holes (not shown) in the bottom of the spacers 19. Therefore, the spacers 19 and consequently the clamping blocks 17 and 18 can be moved to change the distance between the movable clamping blocks 17 and 18 and the stationary block 11.
The clamping blocks 17 and 18 also have V grooves on the top and sides thereof to accommodate the wire type holders. Clamping blocks 17 and 18 have clamps 2t 21, 22 and 23, which are similar to clamps 13, 14.15 and 16. The clamps on the movable clamping blocks 17 and 18 can be held in position in the same manner that the clamps on the stationary clamping block 11 are held in position.
A shield 24 is positioned between the two movable clamping blocks and extends from one end of the base 10 to the slot provided in the stationary clamping block 11. Preferably a slot is provided in the base plate to accommodate the shield 24.
Instead of the holes 20, the base can have three slots in each side to allow the positioning of the movable clamping blocks 17 and 18. Also the number of spacers 19 is optional.
A tapped hole 25 is provided in the stationary clamping block 11 such that an electrical connection can be made to the clamping block 11. Similar tapped holes (not shown) can be provided in the movable clamping blocks 17 and 18 to accommodate other electrical connections. The electrical connection can be made also directly to one or more of the clamps on each of the clamping blocks.
Referring now to FIGURE 2, a typical dimple type source holder 26 has one clamped to the stationary clamping block 11 and the other end clamped to the movable clamping block 17. Also a typical wire type source holder 27 has one end clamped to the stationary clamping block 11 and the other end clamped to the movable clamping block 18.
It can now be seen that one material can be evaporated from the source holder 26 and another material evaporated from the source holder 27. The shield 24 shields the material in one source holder from the vapors given oii by the material in the other source holder.
When the movable clamping blocks 17 and 18 are electrically connected to individual power supplies and the stationary clamping block 11 is electrically connected to a common ground, the material in the source holders 26 and 27 can be evaporated at the same time or at different times.
When a wide source holder is employed, the shield 24 can be removed and both movable clamping blocks 17 and 18 used to support one end of the Wide source holder. In such case only one electrical connection need be made to either one of the movable clamping blocks.
Referring now to FIGURE 3, a single source holder 28 is held by the side clamps 13 and 20. Note thatclamp 13 is in the lower position to receive and make electrical connection with the bottom lead 29 from the source holder 28 and clamping block 17 has been moved closer to the stationary clamping block 11 in order to support and make electrical connection with the top lead 30 from the source holder 28. Also a boat type source holder 31 is held by the side clamps 16 and 31.
It can be readily seen that the present invention can support many different types of source holders yet the present invention is very inexpensive to manufacture. Also the present invention can be transferred from one vacuum system to another merely by disconnecting the 3 electrical leads (not shown) to the clamping blocks 11, 17 and 18.
The materials used to construct the present invention can be any of the normal materials used inside of vacuum chambers. These materials are well known to those skilled in the art.
Although the present invention has been described with reference to the preferred embodiment, it is understood that changes can be made without departing from the scope of the invention and the scope of the invention is set forth in the following claim.
What I claim is:
A device for holding a resistance heated source holder, comprising:
an electrically conductive base;
an electrically conductive stationary clamping block in electrical contact with and fixed to one end of said base;
means for connecting said stationary clamping block to a source of electrical power;
two movable electrically conductive clamping blocks attached to and insulated from said base, said movable clamping blocks being positioned such that a plurality of resistance heated source holders can be positioned between said stationary clamping block and said movable clamping blocks means for individually connecting said movable clamping blocks to a source of electrical power;
said base having openings selectively therein, thereby permitting said movable clamping blocks to be fastened to said base in a variety of locations;
a plurality of top and side clamps individually associated with said stationary and each of said two mov- References Cited by the Examiner UNITED STATES PATENTS,
224,612 2/1880 Sawyer m 219- 458,115 8/1891 Thomson 219 1'53 496,592 5/1893 Burton 219153 1,672,996 6/ 1928 Wilson 269-45 2,879,059 3/ 1959 Sandefur 269105 2,994,760 8/1961 Pecoraro et a1. 269394 FOREIGN PATENTS 801,326 l/ll Germany.
OTHER REFERENCES Universal Compound Angle Plate, Universal Vise &
Tool Co., pamphlet, 1943, pp. 1-4. (Copy in 219-159.)
ANTHONY BARTIS, Acting Primary Examiner.
RICHARD M. WOOD, MILTON O. HIRSHF IE LD,
Examiners.
C. L. ALBRITTON, Assistant Examiner.
US335913A 1964-01-06 1964-01-06 Support apparatus for resistance heated source holders Expired - Lifetime US3231846A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3517161A (en) * 1967-09-13 1970-06-23 Bendix Corp Sublimation unit and system
US3598958A (en) * 1969-11-26 1971-08-10 Sylvania Electric Prod Resistance heated evaporation boat
US5068915A (en) * 1990-05-14 1991-11-26 Leybold Aktiengesellschaft Series evaporator for vacuum vapor-deposition apparatus
US5261964A (en) * 1991-12-03 1993-11-16 Leybold Aktiengesellschaft Evaporator boat for an apparatus for coating substrates
US5410631A (en) * 1993-09-10 1995-04-25 Advanced Ceramics Corporation Clamp assembly for a vaporization boat
US5444813A (en) * 1992-03-31 1995-08-22 Heraeus Noblelight Gmbh Infrared lamp mounting arrangement using spaced mounting holes enabling desired positioning thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US224612A (en) * 1880-02-17 sawyer
US458115A (en) * 1891-08-18 Method of electric bending and straightening
US496592A (en) * 1893-05-02 Working brass by electricity
US1672996A (en) * 1927-05-05 1928-06-12 Frank J Wilson Welder's table and clamp
DE801326C (en) * 1948-10-02 1951-01-29 Hubert Roettges Device for clamping objects in any position to each other
US2879059A (en) * 1958-03-13 1959-03-24 Flotion Ind Mobile workholding device
US2994760A (en) * 1959-01-29 1961-08-01 Ref Mfg Corp Ovens

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US224612A (en) * 1880-02-17 sawyer
US458115A (en) * 1891-08-18 Method of electric bending and straightening
US496592A (en) * 1893-05-02 Working brass by electricity
US1672996A (en) * 1927-05-05 1928-06-12 Frank J Wilson Welder's table and clamp
DE801326C (en) * 1948-10-02 1951-01-29 Hubert Roettges Device for clamping objects in any position to each other
US2879059A (en) * 1958-03-13 1959-03-24 Flotion Ind Mobile workholding device
US2994760A (en) * 1959-01-29 1961-08-01 Ref Mfg Corp Ovens

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3517161A (en) * 1967-09-13 1970-06-23 Bendix Corp Sublimation unit and system
US3598958A (en) * 1969-11-26 1971-08-10 Sylvania Electric Prod Resistance heated evaporation boat
US5068915A (en) * 1990-05-14 1991-11-26 Leybold Aktiengesellschaft Series evaporator for vacuum vapor-deposition apparatus
US5261964A (en) * 1991-12-03 1993-11-16 Leybold Aktiengesellschaft Evaporator boat for an apparatus for coating substrates
US5444813A (en) * 1992-03-31 1995-08-22 Heraeus Noblelight Gmbh Infrared lamp mounting arrangement using spaced mounting holes enabling desired positioning thereof
US5410631A (en) * 1993-09-10 1995-04-25 Advanced Ceramics Corporation Clamp assembly for a vaporization boat

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