ES2035374T3 - Metodo para calentar un tubo de cristal de cuarzo. - Google Patents

Metodo para calentar un tubo de cristal de cuarzo.

Info

Publication number
ES2035374T3
ES2035374T3 ES198989100793T ES89100793T ES2035374T3 ES 2035374 T3 ES2035374 T3 ES 2035374T3 ES 198989100793 T ES198989100793 T ES 198989100793T ES 89100793 T ES89100793 T ES 89100793T ES 2035374 T3 ES2035374 T3 ES 2035374T3
Authority
ES
Spain
Prior art keywords
crystal tube
quartz crystal
quartz
tube
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES198989100793T
Other languages
English (en)
Inventor
Gotaro Cno Yokohama Works Of Tanaka
Hiroshi Cno Yokohama Works Of Suganuma
Akira Cno Yokohama Works Of Urano
Masahiro Cno Yokohama Works Of Takagi
Shun'ichi Cno Yokohama Works Of Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of ES2035374T3 publication Critical patent/ES2035374T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/043—Heating devices specially adapted for re-forming tubes or rods in general, e.g. burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01876—Means for heating tubes or rods during or immediately prior to deposition, e.g. electric resistance heaters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Furnace Details (AREA)

Abstract

UN METODO DE CALENTAMIENTO DE UN TUBO DE CRISTAL DE CUARZO (1) CON UN MICROONDAS, QUE COMPRENDE EL ABASTECIMIENTO DE UN GAS (3) PARA GENERACION DE PLASMA EN EL TUBO DE CRISTAL DE CUARZO (1) APLICANDO UN MICROONDAS AL TUBO DE CRISTAL DE CUARZO (1) ASI COMO PARA GENERAR UN PLASMA CALIENTE (4) EN EL TUBO DE CRISTAL DE CUARZO (1) Y PARA PRECALENTAR EL TUBO DE CRISTAL DE CUARZO (1), Y ENTONCES INTERRUMPIENDO LA APLICACION DE MICROONDAS, Y ASI HACER QUE EL TUBO DE CRISTAL DE CUARZO QUE ABSORBE LOS MICROONDAS. CON ESTE METODO EL TUBO DE CRISTAL DE CUARZO (1) SE PUEDE CALENTAR A UNA TEMPERATURA SUFICIENTE DE UNA MANERA M,UY RAPIDA Y CLARA.
ES198989100793T 1988-01-18 1989-01-18 Metodo para calentar un tubo de cristal de cuarzo. Expired - Lifetime ES2035374T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63007008A JPH01183432A (ja) 1988-01-18 1988-01-18 石英ガラス管の加熱方法

Publications (1)

Publication Number Publication Date
ES2035374T3 true ES2035374T3 (es) 1993-04-16

Family

ID=11654031

Family Applications (1)

Application Number Title Priority Date Filing Date
ES198989100793T Expired - Lifetime ES2035374T3 (es) 1988-01-18 1989-01-18 Metodo para calentar un tubo de cristal de cuarzo.

Country Status (7)

Country Link
US (1) US4900894A (es)
EP (1) EP0325227B1 (es)
JP (1) JPH01183432A (es)
KR (1) KR910002396B1 (es)
AU (1) AU607573B2 (es)
DE (1) DE68902995T2 (es)
ES (1) ES2035374T3 (es)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2234655A (en) * 1989-07-07 1991-02-06 Charles * Carter Arthur Heating by gas ionization
JP2958086B2 (ja) * 1990-09-18 1999-10-06 奈良精機株式会社 注射針の熔融処理装置
GB9414561D0 (en) * 1994-07-19 1994-09-07 Ea Tech Ltd Method of and apparatus for microwave-plasma production
US5847355A (en) * 1996-01-05 1998-12-08 California Institute Of Technology Plasma-assisted microwave processing of materials
US5979190A (en) * 1997-09-29 1999-11-09 Lucent Technologies Inc. Method for manufacturing an article comprising a refractory a dielectric body
US6041623A (en) * 1998-08-27 2000-03-28 Lucent Technologies Inc. Process for fabricating article comprising refractory dielectric body
PL193607B1 (pl) * 1999-06-17 2007-02-28 Ustav Chemickych Procesu Akade Sposób obróbki cieplnej materiałów szklanych orazmateriałów naturalnych zwłaszcza pochodzenia wulkanicznego i urządzenie do obróbki cieplnej materiałów szklanych oraz materiałów naturalnych zwłaszcza pochodzenia wulkanicznego
US6408649B1 (en) * 2000-04-28 2002-06-25 Gyrotron Technology, Inc. Method for the rapid thermal treatment of glass and glass-like materials using microwave radiation
US6826929B2 (en) * 2001-09-19 2004-12-07 Premakaran T. Boaz Method for simultaneously heating and cooling glass to produce tempered glass
US20030070452A1 (en) * 2001-10-12 2003-04-17 Alcatel Process for online spheroidization of quartz and silica particles
US7164095B2 (en) * 2004-07-07 2007-01-16 Noritsu Koki Co., Ltd. Microwave plasma nozzle with enhanced plume stability and heating efficiency
US20080202522A1 (en) * 2007-02-23 2008-08-28 General Electric Company Setting mandatory mechanical ventilation parameters based on patient physiology
US20080230062A1 (en) * 2007-03-23 2008-09-25 General Electric Company Setting expiratory time in mandatory mechanical ventilation based on a deviation from a stable condition of exhaled gas volumes
KR102557566B1 (ko) * 2022-11-25 2023-07-21 (주)태성아이엠티 환원 그래핀을 제조하기 위한 습식 마이크로웨이브 장치
KR102557565B1 (ko) * 2022-11-25 2023-07-21 (주)태성아이엠티 환원 그래핀을 제조하기 위한 건식 마이크로웨이브 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2288958A1 (fr) * 1974-10-21 1976-05-21 Desmarquest & Cec Installation pour le traitement par zone de produits de forme allongee
GB1603949A (en) * 1978-05-30 1981-12-02 Standard Telephones Cables Ltd Plasma deposit
DE3217839A1 (de) * 1982-05-12 1983-11-17 Hans Dr.Rer.Nat. 5370 Kall Beerwald Plasmaverfahren zur herstellung eines dielektrischen stabes
DE3568570D1 (en) * 1984-07-03 1989-04-13 Stiftelsen Inst Mikrovags Method and apparatus for heating thick-walled glass tubes
NL8402225A (nl) * 1984-07-13 1986-02-03 Philips Nv Werkwijze voor de vervaardiging van massieve glazen voorvormen uit holle voorvormen.
DE3528275A1 (de) * 1985-08-07 1987-02-19 Philips Patentverwaltung Verfahren und vorrichtung zum innenbeschichten von rohren
JPH01183436A (ja) * 1988-01-19 1989-07-21 Sumitomo Electric Ind Ltd 石英ガラスの加熱方法

Also Published As

Publication number Publication date
US4900894A (en) 1990-02-13
JPH01183432A (ja) 1989-07-21
DE68902995T2 (de) 1993-04-01
KR890011790A (ko) 1989-08-22
EP0325227A2 (en) 1989-07-26
DE68902995D1 (de) 1992-11-05
AU607573B2 (en) 1991-03-07
EP0325227B1 (en) 1992-09-30
AU2837189A (en) 1989-07-20
KR910002396B1 (ko) 1991-04-22
EP0325227A3 (en) 1990-07-25

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