EP4182587A1 - Vorrichtung zum schutz von flüssigkeitsleitungen in einer euv-quelle - Google Patents

Vorrichtung zum schutz von flüssigkeitsleitungen in einer euv-quelle

Info

Publication number
EP4182587A1
EP4182587A1 EP21736273.0A EP21736273A EP4182587A1 EP 4182587 A1 EP4182587 A1 EP 4182587A1 EP 21736273 A EP21736273 A EP 21736273A EP 4182587 A1 EP4182587 A1 EP 4182587A1
Authority
EP
European Patent Office
Prior art keywords
cavity
source material
internal component
valve body
wing members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21736273.0A
Other languages
English (en)
French (fr)
Inventor
Yang Shi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of EP4182587A1 publication Critical patent/EP4182587A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/02—Check valves with guided rigid valve members
    • F16K15/06—Check valves with guided rigid valve members with guided stems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
    • F16K31/20—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve
    • F16K31/22—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve with the float rigidly connected to the valve
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lift Valve (AREA)
EP21736273.0A 2020-07-15 2021-06-21 Vorrichtung zum schutz von flüssigkeitsleitungen in einer euv-quelle Pending EP4182587A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063052184P 2020-07-15 2020-07-15
PCT/EP2021/066794 WO2022012869A1 (en) 2020-07-15 2021-06-21 Apparatus for protecting fluid lines in an euv source

Publications (1)

Publication Number Publication Date
EP4182587A1 true EP4182587A1 (de) 2023-05-24

Family

ID=76708208

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21736273.0A Pending EP4182587A1 (de) 2020-07-15 2021-06-21 Vorrichtung zum schutz von flüssigkeitsleitungen in einer euv-quelle

Country Status (4)

Country Link
EP (1) EP4182587A1 (de)
CN (1) CN115803551A (de)
TW (1) TW202218486A (de)
WO (1) WO2022012869A1 (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8816305B2 (en) 2011-12-20 2014-08-26 Asml Netherlands B.V. Filter for material supply apparatus
CN203427777U (zh) * 2013-07-17 2014-02-12 瑞立集团瑞安汽车零部件有限公司 一种真空单向阀总成
WO2016203901A1 (ja) * 2015-06-19 2016-12-22 日立オートモティブシステムズ株式会社 蓄電装置
US10323761B2 (en) * 2016-08-26 2019-06-18 The Boeing Company Guide vane check valves
CN107747483A (zh) * 2017-09-28 2018-03-02 宝鸡市金海源钛标准件制品有限公司 一种钛合金单向阀

Also Published As

Publication number Publication date
WO2022012869A1 (en) 2022-01-20
TW202218486A (zh) 2022-05-01
CN115803551A (zh) 2023-03-14

Similar Documents

Publication Publication Date Title
JP6784737B2 (ja) レーザ生成プラズマｅｕｖ光源におけるソース材料送出の装置及び方法
TWI430713B (zh) 用於euv光源之裝置
US7122816B2 (en) Method and apparatus for EUV light source target material handling
US20130146682A1 (en) Target supply device
EP1854121B1 (de) Verfahren und vorrichtung zur euv-lichtquellen-zielmaterial-handhabung
US8969838B2 (en) Systems and methods for protecting an EUV light source chamber from high pressure source material leaks
WO2014158464A1 (en) Method of and apparatus for supply and recovery of target material
US10681795B2 (en) Apparatus for and method of source material delivery in a laser produced plasma EUV light source
US20170097572A1 (en) Faceted euv optical element
US9544982B2 (en) Nozzle
US10372041B2 (en) Target generation device and extreme ultraviolet light generation device
US10009991B2 (en) Target supply apparatus and EUV light generating apparatus
WO2022012869A1 (en) Apparatus for protecting fluid lines in an euv source
JP5489457B2 (ja) Ｅｕｖ光源のための代替燃料
US11774012B2 (en) Apparatus for high pressure connection
US20160249443A1 (en) Target supply device
WO2016071972A1 (ja) フィルタ構造体、ターゲット生成装置およびフィルタ構造体の製造方法
JP2023506411A (ja) 極端紫外光源用のターゲット材料タンク
WO2020141057A1 (en) Apparatus for controlling introduction of euv target material into an euv chamber
TW202405570A (zh) 液體靶材供應設備、燃料發射器、輻射源、微影設備以及液體靶材供應方法
WO2023088646A1 (en) A valve system, liquid target material supply apparatus, fuel emitter, radiation source, lithographic apparatus and flow regulating method
WO2022268468A1 (en) Apparatus and method for producing droplets of target material in an euv source

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20221129

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230724

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)