CN115803551A - 用于保护euv源中的流体管线的装置 - Google Patents

用于保护euv源中的流体管线的装置 Download PDF

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Publication number
CN115803551A
CN115803551A CN202180049142.5A CN202180049142A CN115803551A CN 115803551 A CN115803551 A CN 115803551A CN 202180049142 A CN202180049142 A CN 202180049142A CN 115803551 A CN115803551 A CN 115803551A
Authority
CN
China
Prior art keywords
source material
cavity
valve body
inner member
airfoil members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180049142.5A
Other languages
English (en)
Chinese (zh)
Inventor
史扬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of CN115803551A publication Critical patent/CN115803551A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/02—Check valves with guided rigid valve members
    • F16K15/06—Check valves with guided rigid valve members with guided stems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
    • F16K31/20—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve
    • F16K31/22—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve with the float rigidly connected to the valve
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lift Valve (AREA)
CN202180049142.5A 2020-07-15 2021-06-21 用于保护euv源中的流体管线的装置 Pending CN115803551A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063052184P 2020-07-15 2020-07-15
US63/052,184 2020-07-15
PCT/EP2021/066794 WO2022012869A1 (en) 2020-07-15 2021-06-21 Apparatus for protecting fluid lines in an euv source

Publications (1)

Publication Number Publication Date
CN115803551A true CN115803551A (zh) 2023-03-14

Family

ID=76708208

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180049142.5A Pending CN115803551A (zh) 2020-07-15 2021-06-21 用于保护euv源中的流体管线的装置

Country Status (4)

Country Link
EP (1) EP4182587A1 (de)
CN (1) CN115803551A (de)
TW (1) TW202218486A (de)
WO (1) WO2022012869A1 (de)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8816305B2 (en) 2011-12-20 2014-08-26 Asml Netherlands B.V. Filter for material supply apparatus
CN203427777U (zh) * 2013-07-17 2014-02-12 瑞立集团瑞安汽车零部件有限公司 一种真空单向阀总成
WO2016203901A1 (ja) * 2015-06-19 2016-12-22 日立オートモティブシステムズ株式会社 蓄電装置
US10323761B2 (en) * 2016-08-26 2019-06-18 The Boeing Company Guide vane check valves
CN107747483A (zh) * 2017-09-28 2018-03-02 宝鸡市金海源钛标准件制品有限公司 一种钛合金单向阀

Also Published As

Publication number Publication date
EP4182587A1 (de) 2023-05-24
WO2022012869A1 (en) 2022-01-20
TW202218486A (zh) 2022-05-01

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