EP4050973A4 - PLASMA GENERATING DEVICE AND PLASMA TREATMENT METHOD - Google Patents

PLASMA GENERATING DEVICE AND PLASMA TREATMENT METHOD Download PDF

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Publication number
EP4050973A4
EP4050973A4 EP19950060.4A EP19950060A EP4050973A4 EP 4050973 A4 EP4050973 A4 EP 4050973A4 EP 19950060 A EP19950060 A EP 19950060A EP 4050973 A4 EP4050973 A4 EP 4050973A4
Authority
EP
European Patent Office
Prior art keywords
plasma
processing method
generation device
plasma processing
plasma generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19950060.4A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP4050973A1 (en
Inventor
Takuya Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Publication of EP4050973A1 publication Critical patent/EP4050973A1/en
Publication of EP4050973A4 publication Critical patent/EP4050973A4/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/4645—Radiofrequency discharges
    • H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
EP19950060.4A 2019-10-22 2019-10-22 PLASMA GENERATING DEVICE AND PLASMA TREATMENT METHOD Pending EP4050973A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/041419 WO2021079420A1 (ja) 2019-10-22 2019-10-22 プラズマ発生装置、およびプラズマ処理方法

Publications (2)

Publication Number Publication Date
EP4050973A1 EP4050973A1 (en) 2022-08-31
EP4050973A4 true EP4050973A4 (en) 2022-11-09

Family

ID=75619936

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19950060.4A Pending EP4050973A4 (en) 2019-10-22 2019-10-22 PLASMA GENERATING DEVICE AND PLASMA TREATMENT METHOD

Country Status (4)

Country Link
EP (1) EP4050973A4 (https=)
JP (1) JP7133724B2 (https=)
CN (1) CN114586473B (https=)
WO (1) WO2021079420A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017056185A1 (ja) * 2015-09-29 2017-04-06 富士機械製造株式会社 プラズマ発生装置
EP3197245A1 (en) * 2014-09-16 2017-07-26 Fuji Machine Mfg. Co., Ltd. Plasma gas irradiation device
DE102016125699A1 (de) * 2016-12-23 2018-06-28 Plasmatreat Gmbh Düsenanordnung, Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls, Verwendung derselben, Verfahren zur Plasmabehandlung eines Stoffs oder einer Kunststofffolie, plasmabehandelter Vliesstoff und Verwendung desselben
EP3432691A1 (en) * 2016-03-14 2019-01-23 Fuji Corporation Plasma generator
WO2019150447A1 (ja) * 2018-01-30 2019-08-08 株式会社Ｆｕｊｉ プラズマ処理機

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS3621622Y1 (https=) * 1959-02-03 1961-08-21
US5317126A (en) * 1992-01-14 1994-05-31 Hypertherm, Inc. Nozzle and method of operation for a plasma arc torch
JP3707563B2 (ja) * 1995-01-27 2005-10-19 日野自動車株式会社 ホール型燃料噴射ノズル
DE29911974U1 (de) 1999-07-09 2000-11-23 Agrodyn Hochspannungstechnik GmbH, 33803 Steinhagen Plasmadüse
JP2005302681A (ja) * 2003-05-14 2005-10-27 Sekisui Chem Co Ltd プラズマ処理装置
KR101481928B1 (ko) * 2010-12-23 2015-01-21 엘리멘트 식스 리미티드 합성 다이아몬드 물질의 도핑을 제어하는 방법
GB201021870D0 (en) * 2010-12-23 2011-02-02 Element Six Ltd A microwave plasma reactor for manufacturing synthetic diamond material
US9144148B2 (en) * 2013-07-25 2015-09-22 Hypertherm, Inc. Devices for gas cooling plasma arc torches and related systems and methods
JP2015144078A (ja) 2014-01-31 2015-08-06 富士機械製造株式会社 大気圧プラズマ発生装置
CN107110496A (zh) * 2014-12-24 2017-08-29 克利尔赛恩燃烧公司 具有燃料和氧化剂再循环的火焰稳定器、包括此类火焰稳定器的燃烧系统，以及相关方法
WO2016194138A1 (ja) * 2015-06-02 2016-12-08 富士機械製造株式会社 プラズマ発生装置
EP3357879A1 (de) * 2017-02-07 2018-08-08 Heraeus Quarzglas GmbH & Co. KG Gasverteilelement für den einsatz in der halbleiterfertigung sowie verfahren zur herstellung eines gasverteilelements
JP6713039B2 (ja) * 2018-12-26 2020-06-24 株式会社Ｆｕｊｉ プラズマガス照射装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3197245A1 (en) * 2014-09-16 2017-07-26 Fuji Machine Mfg. Co., Ltd. Plasma gas irradiation device
WO2017056185A1 (ja) * 2015-09-29 2017-04-06 富士機械製造株式会社 プラズマ発生装置
EP3432691A1 (en) * 2016-03-14 2019-01-23 Fuji Corporation Plasma generator
DE102016125699A1 (de) * 2016-12-23 2018-06-28 Plasmatreat Gmbh Düsenanordnung, Vorrichtung zur Erzeugung eines atmosphärischen Plasmastrahls, Verwendung derselben, Verfahren zur Plasmabehandlung eines Stoffs oder einer Kunststofffolie, plasmabehandelter Vliesstoff und Verwendung desselben
WO2019150447A1 (ja) * 2018-01-30 2019-08-08 株式会社Ｆｕｊｉ プラズマ処理機

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2021079420A1 *

Also Published As

Publication number Publication date
JPWO2021079420A1 (https=) 2021-04-29
CN114586473B (zh) 2025-02-18
CN114586473A (zh) 2022-06-03
WO2021079420A1 (ja) 2021-04-29
JP7133724B2 (ja) 2022-09-08
EP4050973A1 (en) 2022-08-31

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