EP3841303B1 - Microsoufflante - Google Patents

Microsoufflante Download PDF

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Publication number
EP3841303B1
EP3841303B1 EP19783618.2A EP19783618A EP3841303B1 EP 3841303 B1 EP3841303 B1 EP 3841303B1 EP 19783618 A EP19783618 A EP 19783618A EP 3841303 B1 EP3841303 B1 EP 3841303B1
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EP
European Patent Office
Prior art keywords
housing
opening
piezo actuator
micropump
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19783618.2A
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German (de)
English (en)
Other versions
EP3841303C0 (fr
EP3841303A1 (fr
Inventor
Frank Bartels
Anja Strube
Florian Siemenroth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bartels Mikrotechnik GmbH
Original Assignee
Bartels Mikrotechnik GmbH
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Publication of EP3841303A1 publication Critical patent/EP3841303A1/fr
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Publication of EP3841303C0 publication Critical patent/EP3841303C0/fr
Publication of EP3841303B1 publication Critical patent/EP3841303B1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0027—Special features without valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections

Definitions

  • the invention relates to a miniaturized pump for compressible fluids.
  • the invention relates to a microblower for gases or gas mixtures such as air in particular.
  • Micropumps are well known in the art. According to one definition, they are used to pump fluids (liquids and gases) in small volumes. These are typically in the range of microliters to milliliters per minute.
  • micropump In addition to the amount of fluid delivered per unit of time, the size of the pump, in particular its pump housing, can also be decisive in determining whether a micropump is present.
  • the term “micropump” also designates a particularly small housing, which has edge lengths in the range from a few millimeters to a few centimeters. Components such as power supply and control are often housed separately from said housing, which is why the term "micropump” in the narrower sense is limited to the components required for actual pumping (pump chamber, valves, housing). In particular, such a micropump is also the subject of the present invention.
  • Micropumps that are particularly suitable for pumping incompressible fluids (liquids) are based on the so-called peristaltic principle. Two or more piezoceramic discs vibrating alternately increase and decrease the volume of two adjacent pump chambers. The conveying direction is determined by the clever coupling of the chambers by means of movable check valves and a phase offset of the control. By varying the stroke or the frequency, the pump can pump a range of liquid volumes.
  • Micropumps constructed in this way are in principle suitable for pumping both liquids and gases;
  • the valves lead to a limitation of the pumping frequency due to their inertia.
  • they are exposed to constant, mostly high-frequency stress, which places high demands on their mechanical properties.
  • Another disadvantage is the noise emitted by the pump drive. At frequencies above approx. 300 Hz, these are clearly audible even with small dimensions, and at frequencies above approx. 1000 Hz the noise emission increases to a level that cannot be tolerated in many application scenarios.
  • Operation above the hearing threshold of approx. 20 KHz is not possible due to the inertia of the valves. Accordingly, there is a practical limit to the flow rate.
  • micropumps which do without mechanical valves. Instead, they are operated in a narrow frequency range, preferably the resonance frequency of the 1st order or higher. They are designed in such a way that fluid dynamic effects come into play at the operating frequency, which lead to the formation of a preferred direction when pumping the fluid. So are from the pamphlet DE 11 2013 002 723 T5 , the pamphlet U.S. 2011/0076170 A1 as well as the publication U.S. 2016/0377072 A1 Known micropumps, which are operated at high frequencies, preferably lying in the inaudible range.
  • the single actuator in the form of a piezo disk, is attached to a membrane which provides passage openings for the fluid to be pumped.
  • Fluid-filled chambers are present on both sides of the membrane.
  • the flow conditions during operation of the pump lead to a vibration depending on the direction of the diaphragm different levels of fluid resistance in the corresponding chamber. In this way, the fluid is conveyed in the desired conveying direction.
  • a piezo disc forms an oscillating plate together with a membrane to which it is attached.
  • a hollow chamber is arranged on the side facing away from the piezo disc. This has a central opening.
  • the oscillating unit consisting of an oscillating plate and a hollow chamber, is mounted elastically in an outer housing that is open to the side of the piezo disc, so that the entire oscillating unit can oscillate in the direction of curvature of the piezo disc that drives it.
  • the outer housing has an outlet opening, also in the center.
  • a disadvantage of the construction shown is the fact that the piezo disk is located in the area of the outer housing that is open to the outside, and that gas must also flow around it during operation. Mechanical damage or impairments due to environmental influences (humidity, aggressive gases, etc.) cannot be ruled out.
  • the inlet and outlet openings are on opposite sides of the micropump. In certain cases, this can be disadvantageous, for example when the micropump is to be mounted on a "fluidic circuit board" in which fluid-carrying channels are present.
  • the air gap between the swing unit and the inside of the outer housing also enlarges the outer housing and reduces the space available for the swing unit.
  • this micropump which is provided in particular for gases, is known from the publication DE 10 2012 101 861 A1 known. Accordingly, in order to prevent impairment by dust or liquids sucked in during operation with the gas, the pump has a gas-permeable but liquid-impermeable fabric over the suction region, which fabric is preferably capable of vibrating. However, said protection also reduces the delivery capacity of the micropump, since part of the capacity is now required for transporting the gas through the tissue, which has a certain flow resistance.
  • a micropump according to the invention for compressible fluids should have improved insensitivity to mechanical and other external impairments. It should be suitable for mechanical connection to a surface and also allow improved utilization of the construction volume.
  • micropump according to the invention and advantageous embodiments thereof are first described below. This is followed by a description of their use.
  • the micropump according to the invention serves to convey compressible fluids such as gases in particular.
  • the micropump comprises two main units, which, however, must not be considered independently of one another, but must be closely coordinated and thus form a common whole in order to ensure the desired fluid transport.
  • the first main unit is hereinafter referred to as the "swing unit” because (in the idealized case) it is the only one that moves during operation.
  • the momentum unit comprises a disk-shaped, mostly round or rectangular piezo actuator, which typically has a diameter of a few (e.g. 1 - 5) millimeters up to a few (e.g. 1 - 4) centimeters and which, when activated, i.e. when a suitable voltage is applied, goes from a typically flat resting state to a typically curved deflection state. If necessary, a curvature in the opposite direction can be generated by applying an oppositely polarized voltage, which increases the usable stroke accordingly.
  • the piezo actuator is arranged on an inside and/or outside of an oscillating diaphragm. He is firmly connected to it, so that it carries out the curvature described above. It is also conceivable to design the piezo actuator and oscillating membrane in one piece, or even to see the latter as a sub-unit of the piezo actuator.
  • the inside is the side that faces towards the blower chamber described below.
  • An oscillating plate is arranged opposite the inside of the oscillating membrane. Depending on the embodiment, this will preferably also move during operation.
  • the vibrating plate has at least one centrally located blower opening. If this has several blower openings, they are preferably also located in the central area.
  • the swing unit is therefore hollow on the inside, and the hollow space, ie the blower chamber, has (at least) one opening through which the fluid can flow in and out again.
  • the second main unit is hereinafter referred to as "housing".
  • the swing unit can be completely accommodated in this, with a gap surrounding the swing unit being present. This is necessary because the flywheel unit is oscillatingly mounted in the housing in the direction of swing of the piezo actuator by means of at least one suspension, whereby it is clear that the gap must be dimensioned in such a way that no collision between the flywheel unit and the housing can occur during normal operation.
  • the suspension is intended to decouple the vibration unit from the housing surrounding it in terms of vibration. In this way, the efficiency of the micropump is increased, since no energy is lost through (undesirable) movement (i.e. resonating) of the housing.
  • the housing has at least one inlet or intake opening. Through this, fluid can flow into the interior of the housing.
  • the housing has (at least) one outlet opening, which is also arranged in the middle and is therefore opposite the blower opening. There is a gap between the two openings that is at least large enough to prevent a collision between the flywheel unit and the housing during normal operation.
  • the housing forms a closed space that also covers the piezoelectric actuator and thus protects it from environmental influences.
  • the side of the oscillating diaphragm that points outwards, and with it the piezo actuator, are also covered by the housing.
  • the suction opening is also arranged radially (and thus perpendicularly to the vibration direction of the piezo actuator) or on an underside opposite the vibration unit. It has an intake channel that leads into a "pump chamber” located between the oscillating plate and the inside of the housing.
  • the oscillating unit When the piezo actuator is operated in an oscillating manner, the oscillating unit can be made to oscillate relative to the housing, as a result of which the compressible fluid can be sucked in through the intake opening and discharged through the outlet opening.
  • the invention thus avoids the disadvantages known from the prior art. Since the piezo actuator is completely surrounded by the housing, this protects it from unwanted mechanical damage and environmental influences. However, protection is only possible due to the construction according to the invention, since the fluid does not flow through a suction opening which leads past the piezo actuator, as is sometimes practiced in the prior art. Since the intake opening is not opposite, but to the side of or on the same side as the outlet opening, the micropump according to the invention can also be mounted on a plate without closing one of the openings, or without one or even several corresponding holes for the openings in the plate being necessary.
  • the micropump according to the invention makes optimum use of the installation space available to it, since the gap present at the side (in the area of the wall) only has to be large enough that the oscillating movement of the oscillating body is not impeded; Since the movement runs parallel to the (lateral) inner wall of the housing, a very small gap, for example 10 - 1000 ⁇ m, is sufficient.
  • the air gap according to the constructions known from the prior art must be large enough for the gas transport, which leads to a significantly larger distance and thus, with a comparable delivery rate, to a larger housing.
  • the housing has a housing body and a housing cover.
  • the housing body then has a pot-like shape with a bottom and surrounding walls.
  • the housing body is set up to accommodate all moving components, including the gap dimensions required for vibration.
  • all moving components can be inserted one after the other into the housing body during production and the housing can finally be closed with the housing cover.
  • the lid can also be formed simply, i.e. without indentations.
  • At least parts of the movable components are arranged in an inside recess of the housing cover, or they move into and out of this at least in an oscillating manner during operation.
  • the production of housing parts of approximately the same thickness can be advantageous in particular for injection molded parts or for the simultaneous production of both parts by means of 3D printing.
  • the swing plate and wall are manufactured in an integrated manner.
  • the two components When assembled, the two components together thus have a pot-like shape, on which the oscillating membrane is placed as a kind of "cover” in order to provide the largely closed blower chamber.
  • the swing plate and wall are manufactured as separate components.
  • the oscillating plate can then be provided in particular as a flat, disc-shaped body on which a ring of a certain thickness is applied.
  • the space which the ring encloses then defines the blower chamber. In this way, blower chambers of different heights can be easily produced, since only one ring of different thickness has to be used in each case; the oscillating plate can remain unchanged.
  • the piezo actuator is arranged in a gas-tight manner with respect to the pump chamber. This means that the piezo actuator no longer comes into contact with the fluid to be pumped because the space in which it is located is sealed off. This can be achieved, for example, by designing the suspension to be continuous all the way round, or by providing an additional, thin protective membrane that does not impede the vibration. Thus, the gap between the wall of the swing unit and the inner wall of the housing is interrupted all around; only the partial volume of the interior of the housing in which the piezo actuator is not located (pump chamber) comes into contact with the fluid.
  • the piezo actuator preferably has a diameter of 5 to 50 mm, and preferably 8 to 20 mm, and particularly preferably 10 to 15 mm.
  • the gap between the wall and the inside of the housing is preferably less than 0.01 to 1 mm, and more preferably less than 0.5 mm.
  • the micropump preferably has a total height of 3 to 10 mm, minus any sockets etc. that may be present; it is particularly preferably smaller than 8 mm.
  • the diameter of the fan opening is between 3.0 and 0.1 mm, and preferably between 2.0 and 0.3 mm, and particularly preferably between 0.5 mm and 0.7 mm.
  • the diameter of the suction opening(s) is preferably between 0.1 and 10.0 mm, and preferably between 0.2 and 5.0 mm, and particularly preferably between 0.5 mm and 2.5 mm.
  • the diameter of the exit orifice(s) is preferably between 0.1 and 10.0 mm, and preferably between 0.25 and 5.0 mm, and most preferably between 0.7 and 0.9 mm.
  • the method serves to convey a compressible fluid, such as in particular a gas, using a micropump as defined above; to avoid repetition, reference is made to the relevant passages above.
  • the piezo actuator In an intake phase, the piezo actuator is controlled with a suitable voltage in such a way that it arches in the opposite direction to the blower opening. This creates a negative pressure in the blower chamber, which is caused by the above Fan opening also propagates into the pumping chamber, whereby fluid is drawn in through the suction port.
  • the piezo actuator is controlled in such a way that it now arches in the direction of the blower opening.
  • there is no (active) control so that the piezo actuator goes (back) into a typically level rest position.
  • this leads to the negative pressure in the blower chamber regressing or even, measured against the ambient pressure, an overpressure being generated, which is also propagated through said blower opening into the pump chamber, whereby fluid is discharged through the outlet opening using the fluid-dynamic effects described above.
  • the rhythmic movement of the piezo actuator also causes the entire swing unit to vibrate.
  • the preferred direction i.e. sucking in through the intake opening and dispensing through the outlet opening, is therefore achieved by the special design of the micropump, in particular by the presence of the blower chamber, the blower opening, the oscillating movement of the swing unit in relation to the housing surrounding it, and the arrangement of the intake and outlet openings.
  • the advantage of the method according to the invention lies in the fact that, when using the micropump according to the invention, it allows improved protection of the piezoactuator against undesired external influences, since the fluid is conveyed only outside the half-space containing the piezoactuator.
  • the suspension divides the interior of the case into two half-spaces; one half-space contains the piezo actuator, the intake and outlet opening(s) open into the other half-space, and only this is actively flowed through by the pumped fluid.
  • the oscillating plate also oscillates in the direction of movement of the piezo actuator, i.e. both plates move in approximately the same direction. In this way, improved generation of negative or positive pressure in the pump chamber can be achieved.
  • the oscillating plate also oscillates, but in the opposite direction to the direction of movement of the piezo actuator, i.e. both plates move at the same frequency, but in precisely the opposite direction to one another.
  • the oscillating membrane and the oscillating plate together with the wall form a type of bellows which alternates between a minimum and maximum volume of the blower chamber with each oscillation cycle. This leads to a particularly strong inflow and outflow of fluid into and out of the blower chamber.
  • Figure 1 shows an exploded view of the main components of an embodiment of the micropump according to the invention.
  • the micropump comprises two main units.
  • the first main unit is the swing unit 10.
  • the oscillating unit 10 includes a disk-shaped piezoelectric actuator 11 which is arranged on an outside of an oscillating membrane 12 (pointing upwards in the figure).
  • a ring 14 of defined thickness is present as the wall for the blower chamber 13 .
  • This is arranged on the oscillating plate 15 which is opposite the inside of the oscillating diaphragm 12 .
  • the oscillating plate 15 there is a centrally arranged fan opening 16. According to this embodiment, the oscillating plate 15 and the wall (ring 14) are separate components.
  • suspensions 17 are arranged symmetrically to the side of the oscillating plate 15 (only one provided with reference numbers). By means of this, the rest of the swing unit 10 can swing at least, and preferably only, in the vertical direction (in the picture). The distal ends of the suspensions 17 can be inserted into correspondingly shaped receptacles 22 of the housing body 21 (likewise only one is provided with a reference number).
  • the second main unit is the housing 20.
  • the housing body 21 includes a recess 23 in which the components of the swing unit 10 can be at least partially accommodated are. Accordingly, there is a gap S between the swing unit 10 and the inside of the housing 20 (cf., for example, the next figure and the one after that), which ensures the necessary freedom of movement of the swing unit 10 .
  • body 21 there are four suction openings 24 (only one is provided with a reference number). In the present case, these initially run radially to the main direction of movement of the swing unit 10, which runs in the vertical direction in the image. After a 90 degree bend (not visible, cf. next figure), they open into the pump chamber 26 .
  • the housing 20 also includes a housing cover 27 which closes off the interior space, comprising the pump chamber 26 and the half-space H, of the housing 20 .
  • the housing cover 27 is provided as a separate component which is connected to the housing body 21 in a gas-tight manner.
  • the housing cover 27 also has a recess (no reference number) in which the components of the swing unit 10 can also be accommodated, at least in part.
  • the housing 20 forms a closed space that also covers the piezoelectric actuator 11 and thus protects it from environmental influences. For reasons of clarity, only some of the reference numbers are shown.
  • the gap S surrounding the swing unit 10 can also be seen, as well as the guidance of the suction openings 24, which lead radially into the housing and, after a 90-degree curve, open perpendicularly into the pump chamber 26.
  • the housing body has only a single, preferably circumferential suction opening.
  • the suction opening then runs parallel to the bottom of the pump chamber below the same and has at least one, but preferably several openings into the pump chamber. In this way, the fluid resistance when flowing in is particularly low.
  • the figure 3 finally indicates the flow paths of the fluid during operation of the micropump.
  • the oscillating plate 15 and the wall are manufactured in an integrated manner.
  • the piezo actuator 11 is arranged gas-tight to the pump chamber 26 .
  • the swing unit 10 moves in the direction of the arrow 31. Consequently, a negative pressure is generated in the lower half-space, which forms the pump chamber 26. This causes fluid (not shown) to flow in the direction of the arrows 32 through the suction openings 24 into the pump chamber 26 .
  • the swing unit 10 moves in the opposite direction to the arrow 31 .
  • the pressure in the pump chamber 26 rises, which leads to the fluid flowing out through the outlet opening 25 .
  • the fluid is always conveyed outside of the upper half-space H containing the piezoelectric actuator 11 , which in the present case lies above the oscillating plate 15 . Even if the suspension 17 is designed to be interrupted, the fluid in the half-space H only moves back and forth a little, is therefore not exchanged and therefore also does not "flow", which leads to a reduction in possible impairments of the piezo actuator by the fluid.
  • the figure 4 shows a schematic cross section through an embodiment with an axial suction opening. Most reference numbers have been omitted for clarity omitted.
  • the embodiment shown differs from that of 3 is that the suction port 24 does not run radially, but extends in the axial direction. Accordingly, it runs approximately parallel to the outlet opening 25 and is located on an underside opposite the swing unit 10 .
  • the lengths of both openings 24, 25 can be the same, but also different, as shown.
  • the intake opening 24 can be in several parts, as in 1 and 2 shown. It can also be designed as a ring opening.
  • FIG 5 shows an exploded view of a further embodiment of the micropump according to the invention.
  • the figure 6 shows the embodiment of figure 5 in a sectional view.
  • a micropump according to this embodiment has a housing body 21 which is set up to accommodate all moving components including the gap dimensions required for oscillation.
  • the housing cover 27 is essentially flat and has no indentations for the internal components (oscillating unit 10) in particular on the inside.
  • FIG. 7 and Figure 8 show another embodiment of the micropump.
  • the housing 20 is designed in two parts. It comprises a lower part 21A and an upper part 21B; both parts can be connected to one another, for example by means of gluing or welding.
  • the connection is preferably made in the course of the connection of the other housing components such as in particular the cover 27.
  • a two-part lower housing part 21 has the advantage that the suction openings 24 with the Corresponding channels (only one provided with a reference number) can be fluidically shaped more favorably (cf. the channels of 1 and 2 , especially the 90 degree curve).
  • Figures 7 and 8 also shows a connecting piece of the outlet opening 25 prepared for insertion into a hose.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Claims (11)

  1. Micropompe pour des fluides compressibles, comprenant :
    - une unité vibrante (10) entourée d'un espace (S), cette unité comprenant un actionneur piézoélectrique en forme de disque (11) disposé sur un diaphragme vibrant (12), ainsi qu'une plaque vibrante (15) disposée à l'opposé d'une face intérieure du diaphragme vibrant (12) et comportant un orifice de soufflage (16) disposé au centre, ainsi qu'une paroi circonférentielle disposée entre le diaphragme vibrant (12) et la plaque vibrante (15), de telle sorte qu'une chambre de soufflage (13) est formée ;
    - un boîtier (20), dans lequel l'unité vibrante(10) peut être entièrement reçue, et dans lequel elle est montée de manière vibrante au moyen d'au moins une suspension (17), et qui comporte un orifice de sortie (25) qui est opposé à l'orifice de soufflage (16) ;
    caractérisée en ce que le boîtier (20)
    - forme un demi-espace clos (H), recouvrant également l'actionneur piézoélectrique (11) et le protégeant ainsi des influences de l'environnement, et
    - comporte au moins un orifice d'aspiration (24) disposé radialement ou sur une face intérieure opposée à l'unité vibrante (10), ayant un canal d'aspiration qui mène à une chambre de pompage (26) différente du canal d'aspiration, située entre la plaque vibrante (15) et la face intérieure du boîtier,
    de telle sorte que lorsque l'actionneur piézoélectrique (11) fonctionne de manière vibrante, l'unité vibrante (10) peut être amenée à vibrer par rapport au boîtier (20), en sorte que le fluide compressible peut être aspiré à travers l'orifice d'aspiration (24) et être évacué à travers l'orifice de sortie (25), dans lequel le fluide est acheminé à l'extérieur du demi-espace (H) contenant l'actionneur piézoélectrique (11).
  2. Micropompe selon la revendication 1, dans laquelle le boîtier (20) comporte un corps de boîtier (21) et un couvercle de boîtier (27), et le corps de boîtier (21) est conçu pour recevoir tous les composants en mouvement, y compris les interstices nécessaires à la vibration.
  3. Micropompe selon la revendication 1, dans laquelle le boîtier (20) comporte un corps de boîtier (21) et un couvercle de boîtier (27), et au moins des parties des composants en mouvement sont disposées dans un évidement intérieur du couvercle de boîtier (27).
  4. Micropompe selon l'une des revendications 1 à 3, dans laquelle la plaque vibrante (15) et la paroi sont fabriquées d'un seul tenant.
  5. Micropompe selon l'une des revendications 1 à 3, dans laquelle la plaque vibrante (15) et la paroi sont fabriquées comme des composants séparés.
  6. Micropompe selon l'une des revendications précédentes, dans laquelle l'actionneur piézoélectrique (11) est agencé de manière étanche au gaz par rapport à la chambre de pompage (26) .
  7. Micropompe selon l'une des revendications précédentes, dans laquelle l'actionneur piézoélectrique (11) a un diamètre de 5 à 50 mm, et/ou un espace (S) entre la paroi et la face intérieure du boîtier (20) est inférieur à 0,01 à 1 mm, et la micropompe a une hauteur totale de 3 à 10 mm.
  8. Micropompe selon l'une des revendications précédentes, dans laquelle le diamètre de l'orifice de soufflage (16) est compris entre 0,5 mm et 0,7 mm, et le diamètre de l'orifice ou des orifices d'aspiration (24) est compris entre 0,5 mm et 2,5 mm, et le diamètre de l'orifice ou des orifices de sortie (25) est compris entre 0,7 mm et 0,9 mm.
  9. Procédé pour acheminer un fluide compressible en utilisant une micropompe telle que définie dans l'une des revendications précédentes, dans lequel
    - lors d'une phase d'aspiration, l'actionneur piézoélectrique (11) est commandé de telle sorte qu'il se bombe en opposition à la direction de l'orifice de soufflage (16), en sorte qu'une dépression est formée dans la chambre de soufflage (13), laquelle dépression se propage à travers l'orifice de soufflage (16) dans la chambre de pompage (26), moyennant quoi du fluide est aspiré à travers l'orifice d'aspiration (24) avec le canal d'aspiration, et
    - lors d'une phase de sortie, l'actionneur piézoélectrique (11) est commandé de telle sorte qu'il se bombe en direction de l'orifice de soufflage (16) ou prend une position de repos à plat, en sorte que la dépression dans la chambre de soufflage (16) diminue ou une surpression est générée, laquelle se propage également à travers ledit orifice de soufflage (16) dans la chambre de pompage (16), moyennant quoi du fluide est délivré à travers l'orifice de sortie (25),
    de telle sorte que l'unité vibrante (10) est amenée à vibrer, le fluide étant acheminé à l'extérieur du demi-espace (H) contenant l'actionneur piézoélectrique (11).
  10. Procédé selon la revendication 9, dans lequel la plaque vibrante (15) vibre également respectivement dans une direction de mouvement de l'actionneur piézoélectrique (11).
  11. Procédé selon la revendication 9, dans lequel la plaque vibrante (15) vibre en opposition à la direction de mouvement de l'actionneur piézoélectrique (11).
EP19783618.2A 2018-08-24 2019-08-23 Microsoufflante Active EP3841303B1 (fr)

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PCT/IB2019/057118 WO2020039399A1 (fr) 2018-08-24 2019-08-23 Microsoufflante

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DE102019004450B4 (de) 2019-06-26 2024-03-14 Drägerwerk AG & Co. KGaA Mikropumpensystem und Verfahren zur Führung eines kompressiblen Fluids
USD991984S1 (en) * 2021-11-30 2023-07-11 Murata Manufacturing Co., Ltd. Piezoelectric pump

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US2029374A (en) * 1934-11-20 1936-02-04 Junius W Houston Electromagnetic pump
FR2757906A1 (fr) * 1996-12-31 1998-07-03 Westonbridge Int Ltd Micropompe avec piece intermediaire integree
JP4677933B2 (ja) * 2005-04-14 2011-04-27 セイコーエプソン株式会社 ポンプ及び流体システム
CN101542122B (zh) 2006-12-09 2011-05-04 株式会社村田制作所 压电微型鼓风机
JP5205957B2 (ja) * 2007-12-27 2013-06-05 ソニー株式会社 圧電ポンプ、冷却装置及び電子機器
JP5115626B2 (ja) 2008-06-03 2013-01-09 株式会社村田製作所 圧電マイクロブロア
DE102012101861A1 (de) 2012-03-06 2013-09-12 Continental Automotive Gmbh Mikropumpe mit gasdurchlässigem, aber flüssigkeitsundurchlässigen Gewebe im Ansaugbereich
JP5928160B2 (ja) 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
WO2013187270A1 (fr) 2012-06-11 2013-12-19 株式会社村田製作所 Soufflante
JP5962848B2 (ja) * 2013-03-22 2016-08-03 株式会社村田製作所 圧電ブロア
WO2016006496A1 (fr) * 2014-07-11 2016-01-14 株式会社村田製作所 Dispositif d'aspiration
TWI557321B (zh) 2015-06-25 2016-11-11 科際精密股份有限公司 壓電泵及其操作方法

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JP2021535323A (ja) 2021-12-16
EP3841303C0 (fr) 2023-07-26
WO2020039399A1 (fr) 2020-02-27
US20210199106A1 (en) 2021-07-01
DE102018120782B3 (de) 2019-08-22
EP3841303A1 (fr) 2021-06-30

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