EP3751963A4 - Mikrowellenheizverfahren, mikrowellenheizvorrichtung und chemisches reaktionsverfahren - Google Patents

Mikrowellenheizverfahren, mikrowellenheizvorrichtung und chemisches reaktionsverfahren Download PDF

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Publication number
EP3751963A4
EP3751963A4 EP19750634.8A EP19750634A EP3751963A4 EP 3751963 A4 EP3751963 A4 EP 3751963A4 EP 19750634 A EP19750634 A EP 19750634A EP 3751963 A4 EP3751963 A4 EP 3751963A4
Authority
EP
European Patent Office
Prior art keywords
microwave heating
chemical reaction
heating device
reaction process
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP19750634.8A
Other languages
English (en)
French (fr)
Other versions
EP3751963A1 (de
Inventor
Yuichi Watanabe
Sei Uemura
Masateru Nishioka
Masato MIYAKAWA
Takashi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2018021456A external-priority patent/JP6986264B2/ja
Priority claimed from JP2018182605A external-priority patent/JP7241379B2/ja
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Priority claimed from PCT/JP2019/004351 external-priority patent/WO2019156142A1/ja
Publication of EP3751963A1 publication Critical patent/EP3751963A1/de
Publication of EP3751963A4 publication Critical patent/EP3751963A4/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/74—Mode transformers or mode stirrers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/647—Aspects related to microwave heating combined with other heating techniques
    • H05B6/6488—Aspects related to microwave heating combined with other heating techniques combined with induction heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016—Soldering of electronic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/06—Solder feeding devices; Solder melting pans
    • B23K3/0607—Solder feeding devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
    • F27B9/067—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated heated by induction
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/6402—Aspects relating to the microwave cavity
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/6408—Supports or covers specially adapted for use in microwave heating apparatus
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/6447—Method of operation or details of the microwave heating apparatus related to the use of detectors or sensors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/66—Circuits
    • H05B6/68—Circuits for monitoring or control
    • H05B6/686—Circuits comprising a signal generator and power amplifier, e.g. using solid state oscillators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/78—Arrangements for continuous movement of material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/80—Apparatus for specific applications
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/12—Processes employing electromagnetic waves
    • B01J2219/1203—Incoherent waves
    • B01J2219/1206—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2206/00—Aspects relating to heating by electric, magnetic, or electromagnetic fields covered by group H05B6/00
    • H05B2206/04—Heating using microwaves
    • H05B2206/046—Microwave drying of wood, ink, food, ceramic, sintering of ceramic, clothes, hair

Landscapes

  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Power Engineering (AREA)
  • Constitution Of High-Frequency Heating (AREA)
EP19750634.8A 2018-02-08 2019-02-07 Mikrowellenheizverfahren, mikrowellenheizvorrichtung und chemisches reaktionsverfahren Pending EP3751963A4 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2018021455 2018-02-08
JP2018021456A JP6986264B2 (ja) 2018-02-08 2018-02-08 薄膜パターンの焼成方法及びマイクロ波焼成装置
JP2018021457 2018-02-08
JP2018182605A JP7241379B2 (ja) 2018-02-08 2018-09-27 はんだ実装方法及びマイクロ波加熱装置
PCT/JP2019/004351 WO2019156142A1 (ja) 2018-02-08 2019-02-07 マイクロ波加熱方法、マイクロ波加熱装置及び化学反応方法

Publications (2)

Publication Number Publication Date
EP3751963A1 EP3751963A1 (de) 2020-12-16
EP3751963A4 true EP3751963A4 (de) 2021-11-24

Family

ID=69023370

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19750634.8A Pending EP3751963A4 (de) 2018-02-08 2019-02-07 Mikrowellenheizverfahren, mikrowellenheizvorrichtung und chemisches reaktionsverfahren

Country Status (5)

Country Link
US (1) US11883789B2 (de)
EP (1) EP3751963A4 (de)
KR (1) KR102745755B1 (de)
CN (1) CN111602465B (de)
TW (1) TWI841549B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111100662B (zh) * 2018-10-29 2021-07-02 中国石油化工股份有限公司 一种微波高温裂解废旧塑料连续操作方法
KR20220100863A (ko) * 2019-11-15 2022-07-18 고쿠리츠켄큐카이하츠호진 상교기쥬츠 소고켄큐쇼 실장용 배선 기판, 전자 부품 실장 기판, 전자 부품의 실장 방법, 마이크로파 가열 방법 및 마이크로파 가열 장치
CN112272426A (zh) * 2020-10-27 2021-01-26 浙江大学 一种euv光源锡靶液滴发生装置
WO2022124612A1 (ko) * 2020-12-09 2022-06-16 한국전기연구원 마이크로파 유도가열 장치 및 이를 이용한 적층 세라믹 커패시터의 고속 동시소결 방법
CN112743183A (zh) * 2021-01-18 2021-05-04 成都奋羽电子科技有限公司 一种微波辅助的电路板焊接方法及装置
US12546690B2 (en) * 2021-03-31 2026-02-10 The Research Foundation For The State University Of New York Systems and methods for annealing samples
CN117404914B (zh) * 2023-10-08 2024-04-16 广东广青金属科技有限公司 一种直接还原制备铁合金的冶炼装置及方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040084444A1 (en) * 2002-10-31 2004-05-06 Liusheng Wang Microwave assisted bonding method and joint
JP2005322582A (ja) * 2004-05-11 2005-11-17 Idx Corp マイクロ波加熱装置
JP2006221958A (ja) * 2005-02-10 2006-08-24 Idx Corp 導電性又は磁性薄膜を有するシート状被加熱物のマイクロ波による加熱方法及び装置
JP2010274383A (ja) * 2009-05-29 2010-12-09 Nisshin Seisakusho:Kk メタルボンド砥石の製造方法及び製造装置
JP2011081914A (ja) * 2009-10-02 2011-04-21 Saida Fds Inc マイクロ波照射装置
US20150223295A1 (en) * 2012-09-25 2015-08-06 Showa Denko K.K. Microwave heating apparatus
JP5892635B2 (ja) * 2013-03-07 2016-03-23 国立大学法人東京工業大学 複合体の加熱方法と加熱装置
JP2017200671A (ja) * 2016-05-02 2017-11-09 昭和電工株式会社 マイクロ波を使用した化学反応装置

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US101808A (en) 1870-04-12 Improvement in attaching knobs to spindles
JPS58164288A (ja) * 1982-03-25 1983-09-29 株式会社リコー 膜集積回路用基板の製造方法
KR100221958B1 (ko) 1997-07-03 1999-09-15 김윤 모노필라멘트를 사용한 코팅지
US6365885B1 (en) 1999-10-18 2002-04-02 The Penn State Research Foundation Microwave processing in pure H fields and pure E fields
JP2008116058A (ja) * 2005-05-30 2008-05-22 Buhei Kono 陶磁器をマイクロ波によって加熱し、陶磁器から遠赤外線、赤外線波長の放射に転換し、熱効率を上げて調理及び化学反応、化学合成、金属加工、金属結晶、金属の燒結、冶金を行う技術開発。
JP5681847B2 (ja) 2010-09-30 2015-03-11 株式会社サイダ・Ｆｄｓ マイクロ波装置
US10091841B2 (en) 2010-09-30 2018-10-02 Pacific Microwave Technology Corp. Microwave device and flow tube used therein
KR20140009379A (ko) 2011-02-25 2014-01-22 도쿄엘렉트론가부시키가이샤 막 형성 방법 및 막 형성 장치
JP6004281B2 (ja) * 2011-08-04 2016-10-05 パナソニックＩｐマネジメント株式会社 マイクロ波加熱装置
JP2013101808A (ja) 2011-11-08 2013-05-23 Showa Denko Kk マイクロ波加熱装置及びマイクロ波加熱方法
TWI581668B (zh) 2011-12-20 2017-05-01 Panasonic Corp Microwave heating device
JP6179473B2 (ja) * 2014-07-23 2017-08-16 コニカミノルタ株式会社 導電パターン作製装置
WO2017138381A1 (ja) 2016-02-10 2017-08-17 株式会社村田製作所 フレキシブルケーブル付電子部品連およびフレキシブルケーブル付電子部品連の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040084444A1 (en) * 2002-10-31 2004-05-06 Liusheng Wang Microwave assisted bonding method and joint
JP2005322582A (ja) * 2004-05-11 2005-11-17 Idx Corp マイクロ波加熱装置
JP2006221958A (ja) * 2005-02-10 2006-08-24 Idx Corp 導電性又は磁性薄膜を有するシート状被加熱物のマイクロ波による加熱方法及び装置
JP2010274383A (ja) * 2009-05-29 2010-12-09 Nisshin Seisakusho:Kk メタルボンド砥石の製造方法及び製造装置
JP2011081914A (ja) * 2009-10-02 2011-04-21 Saida Fds Inc マイクロ波照射装置
US20150223295A1 (en) * 2012-09-25 2015-08-06 Showa Denko K.K. Microwave heating apparatus
JP5892635B2 (ja) * 2013-03-07 2016-03-23 国立大学法人東京工業大学 複合体の加熱方法と加熱装置
JP2017200671A (ja) * 2016-05-02 2017-11-09 昭和電工株式会社 マイクロ波を使用した化学反応装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2019156142A1 *

Also Published As

Publication number Publication date
EP3751963A1 (de) 2020-12-16
KR102745755B1 (ko) 2024-12-23
CN111602465A (zh) 2020-08-28
CN111602465B (zh) 2022-11-29
US20210023526A1 (en) 2021-01-28
KR20200115516A (ko) 2020-10-07
US11883789B2 (en) 2024-01-30
TWI841549B (zh) 2024-05-11
TW201940007A (zh) 2019-10-01

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