EP3688394A1 - Surveillance en temps réel d'un four vertical à plusieurs zones, dotée d'une détection précoce de l'arrêt d'un élément de zone chauffante - Google Patents

Surveillance en temps réel d'un four vertical à plusieurs zones, dotée d'une détection précoce de l'arrêt d'un élément de zone chauffante

Info

Publication number
EP3688394A1
EP3688394A1 EP18799591.5A EP18799591A EP3688394A1 EP 3688394 A1 EP3688394 A1 EP 3688394A1 EP 18799591 A EP18799591 A EP 18799591A EP 3688394 A1 EP3688394 A1 EP 3688394A1
Authority
EP
European Patent Office
Prior art keywords
resistance
heating
thermal
thermal device
heating zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP18799591.5A
Other languages
German (de)
English (en)
Inventor
Sven GRUBER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
X Fab Semiconductor Foundries GmbH
Original Assignee
X Fab Semiconductor Foundries GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by X Fab Semiconductor Foundries GmbH filed Critical X Fab Semiconductor Foundries GmbH
Publication of EP3688394A1 publication Critical patent/EP3688394A1/fr
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
    • F27D21/0014—Devices for monitoring temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F27B17/0016—Chamber type furnaces
    • F27B17/0025—Especially adapted for treating semiconductor wafers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/14—Measuring resistance by measuring current or voltage obtained from a reference source
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/52—Testing for short-circuits, leakage current or ground faults
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0233—Industrial applications for semiconductors manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • F27D2019/0006—Monitoring the characteristics (composition, quantities, temperature, pressure) of at least one of the gases of the kiln atmosphere and using it as a controlling value
    • F27D2019/0025—Monitoring the temperature of a part or of an element of the furnace structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08—Measuring resistance by measuring both voltage and current

Definitions

  • TTEELL ((TTookkyyoo EElleeccttrroonn LLiimmiitteedd)) ..
  • US 2010/14749 (Turlure, STM) relates to a wafer oven (there page 10, column 3, paragraphs 45, 46) in which a temperature sensor 29 is arranged. If the measured temperature exceeds a threshold set by the camera 26 mounted there, the oven becomes too hot, or too hot, and the camera used to position the wafer could be damaged. A detection of a failure of the furnace for wafers is not intended here (and also impossible).
  • US 2009/237102 AI (Lou, Star Technologies) describes a heater for semiconductors and has a temperature control to control the temperature of the furnace. In addition, test signals are provided for the semiconductors in the oven.
  • the claimed invention relates to monitoring of the aforementioned individual heating zones (in each of which at least one heating element is located) on premature wear, and thus all heating zones together. Also several systems, each with several heating zones.
  • the mentioned heater from TEL is a vertical 5-zone heater operating in the range of 600 ° C to 1150 ° C. Due to the vertical arrangement and the high
  • Every process loss has a production loss of at least 150 wafers
  • the invention is based on the following technical problem ...
  • the invention is concerned with the prevention of wafer losses with values of up to 150,000 EUR per batch.
  • the claimed invention detects early wear (touching the elements or areas of
  • Heater winding to minimize or eliminate the loss of the wafer and to better plan the availability of personnel and materials.
  • this is done by a permanent measurement of the resistance (obtained from measurements of voltage and current) of each heating zone.
  • the current value of the resistor is compared with the previous value. Even at a low Deviation in the resistance value, an alarm (a warning) is generated for the system, well in time before a failure of an entire heating coil.
  • the invention uses the effect that a real-time detection in the individual heating zones is permanently implemented and thus early contact within the winding is detected before it finally comes to the winding break. These are the expected error (which is already issued as an alarm message) and the real error (which comes as a winding break).
  • the advantages achieved by the invention are in particular that the risk of wafer loss can be significantly minimized by detection of an impending failure, the system is already stopped and z. B. the five-zone heater can be replaced preventively, or even individual heating zones are renewed, or the thermal device is not started before a repair is not done.
  • the claimed screen display (e.g., claim 20) enables a
  • Parameters of the thermal devices and a measurement and detection window area for representing technical measured values calculated values of the thermal devices preferably several independent latter
  • Figure 1 Example of a winding contact of a resistor 1 in a heating zone.
  • FIG. 2 A schematic circuit diagram of the heating (in the plant 100)
  • FIG. 1 A circuit diagram of the heater on the high-voltage side
  • FIG. 3 shows an example of a voltage converter 21 from the group 20 of voltage transformers.
  • FIG. 4 shows an example of a current sensor 31 from the group 30 of FIG.
  • Figure 6 a block diagram of the resistance measurement and system monitoring.
  • FIGS. 6b flowchart of a program-technical solution of the
  • FIGS. 8 software tabs as a screen image
  • FIG. 9 software register as screen display
  • Plant pages 212, 212a ... as USER interface (s).
  • FIG. 12 Software registers as screen display, UI evaluation 214.
  • Figures 13 early detection of a first winding contact event 310, divided into two sheets 13-1 and 13-2.
  • FIG. 14 shows the premature detection of a second winding contact event 310 ', divided into two sheets 14-1 and 14-2.
  • FIG. 1 An enlarged illustration of a winding, that is to say a resistor 1 as a heating coil in a wound, planar form, is illustrated in FIG.
  • a winding contact Fi is to be shown, which has arisen in the region of a resulting winding damage F (in a circle) by touching two adjacent Schudrahtabitesen (in black and dark).
  • the center of the helix is not shown, it is above to assume about twice the height of the picture.
  • the section is shown at a lower (right) edge region and it is explained on the basis of the resistance 1 in the heating zone 1 'such a coil.
  • the heating wire is consistently a piece, which winds winding or helically around a center outward.
  • Sections of the heating wire (dark in the picture) is an insulating material (in the picture bright). In the edge area, individual numbered sections of this heating wire can be seen. Sections 1.4, 1.3, 1.2 and 1.1 are adjacent sections of the
  • the outermost wire or line section 1.1 performs under all webs 1.10 to 1.14. It begins in the picture on the left, under bridge 1.10 leads to the right, and gets to the bridge 1.11, 1.12, then to the
  • the webs have approximately the same circumferential distance angles, but are in their
  • the insulating zone is 1.6.
  • the webs are based on the insulation zones between the heating wire sections (shown brighter). Even further inside is the next isolation zone 1.5, at the section 1.4 of the heating wire adjoining inside.
  • the previously described line sections 1.4, 1.3, 1.2 and 1.1 continue the heating wire.
  • Line sections 1.3 and 1.4 takes place in the gutter section OCF.
  • This local case of touch which causes a circumferential coil (approximately 360 °) to be short-circuited, will result in a fault.
  • This fault situation can have the effect that the entire heating coil 1 fails if at one point Fi an excessive heating occurs, which can lead to a line break.
  • FIG. 1 A schematic diagram of the structure is illustrated with FIG. 1
  • a voltage at each of the resistors 1 to 5 is measured by means of an optically isolated voltage converter 20 (from FIG. 3) directly at each heating zone 1 'to 5'.
  • a current detection 30 of each zone 1 'to 5' is realized via in each case a contactless Hall current sensor (from FIG. 4) between phase A to E and SCR unit 40 (thyristor block or heater control).
  • FIG. 2 shows a group 20, 30 of transducers, wherein two of the transducers 21, 31 are assigned to a zone 1 '.
  • a current detection 31 and a voltage converter 21 (collectively also called “converter") form the measured values of the resistance 1 of a heating zone 1 '.
  • Voltage sensors 20 use a ⁇ 15V DC voltage as a potential-separated supply voltage.
  • an 8-slot housing is used for modules ml to m7, wherein in each module an analogue detection area 30a for current and a voltage analogue detection area 20a is provided.
  • the eight-slot package is an exemplary NI-cDAQ 9188 from National Instruments. It accommodates the 7 analog input modules (16 analog inputs per module) and one solid state relay module 60 with eight SSR relays 61 to 68 (see Figure 5).
  • FIG. 6 example of a (total) system 100, of which seven may be present in the expansion stage proposed here.
  • the unit 100 is distributed on four sheets, which are to be put together as shown in the upper right for Figure 6 on sheet 6-1.
  • Each system has an electrical control box in which the voltage transformers 20 and power supply 80 are implemented at ⁇ 15V (DCV).
  • suppression capacitors can be integrated with the current sensors 30, since these are mounted directly in the vicinity of power transformers in the system.
  • shielded multi-core cables can be used.
  • Non-flammable lines can be used to pick up the voltages.
  • Thyristorblock 40 can be seen.
  • Their control corresponds to the usual procedure and will not be explained in detail here. The effect of their control already.
  • the five zones 1 'to 5' can be seen in the thermal system 100 of Figure 2, they are there marked with five resistors 1 to 5, of which each resistor is located in a zone.
  • the resistors are called as the zones, ie resistor 1 in zone 1 ', resistor 2 in zone 2', resistor 3 in zone 3 ', resistor 4 in zone 4' and resistor 5 in zone 5 '.
  • resistors are all connected in series in the example, it is also possible to use an upper resistor (top) and a lower resistance (bottom).
  • each resistor for example, resistor 1, as a helix (heating coil) is formed.
  • the voltages at the resistors ie each voltage at each resistor, is determined via the voltage sensors 20 mentioned.
  • a voltage sensor 21 is provided in the heating zone 1 'at the resistor 1. All other voltage sensors 22, 23, 24 and 25 correspond to the heating zones 2 ', 3', 4 'and 5', and the associated
  • Resistor 1 (the heating coil 1) in the heating zone 1 '.
  • a current IA is drawn in, from the (later) to be explained potential-free secondary load voltage A via the current measurement 31, the bidirectionally connected thyristors 41, the associated line to BN then in the heating zone 1 'through the resistor 1 and at the end over the connection line AN flows.
  • This current is an alternating current and it comes from a voltage which will be explained below with reference to FIG. 2a.
  • This voltage A has a phase and a neutral conductor AN, which are here named "Top". They come from a winding on a common transformer core, of which windings there are five in the example. These windings and their outputs from each phase and neutral, each potential-free, are named A, B, C, D and E. They are connected to the associated phase inputs A, B, C, D and E of the thyristor block 40
  • the heating transformer 110 has a primary high input voltage, which may be between 300V and 600V, preferably at 380V nominal AC voltage.
  • the associated input circuit of three phases U, V and W is connected to three windings Wl, W2 and W3 in a delta connection, which are wound on a common core.
  • This transformer core has five potential-free secondary windings on the secondary side which match the number of heating zones in the thermal system 100.
  • Each secondary winding supplies a heating zone and, after the heating zones are connected in series with their resistors, can also be connected to each winding via the
  • Thyristor block 40 and the bidirectional thyristors present therein an individual heating of the respective zone The switches shown in FIG. 2a turn on the heating zones and their supply voltage, they are here summarily called "Sch", and can be found in the figure quartet in the lower left corner of FIGS. The voltages shown there correspond to the voltages A to E (from top to bottom). On the right, the thyristors of the thyristor block 40 can be seen.
  • the current levels of the supply of the heating transformer 110 are adapted to the current compatibility of the resistors 1 to 5. They are between 30A and 55A. Also the
  • Voltages of the secondary windings of the heating transformer 110 are matched and are between 75V to 165V.
  • the resistances in the heating zones have values between 1.8 ⁇ to 4.5 ⁇ in the middle temperature range and between 0.25 ⁇ and 0.9 ⁇ in the high temperature range.
  • the currents can be up to 150A.
  • the resistors can have resistance values below 1 ⁇ .
  • Resistance It is designed as a helix, as can be seen in FIG. Its operational value (here called resistance value) is Ri.
  • the heating zone 1 ' is in this example, the upper heating zone "Top" and has the
  • the voltage transformers 20 are shown in Figure 3, as Aufsteckgephaseuse (for a Aufschnapp-rail not shown). They have input connections and
  • FIG. 4 shows an example of a current sensor 31, which measures the current without potential, which current is supplied from the thyristor block 40 to the bipolar thyristor 41, for example.
  • thermal plant 100 are assigned to a module.
  • FIG. 6a is a schematic block diagram (as a circuit) can be seen, as it can be realized for a zone and a resistor disposed therein.
  • this scheme can also be transferred to multiple zones, or multidimensionally considered each
  • Function block 50, 52, ... is present as often as there are resistances in a thermal system to measure, either in a thermal plant 100 or across plants, when multiple systems, such as seven systems, each with five heating zones are monitored ,
  • zone 1 the monitoring will be explained with reference to FIG. 6a.
  • AC voltage is preferably RMS values, not instantaneous values.
  • Both measured signals, the voltage and the current at the instant i, are supplied to the arithmetic unit 50 in order to calculate therefrom a resistance value Ri (i) belonging to a time value as time stamp i.
  • This measurement and this calculation takes place permanently during the operation of the system 100 and the resistance values Ri (i) continuously determined during this process are stored in the intermediate memory 52.
  • This buffer 52 outputs the current value and a previous value, in particular the immediately preceding value, and thus supplies a comparator or a difference former 54.
  • the two resistance values Ri (i) and Ri (i-l) are subtracted or compared in their value and the comparison result, in particular the difference ARi (i), of these two values is output.
  • the output of the difference ARj (i) is provided to a threshold switch 56 which responds when a predetermined difference value AR is exceeded (also referred to as upper and lower limit windows) and the threshold switch 56 provides a signal to one of the SSR relays 60 from which triggers an alarm signal 90.
  • the multiple SSR relays 60 can be seen in FIG. 6, one of them, the SSR 61 is here at
  • Heating coil 1 of the thermal system 100 active.
  • the injected deviation AR defines the responsiveness and indicates whether an error case F caused by contact of two adjacent heater wire sections in the area Fi is in progress or already in progress.
  • the alarm 90 on this detected error case is thus generated, well before a failure of a whole heating coil or heating coil 1, which was used here as an example in Figure 6a and in Figure 1.
  • a measurement data acquisition and monitoring can also be done by program technology, which illustrate Figure 6b.
  • the programmed technical flow chart is 190. It works with real measured values from an operating procedure (like a process computer to be assigned to a technical area that does not process abstract data, and therefore is not a "data processing system as such").
  • the acquisition of the current and voltage signals (ie the measured values) is realized simultaneously with 5,000 values / sec per analog input across all plants 100,
  • a measuring interval is 4 sec, which corresponds to a total of 20,000 values per analog input.
  • the complete measurement data packet can be sent over a network, e.g. are transmitted via Ethernet (not shown) to a controller programmed with (technical) software, which implements the function of the FIG. 6a shown as a circuit or is recorded in the software flowchart 190.
  • Thyristor control 40 of each system 100 This switches depending on
  • Half-wave depending on the performance can influence each other and so one
  • function 122 it may be checked whether there are a minimum number of periods, e.g. five periods. If not, then this data is ignored, branch 122a. This is particularly useful because when cooling the heater, the power can be less than 3% and thus could have a not sufficient number of raw data (first threshold) for optimal RMS formation.
  • the resistance value of each heating element is determined according to Ohm's law with the function 140 and stored with a time stamp in a suitable file, in particular a text file.
  • the power curve is controlled with the function 142 from the determined resistance value with the square values of voltage and current, to additionally rule out that the signal is disturbed. If the difference in the comparison 144 is greater than a default (a second threshold), the measured data (the measurement interval) of the affected heater zone is also ignored, branch 144a, function 145.
  • the raw data are stored in order to be able to carry out an analysis of the signal profiles afterwards. It can also be evaluated whether the thyristor pair for the positive or negative half-wave is defective. This is determined in the process and displayed in text form.
  • the resistance difference ARabsoiut can be applied to the previous or current measurement value Rj (i) or j (il) is related to be expressed as a percentage as AR re iativ, thus for the i-th measurement of zone j gives ⁇ Rj (i) - Rj (i-1) ⁇ / Rj (i).
  • the path 151a is taken in the process, otherwise branch 151b, which leads back to the function 110, as well as the branching return paths 122a and 145a as consequences of unachieved thresholds.
  • the various inserted thresholds should be selected again. They serve to verify a result that is not as simple as
  • Alarm error case 151, 151a and the alarm generation 161 is assumed, but can go through several plausibility checks, whether it is really a real error (in the sense of an expected real error), not just an unfortunate reading or a disturbance.
  • thyristor control 40 operates on a pulse packet control assumed here in the example, ie it always transmits an entire sine wave and blocks one or more sine waves, at low powers, e.g. less than 3%, many solid waves are blanked out by 360 ° and only one or a few full waves are switched through
  • first threshold For example, a full-wave through and five full waves. For example, at higher currents, eight fullwaves are turned on and two fullwaves are matched. The latter case would support query 122 and say that there are sufficient measurements for RMS calculation.
  • a second threshold is in the control of active power over current and voltage. If the resistance has been calculated in function 140, it can also be used to calculate the active power delivered to the system or to the zone, both by voltage and by current. Both calculated process values of the active power are available and help to detect faults. This should be referred to as the second threshold, which is not a true threshold, but only a threshold or switching threshold to prevent any further transmission of disturbances or false alarms.
  • a third threshold is in the query 151.
  • the difference to be detected between the measured and the previously measured resistance value (or a previously measured resistance value) becomes a minimum
  • One, two or all of the three thresholds help ensure safety and security
  • Suitable values for the minimum number of periods are the number of at least five consecutive voltage periods.
  • each with the previously calculated resistance is in a range of less than 5%, preferably less than 2%.
  • GUI Functional software interface
  • GUI graphical user interface
  • the graphical user interface may be composed of multiple tabs 210.
  • the following properties can be set ...
  • Threshold in the form of eight windows
  • the measuring system is configured at 221 (in the lower rider).
  • the limits are configured or determined in sub-tab 222 by +/- limits so that the limits of ⁇ 2.5% set here for PHOT-0400, for example, indicate a range within which no warning or no Alarm is output.
  • field 223 with graphically activatable keys or areas is turned on, in which the eight systems mentioned are activated for data acquisition.
  • the evaluation is in sub-tab 224, where each plant from PHOT-0400 to PHOT-1400 is mapped in area 224a with all its zones, here five zones each (Bottom, CTR1, CTR2, CTR3 and Top).
  • This graphical tab accessed via tab 211, thus has the characteristics of the configuration of the measuring system, the configuration of the limits, the alarm evaluation and additionally a field which activates the data acquisition at each of the several thermal systems.
  • the change in resistance (see also FIG. 11) can also be viewed over time since the mean value is formed and stored for each time interval. Under a UI evaluation (see Figure 12), the raw data of voltage and current can be viewed in case of error.
  • tabs 212, 212a, 212b, etc. will be illustrated here with reference to FIG. Each attachment is shown here in more detail and has a chart 232 showing the course of resistance over time. Only the tab 212 will be explained here, in the same way the tabs 212a, 212b are formed and functionally realized. The user leaves the home page of the
  • Alarm event but depends on the settings of the parameters on the start page 211 of the GUI.
  • the configurations are concentrated on the homepage 211.
  • the plant results on the tabs 212, 212a, ... with associated alarm message 90 for each Plant and within the plant for all existing zones, in the example five zones per plant 10 in the entire plant 100.
  • an error message from the thyristor unit 40 may be included among the alarms, not just the detection of a resistive coil that is going to be damaged.
  • the tabs 213 (FIGS. 10 and 11) as well as the UI evaluation 214 (in FIG. 12) are used for checking and retrospectively considering an error development. Often it is useful to reproduce and look at the exact course of the error later, it is often helpful to analyze why an error was detected or how it was detected and last but not least it makes sense to analyze an accidentally reported alarm also why this was recognized, although he should not have been recognized. All these tasks are served by the records of the past (History, tab 213) and the recordings of the measurements of the drift of the resistance, how it behaves in the long term. For this purpose, the mean value per day is entered, for example, according to FIG. 11, wherein the illustrated scaling of the x-axis between two vertical sections respectively in FIGS.
  • the measurement data is being condensed more and more, so that they also allow long-term statements and assessments, as well as short-term determination in the minute grid.
  • the paged-out data can be read in via field 235 (a text file is provided to make this data available).
  • drift data can be read in via field 236, as illustrated in FIG. 11, in each case system-related, function field 237. Reading the drift data over a longer period of more than one day (the history data of FIG 24 hours from day) can be reached over the two-month grid of FIG. 11 and the chart drift data 234 '.
  • the monitoring and control also serves a record of the voltage curve over the activatable field 240 comparable to the resistance value.
  • the voltage curve 241 appearing on the x-axis is based on the number of pulses
  • FIGS. 13 and 14 show, as mentioned above, that premature detection of a winding contact was possible, designated as the first event in FIGS. 13 and 14 as the second event.
  • the PHOT-1000 system is functional
  • Selection box 237 is selected and in both representations a scaling of 2h per scale grid is used.
  • the time range 300 is increased out than 300 'in order to illustrate the beginning of the error case (a resistance change of 7% occurs) at the time 310.
  • the breaking of the resistance is shown at 320 after 5h as a real error case.
  • the (actual) error case is earlier in time and is already classified by the system as an error case, before the real error causes the thermal system to fail (and makes the batch of the load unusable).

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  • Mechanical Engineering (AREA)
  • Control Of Resistance Heating (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Electric Stoves And Ranges (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

L'invention vise à éviter les pertes de plaquettes lors d'un traitement thermique. Les plaquettes représentent une valeur de jusqu'à 150.000 euros par charge. Aucun arrêt non planifié du dispositif thermique destiné au traitement des plaquettes ne doit donc plus survenir. La solution selon l'invention de surveillance du ou des dispositifs thermiques 100 destiné(s) à recevoir et à traiter thermiquement des lots ou des charges de tranches utilise une mesure, appliquée de manière durable, d'une valeur de résistance Ri dans au moins une zone chauffante 1' parmi plusieurs zones chauffantes 1', 2', 3', 4', 5' du dispositif thermique. La valeur en cours R1(i) à chaque fois mesurée de la résistance 1 dans la zone chauffante associée 1' est comparée à une valeur R1(i-1) mesurée préalablement de la même résistance 1. Lors de la détection d'une déviation ΔRi par la comparaison des deux valeurs de résistance de la même zone chauffante 1', une alerte ou une alarme 90 est déjà générée pour le dispositif thermique 100, qui est située, d'un point de vue temporel, avant un arrêt de toute une zone chauffante 1 dans le dispositif thermique 100. Une meilleure aptitude à la planification de ressources est un autre but.
EP18799591.5A 2017-09-25 2018-09-25 Surveillance en temps réel d'un four vertical à plusieurs zones, dotée d'une détection précoce de l'arrêt d'un élément de zone chauffante Pending EP3688394A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017122205 2017-09-25
DE102018101010.9A DE102018101010A1 (de) 2017-09-25 2018-01-18 Echtzeit Monitoring eines Mehrzonen-Vertikalofens mit frühzeitiger Erkennung eines Ausfalls eines Heizzonen-Elements
PCT/IB2018/057414 WO2019058358A1 (fr) 2017-09-25 2018-09-25 Surveillance en temps réel d'un four vertical à plusieurs zones, dotée d'une détection précoce de l'arrêt d'un élément de zone chauffante

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EP3688394A1 true EP3688394A1 (fr) 2020-08-05

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EP18799591.5A Pending EP3688394A1 (fr) 2017-09-25 2018-09-25 Surveillance en temps réel d'un four vertical à plusieurs zones, dotée d'une détection précoce de l'arrêt d'un élément de zone chauffante

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US (1) US20200411343A1 (fr)
EP (1) EP3688394A1 (fr)
JP (2) JP7271520B2 (fr)
KR (1) KR102598971B1 (fr)
CN (1) CN111433547A (fr)
DE (1) DE102018101010A1 (fr)
TW (1) TWI808996B (fr)
WO (1) WO2019058358A1 (fr)

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CN113063999B (zh) * 2021-03-11 2023-08-18 北京北方华创微电子装备有限公司 半导体工艺设备中加热器的诊断方法及系统
CN116302773A (zh) * 2021-12-03 2023-06-23 株洲瑞德尔智能装备有限公司 一种烧结设备的故障监测方法及装置

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Publication number Publication date
WO2019058358A1 (fr) 2019-03-28
TWI808996B (zh) 2023-07-21
JP7271520B2 (ja) 2023-05-11
JP2020535646A (ja) 2020-12-03
CN111433547A (zh) 2020-07-17
DE102018101010A1 (de) 2019-03-28
JP2023109763A (ja) 2023-08-08
US20200411343A1 (en) 2020-12-31
TW201923368A (zh) 2019-06-16
KR102598971B1 (ko) 2023-11-03
KR20200100602A (ko) 2020-08-26

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