FR2934083B1 - Procede et dispositif de reglage de la position de depot d'une plaquette de semi-conducteur dans un four - Google Patents

Procede et dispositif de reglage de la position de depot d'une plaquette de semi-conducteur dans un four

Info

Publication number
FR2934083B1
FR2934083B1 FR0804063A FR0804063A FR2934083B1 FR 2934083 B1 FR2934083 B1 FR 2934083B1 FR 0804063 A FR0804063 A FR 0804063A FR 0804063 A FR0804063 A FR 0804063A FR 2934083 B1 FR2934083 B1 FR 2934083B1
Authority
FR
France
Prior art keywords
oven
adjusting
semiconductor wafer
deposition position
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0804063A
Other languages
English (en)
Other versions
FR2934083A1 (fr
Inventor
Sebastien Turlure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Rousset SAS
Original Assignee
STMicroelectronics Rousset SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics Rousset SAS filed Critical STMicroelectronics Rousset SAS
Priority to FR0804063A priority Critical patent/FR2934083B1/fr
Priority to US12/504,361 priority patent/US20100014749A1/en
Publication of FR2934083A1 publication Critical patent/FR2934083A1/fr
Application granted granted Critical
Publication of FR2934083B1 publication Critical patent/FR2934083B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
FR0804063A 2008-07-17 2008-07-17 Procede et dispositif de reglage de la position de depot d'une plaquette de semi-conducteur dans un four Expired - Fee Related FR2934083B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0804063A FR2934083B1 (fr) 2008-07-17 2008-07-17 Procede et dispositif de reglage de la position de depot d'une plaquette de semi-conducteur dans un four
US12/504,361 US20100014749A1 (en) 2008-07-17 2009-07-16 Method and device for adjusting the deposit position of a semiconductor wafer in an oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0804063A FR2934083B1 (fr) 2008-07-17 2008-07-17 Procede et dispositif de reglage de la position de depot d'une plaquette de semi-conducteur dans un four

Publications (2)

Publication Number Publication Date
FR2934083A1 FR2934083A1 (fr) 2010-01-22
FR2934083B1 true FR2934083B1 (fr) 2010-09-10

Family

ID=39870111

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0804063A Expired - Fee Related FR2934083B1 (fr) 2008-07-17 2008-07-17 Procede et dispositif de reglage de la position de depot d'une plaquette de semi-conducteur dans un four

Country Status (2)

Country Link
US (1) US20100014749A1 (fr)
FR (1) FR2934083B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102362654B1 (ko) 2015-07-03 2022-02-15 삼성전자주식회사 오븐
DE102018101010A1 (de) 2017-09-25 2019-03-28 X-Fab Semiconductor Foundries Ag Echtzeit Monitoring eines Mehrzonen-Vertikalofens mit frühzeitiger Erkennung eines Ausfalls eines Heizzonen-Elements
US11876036B2 (en) 2020-06-18 2024-01-16 The Research Foundation For The State University Of New York Fluid cooling system including embedded channels and cold plates

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL123575A (en) * 1998-03-05 2001-08-26 Nova Measuring Instr Ltd Method and apparatus for alignment of a wafer
US7109483B2 (en) * 2000-11-17 2006-09-19 Ebara Corporation Method for inspecting substrate, substrate inspecting system and electron beam apparatus
US7233841B2 (en) * 2002-04-19 2007-06-19 Applied Materials, Inc. Vision system
US7054477B2 (en) * 2002-11-13 2006-05-30 Uni-Tek System, Inc. Automatic accurate alignment method for a semiconductor wafer cutting apparatus
KR100717282B1 (ko) * 2006-02-06 2007-05-15 삼성전자주식회사 반송장치의 위치 교정 방법 및 툴
JP4887913B2 (ja) * 2006-06-02 2012-02-29 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体

Also Published As

Publication number Publication date
US20100014749A1 (en) 2010-01-21
FR2934083A1 (fr) 2010-01-22

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Effective date: 20150331