EP3650911A4 - Optical device - Google Patents
Optical device Download PDFInfo
- Publication number
- EP3650911A4 EP3650911A4 EP18827806.3A EP18827806A EP3650911A4 EP 3650911 A4 EP3650911 A4 EP 3650911A4 EP 18827806 A EP18827806 A EP 18827806A EP 3650911 A4 EP3650911 A4 EP 3650911A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- optical device
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0118—Cantilevers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0136—Comb structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017133093 | 2017-07-06 | ||
JP2017235025 | 2017-12-07 | ||
PCT/JP2018/025637 WO2019009395A1 (en) | 2017-07-06 | 2018-07-06 | Optical device |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3650911A1 EP3650911A1 (en) | 2020-05-13 |
EP3650911A4 true EP3650911A4 (en) | 2021-03-24 |
EP3650911B1 EP3650911B1 (en) | 2023-08-30 |
Family
ID=64951103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP18827806.3A Active EP3650911B1 (en) | 2017-07-06 | 2018-07-06 | Optical device |
Country Status (5)
Country | Link |
---|---|
US (1) | US11733509B2 (en) |
EP (1) | EP3650911B1 (en) |
JP (1) | JP6503151B1 (en) |
CN (1) | CN110799884B (en) |
WO (1) | WO2019009395A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6778134B2 (en) * | 2017-03-14 | 2020-10-28 | 浜松ホトニクス株式会社 | Optical module and its mounting method |
US11513339B2 (en) | 2017-03-14 | 2022-11-29 | Hamamatsu Photonics K.K. | Optical module |
CN110392858B (en) | 2017-03-14 | 2021-08-13 | 浜松光子学株式会社 | Optical module |
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2018
- 2018-07-06 CN CN201880042645.8A patent/CN110799884B/en active Active
- 2018-07-06 EP EP18827806.3A patent/EP3650911B1/en active Active
- 2018-07-06 WO PCT/JP2018/025637 patent/WO2019009395A1/en unknown
- 2018-07-06 JP JP2019503585A patent/JP6503151B1/en active Active
- 2018-07-06 US US16/625,695 patent/US11733509B2/en active Active
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JP2010008611A (en) * | 2008-06-25 | 2010-01-14 | Panasonic Electric Works Co Ltd | Movable structure and micromirror element using the same |
US20110090551A1 (en) * | 2009-10-15 | 2011-04-21 | Tjalf Pirk | Micromechanical assembly having a displaceable component |
Also Published As
Publication number | Publication date |
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EP3650911B1 (en) | 2023-08-30 |
US11733509B2 (en) | 2023-08-22 |
EP3650911A1 (en) | 2020-05-13 |
JP6503151B1 (en) | 2019-04-17 |
TW201906780A (en) | 2019-02-16 |
WO2019009395A1 (en) | 2019-01-10 |
CN110799884A (en) | 2020-02-14 |
JPWO2019009395A1 (en) | 2019-07-18 |
CN110799884B (en) | 2022-03-01 |
US20210155471A1 (en) | 2021-05-27 |
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