JP6015564B2 - Optical scanning device - Google Patents

Description

  The present invention relates to an optical scanning device that scans a light beam.

In recent years, various optical scanning devices using MEMS (Micro Electro Mechanical System) technology have been proposed for the purpose of downsizing the optical scanning device (see, for example, Patent Document 1).
This type of optical scanning device can be applied to various fields. When applied to the vehicle field, for example, it is used for irradiation of radar light for detecting obstacles and the like around the vehicle. It is used to irradiate video light for displaying an image on a windshield or the like.

  For example, in such a vehicle field, the focal length of radar light is adjusted according to the position of the obstacle in order to increase the accuracy of obstacle detection, or the focal length of video light is set to the front to improve the visibility of the display image. There is a need to adjust according to the irradiation position on the free curved surface of glass.

  Here, in Patent Document 2, as a driving mechanism for adjusting the focal length of the light beam reflected by the reflecting mirror, the proximity portion of the reflecting mirror in the diaphragm is deformed by heating, and thereby the reflecting mirror is deformed. A mechanism for changing the radius of curvature (hereinafter referred to as “thermal actuator”) is disclosed.

JP 2011-203575 A Japanese Patent No. 4476080

  However, when the above-described thermal actuator is used in the optical scanning device, since it takes a relatively long time from setting the heating temperature to actually reaching the set temperature and obtaining the desired deformation amount, the focal length of the light beam There is a concern that the response speed at the time of adjusting becomes slow, and such a delay in the response speed may cause a delay in the scanning speed of the light beam, which may make it difficult to detect an obstacle or display an image.

  The present invention has been made in view of the above-described concerns and the like, and an object thereof is to provide an optical scanning device capable of suitably improving the responsiveness when adjusting the focal length of a light beam as compared with the conventional configuration. .

  The present invention, which has been made to achieve the above object, is an optical scanning device for scanning a light beam, and includes a diaphragm supported by a fixed part through a first beam part so as to vibrate, and supported by the diaphragm. A mirror portion having a reflection surface for reflecting the light beam, a first drive mechanism for vibrating the diaphragm, and a second drive mechanism for adjusting the focal length of the light beam reflected by the reflection surface of the mirror portion And drive control means for driving and controlling the first drive mechanism and the second drive mechanism.

  Of these, the second drive mechanism generates a magnetic field in the same direction as or opposite to the static magnetic field of the mirror static magnetic field generating unit when energized, and a mirror static magnetic field generating unit that generates a static magnetic field in a direction perpendicular to the back surface of the mirror unit. The mirror unit is configured to be deformed by an attractive repulsion force as an interaction between the energized mirror driving coil and the static magnetic field of the mirror static magnetic field generating unit.

  The mirror static magnetic field generation unit is disposed opposite to the mirror unit on the back side of the reflection surface of the mirror unit, and the mirror drive coil is laid on the mirror unit on the back side of the reflection surface of the mirror unit.

  The drive control means supplies a current for deforming the mirror portion (hereinafter referred to as “deformation drive current”) to the mirror drive coil so that the radius of curvature of the reflection surface becomes a target value corresponding to the focal length of the light beam. Supply.

  In other words, in the present invention, when a deformation driving current is supplied to the mirror driving coil, the magnetic force generated between the mirror driving coil and the static magnetic field of the mirror static magnetic field generating unit causes an attractive force working between different polarities or between the same polarity. The mirror part is deformed by applying a working repulsive force (suction repulsive force), and this changes the radius of curvature of the reflecting surface of the mirror part, thereby the focal length of the light beam reflected by the reflecting surface of the mirror part. Will be changed.

  Therefore, according to the present invention, when the deformation drive current is supplied to the mirror drive coil without waiting for the time until the set temperature is actually reached after setting the heating temperature as in the above-described thermal actuator, Since the mirror portion can be deformed (and consequently the radius of curvature of the reflecting surface can be changed) by the suction repulsive force, the responsiveness when adjusting the focal length of the light beam can be suitably enhanced as compared with the conventional configuration. .

  The relationship between the radius of curvature of the reflecting surface and the focal length of the light beam can be obtained in advance by simulation or the like. Further, the radius of curvature of the reflecting surface (and hence the focal length of the light beam) and the value of the deformation drive current This relationship can be obtained in advance by experiments or the like. Therefore, the drive control means can set the value of the deformation drive current at which the radius of curvature of the reflecting surface becomes a target value corresponding to the focal length of the light beam based on these relationships.

  Further, in the present invention, the mirror static magnetic field generation unit is only required to be formed in such a size that the static magnetic field acts on at least the mirror drive coil. You may form in the magnitude | size which acts also with respect to it.

  In the latter case, the first drive mechanism has a sub drive coil that is laid in the proximity portion of the diaphragm and generates a magnetic field in a direction opposite to the magnetic field generated in the mirror drive coil by energization. Due to the attractive repulsive force as an interaction between the drive coil and the static magnetic field generating part of the mirror, a force in the direction opposite to the direction in which the diaphragm tries to displace with the deformation of the mirror part is applied to the diaphragm. It should be configured.

  According to such a configuration, when the mirror portion is deformed while vibrating the vibration plate, it is possible to prevent the vibration plate from being pulled and displaced by the mirror portion. When adjusting the focal length of the light beam, the accuracy of light beam scanning can be suitably maintained.

By the way, in the present invention, the first drive mechanism may be at least a mechanism for vibrating the diaphragm, but may be configured as follows, for example.
That is, the first drive mechanism is disposed apart from the mirror static magnetic field generation unit and generates a static magnetic field in a direction acting on the diaphragm, and faces the main static magnetic field generation unit in the diaphragm. A main drive coil at least partially laid at a position, and configured to vibrate the diaphragm by the interaction between the energized main drive coil and the static magnetic field of the main static magnetic field generation unit, The drive control means performs current control on the main drive coil.

In this case, since the first drive mechanism and the second drive mechanism can be configured by the plurality of static magnetic field generation units and the drive coils, the configuration of the optical scanning device can be made relatively simple.
The drive control means also supplies a current (hereinafter referred to as “vibration drive current”) for applying a periodic excitation force to the diaphragm so that the amplitude of the diaphragm becomes a target value corresponding to the scanning region of the light beam. You may supply to a main drive coil.

  The relationship between the amplitude of the diaphragm and the scanning region of the light beam can be obtained in advance by simulation or the like, and the relationship between the amplitude of the diaphragm (and thus the scanning region of the light beam) and the value of the vibration driving current. The property can be obtained in advance by experiments or the like. Therefore, the drive control means can set the value of the vibration drive current at which the amplitude of the diaphragm becomes a target value corresponding to the scanning region of the light beam based on these relationships.

  According to such a configuration, for example, the diaphragm and the mirror can be suitably resonated, so that the scanning speed of the light beam can be increased. For example, obstacle detection and image display are performed in the vehicle field. A more suitable optical scanning device can be provided.

  Further, in the present invention, the diaphragm may be plate-shaped as the name suggests, but may be formed in a rectangular shape, for example. In this case, the main static magnetic field generator generates a static magnetic field in a direction parallel to the plate surface of the diaphragm, and the first drive mechanism interacts with the energized main drive coil and the static magnetic field of the main static magnetic field generator. It is preferable that the diaphragm be vibrated by the Lorentz force.

  According to such a configuration, since the main drive coil can be easily laid on the diaphragm by making the diaphragm rectangular, the configuration of the optical scanning device can be further simplified.

  Alternatively, in the present invention, the diaphragm may be formed in an H shape, for example. In this case, the main static magnetic field generating unit generates a static magnetic field in a direction perpendicular to the plate surface of the diaphragm, and the main drive coil generates a magnetic field in the same direction as or opposite to the static magnetic field of the main static magnetic field generating unit by energization. To do. The first drive mechanism may be configured to vibrate the diaphragm by an attractive repulsion force as an interaction between the energized main drive coil and the static magnetic field of the main static magnetic field generation unit.

  According to such a configuration, although the diaphragm is made in an H shape, the laying of the main drive coil on the diaphragm is slightly more complicated than when the diaphragm is rectangular, but the first beam portion is Since it can arrange | position close to the center side of a diaphragm, size reduction of an optical scanning device can be achieved.

  In the present invention, the mirror part is supported by the diaphragm via the second beam part so as to vibrate, and the drive control means is a first for vibrating the diaphragm about the first beam part as a rotation axis. A configuration may be employed in which the vibration drive current and the second vibration drive current for vibrating the mirror portion about the second beam portion as the rotation axis are supplied to the main drive coil.

  In this case, a two-dimensional optical scanning device using a two-degree-of-freedom vibrator can be suitably configured. The drive control means may supply the second oscillating current to the main drive coil superimposed on the first oscillating current in order to resonate the oscillating plate and the mirror unit, or the oscillating plate and the mirror unit individually. In order to vibrate, the first oscillating current and the second oscillating current may be supplied to the main drive coil at respective timings.

  Further, in the present invention, the mirror part includes an inner gimbal disposed between the diaphragm and the diaphragm, and the inner gimbal is supported by the diaphragm via the second beam part so as to vibrate. The inner gimbal is supported through the third beam portion so as to vibrate. The drive control means may be configured to supply a vibration drive current for simultaneously exciting the vibration system including the mirror portion, the inner gimbal, and the diaphragm to the main drive coil.

  In this case, a two-dimensional optical scanning device using a three-degree-of-freedom vibrator can be suitably configured.

It is a block diagram which illustrates the whole structure of an optical scanning device. It is a block diagram which illustrates the composition of the principal part of an optical scanning device. FIG. 3 is an image diagram illustrating the configuration of an optical scanning unit according to the first embodiment. FIG. 6 is an image diagram illustrating the configuration of an optical scanning unit according to a second embodiment. FIG. 6 is an image diagram illustrating the configuration of an optical scanning unit in Example 3. FIG. 10 is an image diagram illustrating a configuration of an optical scanning unit according to a fourth embodiment. FIG. 10 is an image diagram illustrating a configuration of an optical scanning unit according to a fifth embodiment. FIG. 10 is an image diagram illustrating the configuration of an optical scanning unit according to a sixth embodiment.

  An optical scanning device as an embodiment of the present invention will be described below with reference to the drawings. The optical scanning device according to the present embodiment is used for irradiation of radar light for detecting obstacles and the like around the vehicle, and is used for irradiation of video light for displaying an image on a windshield of the vehicle. It is something that is.

<Overall configuration>
As shown in FIG. 1, the optical scanning device 1 according to the present embodiment includes a light emitting unit 2, an input unit 3, a light emission control unit 4, an optical scanning unit 5, a drive control unit 6, and a data storage unit 7. It is configured with.

  The light emitting unit 2 irradiates the light scanning unit 5 with a light beam. For example, a laser light source that emits laser light as radar light, an LED light source that emits LED light of each color as video light, A light source prepared in advance according to an application such as image display, and an optical component such as a lens or a reflection mirror disposed on the optical axis of a light beam emitted from the light source are configured. In the light emitting unit 2, the above-described optical components are not essential, and may be arranged not in the light emitting unit 2 but in the subsequent stage of the optical scanning unit 5, and in the light emitting unit 2 in the subsequent stage of the optical scanning unit 5. May also be arranged.

  The input unit 3 inputs higher-level control commands related to obstacle detection, image display, and the like from another in-vehicle device (hereinafter referred to as “upper in-vehicle device”) mounted on the same vehicle. For example, the control commands input from the host vehicle apparatus include the irradiation direction and irradiation range of radar light, the position of an obstacle detected by the host vehicle apparatus, the irradiation direction and irradiation range of image light (each color), the windshield Any one of various information set by a higher-level in-vehicle device such as an irradiation position on a free curved surface is included.

  The light emission control unit 4 drives and controls the light emission unit 2 based on a control command input from a higher-level vehicle-mounted device via the input unit 3. For example, the light emission control unit 4 controls the irradiation intensity of the radar light, the color and brightness of the image light, the light emission timing of the light beam, and the like according to the scanning angle of the light scanning unit 5. In the present embodiment, information representing the scanning angle of the optical scanning unit 5 is input from the drive control unit 6.

  The optical scanning unit 5 scans the light beam emitted from the light emitting unit 2, and as shown in FIG. 2, the diaphragm 10, the first drive mechanism 20 for vibrating the diaphragm 10, and the vibration A mirror unit 30 having a reflecting surface 30a that is supported by the plate 10 and reflects a light beam, and a second drive mechanism 40 for adjusting the focal length of the light beam reflected by the reflecting surface 30a are configured. .

  The first drive mechanism 20 includes a main drive coil 21 and a main static magnetic field generation unit 22, and will vibrate due to the interaction between the energized main drive coil 21 and the main static magnetic field generation unit 22 as will be described in detail later. The plate 10 is configured to vibrate.

  The second drive mechanism 40 includes a mirror drive coil 41 and a mirror static magnetic field generation unit 42. As will be described in detail later, the mirror drive coil 41 and the static magnetic field of the mirror static magnetic field generation unit 42 that are energized mutually. The mirror part 30 is configured to be deformed by a suction repulsive force as an action.

  The drive control unit 6 controls the drive of the first drive mechanism 20 and the second drive mechanism 40 based on a control command input from a higher-level in-vehicle device via the input unit 3. For example, the drive control unit 6 applies a periodic excitation force to the diaphragm 10 so that the amplitude of the diaphragm 10 becomes a target value according to the irradiation region of the radar light or the image light (that is, the scanning region of the light beam). A vibration drive current for supplying the main drive coil 21 with a vibration and a vibration drive current for tilting the diaphragm 10 at an angle corresponding to the irradiation direction of the radar light or the image light (hereinafter referred to as “tilt drive current”). Is supplied to the main drive coil 21. Thus, the drive control unit 6 is configured to perform current control on the main drive coil 21 in order to vibrate the diaphragm 10. Note that the scanning angle of the optical scanning unit 5 described above is the rotation angle of the mirror unit 30 supported by the vibration plate 10. In the drive control unit 6, the vibration driving current supplied to the main driving coil 21 and the tilt driving are performed. It is calculated based on the value and direction of the current, the waveform, the time that these currents flow through the main drive coil 21, and the like.

  Further, the drive control unit 6 is reflected by the reflecting surface 30a of the mirror unit 30 and irradiated to the outside based on the position of the obstacle detected by the radar light, the irradiation position of the image light on the free curved surface such as the windshield, and the like. The deformation driving current for deforming the mirror unit 30 is applied to the mirror driving coil 41 so that the radius of curvature of the reflecting surface 30a becomes a target value corresponding to the focal length of the light beam. Supply. Thus, the drive control unit 6 is configured to perform current control on the mirror drive coil 41 in order to adjust the focal length of the light beam.

  Returning to FIG. 1, the data storage unit 7 stores data used when the drive control unit 6 controls the drive of the first drive mechanism 20 and the second drive mechanism 40. Specifically, for example, the relationship between the radius of curvature of the reflecting surface 30a and the focal length of the light beam, the radius of curvature of the reflecting surface 30a of the mirror unit 30 (and hence the focal length of the light beam), the value of the deformation drive current, etc. Is stored, and the drive control unit 6 determines that the radius of curvature of the reflecting surface 30a of the mirror unit 30 is based on the focal length of the light beam based on the data indicating these relationships. The value of the deformation drive current as a value is set.

  Further, the data storage unit 7 stores the relationship between the amplitude of the diaphragm 10 and the scanning region of the light beam, and the relationship between the amplitude of the diaphragm 10 (and thus the scanning region of the light beam) and the value of the vibration driving current. Based on the data indicating these relationships, the drive controller 6 determines the vibration drive current value at which the amplitude of the vibration plate 10 becomes a target value corresponding to the scanning region of the light beam. Settings are made. Further, data indicating the relationship between the tilt angle of the diaphragm 10 and the irradiation direction of the light beam, the tilt angle of the diaphragm 10 and the value of the tilt drive current, and the like are stored. Based on the data indicating these relationships, the inclination drive current value is set so that the inclination angle of the diaphragm 10 becomes a target value corresponding to the irradiation direction of the light beam. It is assumed that the various relationships described above are obtained in advance through experiments, simulations, and the like.

<Example 1>
Next, the optical scanning unit 5 as Example 1 of the present embodiment will be described with reference to the drawings.
As shown in FIG. 3A, in the optical scanning unit 5 of the first embodiment, the diaphragm 10 is formed in a rectangular shape, and a central part 100 that supports the mirror part 30, and left and right from the central part 100. Projecting portions 110a and 110b projecting in the direction (X direction in the drawing), respectively, and the central portion of the end side in the X direction of the projecting portions 110a and 110b can be vibrated via the first beam portion 11. It is supported by the fixed part 50. In addition, the fixing | fixed part 50 is formed in frame shape, for example, and is supporting the diaphragm 10 via the 1st beam part 11 from the both sides.

  The mirror part 30 is formed in a disc shape, and the center thereof coincides with the center of gravity of the diaphragm, and the reflecting surface 30a for reflecting the light beam is arranged so as to be parallel to the surface (front surface) of the diaphragm 10. Yes. The mirror unit 30 is provided with a circular mirror fixing rib 31 around the reflecting surface 30a. The mirror fixing rib 31 protrudes from the surface of the diaphragm 10, and the center of the reflecting surface 30a is convex or concave when adjusting the radius of curvature of the reflecting surface 30a (and hence the focal length of the light beam). The circumferential part of the mirror part 30 is reinforced so as to deform the mirror part 30 into a spherical shape.

  The diaphragm 10 is also provided with a diaphragm fixing rib 32 that protrudes from the surface so as to surround the end side. In other words, the diaphragm 10 is reinforced by the diaphragm fixing rib 32 and the mirror fixing rib 31 so that the diaphragm 10 is difficult to be deformed by a force received from outside (reinforcing to ensure rigidity of the diaphragm 10). ) Is given.

  The first beam portion 11 is made of an elastically deformable material. The first beam portion 11 is arranged on the same straight line (however, in the X direction) passing through the center of gravity of the vibration plate 10 and torsionally vibrates. By connecting the fixed portion 50 and the vibration plate 10, vibration is generated. The plate 10 is configured to torsionally vibrate with the first beam portion 11 as a rotation axis.

  The manufacturing method of the diaphragm 10, the first beam portion 11, the diaphragm fixing rib 32 and the mirror fixing rib 31 is based on an SOI wafer having an active layer thickness of 10 μm and a handle layer thickness of 50 μm. The diaphragm 10 and the first beam portion 11 are formed by etching the layer), and the handle fixing rib 32 and the mirror fixing rib 31 are formed by etching the handle layer from the back surface of the diaphragm 10. Is formed. Accordingly, the diaphragm 10 and the first beam portion 11 are formed of a material (for example, silicon) having a plate thickness of 10 μm, and the diaphragm fixing rib 32 and the mirror fixing rib 31 are formed of a material (for example, silicon) having a thickness of 50 μm. It is formed.

  Further, regarding the manufacturing method of the reflecting surface 30a constituting the mirror part 30, the reflecting surface 30a is formed by sputtering an aluminum film at the center part (area surrounded by the mirror fixing rib 31) of the diaphragm 10. . That is, in the mirror unit 30, an aluminum film is formed as the reflecting surface 30a in order to increase the reflectance of the light beam.

  Furthermore, the manufacturing method of the main drive coil 21 is formed by applying a plating film to the back surface (for example, the silicon surface) of the diaphragm 10 (specifically, the overhang portions 110a and 110b). About the method, it forms by apply | coating a plating film to the back surface (for example, silicon surface) of the mirror part 30 (specifically center part of the mirror part 30).

  As shown in FIG. 3B, in the optical scanning unit 5 of the first embodiment, the mirror static magnetic field generation unit 42 is disposed opposite to the mirror unit 30 on the back side of the mirror unit 30 with respect to the reflection surface 30a. The mirror drive coil 41 is laid at the center of the mirror unit 30 on the back surface side of the mirror unit 30 with respect to the reflection surface 30a.

  Among these, the mirror static magnetic field generating unit 42 is a permanent magnet formed in an annular shape having a diameter larger than that of the mirror unit 30, and generates a static magnetic field in a direction perpendicular to the back surface of the mirror unit 30 (Z direction in the drawing). Arranged to occur.

  The mirror drive coil 41 has lead wires connected to both ends thereof connected to the drive control unit 6 (see FIG. 2), and protrudes toward the mirror static magnetic field generation unit 42 at the center of the back surface of the mirror unit 30. It is wound to become. That is, the mirror drive coil 41 is configured to generate a magnetic field in the same direction as or opposite to the static magnetic field of the mirror static magnetic field generation unit 42 by energization. Note that the direction of the magnetic field generated in the mirror drive coil 41 depends on the direction of the current flowing in the mirror drive coil 41.

  As described above, in the optical scanning unit 5, when the above-described deformation drive current is supplied to the mirror drive coil 41 by the drive control unit 6, the magnetic field generated in the mirror drive coil 41 and the static magnetic field of the mirror static magnetic field generation unit 42 are Thus, the mirror part 30 is deformed into a spherical shape by the action of a suction force working between different poles or a repulsive force working between the same poles (suction repulsion force). Thus, the focal length of the light beam reflected by the reflecting surface 30a of the mirror unit 30 can be adjusted by changing the radius of curvature of the reflecting surface 30a of the mirror unit 30.

  Therefore, according to the optical scanning unit 5 of the first embodiment, the deformation drive current is applied to the mirror drive coil 41 without waiting for the time from the setting of the heating temperature to the actual setting temperature as in the conventional configuration. Since the mirror portion 30 can be deformed immediately by the above-described suction repulsive force (and the curvature radius of the reflecting surface 30a can be changed) immediately, the response when adjusting the focal length of the light beam compared to the conventional configuration The property can be preferably increased.

  As shown in FIG. 3B, in the optical scanning unit 5 of the first embodiment, the main static magnetic field generation unit 22 is disposed apart from the mirror static magnetic field generation unit 42, and the main drive coil 21. Are at least partially laid on the back surface of the diaphragm 10 at a position facing the main static magnetic field generation unit 22.

  Among these, the main static magnetic field generation unit 22 is a prismatic permanent magnet that is disposed to face the end sides in the vertical direction (Y direction in the drawing) of the overhang portions 110a and 110b of the diaphragm 10, and vibrates. It arrange | positions so that a static magnetic field may be generate | occur | produced in the parallel direction (Y direction in a figure) with respect to the plate surface of the board 10. FIG.

  Lead wires connected to both ends of the main drive coil 21 are connected to the drive control unit 6 (see FIG. 2), and some of the overhang portions 110a and 110b of the diaphragm 10 are overhang portions 110a. , 110b in the Y direction (hereinafter referred to as “projected end side portion”). That is, the main drive coil 21 includes a left main drive coil 21a wound around the overhanging portion 110a and a right main drive coil 21b wound around the overhanging portion 110b. When a current in the X direction flows through a portion located at the projecting end side, a direction perpendicular to the X direction and the Y direction (the Z direction in the figure) as an interaction with the static magnetic field in the Y direction of the main static magnetic field generating unit 22 ) Lorentz force. The left main drive coil 21a and the right main drive coil 21b are subjected to Lorentz force in the same direction at the upper projecting end side, and the Lorentz force in the same direction also at the lower projecting end side. A working current is supplied.

  As described above, in the optical scanning unit 5, when the vibration drive current or the gradient drive current is supplied to the main drive coil 21 by the drive control unit 6, the current flowing through the main drive coil 21 and the main static magnetic field generation unit 22 The diaphragm 10 is vibrated by the Lorentz force due to the static magnetic field. Thus, the mirror unit 30 supported by the vibration plate 10 vibrates, so that the light beam reflected by the reflecting surface 30a of the mirror unit 30 can be scanned.

  Therefore, according to the optical scanning unit 5 of the first embodiment, since the scanning of the light beam and the adjustment of the focal length can be performed by the plurality of permanent magnets and the drive coil, the configuration of the optical scanning device 1 is relatively simple. be able to. Moreover, since the main drive coil 21 can be easily laid on the diaphragm 10 by making the diaphragm 10 rectangular, the configuration of the optical scanning device 1 can be further simplified.

  In the optical scanning unit 5 of the first embodiment, the mirror static magnetic field generation unit 42 acts on the part of the projecting portions 110 a and 110 b of the diaphragm 10 in which the static magnetic field of the mirror static magnetic field generation unit 42 acts. You may form in the magnitude | size to do. The main drive coil 21 may be wound so as to be convex in the Z direction so as to generate a magnetic field in a direction opposite to the magnetic field generated in the mirror drive coil 41 when energized.

  In such a configuration, when the main drive coil 21 is energized, due to the magnetic field generated in the main drive coil 21 and the static magnetic field of the mirror static magnetic field generation unit 42, a part of the projecting portions 110 a and 110 b in the diaphragm 10 A suction repulsive force in the direction opposite to the direction in which the center portion of the mirror portion 30 is displaced acts.

  For this reason, when the mirror part 30 is deformed while vibrating the diaphragm 10, it is possible to prevent the diaphragm 10 from being pulled and displaced by the mirror part 30, so that the light beam can be scanned while scanning the light beam. When adjusting the focal length of the beam, the accuracy of light beam scanning can be maintained.

<Example 2>
Next, the optical scanning unit 5 as Example 2 of the present embodiment will be described with reference to the drawings. The optical scanning unit 5 of the second embodiment is made in view of the following problems in the first embodiment. That is, in the first embodiment, when adjusting the focal length of the light beam while scanning the light beam, a current (hereinafter referred to as “current” for suppressing the vibration plate 10 from being pulled and displaced by the mirror unit 30). It is necessary to supply the vibration drive current and the gradient drive current to the main drive coil 21 in a manner superimposed on the “displacement drive current”. However, superimposing a signal (displacement drive current) different from the signal (vibration drive current or tilt drive current) necessary for the light beam scan on the main drive coil 21 is a light beam scan (scan). The possibility of adversely affecting the operation) cannot be denied.

  Therefore, in the optical scanning unit 5 of the second embodiment, the first drive mechanism 20 has a sub drive coil 61 for supplying the displacement drive current separately instead of supplying the displacement drive current to the main drive coil 21. Then, the repulsive force as an interaction between the energized sub drive coil 61 and the static magnetic field generating unit 42 is opposite to the direction in which the diaphragm 10 is displaced along with the deformation of the mirror unit 30. The configuration is such that a direction force is applied to the diaphragm 10.

  The drive control unit 6 is configured to separately supply the displacement drive current to the sub drive coil 61 when performing current control on the mirror drive coil 41 in order to adjust the focal length of the light beam. Yes.

  Further, the data storage unit 7 includes data indicating the relationship between the above-described deformation drive current value and the displacement drive current value as data used when the drive control unit 6 performs the above-described current control. Based on the data indicating these relationships, the drive control unit 6 stores the displacement, and the vibration plate 10 is pulled by the mirror unit 30 according to the value of the deformation drive current supplied to the mirror drive coil 41. For example, the value of the displacement drive current necessary for suppressing the occurrence of the displacement is set.

  Specifically, as illustrated in FIG. 4A, in the optical scanning unit 5, the vibration plate 10 extends in the center part 100 that supports the mirror part 30 and the left and right direction (X direction) from the center part 100. And overhang portions 110a and 110b, and a proximity portion 120 located between the central portion 100 and the overhang portions 110a and 110b and close to the mirror portion 30.

  As shown in FIG. 4B, in the optical scanning unit 5 of the first embodiment, the sub-driving coil 61 is disposed opposite to the mirror static magnetic field generating unit 42, and the sub drive coil 61 is located on the back side of the diaphragm 10. Is laid.

  The sub drive coil 61 has lead wires connected to both ends thereof connected to the drive control unit 6 (see FIG. 2), and toward the mirror static magnetic field generation unit 42 in the proximity portion 120 on the back surface of the optical scanning unit 5. It is wound to be convex. The drive control unit 6 supplies a displacement drive current to the sub drive coil 61 in the direction opposite to the current flowing through the mirror drive coil 41. That is, the sub drive coil 61 is configured to generate a magnetic field in a direction opposite to the magnetic field generated in the mirror drive coil 41 when energized.

  As described above, in the optical scanning unit 5, when the displacement drive current is supplied to the sub drive coil 61 by the drive control unit 6, the magnetic field generated in the sub drive coil 61 and the static magnetic field of the mirror static magnetic field generating unit 42 are As a result, a suction repulsive force in a direction opposite to the direction in which the central portion of the mirror portion 30 is displaced acts on the proximity portion 120 of the diaphragm 10.

  For this reason, when the mirror unit 30 is deformed while vibrating the vibration plate 10, a current different from the vibration drive current and the tilt drive current described above is not superimposed on the main drive coil 21, and the vibration plate is applied to the mirror unit 30. 10 can be prevented from being displaced by being pulled, and therefore, when adjusting the focal length of the light beam while scanning the light beam, the accuracy of the light beam scanning can be more suitably maintained. .

<Example 3>
Next, an optical scanning unit 5 as Example 3 of the present embodiment will be described with reference to the drawings. In the first and second embodiments, since the mirror unit 30 is fixed to the diaphragm 10, the light beam scanning direction is one direction (Y direction). The optical scanning unit 5 according to the third embodiment is different only in that the scanning direction of the light beam is two directions (XY directions).

  Specifically, as shown in FIG. 5A, in the optical scanning unit 5, a groove that partially separates between the central portion 100 and the proximity portion 120 of the diaphragm 10 is provided, and the mirror unit 30 is The vibrating plate 10 is supported by the proximity portion 120 via the second beam portion 12 so as to vibrate.

  The second beam portion 12 is formed in the same manner as the first beam portion 11, and is arranged on the same straight line (however, in the Y direction) passing through the center of gravity of the diaphragm 10 (and hence the center of the mirror portion 30), and torsionally vibrates. By connecting the diaphragm 10 and the end portion of the mirror portion 30 in the Y direction, the mirror portion 30 is configured to vibrate with the second beam portion 12 as a rotation axis. That is, the optical scanning unit 5 is a two-degree-of-freedom twisted vibrator having a degree of freedom of twisting about the first beam part 11 (X axis) and the second beam part 12 (Y axis).

  A two-degree-of-freedom torsional vibrator theoretically has two vibrators. That is, the two vibration modes have different resonance frequencies, and the ratio of the angular amplitude of torsional vibration to each resonance frequency is different (this is called a vibration mode).

  If a periodic excitation force having a frequency corresponding to each of the different vibration modes is applied, the respective vibration modes can be excited. In addition, if a periodic excitation force having a plurality of frequencies is superimposed and applied, two vibration modes can be excited simultaneously.

  For this reason, as shown in FIG. 5B, the drive control unit 6 corresponds to a vibration mode A in which the vibration plate 10 (and the mirror unit 30) is vibrated with the first beam portion 11 (X axis) as a rotation axis. Vibration drive in which the first vibration drive current (SA) and the second vibration drive current (SB) corresponding to the vibration mode B in which the mirror 30 is vibrated with the second beam portion 12 (Y axis) as the rotation axis are superimposed. A current is supplied to the main drive coil 21.

  However, since the direction of the current flowing in the X direction is different between the left main drive coil 21a and the right main drive coil 21b, for example, when the vibration drive current (SA + SB) is supplied to the left main drive coil 21a, the right main drive coil 21b. Is supplied with a vibration drive current (SA-SB) obtained by reversing the phase of the second vibration drive current (SB).

  In such a configuration, the diaphragm 10 and the mirror unit 30 can be suitably resonated by supplying the main drive coil 21 with a vibration drive current for the drive control unit 6 to apply a periodic excitation force. Therefore, it is possible to increase the scanning speed of the light beam. For example, in the vehicle field, it is possible to provide a more suitable optical scanning device 1 for performing obstacle detection, image display, and the like.

  Further, since the first vibration drive current (SA) and the second vibration drive current (SB) corresponding to different vibration modes are superimposed on the vibration drive current, the vibration plate 10 and the mirror unit are respectively used in each vibration mode. Since 30 is excited, the optical scanning unit 5 can suitably configure the optical scanning device 1 that can scan a light beam in two dimensions by a two-degree-of-freedom vibrator.

  The drive control unit 6 supplies the vibration drive current obtained by superimposing the first vibration drive current (SA) and the second vibration drive current (SB) to the main drive coil 21, so that the diaphragm 10 and the mirror unit Instead of resonating 30, a tilt drive current that forcibly tilts the diaphragm 10 and the mirror unit 30 to respective angles according to the irradiation direction of the light beam may be supplied to the main drive coil 21. Alternatively, a tilt drive current that forcibly tilts one of the diaphragm 10 and the mirror unit 30 may be supplied to the main drive coil 21 so as to be superimposed on a vibration drive current that resonates one of them. In the former case, a raster scanning locus can be obtained, and in the latter case, a Lissajous scanning locus can be obtained.

<Example 4>
Next, an optical scanning unit 5 as Example 4 of the present embodiment will be described with reference to the drawings. In the third embodiment, the optical scanning unit 5 is a two-degree-of-freedom torsional vibrator, whereas in the optical scanning unit 5 of the fourth embodiment, the optical scanning unit 5 has a three-degree-of-freedom torsional vibration. The only difference is that it is a child configuration.

  Specifically, as shown in FIG. 6, the optical scanning unit 5 is provided with a groove that partially separates the proximity portion 120 and the overhanging portion 110 of the vibration plate 10, so that the mirror portion 30 and the vibration plate 5 are provided. 10 and an inner gimbal 60 disposed between the first and second members.

  The inner gimbal 60 is supported by the overhanging portion 110 of the diaphragm 10 via the second beam portion 12 so as to vibrate. Further, the mirror part 30 is supported in the frame of the inner gimbal 60 through the third beam part 13 so as to vibrate.

  The second beam portion 12 and the third beam portion 13 are formed in the same manner as the first beam portion 11 and are arranged on the same straight line passing through the center of gravity of the diaphragm 10 (and thus the center of the mirror portion 30), and torsionally vibrate. It is. However, the 2nd beam part 12 and the 3rd beam part 13 are arrange | positioned so that it may become a rotation axis which mutually cross | intersects and makes 45 degrees with respect to the 1st beam part 11 (X axis), and each rotation It is configured to vibrate and torsion about an axis. That is, the optical scanning unit 5 is a three-degree-of-freedom torsional vibrator having a degree of freedom of twisting around the first beam unit 11 (X axis), the second beam unit 12 and the third beam unit 13.

  A three-degree-of-freedom torsional vibrator theoretically has three vibrators. That is, the three vibration modes have different resonance frequencies, and the ratio of the angular amplitude of torsional vibration to each resonance frequency is different (this is called a vibration mode).

  If a periodic excitation force having a frequency corresponding to each of the different vibration modes is applied, the respective vibration modes can be excited. In addition, if the periodic excitation forces of a plurality of frequencies are superimposed and applied, the three vibration modes can be excited simultaneously.

  For this reason, the drive control unit 6 supplies a vibration drive current having a frequency component for simultaneously exciting the vibration system including the mirror unit 30, the inner gimbal 60, and the diaphragm 10 to the main drive coil 21. . Since basic matters in the three-degree-of-freedom torsional vibrator are disclosed in detail in the above-mentioned Patent Document 1, detailed description thereof is omitted here.

  According to the optical scanning unit 5 of the fourth embodiment, as described in Patent Document 1, a vibration system including the mirror unit 30, the inner gimbal 60, and the vibration plate 10 at a resonance frequency different from each other with a vibration drive current having a small value. Since the mirror unit 30 can resonate greatly by exciting simultaneously, the optical scanning unit 5 can suitably configure the optical scanning device 1 that can scan a light beam in two dimensions by a three-degree-of-freedom vibrator. it can.

<Example 5>
Next, an optical scanning unit 5 as Example 5 of the present embodiment will be described with reference to the drawings. In the first to fourth embodiments, the diaphragm 10 has a rectangular shape, whereas the optical scanning unit 5 of the fifth embodiment has a configuration in which the optical scanning unit 5 has an H shape. Only the difference. However, the mirror part 30 shall be fixed to the center part 100 of the diaphragm 10 similarly to Examples 1-2.

  Specifically, as shown in FIG. 7A, in the optical scanning unit 5, the diaphragm 10 is formed by cutting out the central portions of the overhang portions 110 a and 110 b so that the overhang portions 110 a and 110 b are connected to each other. Thus, as a whole, it has a central portion 100 that supports the mirror portion 30, an upper left overhang 110am, a lower left overhang 110an, an upper right overhang 110bm, and a lower right overhang 110bn. It is formed in an H shape.

  As shown in FIG. 7B, the main static magnetic field generation unit 22 faces the upper left overhanging portion 110am, the lower left overhanging portion 110an, the upper right overhanging portion 110bm, and the lower right overhanging portion 110bn. The four permanent magnets are arranged so as to generate a static magnetic field in a direction perpendicular to the plate surface of the diaphragm 10 (Z direction).

  The main drive coil 21 includes an upper left main drive coil 21am wound around the upper left overhang portion 110am, a lower left main drive coil 21an wound around the lower left overhang portion 110an, and an upper right overhang portion 110bm. The upper right main drive coil 21bm wound around and the lower right main drive coil 21bn wound around the lower right overhanging portion 110bn.

  The main drive coils 21 have lead wires connected to both ends thereof connected to the drive control unit 6 (see FIG. 2). The upper left overhang 110am, the lower left overhang 110an, the upper right overhang. Each of the protruding portion 110bm and the lower right overhanging portion 110bn is wound so as to protrude toward the opposing main static magnetic field generating portion 22. That is, the main drive coil 21 is configured to generate a magnetic field in the same direction as or opposite to the static magnetic field of the main static magnetic field generator 22 by energization. The direction of the magnetic field generated in each main drive coil 21 depends on the direction of the current flowing through the main drive coil 21.

  As described above, in the optical scanning unit 5, for example, when the above-described vibration drive current is supplied to the main drive coil 21 by the drive control unit 6, the magnetic field generated in the main drive coil 21 and the static magnetic field of the main static magnetic field generation unit 22. As a result, the diaphragm 10 vibrates due to the acting repulsive force. Thus, the mirror unit 30 supported by the vibration plate 10 vibrates, so that the light beam reflected by the reflecting surface 30a of the mirror unit 30 can be scanned.

  The drive control unit 6 supplies, for example, vibration drive currents having opposite phases to the upper main drive coil 21m and the lower main drive coil 21n, and the same phase to the left main drive coil 21a and the right main drive coil 21b. By supplying the vibration drive current, the diaphragm 10 is vibrated with the first beam portion 11 (X axis) as the rotation axis.

  According to such a configuration, since the diaphragm 10 is formed in an H shape, the laying of the main drive coil 21 on the diaphragm 10 is slightly more complicated than when the diaphragm 10 is rectangular, Since one beam portion 11 can be connected to the central portion 100 of the diaphragm 10, the optical scanning portion 5 is reduced in size as a whole because the first beam portion 11 is disposed closer to the center side of the diaphragm 10. be able to.

<Example 6>
Next, an optical scanning unit 5 as Example 6 of the present embodiment will be described with reference to the drawings. In the fifth embodiment, since the mirror unit 30 is fixed to the diaphragm 10, the scanning direction of the light beam is one direction (Y direction). The optical scanning unit 5 is different only in that the scanning direction of the light beam has two directions (XY directions).

  Specifically, as shown in FIG. 8A, the optical scanning unit 5 is provided with a groove that partially separates the central portion 100 and the proximity portion 120 of the diaphragm 10 as in the third embodiment. The mirror part 30 is supported by the proximity part 120 of the diaphragm 10 via the second beam part 12 so as to vibrate.

  The second beam portion 12 is formed in the same manner as the first beam portion 11, and is arranged on the same straight line (however, in the Y direction) passing through the center of gravity of the diaphragm 10 (and hence the center of the mirror portion 30), and torsionally vibrates. By connecting the diaphragm 10 and the end portion of the mirror portion 30 in the Y direction, the mirror portion 30 is configured to vibrate with the second beam portion 12 as a rotation axis. That is, the optical scanning unit 5 is a two-degree-of-freedom twisted vibrator having a degree of freedom of twisting about the first beam part 11 (X axis) and the second beam part 12 (Y axis).

  Then, as shown in FIG. 8 (b), the drive control unit 6 corresponds to the vibration mode A corresponding to the vibration mode A in which the vibration plate 10 (and the mirror unit 30) is vibrated with the first beam portion 11 (X axis) as the rotation axis. One vibration drive current (SA) and a second vibration drive current (SB) corresponding to vibration mode B for vibrating the mirror section 30 with the second beam section 12 (Y axis) as a rotation axis are superimposed. Is supplied to the main drive coil 21.

  However, the first main drive coil 21m and the lower main drive coil 21n are supplied with the first vibration drive current (SA) having the opposite phase, and the left main drive coil 21a and the right main drive coil 21b are provided with the opposite phase vibration drive. Supply current (SB). Therefore, for example, when the vibration drive current (SA + SB) is supplied to the upper left main drive coil 21am, the vibration drive current (−SA + SB) obtained by reversing the phase of the first vibration drive current (SA) in the lower left main drive coil 21an. ), The vibration drive current (SA-SB) obtained by reversing the phase of the second vibration drive current (SB) in the upper right main drive coil 21bm, and the first and second vibration drive currents (SA-SB) in the lower right main drive coil 21bn. The vibration drive current (-SA-SB) with the phase of SA, SB) reversed in polarity is supplied.

  Even with such a configuration, the vibration control current can be suitably resonated between the vibration plate 10 and the mirror unit 30 by supplying the main drive coil 21 with a vibration drive current for the drive control unit 6 to apply a periodic excitation force. Therefore, it is possible to increase the scanning speed of the light beam. For example, in the vehicle field, it is possible to provide a more suitable optical scanning device 1 for performing obstacle detection, image display, and the like.

  Further, since the first vibration drive current (SA) and the second vibration drive current (SB) corresponding to different vibration modes are superimposed on the vibration drive current, the vibration plate 10 and the mirror unit are respectively used in each vibration mode. Since 30 is excited, the optical scanning unit 5 can suitably configure the optical scanning device 1 that can scan a light beam in two dimensions by a two-degree-of-freedom vibrator.

<Other embodiments>
As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment, In the range which does not deviate from the summary of this invention, it is possible to implement in various aspects.

  For example, the optical scanning unit 5 of the sixth embodiment has a configuration in which the diaphragm 10 is formed in an H shape and becomes a two-degree-of-freedom twisted vibrator, but the configuration in which the diaphragm 10 is formed in an H shape. Therefore, as in the fourth embodiment, a configuration that becomes a three-degree-of-freedom twisted vibrator may be employed.

  Further, in the optical scanning unit 5 of the above embodiment, the diaphragm 10 is configured to vibrate the diaphragm by the interaction between the energized main drive coil 21 and the static magnetic field of the main static magnetic field generator 22. However, the present invention is not limited to this. For example, as described in Patent Document 1, the diaphragm may be vibrated using electrostatic force.

  DESCRIPTION OF SYMBOLS 1 ... Optical scanning device, 2 ... Light emission part, 3 ... Input part, 4 ... Light emission control part, 5 ... Optical scanning part, 6 ... Drive control part, 7 ... Data storage part, 10 ... Diaphragm, 11 ... 1st beam , 12 ... 2nd beam part, 13 ... 3rd beam part, 20 ... 1st drive mechanism, 21 ... Main drive coil, 21a ... Left main drive coil, 21am ... Upper left main drive coil, 21an ... Lower left main drive coil, 21b ... right main drive coil, 21bm ... upper right main drive coil, 21bn ... lower right main drive coil, 21m ... upper main drive coil, 21n ... lower main drive coil, 22 ... main static magnetic field generating unit, 30 ... mirror unit, 30a DESCRIPTION OF SYMBOLS ... Reflecting surface, 31 ... Mirror fixing rib, 32 ... Diaphragm fixing rib, 40 ... 2nd drive mechanism, 41 ... Mirror drive coil, 42 ... Mirror static magnetic field generating part, 50 ... Fixing part, 60 ... Inner gimbal, 61 ... Sub WD Coil, 100 ... central portion, 110 ... overhang portion, 110a ... left overhang portion, 110am ... upper left overhang portion, 110an ... lower left overhang portion, 110b ... right overhang portion, 110bm ... upper right overhang portion, 110bn ... Lower right overhang, 120 ... Proximity.

Claims (8)

An optical scanning device (1) for scanning a light beam,
A diaphragm (10) supported by the fixed portion through the first beam portion (11) so as to vibrate;
A mirror part (30) having a reflecting surface (30a) supported by the diaphragm and reflecting the light beam;
A first drive mechanism (20) for vibrating the diaphragm;
A second drive mechanism (40) for adjusting the focal length of the light beam reflected by the reflecting surface;
Drive control means (6) for driving and controlling the first drive mechanism and the second drive mechanism;
With
The second drive mechanism includes:
A mirror static magnetic field generating section (42) disposed opposite to the mirror section on the back surface side with respect to the reflecting surface and generating a static magnetic field in a direction perpendicular to the back surface of the mirror section;
A mirror drive coil (41) that is laid on the mirror part on the back side with respect to the reflecting surface, and generates a magnetic field in the same direction as or opposite to the static magnetic field of the mirror static magnetic field generating part by energization;
And is configured to deform the mirror portion by an attractive repulsion force as an interaction between the energized mirror driving coil and the static magnetic field of the mirror static magnetic field generation unit,
The drive control means supplies a deformation drive current for deforming the mirror section to the mirror drive coil so that the radius of curvature of the reflecting surface becomes a target value corresponding to the focal length of the light beam ,
The mirror static magnetic field generation unit is formed in such a size that the static magnetic field of the mirror static magnetic field generation unit also acts on the proximity portion (120) of the mirror unit in the diaphragm,
The first drive mechanism includes a sub drive coil (61) that is laid in the proximity portion of the diaphragm and generates a magnetic field in a direction opposite to the magnetic field generated in the mirror drive coil when energized. Due to the attractive repulsive force as the interaction between the sub drive coil and the static magnetic field of the mirror static magnetic field generating part, a force in the direction opposite to the direction in which the diaphragm is displaced along with the deformation of the mirror part is applied. An optical scanning device characterized by being configured to give to a diaphragm. The first drive mechanism includes:
A main static magnetic field generating section (22) which is arranged apart from the mirror static magnetic field generating section and generates a static magnetic field in a direction acting on the diaphragm;
A main drive coil (21) at least partially laid at a position facing the main static magnetic field generation unit in the diaphragm;
And is configured to vibrate the diaphragm by the interaction between the energized main drive coil and the static magnetic field of the main static magnetic field generation unit,
The optical scanning apparatus according to claim 1, wherein the drive control unit performs current control on the main drive coil. An optical scanning device (1) for scanning a light beam,
A diaphragm (10) supported by the fixed portion through the first beam portion (11) so as to vibrate;
A mirror part (30) having a reflecting surface (30a) supported by the diaphragm and reflecting the light beam;
A first drive mechanism (20) for vibrating the diaphragm;
A second drive mechanism (40) for adjusting the focal length of the light beam reflected by the reflecting surface;
Drive control means (6) for driving and controlling the first drive mechanism and the second drive mechanism;
With
The second drive mechanism includes:
A mirror static magnetic field generating section (42) disposed opposite to the mirror section on the back surface side with respect to the reflecting surface and generating a static magnetic field in a direction perpendicular to the back surface of the mirror section;
A mirror drive coil (41) that is laid on the mirror part on the back side with respect to the reflecting surface, and generates a magnetic field in the same direction as or opposite to the static magnetic field of the mirror static magnetic field generating part by energization;
And is configured to deform the mirror portion by an attractive repulsion force as an interaction between the energized mirror driving coil and the static magnetic field of the mirror static magnetic field generation unit,
The drive control means supplies a deformation drive current for deforming the mirror section to the mirror drive coil so that the radius of curvature of the reflecting surface becomes a target value corresponding to the focal length of the light beam ,
The first drive mechanism includes:
A main static magnetic field generating section (22) which is arranged apart from the mirror static magnetic field generating section and generates a static magnetic field in a direction acting on the diaphragm;
A main drive coil (21) at least partially laid at a position facing the main static magnetic field generation unit in the diaphragm;
And is configured to vibrate the diaphragm by the interaction between the energized main drive coil and the static magnetic field of the main static magnetic field generation unit,
The drive control means performs current control on the main drive coil,
The diaphragm is formed in an H shape,
The main static magnetic field generation unit generates a static magnetic field in a direction perpendicular to the plate surface of the diaphragm,
The main drive coil generates a magnetic field in the same direction as or opposite to the static magnetic field of the main static magnetic field generator when energized,
The first drive mechanism is configured to vibrate the diaphragm by an attractive repulsion force as an interaction between the energized main drive coil and the static magnetic field of the main static magnetic field generating unit. Optical scanning device. The drive control means supplies a vibration drive current to the main drive coil for applying a periodic excitation force to the diaphragm so that the amplitude of the diaphragm becomes a target value corresponding to the scanning region of the light beam. the optical scanning device according to claim 2 or claim 3, characterized in that supply. The diaphragm is formed in a rectangular shape,
The main static magnetic field generation unit generates a static magnetic field in a direction parallel to the plate surface of the diaphragm,
Wherein the first drive mechanism according to claim 2 to claim, characterized in that vibrating the vibrating plate by the Lorentz force as interaction with energized the main drive coil and the static magnetic field of the main static magnetic field generating unit the optical scanning apparatus according to any one of 4. The diaphragm is formed in an H shape,
The main static magnetic field generation unit generates a static magnetic field in a direction perpendicular to the plate surface of the diaphragm,
The main drive coil generates a magnetic field in the same direction as or opposite to the static magnetic field of the main static magnetic field generator when energized,
The first drive mechanism is configured to vibrate the diaphragm by an attractive repulsion force as an interaction between the energized main drive coil and the static magnetic field of the main static magnetic field generating unit. The optical scanning device according to any one of claims 2 to 4 . The mirror part is supported on the diaphragm via a second beam part (12) so as to vibrate,
The drive control means includes a first vibration drive current for vibrating the diaphragm with the first beam portion as a rotation axis, and a second vibration for vibrating the mirror portion with the second beam portion as a rotation axis. The optical scanning device according to claim 2 , wherein a drive current is supplied to the main drive coil. An inner gimbal (60) disposed between the mirror part and the diaphragm;
The inner gimbal is supported by the diaphragm via a second beam portion (12) so as to vibrate,
The mirror part is supported by the inner gimbal through a third beam part (13) so as to vibrate,
The said drive control means supplies the said vibration drive current for exciting simultaneously the vibration system which consists of the said mirror part, the said inner gimbal, and the said diaphragm to the said main drive coil, The Claims 2 thru | or 3 characterized by the above-mentioned. 7. The optical scanning device according to claim 6.