JP5168659B2 - Movable plate structure and optical scanning device - Google Patents

Movable plate structure and optical scanning device Download PDF

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JP5168659B2
JP5168659B2 JP2008301826A JP2008301826A JP5168659B2 JP 5168659 B2 JP5168659 B2 JP 5168659B2 JP 2008301826 A JP2008301826 A JP 2008301826A JP 2008301826 A JP2008301826 A JP 2008301826A JP 5168659 B2 JP5168659 B2 JP 5168659B2
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movable plate
torsion beam
optical scanning
scanning device
plate structure
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JP2010128116A (en
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智文 北澤
悟一 赤沼
史子 酒匂
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Ricoh Co Ltd
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Ricoh Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs

Description

本発明は可動板構造体及び光走査装置に関し、詳細には小型ガルバノミラーを用いた光走査装置における可動板の歪み防止及び軽量化に関する。 The present invention relates to a movable plate structure and an optical scanning device, and more particularly to distortion prevention and weight reduction of a movable plate in an optical scanning device using a small galvanometer mirror.

マイクロマシン技術を用いた光走査装置は、ポリゴンミラーや従来型のガルバノミラーに較べて省電力化、小型化や高速化の可能性があり、駆動部分の形成もシリコンウェハを素材として、半導体微細加工技術を用いて大量で安価に形成できる可能性があるため実用化が期待されている。   Optical scanning devices using micromachine technology can save power, reduce size, and increase speed compared to polygon mirrors and conventional galvanometer mirrors. It is expected to be put to practical use because it can be formed in large quantities at a low cost using the technology.

図１８は従来の光走査装置の構成を示す図である。図１８の（ａ）は平面図であり、図１８の（ｂ）は斜視図である。同図に示す従来の光走査装置における可動板部１００は、光ビームを二次元走査するものであり、固定枠１０１に外側トーション梁１０２で揺動可能に軸支された枠状の外側可動板１０３と、外側トーション梁１０２の軸線と直交する内側トーション梁１０４で外側可動板１０３に揺動に軸支されて反射ミラーが形成されている内側可動板１０５とを、主に含んで構成されている。また、外側可動板１０３及び内側可動板１０５の表裏面の周縁部には、外側トーション梁１０２及び内側トーション梁１０４に回転振動を付与するため、例えば電磁力によるもの、静電力によるもの、あるいは電歪素子によるものなど多様な形態の駆動部１０６、１０７が設けられている。   FIG. 18 is a diagram showing a configuration of a conventional optical scanning device. FIG. 18A is a plan view, and FIG. 18B is a perspective view. A movable plate portion 100 in the conventional optical scanning device shown in FIG. 1 is for two-dimensional scanning of a light beam, and is a frame-shaped outer movable plate that is pivotally supported by a fixed frame 101 by an outer torsion beam 102. 103 and an inner movable plate 105 which is pivotally supported on the outer movable plate 103 by an inner torsion beam 104 orthogonal to the axis of the outer torsion beam 102 and is formed with a reflection mirror. Yes. Further, in order to impart rotational vibration to the outer torsion beam 102 and the inner torsion beam 104 at the peripheral portions of the front and back surfaces of the outer movable plate 103 and the inner movable plate 105, for example, those caused by electromagnetic force, those caused by electrostatic force, Various types of driving units 106 and 107 such as those using a strain element are provided.

このような構成を有する従来の光走査装置１００によれば、内側可動板１０５は、図１９の（ａ）のように、反射面が蒸着され、回動可能に内側トーション梁１０４と一体に形成されている。そして、回転振動の力が与えられ、図１９の（ｂ）、（ｃ）のように回転させられて光走査を行うものである。回転振動を与える手段としては、例えば電磁力によるもの、静電力によるもの、電歪素子によるものなど多様である。なお、図１８の外側可動板１０３も同様に回転振動による光走査を行い、よって２方向それぞれに制御され、２次元的に光を走査する。   According to the conventional optical scanning device 100 having such a configuration, the inner movable plate 105 is formed integrally with the inner torsion beam 104 so that the inner surface of the inner movable plate 105 can be rotated as shown in FIG. Has been. Then, a rotational vibration force is applied, and the optical scanning is performed by being rotated as shown in FIGS. 19B and 19C. There are various means for applying rotational vibration, such as those using electromagnetic force, electrostatic force, and electrostrictive elements. Note that the outer movable plate 103 in FIG. 18 similarly performs light scanning by rotational vibration, and is thus controlled in two directions to scan light two-dimensionally.

このような、マイクロマシン技術を用いた光走査装置では、小型化、高速化に伴い、駆動時のミラー面の歪み、ビームスポットの形状が劣化することが課題の一つとなっている。このような課題を解決するために、従来よりいくつかの提案がなされている。   In such an optical scanning device using micromachine technology, one of the problems is that the mirror surface distortion at the time of driving and the shape of the beam spot deteriorate as the size and speed increase. In order to solve such a problem, some proposals have been conventionally made.

その一つとしての特許文献１には、フレーム、梁及びミラー部が一体成形され、このミラー部の裏面には複数の凹部が形成され、この凹部は帯状、マトリクス状、ハニカム状など様々な形状でエッチング処理されている。また、特許文献２によれば、可動板の周縁部に沿って通電により磁界を発生する薄膜コイルを敷設し、トーションバーの軸方向に平行な可動板の対辺部の薄膜コイル部分に対して静磁界を作用させる静磁界発生手段を備えて、で可動板の表裏面に発生する応力をバランスさせ、可動板の反りを抑制する。更に、特許文献３には、ミラー基板の裏側に、階段状の複数の領域を配置し、曲げモーメントが最大になる点を含む領域の曲げ剛性が最大になるように、曲げ剛性を配置する。また、ミラー基板の各領域での動的な撓み量が概略等しくなるように、各領域の断面２次モーメントを設定する。   In Patent Document 1 as one of them, a frame, a beam, and a mirror portion are integrally formed, and a plurality of concave portions are formed on the back surface of the mirror portion, and the concave portions have various shapes such as a band shape, a matrix shape, and a honeycomb shape. Etching process. According to Patent Document 2, a thin film coil that generates a magnetic field by energization is laid along the peripheral edge of the movable plate, and the thin film coil portion on the opposite side of the movable plate parallel to the axial direction of the torsion bar is statically fixed. A static magnetic field generating means for applying a magnetic field is provided to balance the stress generated on the front and back surfaces of the movable plate, thereby suppressing the warp of the movable plate. Further, in Patent Document 3, a plurality of step-like regions are arranged on the back side of the mirror substrate, and the bending rigidity is arranged so that the bending rigidity of the region including the point where the bending moment is maximized is maximized. In addition, the cross-sectional second moment of each region is set so that the amount of dynamic deflection in each region of the mirror substrate is approximately equal.

しかしながら、上記特許文献１によれば、裏面全体に凹部を設けて反射面の歪みを抑制しようとするものであるが、後述するように歪みが生じていない領域まで凹部を設けているため可動板部が重くなり、慣性モーメントも増大するとことで、駆動に大きなエネルギーが必要になるという問題も生じる。また、上記特許文献２によれば、能動的に可動板の歪みを補正しようとするものであるが、製造過程が複雑になり、装置も大型化する可能性が高く、また制御が複雑になるなどの問題もある。更に、上記特許文献３によれば、回動軸から離れるにしたがって、ミラー基板が薄くなるので、慣性モーメントを大きくせずに、歪みを補正する効果があるが、部分的に厚みが細かく変化するので、製造しにくいという問題がある。   However, according to Patent Document 1, a concave portion is provided on the entire back surface to suppress distortion of the reflecting surface. However, since the concave portion is provided up to a region where no distortion occurs as described later, the movable plate As the part becomes heavier and the moment of inertia increases, there is a problem that a large amount of energy is required for driving. Further, according to the above-mentioned Patent Document 2, it is intended to actively correct the distortion of the movable plate. However, the manufacturing process is complicated, the apparatus is likely to be enlarged, and the control is complicated. There are also problems such as. Furthermore, according to the above-mentioned Patent Document 3, the mirror substrate becomes thinner as it moves away from the rotation axis, so that there is an effect of correcting the distortion without increasing the moment of inertia, but the thickness changes partially finely. Therefore, there is a problem that it is difficult to manufacture.

そこで、駆動時に発生する歪みを抑制するためには、可動板を弾性係数の大きな材料で作るか、可動板を厚くするなどしてその剛性を上げることが考えられる。
特開２００１−２４９３００号公報 特開２００４−２６４６８４号公報 特開２００５−３００９２７号公報 Therefore, in order to suppress the distortion generated during driving, it is conceivable to increase the rigidity of the movable plate by making it from a material having a large elastic coefficient or by increasing the thickness of the movable plate.
JP 2001-249300 A JP 2004-264684 A JP 2005-3000927 A

しかしながら、上述のように可動板を弾性係数の大きな材料で作っても、半導体微細加工技術で加工できる材料でなければならず、材料が限定される。また、トーション梁と一体に形成するので、弾性係数が大きい材料を使うと、トーション梁を捩じるのに大きな力、エネルギーが必要になってしまう。また、可動板を厚くするなどしてその剛性を上げる方法は、可動板部が重くなることと、回動軸から離れた位置でも厚みがあることで、可動板部の慣性モーメントが増大するので、可動板を回転振動させるのに、大きな力、エネルギーが必要になる。更に、図２０及び図２１に示すような、可動板２０１の反射面の裏側にリブ２０２を設けて補強することも上述したように上記特許文献１に提案されているが、設計条件、使用条件によっては、可動板２０１の重量、慣性モーメントを増大させるだけで、平面性の改善が見られない場合もある。   However, even if the movable plate is made of a material having a large elastic coefficient as described above, it must be a material that can be processed by a semiconductor microfabrication technique, and the material is limited. In addition, since it is formed integrally with the torsion beam, if a material having a large elastic coefficient is used, a large force and energy are required to twist the torsion beam. In addition, the method of increasing the rigidity of the movable plate by increasing the thickness of the movable plate increases the moment of inertia of the movable plate because the movable plate becomes heavy and thick even at a position away from the rotation axis. A large force and energy are required to rotate and vibrate the movable plate. Furthermore, as described above, it is proposed in Patent Document 1 that the rib 202 is provided on the back side of the reflecting surface of the movable plate 201 as shown in FIGS. Depending on the case, the planarity may not be improved only by increasing the weight and the moment of inertia of the movable plate 201.

本発明はこれらの問題点を解決するためのものであり、可動板の重量を増やすことなく、反射面の歪みを抑制できる、可動板構造体及び光走査装置を提供することを目的とする。 The present invention is for solving these problems, and an object of the present invention is to provide a movable plate structure and an optical scanning device that can suppress the distortion of the reflecting surface without increasing the weight of the movable plate .

前記問題点を解決するために、本発明の可動板構造体は、入射光を反射させる反射面を有する可動板及び該可動板を回動可能に軸支するトーション梁を有する可動板部を備えている。そして、本発明の可動板構造体は、可動板とトーション梁との接続部分付近では可動板の外周端部に沿って設けられ、接続部分付近以外では可動板の回動軸に近づけて設けられるリブ部を備えることに特徴がある。よって、可動板部の慣性モーメントの増加を抑制し、反射面の動的歪みを抑制することができる。 In order to solve the above problems, the movable plate structure of the present invention is provided with a movable plate portion having a torsion beam for supporting rotatably the movable plate and the movable plate having a reflecting surface for reflecting the incident light ing. The movable plate structure of the present invention is provided along the outer peripheral end of the movable plate in the vicinity of the connection portion between the movable plate and the torsion beam, and is provided close to the rotating shaft of the movable plate in the vicinity of the connection portion. It is characterized by having a rib part . Therefore, an increase in the moment of inertia of the movable plate portion can be suppressed and dynamic distortion of the reflecting surface can be suppressed.

また、可動板とトーション梁との接続部分付近におけるリブ部の厚みは厚く、可動板とトーション梁との接続部分付近から回動中心から離れた位置に向かってリブ部の厚みは連続的に徐々に薄くなるように形成する。よって、可動板部の慣性モーメントの増加を招かずに、反射面の歪みを抑制することができる。 In addition, the thickness of the rib portion in the vicinity of the connection portion between the movable plate and the torsion beam is thick, and the thickness of the rib portion gradually increases from the vicinity of the connection portion between the movable plate and the torsion beam toward the position away from the rotation center. It is formed to be thin. Therefore, it is possible to suppress the distortion of the reflecting surface without increasing the moment of inertia of the movable plate portion.

更に、可動板上の反射面とトーション梁の外面部を異なる面上に配置することにより、トーション梁の捩れの力が直接反射面に伝わらないので、歪みを低減することができる。   Furthermore, by disposing the reflection surface on the movable plate and the outer surface portion of the torsion beam on different surfaces, the torsional force of the torsion beam is not directly transmitted to the reflection surface, so that distortion can be reduced.

また、可動板の外周端部の少なくとも一部に沿って形成されたリブ部を介して、可動板とトーション梁が接続することにより、必要な剛性を保ちつつ、可動板部を軽量化することができる。 In addition, the movable plate and the torsion beam are connected via a rib portion formed along at least a part of the outer peripheral end of the movable plate, thereby reducing the weight of the movable plate while maintaining necessary rigidity. Can do.

更に、リブ部を可動板の裏面に設け、リブ部の高さとトーション梁の厚みを等しくすることにより、従来のＳｉとＳｉＯ２からなるウェハから作り出す製造法で反射面とトーション梁が同一面上にない構成を作製できるので、コストアップを招かない。 Further, a rib portion on the back surface of the movable plate, by equalizing the thickness of the height and the torsion beam rib portion, the reflecting surface and the torsion beams on the same plane in the manufacturing process to produce the conventional Si and wafer made of SiO 2 This makes it possible to produce a configuration that is not present, and therefore does not increase costs.

また、リブ部を可動板の反射面側に設けることにより、より効果的に歪みを抑制することができる。 Moreover, distortion can be more effectively suppressed by providing the rib portion on the reflective surface side of the movable plate.

更に、可動板の外周端部の少なくとも一部に沿って形成されたリブ部を介して、可動板とトーション梁が接続され、リブ部による可動板とトーション梁の接続部分に溝部を形成する。よって、トーション梁の表面に発生する歪みが直接的に可動板の反射面に伝わらないので、駆動時の歪みを軽減することができる。 Furthermore, the movable plate and the torsion beam are connected via a rib portion formed along at least a part of the outer peripheral end portion of the movable plate, and a groove portion is formed in a connecting portion of the movable plate and the torsion beam by the rib portion . Therefore, since distortion generated on the surface of the torsion beam is not directly transmitted to the reflecting surface of the movable plate, distortion during driving can be reduced.

また、本発明の光走査装置は、上記可動板構造体と、該可動板構造体のトーション梁にねじり方向の駆動力を作用させる駆動部とを具備することに特徴がある。よって、実反射面の動的歪みを抑制することができる。 The optical scanning device of the present invention is characterized by comprising the above-mentioned movable plate structure and a drive unit that applies a driving force in the torsional direction to the torsion beam of the movable plate structure. Therefore, dynamic distortion of the actual reflection surface can be suppressed.

本発明の可動板構造体によれば、可動板とトーション梁との接続部分付近では可動板の外周端部に沿って設けられ、接続部分付近以外では可動板の回動軸に近づけて設けられるリブ部を備えることに特徴がある。よって、可動板部の慣性モーメントの増加を抑制し、反射面の動的歪みを抑制することができる。
According to the movable plate structure of the present invention, the movable plate structure is provided along the outer peripheral end of the movable plate in the vicinity of the connection portion between the movable plate and the torsion beam, and is provided close to the rotating shaft of the movable plate except in the vicinity of the connection portion. It is characterized by having a rib part . Therefore, an increase in the moment of inertia of the movable plate portion can be suppressed and dynamic distortion of the reflecting surface can be suppressed.

はじめに、円形の可動板を特別な補強をせず、トーション梁と可動板の厚みが同じで、可動板にリブなどの補強をしない駆動させる条件で、光走査装置における可動板における歪み量分布について説明する。   First, on the condition that the circular movable plate is not reinforced, the torsion beam and the movable plate have the same thickness, and the movable plate is not reinforced with ribs, etc. explain.

図１は光走査装置における可動板の歪み量の分布を示す図である。同図からわかるように、歪みが大きい位置は、可動板とトーション梁の接続部分付近と、それから回動軸から離れて回動軸に垂直な方向の両端である。また、歪みの大きさは、出っ張り、凹みに関わらず絶対値で示している。可動板とトーション梁の接続部分では可動板を回動させる際に可動板とトーション梁の間で捩り応力が発生するので、可動板とトーション梁の接続部分付近では引っ張り応力や圧縮応力が発生して他の部分に比べ大きな歪みが生じると考えられる。回動軸から離れた部分でも駆動時に歪みが生じているが、可動板とトーション梁の接続部分では、より大きな歪みが生じており、反射面の平面度を低下させている。なお、使用条件や設計によって変わることもある。   FIG. 1 is a diagram showing the distribution of the distortion amount of the movable plate in the optical scanning device. As can be seen from the figure, the positions where the distortion is large are the vicinity of the connecting portion of the movable plate and the torsion beam, and both ends in the direction away from the rotation axis and perpendicular to the rotation axis. Further, the magnitude of the distortion is shown as an absolute value regardless of the protrusion or the dent. Since the torsional stress is generated between the movable plate and the torsion beam when the movable plate is rotated at the connecting part of the movable plate and the torsion beam, tensile stress and compressive stress are generated near the connecting part of the movable plate and the torsion beam. Therefore, it is considered that a large distortion occurs compared to other parts. Although distortion occurs at the time of driving even at a part away from the rotating shaft, a larger distortion occurs at the connection part between the movable plate and the torsion beam, and the flatness of the reflecting surface is lowered. In addition, it may vary depending on usage conditions and design.

そこで、本発明の光走査装置における可動板部では、重量増加を少なくし、歪み補正の効果を上げるために、少なくとも、可動板とトーション梁の接続部分付近をリブで補強する。以下、図面を用いて詳細に説明する。   Therefore, in the movable plate portion in the optical scanning device of the present invention, at least the vicinity of the connection portion between the movable plate and the torsion beam is reinforced with a rib in order to reduce the weight increase and increase the distortion correction effect. Hereinafter, it explains in detail using a drawing.

図２は本発明の第１の実施の形態に係る光走査装置における可動板部の構成を示す図である。同図の（ａ）は平面図であり、同図の（ｂ）は斜視図である。同図に示すように、本実施の形態の光走査装置における可動板部１０は、反射面裏側の可動板１１とトーション梁１２の各接続部分付近に可動補強のためのリブ１３をそれぞれ設けている。このような構成を有する本実施の形態の光走査装置によれば、体積増加が僅かであり、歪みの大きい回動中心に近いところが補強されることで、可動板部分の、重量と慣性モーメントの増加を抑えることができる。しかし、リブによる補強で可動板とトーション梁の接続部分に歪みを低減させたとしても、回動軸から離れた遠い部分の歪みが残る場合には、可動板部の重量増加を避ける可動板補強が必要になる。   FIG. 2 is a diagram showing the configuration of the movable plate portion in the optical scanning device according to the first embodiment of the present invention. (A) of the same figure is a top view, (b) of the same figure is a perspective view. As shown in the figure, the movable plate portion 10 in the optical scanning device of the present embodiment is provided with ribs 13 for movable reinforcement in the vicinity of each connecting portion of the movable plate 11 and the torsion beam 12 on the back side of the reflecting surface. Yes. According to the optical scanning device of the present embodiment having such a configuration, the volume and the moment of inertia of the movable plate portion of the movable plate portion are reinforced by reinforcing the portion near the rotation center where the volume is slight and the distortion is large. The increase can be suppressed. However, even if the distortion is reduced at the connection part of the movable plate and the torsion beam by reinforcing with the rib, if the distortion of the distant part away from the rotating shaft remains, the movable plate reinforcement that avoids the increase in the weight of the movable plate part Is required.

そこで、本発明の第２の実施の形態に係る光走査装置における可動板部の構成図である図３に示すように、本実施の形態に係る光走査装置における可動板部２０によれば、可動板１１の外形形状に沿ってリブ２１を形成して補強している。なお、同図において、図２と同じ参照符号は同じ構成要素を示す。平面図である図３の（ａ）に示すように可動板１１の裏面外周全体に閉じた状態でリブ２１が設けられている。また、回動軸と垂直な方向に長いような可動板形状ではなく、略円形の可動板であれば、可動板の外形形状に沿ったリブを形成すれば、その内側に回動軸と垂直な方向のリブを設けても、設けなくても、駆動時に同じ平面性が得られる。ただし、極端に速い駆動周期や、幅が狭く低いリブの場合は、当てはまらないこともある。このような構成を有する本実施の形態の光走査装置によれば、少ない重量、慣性モーメントの増加で、効果的に可動板全体の、駆動時の歪みを抑制することができる。   Therefore, as shown in FIG. 3 which is a configuration diagram of the movable plate portion in the optical scanning device according to the second embodiment of the present invention, according to the movable plate portion 20 in the optical scanning device according to the present embodiment, Ribs 21 are formed and reinforced along the outer shape of the movable plate 11. In the figure, the same reference numerals as those in FIG. 2 denote the same components. As shown in FIG. 3A, which is a plan view, the rib 21 is provided in a closed state on the entire outer periphery of the back surface of the movable plate 11. In addition, if it is not a movable plate shape that is long in the direction perpendicular to the rotation axis, but a substantially circular movable plate, if a rib is formed along the outer shape of the movable plate, it is perpendicular to the rotation axis on the inside. The same flatness can be obtained at the time of driving with or without providing ribs in various directions. However, this may not be the case for extremely fast drive cycles or narrow and low ribs. According to the optical scanning device of the present embodiment having such a configuration, distortion during driving of the entire movable plate can be effectively suppressed with a small increase in weight and moment of inertia.

次に、可動板部の重量と慣性モーメントを更に減らすために、本発明の第３の実施の形態に係る光走査装置における可動板部の構成図である図４に示すように、本実施の形態に係る光走査装置における可動板部３０によれば、可動板１１とトーション梁１２の接続部分付近には可動板１１の外形に沿った位置に、かつ回動中心から離れた位置であって垂直方向には外形より内側に閉じた状態でリブ３１を形成する。なお、同図において、図２と同じ参照符号は同じ構成要素を示す。平面図である図４の（ａ）に示すように、囲まれたリブ３１の外側の部分は、腕の短い片持ち梁と同じように考えれば、図２に示すような全周をリブ２１で囲った第２の実施の形態と比べても、平面度低下の影響は少ない。実際には、トーション梁と垂直な方向のどの位置にリブを設けるかは、シミュレーションや、試作評価などで決定すればよい。設計条件にもよるが、第２の実施の形態の構成に比べ、反射面の歪みをほとんど悪化させずに、リブの外周を短くするので、可動板の重量を減らすことができる。また、リブ部が回動軸から近い位置に設けられるので、慣性モーメントをより小さくできる可能性が高い。   Next, in order to further reduce the weight and moment of inertia of the movable plate portion, as shown in FIG. 4 which is a configuration diagram of the movable plate portion in the optical scanning device according to the third embodiment of the present invention, According to the movable plate portion 30 in the optical scanning device according to the embodiment, the position near the connection portion between the movable plate 11 and the torsion beam 12 is a position along the outer shape of the movable plate 11 and away from the rotation center. In the vertical direction, the rib 31 is formed in a state of being closed inside the outer shape. In the figure, the same reference numerals as those in FIG. 2 denote the same components. As shown in FIG. 4A, which is a plan view, the outer portion of the enclosed rib 31 has the entire circumference as shown in FIG. Compared with the second embodiment surrounded by, the influence of the decrease in flatness is small. Actually, the position in the direction perpendicular to the torsion beam may be determined by simulation or trial evaluation. Although depending on the design conditions, compared with the configuration of the second embodiment, the outer periphery of the rib is shortened without substantially deteriorating the distortion of the reflecting surface, so that the weight of the movable plate can be reduced. Further, since the rib portion is provided at a position close to the rotation axis, there is a high possibility that the moment of inertia can be further reduced.

また、図１に示すように光走査装置における可動板の歪み量に応じてリブの厚みを可変する。具体的には、トーション梁の接続部分は厚みの大きいリブで補強し、トーション梁の接続部分から遠い位置にあるリブは厚みを小さく形成する。このように、回動中心から離れた位置におけるリブの厚みを小さくすることにより、可動板部の軽量化し、可動板部の慣性モーメントを増大させずに済むので、駆動時のエネルギー、駆動力が小さくて済む光走査装置を構成することが可能である。   Further, as shown in FIG. 1, the thickness of the rib is varied in accordance with the amount of distortion of the movable plate in the optical scanning device. Specifically, the connecting portion of the torsion beam is reinforced with a rib having a large thickness, and the rib located far from the connecting portion of the torsion beam is formed with a small thickness. Thus, by reducing the thickness of the rib at a position away from the center of rotation, it is possible to reduce the weight of the movable plate portion and not to increase the moment of inertia of the movable plate portion. It is possible to configure an optical scanning device that can be small.

図５は本発明の第４の実施の形態に係る光走査装置における可動板部の構成を示す図である。同図の（ａ）は斜視図、同図の（ｂ）は側面図、同図の（ｃ）は回動軸方向の可動板部の中央断面図である。なお、同図において、図２と同じ参照符号は同じ構成要素を示す。同図に示すように、本実施の形態の光走査装置における可動板部４０は、トーション梁１２と可動板１１の反射面４１が同一面上に配されないようにする。例えば同図の（ｂ）、（ｃ）からわかるように、トーション梁１２の平面と可動板１１の反射面４１が同一面にならないように段差を付けて、可動板１１とトーション梁１２を構成する。このような構成を有する本実施の形態の光走査装置によれば、トーション梁の接続部分の回動による応力は、可動板の側面部表面を変形させる応力を発生させるが、その応力を、直接、反射面に伝えないので、反射面の歪みを抑えることができる。また、同図の（ｃ）に示すように、可動板１１の裏面は周囲を残すように肉抜き構造にして軽量化している。よって、第２の実施の形態と同様に、可動板が小型で、回動軸と垂直な方向に長い構造でなければ、可動板部の全周を補強する構造であっても、肉抜き構造にすれば、歪みの抑制に有効であると共に、可動板部を軽量化でき、慣性モーメントを下げられる。そのため、駆動時のエネルギー、駆動力が小さい光走査装置を構成することが可能である。   FIG. 5 is a diagram showing the configuration of the movable plate portion in the optical scanning device according to the fourth embodiment of the present invention. (A) of the figure is a perspective view, (b) of the figure is a side view, and (c) of the figure is a central sectional view of the movable plate portion in the direction of the rotation axis. In the figure, the same reference numerals as those in FIG. 2 denote the same components. As shown in the figure, the movable plate portion 40 in the optical scanning device of the present embodiment prevents the torsion beam 12 and the reflecting surface 41 of the movable plate 11 from being arranged on the same plane. For example, as can be seen from (b) and (c) of the figure, the movable plate 11 and the torsion beam 12 are configured by providing a step so that the plane of the torsion beam 12 and the reflecting surface 41 of the movable plate 11 are not the same surface. To do. According to the optical scanning device of the present embodiment having such a configuration, the stress due to the rotation of the connecting portion of the torsion beam generates a stress that deforms the surface of the side surface of the movable plate. Since it is not transmitted to the reflecting surface, distortion of the reflecting surface can be suppressed. Further, as shown in FIG. 5C, the rear surface of the movable plate 11 is lightened by making it a thinned structure so as to leave a periphery. Therefore, as in the second embodiment, if the movable plate is not small and has a structure that is not long in the direction perpendicular to the rotation axis, even if it is a structure that reinforces the entire circumference of the movable plate portion, In this case, it is effective for suppressing distortion, the movable plate portion can be reduced in weight, and the moment of inertia can be reduced. Therefore, it is possible to configure an optical scanning device with small energy and driving force during driving.

図６に示すように、ＳｉＯ２層５１をＳｉ層５２、５３で挟んだＳｉＯウェハを両面から、ＳｉＯ２層までエッチング処理により不要部分を除去することで、（リブの形成などで）部分的に厚み異なる小型構造を形成できる。可動板やトーション梁などの可動板部の形状は、図７のように、ＳｉＯ２層５１を挟んで、図中上側のＳｉ層５３から可動板の平面部を残して除去加工を行い、下側のＳｉ層５２からリブ部、トーション梁の形状を残すようにエッチングによる除去加工を行い、形成する。リブの厚みとトーション梁の厚みを同じにしなくてはならないが、図８のように、トーション梁１２の幅を狭めるなどの調整により、可動板部の共振周波数を調整することができる。また、トーション梁と反射面を同一面上に配置しない構成であっても、ＳｉＯ２層をＳｉ層で挟んだＳｉＯウェハの標準的な加工方法で、可動板部を形成できるので、製造コストを抑えることが可能である。 As shown in FIG. 6, the SiO 2 layer 51 sandwiched between the Si layers 52 and 53 is partially removed (for example, by forming ribs) by removing unnecessary portions from both sides to the SiO 2 layer by etching. Small structures with different thicknesses can be formed. As shown in FIG. 7, the shape of the movable plate portion such as the movable plate and the torsion beam is removed by removing the plane portion of the movable plate from the upper Si layer 53 with the SiO 2 layer 51 in between. Removal is performed by etching so as to leave the shape of the rib portion and the torsion beam from the Si layer 52 on the side. Although the rib thickness and the torsion beam thickness must be the same, the resonance frequency of the movable plate portion can be adjusted by adjusting the width of the torsion beam 12 as shown in FIG. Even if the torsion beam and the reflecting surface are not arranged on the same plane, the movable plate portion can be formed by a standard processing method of the SiO wafer in which the SiO 2 layer is sandwiched between the Si layers. It is possible to suppress.

更に、図９のように、トーション梁１２の１つの側面と、可動板上反射面が略同一面上にある場合に、可動板１１における反射面４１を有する面と、トーション梁１２の間に溝部６１を設けている。よって、トーション梁の捩れによって生じる応力が、直接反射面に伝わらないので、駆動時の面の歪みを抑制することができる。また、図６のようなＳｉＯウェハから可動板部を形成する場合、図１０のように、上側のＳｉ層５３は、溝部６１を作るために、可動板平面部、トーション梁の上側を残すようにエッチングし、下側のＳｉ層５２は、可動板裏側を肉抜きするようにエッチングして、可動板部を形成する。   Further, as shown in FIG. 9, when one side surface of the torsion beam 12 and the reflective surface on the movable plate are substantially on the same plane, the surface between the movable plate 11 having the reflective surface 41 and the torsion beam 12 is interposed. A groove 61 is provided. Therefore, since the stress generated by the twist of the torsion beam is not directly transmitted to the reflecting surface, the distortion of the surface during driving can be suppressed. Further, when the movable plate portion is formed from the SiO wafer as shown in FIG. 6, the upper Si layer 53 leaves the movable plate plane portion and the upper side of the torsion beam to form the groove portion 61 as shown in FIG. The lower Si layer 52 is etched so that the back side of the movable plate is thinned to form a movable plate portion.

また、ＳｉＯ２層をＳｉ層で挟んだＳｉＯウェハを両面から、ＳｉＯ２層までエッチング処理により不要部分を除去することで図１１のように可動板１１とトーション梁１２の厚みを違えることができる構成を選択することができる。可動板１１やトーション梁２１などの可動板部の形状を形成する場合、図１２のように、ＳｉＯ２層まで、図中上側のＳｉ層５３は可動板１１の平面部とトーション梁１２を残して除去加工を行い、下側のＳｉ層５２はリブ部の形状だけを残すように除去加工を行う。よって、トーション梁のアスペクト比を小さくすることができるので、捩りに対する強度を上げることができる。トーション梁のアスペクト比を小さくする梁形状にしたい場合であっても、ＳｉＯ２層をＳｉ層で挟んだＳｉＯウェハの標準的加工に、可動板部を形成できるので、製造コストを抑え、トーション梁構造の選択自由度を挙げることが可能である。 Further, it is possible to made different the SiO wafer sandwiching the SiO 2 layer in the Si layer from both sides, the thickness of the movable plate 11 and the torsion beam 12 as shown in FIG. 11 by removing unnecessary portions by etching to the SiO 2 layer A configuration can be selected. When forming the shape of the movable plate portions such as the movable plate 11 and the torsion beam 21, as shown in FIG. 12, until the SiO 2 layer, Si layer 53 on the upper side in the figure leaving the flat portion and the torsion beam 12 of the movable plate 11 The lower Si layer 52 is removed so as to leave only the shape of the rib portion. Therefore, since the aspect ratio of the torsion beam can be reduced, the strength against torsion can be increased. Even when it is desired to reduce the aspect ratio of the torsion beam, the movable plate can be formed in the standard processing of the SiO wafer in which the SiO 2 layer is sandwiched between the Si layers. It is possible to list the degree of freedom of structure selection.

ここで、上述したが、図１からわかるように可動板を回動可能に支持するトーション梁との接続部分で大きな歪みが発生する。また、実際に光束（の必要な部分）が反射する範囲で必要な平面性が得られれば、可動板の他の部分が大きく歪んでいたとしても、使用上の問題はない。そこで、トーション梁方向に、可動板を光束の大きさよりも広げる。図１３に示すように、トーション梁１２の接続部分と回動軸方向の光束の反射面領域７１における端部との離間長Ａ１、Ａ２、回動軸と垂直な方向の光束と反射面領域７１における端部との離間長Ｂ１、Ｂ２とすると、Ａ１＋Ａ２＞Ｂ１＋Ｂ２となる。   Here, as described above, as can be seen from FIG. 1, a large distortion occurs at the connection portion with the torsion beam that rotatably supports the movable plate. In addition, if necessary flatness is obtained within a range where the light beam (a necessary part) is actually reflected, there is no problem in use even if other parts of the movable plate are greatly distorted. Therefore, the movable plate is expanded in the direction of the torsion beam than the size of the light beam. As shown in FIG. 13, the separation lengths A1 and A2 between the connection portion of the torsion beam 12 and the end of the light reflecting surface area 71 in the rotation axis direction, the light flux and the reflection surface area 71 in the direction perpendicular to the rotation axis. Assuming that the separation lengths B1 and B2 from the end portion are A1 + A2> B1 + B2.

このような可動板形状で、光束が反射しない部分での歪みは大きいものの、トーション梁から離れた位置では、歪みが小さくなるので、その範囲で光束を反射させれば、光学的な性能劣化を防ぐことができる。また、回転軸とは垂直方向に可動板を広げないので、慣性モーメントの増大を最小限に抑えることができる。可動板とトーション梁の厚みを同じに、可動板部の厚みは一定となるので、加工が容易になる。また、図１４に示すように、光束が回動軸とは垂直な方向に長い場合は、可動板を楕円や小判型にしなくとも、Ａ１＋Ａ２＞Ｂ１＋Ｂ２の条件を満たし、歪みの大きい範囲で反射させずに済む。   With such a movable plate shape, the distortion at the part where the light beam does not reflect is large, but the distortion is small at the position away from the torsion beam. Can be prevented. Further, since the movable plate is not spread in the direction perpendicular to the rotation axis, an increase in the moment of inertia can be minimized. Since the thickness of the movable plate and the torsion beam are the same, and the thickness of the movable plate portion is constant, processing is facilitated. Further, as shown in FIG. 14, when the light beam is long in the direction perpendicular to the rotation axis, the movable plate is reflected in a large distortion range without satisfying the condition of A1 + A2> B1 + B2 without making the movable plate oval or oval. You do n’t have to.

また、回動軸方向に可動板を長くするだけでは、歪み抑制が不十分であれば、上述した補強方法と組み合わせることで、歪み補正の効果を上げることができる。例えば、図２の第１の実施の形態と同様に可動板１１を軸方向長くしてトーション梁１２の接続部分付近をリブ１３で補強したり、図３の第２の実施の形態と同様に外形形状に沿ってリブ２１を形成する。また、図４の第３の実施の形態と同様に回動中心から遠い部分では外周に沿わない形状で閉じた形状でリブ３１を形成するなどのリブによる補強との組み合わせで、より平面度を改善することも可能である。ただし、可動板がトーション梁の長手方向と垂直に長い形状の場合は、先端の撓みが問題になるので、根元部分の補強では、必要な平面度を得られない可能性が高い。   Moreover, if distortion suppression is insufficient only by lengthening the movable plate in the rotation axis direction, the effect of distortion correction can be improved by combining with the above-described reinforcing method. For example, as in the first embodiment of FIG. 2, the movable plate 11 is lengthened in the axial direction and the vicinity of the connecting portion of the torsion beam 12 is reinforced with ribs 13, or as in the second embodiment of FIG. Ribs 21 are formed along the outer shape. Further, as in the third embodiment of FIG. 4, the flatness can be further improved by combining with rib reinforcement such as forming the rib 31 in a closed shape that does not follow the outer periphery in a portion far from the rotation center. It is also possible to improve. However, when the movable plate has a shape that is long perpendicular to the longitudinal direction of the torsion beam, the bending of the tip becomes a problem, and it is highly likely that the necessary flatness cannot be obtained by reinforcing the root portion.

更に、回動軸の軸方向に可動板の寸法が大きく、表側にリブを設けてもリブが光束を遮らなければ、本発明の第５の実施の形態に係る光走査装置における可動板部８０においては、図１５に示すように可動板１１の反射面側にリブ８１を設けるようにすることも可能である。このようにすれば、トーション梁からの伝わる力は、リブ側面を歪ませるように作用するので、トーション梁の捩りによって生じる反射面歪みに関しては、より一層の歪み抑制効果がある。同じ形状のリブならば、表面に付けても、裏面に付けても、可動板部の重量、慣性モーメントに違いはないが、反射面側にリブを設ける方が、反射面の歪みを抑制する効果が高い。   Further, if the movable plate has a large dimension in the axial direction of the rotation shaft and the rib does not block the light beam even if the rib is provided on the front side, the movable plate portion 80 in the optical scanning device according to the fifth embodiment of the present invention is used. In FIG. 15, it is also possible to provide ribs 81 on the reflecting surface side of the movable plate 11 as shown in FIG. In this way, the force transmitted from the torsion beam acts to distort the rib side surface, so that there is a further distortion suppressing effect with respect to the reflection surface distortion caused by torsion of the torsion beam. If the ribs have the same shape, there is no difference in the weight and moment of inertia of the movable plate part, whether it is attached to the front surface or the back surface. However, providing the rib on the reflective surface side suppresses distortion of the reflective surface. High effect.

また、回転軸方向に回転軸から近い部分も遠い部分同じように可動板を伸ばしていたが、図１６におけるハッチング部分で示すように、伸ばした部分でも、歪みを吸収する作用していない部分は、無くしたとしても、実際の反射面の歪み抑制に影響がない。この場合は、図１７のように、表面を歪ませる力作用する軸から近い範囲のみを伸ばす。この場合、可動板１１とトーション梁１２の接続部分と回動軸方向の光束の反射面領域の端部との離間長Ａ１、Ａ２、回動軸と垂直な方向の光束と反射面領域の端部との離間長Ｂ１、Ｂ２とすると、Ａ１＋Ａ２＞Ｂ１＋Ｂ２となる条件を満たす。よって、本発明の第６の実施の形態に係る光走査装置における可動板部９０においては、可動板における一部分のみの領域９１を回動軸方向に伸ばして突き出る形状とすることで、反射面の平面度を落とことなく、図１６におけるハッチング部分の肉厚を削った分で、可動板部を軽量化することができる。また、回動軸から離れた部分の肉厚を落とせるので、可動板部の慣性モーメントを下げられるので、小さなエネルギーでの駆動が可能になる。   In addition, the movable plate was stretched in the same way as the portion far from the rotational axis in the direction of the rotational axis, but as shown by the hatched portion in FIG. 16, the stretched portion does not act to absorb distortion. Even if it is eliminated, there is no effect on the actual distortion suppression of the reflecting surface. In this case, as shown in FIG. 17, only the range close to the axis where the force acts to distort the surface is extended. In this case, the separation lengths A1 and A2 between the connecting portion of the movable plate 11 and the torsion beam 12 and the end of the reflection surface region of the light beam in the rotation axis direction, the light beam in the direction perpendicular to the rotation axis and the end of the reflection surface region. When the separation lengths B1 and B2 from the part are satisfied, the condition of A1 + A2> B1 + B2 is satisfied. Therefore, in the movable plate portion 90 in the optical scanning device according to the sixth embodiment of the present invention, by forming the region 91 of only a part of the movable plate in the direction of the rotation axis and projecting it, The movable plate portion can be reduced in weight by reducing the thickness of the hatched portion in FIG. 16 without reducing the flatness. Moreover, since the thickness of the part away from the rotating shaft can be reduced, the moment of inertia of the movable plate part can be lowered, so that it is possible to drive with small energy.

なお、本発明は上記実施の形態に限定されるものではなく、特許請求の範囲内の記載であれば多種の変形や置換可能であることは言うまでもない。   In addition, this invention is not limited to the said embodiment, It cannot be overemphasized that various deformation | transformation and substitution are possible if it is description in a claim.

光走査装置における可動板の歪み量の分布を示す図である。It is a figure which shows distribution of the distortion amount of the movable plate in an optical scanning device. 本発明の第１の実施の形態に係る光走査装置における可動板部の構成を示す図である。It is a figure which shows the structure of the movable plate part in the optical scanning device which concerns on the 1st Embodiment of this invention. 本発明の第２の実施の形態に係る光走査装置における可動板部の構成を示す図である。It is a figure which shows the structure of the movable plate part in the optical scanning device concerning the 2nd Embodiment of this invention. 本発明の第３の実施の形態に係る光走査装置における可動板部の構成を示す図である。It is a figure which shows the structure of the movable plate part in the optical scanning device concerning the 3rd Embodiment of this invention. 本発明の第４の実施の形態に係る光走査装置における可動板部の構成を示す図である。It is a figure which shows the structure of the movable plate part in the optical scanning device concerning the 4th Embodiment of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す平面図である。It is a top view which shows another structure of the movable board part in the optical scanning device of this invention. 本発明の光走査装置における可動板部の別の構成を示す平面図である。It is a top view which shows another structure of the movable board part in the optical scanning device of this invention. 本発明の第５の実施の形態に係る光走査装置における可動板部の構成を示す斜視図である。It is a perspective view which shows the structure of the movable plate part in the optical scanning device concerning the 5th Embodiment of this invention. 本発明の光走査装置における可動板部の構成を示す平面図である。It is a top view which shows the structure of the movable plate part in the optical scanning device of this invention. 本発明の第６の実施の形態に係る光走査装置における可動板部の構成を示す平面図である。It is a top view which shows the structure of the movable plate part in the optical scanning device concerning the 6th Embodiment of this invention. 従来の光走査装置における可動板部の構成を示す図である。It is a figure which shows the structure of the movable plate part in the conventional optical scanning device. 従来の光走査装置における稼動部の回動の様子を示す図である。It is a figure which shows the mode of the rotation of the operation part in the conventional optical scanning device. 従来の光走査装置における可動板部の構成を示す図である。It is a figure which shows the structure of the movable plate part in the conventional optical scanning device. 従来の光走査装置における可動板部の別の構成を示す図である。It is a figure which shows another structure of the movable plate part in the conventional optical scanning device.

符号の説明Explanation of symbols

１０，２０，３０，４０，６０，７０，８０，９０；可動板部、
１１；可動板、１２；トーション梁、１３，２１，３１，８１；リブ、
４１；反射面、５１；ＳｉＯ２層、５２，５３；Ｓｉ層、６１；溝部、
７１；反射面領域、９１；領域。 10, 20, 30, 40, 60, 70, 80, 90; movable plate part,
11; movable plate, 12; torsion beam, 13, 21, 31, 81; rib,
41; reflective surface, 51; SiO 2 layer, 52, 53; Si layer, 61; groove,
71; reflective surface area, 91; area.

Claims (8)

入射光を反射させる反射面を有する可動板及び該可動板を回動可能に軸支するトーション梁を有する可動板部を備える可動板構造体において、
前記可動板と前記トーション梁との接続部分付近では前記可動板の外周端部に沿って設けられ、前記接続部分付近以外では前記可動板の回動軸に近づけて設けられるリブ部を備えることを特徴とする可動板構造体。 In the movable plate structure including a movable plate portion having a torsion beam for supporting rotatably the movable plate and the movable plate having a reflecting surface for reflecting incident light,
A rib portion provided along the outer peripheral end of the movable plate in the vicinity of the connection portion between the movable plate and the torsion beam, and provided near the rotating shaft of the movable plate except in the vicinity of the connection portion. Feature movable plate structure. 前記可動板と前記トーション梁との接続部分付近における前記リブ部の厚みは厚く、前記可動板と前記トーション梁との接続部分付近から回動中心から離れた位置に向かって前記リブ部の厚みは連続的に徐々に薄くなるように形成することを特徴とする請求項１記載の可動板構造体。 Thicker thickness of the rib portion in the connection around the portion of the front Symbol movable plate and the torsion beam, the thickness of the rib portion from the vicinity of the connection portion between the torsion beam and the movable plate toward a position apart from the pivoting central 2. The movable plate structure according to claim 1 , wherein the movable plate structure is formed so as to become gradually thinner. 前記可動板上の反射面と前記トーション梁の外面部を異なる面上に配置することを特徴とする請求項１又は２に記載の可動板構造体。 The movable plate structure according to claim 1 or 2, wherein the reflection surface on the movable plate and the outer surface portion of the torsion beam are arranged on different surfaces. 前記可動板の外周端部の少なくとも一部に沿って形成された前記リブ部を介して、前記可動板と前記トーション梁が接続することを特徴とする請求項３記載の可動板構造体。 The movable plate structure according to claim 3 , wherein the movable plate and the torsion beam are connected via the rib portion formed along at least a part of the outer peripheral end portion of the movable plate . 前記リブ部を前記可動板の裏面に設け、前記リブ部の高さと前記トーション梁の厚みを等しくすることを特徴とする請求項３記載の可動板構造体。 Wherein a rib portion on the back surface of the movable plate, the movable plate structure according to claim 3, wherein the equalizing the thickness of the height and the torsion beam of the rib portion. 前記リブ部を前記可動板の反射面側に設けることを特徴とする請求項１〜５のいずれか１項に記載の可動板構造体。 The movable plate structure according to any one of claims 1 to 5 , wherein the rib portion is provided on a reflective surface side of the movable plate . 前記可動板の外周端部の少なくとも一部に沿って形成された前記リブ部を介して、前記可動板と前記トーション梁が接続され、前記リブ部による前記可動板と前記トーション梁の接続部分に溝部を形成することを特徴とする請求項６記載の可動板構造体。 The movable plate and the torsion beam are connected via the rib portion formed along at least a part of the outer peripheral end portion of the movable plate, and the connecting portion of the movable plate and the torsion beam by the rib portion is connected. The movable plate structure according to claim 6 , wherein a groove is formed. 請求項１〜７のいずれか１項に記載の可動板構造体と、該可動板構造体のトーション梁にねじり方向の駆動力を作用させる駆動部とを具備することを特徴とする光走査装置。 An optical scanning device comprising: the movable plate structure according to any one of claims 1 to 7; and a drive unit that applies a driving force in a torsional direction to a torsion beam of the movable plate structure. .
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