EP3632135B1 - Mikromechanischer schallwandler - Google Patents

Mikromechanischer schallwandler Download PDF

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Publication number
EP3632135B1
EP3632135B1 EP18729366.7A EP18729366A EP3632135B1 EP 3632135 B1 EP3632135 B1 EP 3632135B1 EP 18729366 A EP18729366 A EP 18729366A EP 3632135 B1 EP3632135 B1 EP 3632135B1
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EP
European Patent Office
Prior art keywords
bending
transducer
bending transducer
substrate
free end
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EP18729366.7A
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German (de)
English (en)
French (fr)
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EP3632135A2 (de
Inventor
Fabian STOPPEL
Bernhard Wagner
Shanshan Gu-Stoppel
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
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Priority to EP23189032.8A priority Critical patent/EP4247005A3/de
Priority to EP23189034.4A priority patent/EP4247006A3/de
Publication of EP3632135A2 publication Critical patent/EP3632135A2/de
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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/26—Damping by means acting directly on free portion of diaphragm or cone
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2440/00—Bending wave transducers covered by H04R, not provided for in its groups
    • H04R2440/01—Acoustic transducers using travelling bending waves to generate or detect sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10—General applications
    • H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's

Definitions

  • Exemplary embodiments of the present invention relate to a micromechanical sound transducer with at least one bending actuator (bending transducer in general) and a miniaturized gap as well as a miniaturized sound transducer with a cascaded bending transducer. Additional exemplary embodiments relate to corresponding production methods.
  • microspeakers are based on the electrodynamic drive system, in which a membrane is deflected by means of a plunger coil moving in a permanent magnetic field.
  • a major disadvantage of these conventional electrodynamic sound transducers is the low efficiency and the resulting high power consumption of often more than one watt.
  • sound converters do not have any position sensors, so that the movement of the membrane is uncontrolled and high levels of distortion occur at higher sound pressure levels.
  • Other disadvantages are the high series variability and relatively high overall heights of mostly over 3 mm.
  • MEMS Due to high-precision manufacturing processes and energy-efficient drive principles, MEMS have the potential to overcome these disadvantages and enable a new generation of sound transducers. So far, however, a fundamental problem has been the excessively low sound pressure level of MEMS sound transducers. The primary reason for this lies in the difficulty of generating sufficiently large stroke movements with the smallest possible dimensions. To make matters worse, a membrane is required to prevent an acoustic short circuit, which has a negative effect on the overall deflection due to its additional spring stiffness. The latter can be minimized by using very soft and three-dimensionally shaped membranes (e.g. with a torus), which, however, cannot currently be manufactured using MEMS technology and are therefore hybridly integrated in a complex and costly manner.
  • very soft and three-dimensionally shaped membranes e.g. with a torus
  • MEMS sound transducers of the most varied designs are dealt with in publications and patents, from which, among other things, due to the above-mentioned problems, no market-ready products have emerged. These concepts are based on closed membranes that vibrate and generate sound.
  • [Hou13, US2013/156253A1 ] becomes e.g. B. describes an electrodynamic MEMS sound transducer that requires the hybrid integration of a polymembrane and a permanent magnet ring.
  • the concept of piezoelectric MEMS acoustic transducers has been presented in [Yi09, Dej12, US7003125 , US8280079 , US2013/0294636A1 ] shown.
  • piezoelectric materials such as PZT, AIN or ZnO were applied directly to silicon-based sound transducer membranes, which, however, do not allow sufficiently large deflections due to their low elasticity.
  • Digital MEMS sound transducers based on arrays with electrostatically driven membranes, which, however, can only generate sufficiently high sound pressure levels at high frequencies, are described in [Gla13, US7089069 , US20100316242A1 ] described. Therefore, there is a need for a better approach. Further state of the art forms the DE 10 2015 213771 A1 , the DE 10 2015 210919 A1 , the EP 2 362 686 A2 , the DE 10 2006 005048 as well as the EP 2 254 354 A2
  • Embodiments of the present invention create a micromechanical sound transducer (eg constructed in a substrate) with a first bending transducer or bending actuator and a second bending transducer or bending actuator.
  • the first bending actuator has a free end and, for example, at least one or two free sides and is designed to be excited, for example by an audio signal, to oscillate vertically and to emit (or pick up) sound.
  • the second bending actuator also has a free end and is arranged opposite the first bending actuator in such a way that the first and the second bending actuator lie or are suspended in a common plane.
  • the arrangement is designed in such a way that a gap (eg in the micrometer range) is formed between the first and the second bending actuator which separates the two bending actuators from each other.
  • the second bending actuator is always excited to oscillate in phase with the first bending actuator, with the consequence that the gap essentially remains constant over the entire deflection of the bending actuators.
  • Claim 1 further defines that the gap is less than 5% or less than 1% or less than 0.1% or less than 0.01% of the area of the first bending transducer, the gap being less than 10%, 5%, 1%, 0 .1% or 0.01% of the area of the first bending transducer.
  • Exemplary embodiments for this aspect of the invention are based on the knowledge that by using a plurality of mutually separated bending transducers or actuators, which are separated from one another with a minimal (separation) gap, it is achieved with identical deflection of the two transducers or actuators out of the plane can be that the gap between the two actuators remains almost constantly small (in the micrometer range), so that there are always high viscosity losses in the gap, which as a result prevent an acoustic short circuit between the rear volume and the front volume (of the bending actuator).
  • the present concept enables a significant increase in performance.
  • a micromechanical sound transducer is created with a first bending transducer or bending actuator (designed to be excited for vertical oscillation) and a screen element extending vertically (i.e. out of the plane of the substrate and thus also out of the plane of extension of the bending transducer) to the first bending transducer or bending actuator .
  • the screen element is separated from the free end of the first bending actuator by a gap (gap).
  • this aspect lies in the fact that the diaphragm element over the entire range of movement of the transducer or actuator (as a result of the vibration) can ensure that the distance between the diaphragm element and the free end of the actuator remains approximately constant.
  • This achieves the same effect as above, namely that an acoustic short circuit can be prevented due to the high viscous losses at the free end (and possibly also the free sides) or in the gap.
  • the invention also relates to a manufacturing method of such an actuator with a screen element according to claim 15.
  • the first and the second bending actuator are bending actuators of the same type. These can be, for example, flat, rectangular, trapezoidal or generally polygonal bending actuators. According to a further exemplary embodiment, these bending actuators can each have the shape of a triangle or a segment of a circle. The triangular or circular segment shape is often used in micromechanical sound transducers that include more than two bending actuators.
  • the micromechanical sound transducer comprises one or more further bending actuators, such as e.g. B. three or four bending actuators.
  • either the simultaneous or in-phase control of the two bending actuators or the provision of the diaphragm element makes it possible, starting from a gap which (at rest) is less than 10% or even less than 5%; 2.5%, 1%, 0.1% or 0.01% of the area of the first bending actuator, the gap remains small over the entire range of movement, i.e. it is a maximum of 15% or even only 10% (or 1 % or 0.1% or 0.01%) of the area of the first bending actuator.
  • the height of the screen element is dimensioned such that it is at least 30% or 50% or preferably 90% or even 100% or more of the maximum deflection of the first bending actuator in linear operation (ie linear mechano-elastic range) or the maximum elastic deflection of the first bending transducer (generally 5-100%).
  • the height can be dependent on the gap width (at least 0.5 times, 1 time, 3 times or 5 times the gap width) or depending on the thickness of the bending transducer (at least 0.1 times, 0.5 times times, 1 time, 3 times or 5 times thickness).
  • the screen element may have a varying geometry in its cross-section (e.g. a geometry curved/inclined towards the actuator) so that the slot has a largely constant cross-section along the actuator movement.
  • the panel may form a mechanical stop to prevent mechanical overload.
  • a micromechanical sound transducer which includes a controller which controls the second bending actuator in such a way that it is excited to oscillate in phase with the first bending actuator.
  • a sensor system is provided which detects the vibration and/or the position of the first and/or the second bending actuator in order to enable the controller to activate the two bending actuators in phase.
  • this principle allows the actual position of the sound-generating element to be determined with the help of easily integrated sensors. This is of great advantage and enables a much more accurate and reliable detection.
  • This forms the basis for controlled excitation (closed loop), with which external influences, aging effects and non-linearities can be electronically compensated.
  • the bending actuators can also have a so-called "cascading".
  • first and/or the second bending actuator each comprise at least a first and a second bending element. These elements are connected in series.
  • "connected in series” means that the first and second bending element have a clamped end and a free end and the clamped end of the second bending element engages the free end of the first bending actuator and its free end engages the free end of the entire bending actuator forms.
  • the connection between the two bending elements can be formed, for example, by a flexible element.
  • the micromechanical sound transducer can have an additional frame, which is provided, for example, in the area of the transition between the first and the second bending element. This is used for stiffening and mode decoupling.
  • the two bending elements it should be noted that, according to a preferred exemplary embodiment, they are controlled with different control signals, so that, for example, the inner bending element or the inner bending elements are used for higher frequencies, while the bending elements further out are driven to oscillate in a lower frequency range .
  • a micromechanical sound transducer having at least one, preferably two, flexure actuators, each flexure actuator comprising a first and a second flexure element connected in series.
  • bending actuators can also have a flexible connection instead of a separating gap.
  • Exemplary embodiments of this dependent aspect are based on the knowledge that by connecting a plurality of bending elements of a bending actuator in series, it can be achieved that different bending actuators are responsible for different frequency ranges.
  • the internal bending actuator can be designed for a high-frequency range, while the frequency range further out is operated for the low-frequency range.
  • the concept described enables cascading with several individually controllable actuator stages.
  • significant increases can be achieved through the frequency-separated control in combination with the piezoelectric drives achieve in energy efficiency.
  • the good mode decoupling also offers advantages in terms of playback quality. Other advantages are e.g. B. the realization of particularly space-saving multi-way sound transducers.
  • Fig. 1a shows a sound transducer 1 with a first bending actuator 10 and a second bending actuator 12. Both are arranged or clamped in a plane E1, as can be seen from the clamps 10e and 12e.
  • the clamping can be realized in that the bending actuators 10 and 12 are etched out of a common substrate (not shown), so that the bending actuators 10 and 12 are connected to the substrate on one side and a (common) cavity (not shown) is formed.
  • the bending actuators 10 and 12 shown here can be prestressed, for example, so that the representation either shows a rest state or also shows a deflected snapshot (in this case the rest state is shown by the dashed line).
  • the two actuators 10 and 12 are arranged horizontally next to one another, so that the actuators 10 and 12 or at least the clamps 10e and 12e lie in a common plane E1.
  • This statement preferably relates to the state of rest, with plane E1 relating primarily to the common clamping areas 10e and 12e in the prestressed case.
  • the two actuators 10 and 12 are arranged opposite one another, so that there is a gap 14 of, for example, 5 ⁇ m, 25 ⁇ m or 50 ⁇ m (generally in the range between 1 ⁇ m and 90 ⁇ m, preferably less than 50 ⁇ m or less than 20 ⁇ m) between them.
  • This gap 14 separating the two cantilevered flexure actuators 12 and 14 may be referred to as the decoupling gap.
  • the decoupling gap 14 varies only minimally over the entire deflection range of the actuators 10 and 12, e.g., by a factor of 1, 1.5 or 4 (generally in the range 0.5-5), i. H. Variation of less than +500%, +300%, +100% or +75% or less than +50% of the gap width (at rest) in order to be able to do without an additional seal, as will be explained below.
  • the actuators 10 and 12 are preferably driven piezoelectrically.
  • Each of these actuators 10 and 12 can have a layer structure, for example, and can have one or more passive functional layers in addition to the piezoelectric active layers.
  • electrostatic, thermal or magnetic drive principles are also possible. If a voltage is applied to the actuators 12, the latter or, in the piezoelectric case, the piezoelectric material of the actuators 10 and 12 deforms and causes the actuators 10 and 12 to bend out of the plane. This deflection results in displacement of air. With a cyclic control signal, the respective actuator 10 and 12 is then excited to oscillate in order to emit (or pick up in the case of a microphone not claimed) a sound signal.
  • the actuators 10 and 12 or the corresponding control signal is designed in such a way that adjacent actuator edges or the free end of the actuators 10 and 12 experience an almost identical deflection from the plane E1.
  • the free ends are identified by reference numerals 10f and 12f. Since the actuators 10 and 12 or the free ends 10f and 12f move parallel to one another, they are in phase. In this respect, the deflection of the actuators 10 and 12 is referred to as being in phase.
  • Fig. 1b shows another variant of how an actuator of a micromechanical sound transducer can achieve good sound pressure behavior without sealing.
  • the exemplary embodiment Fig. 1b shows the sound transducer 1 'comprising the actuator 10, which is clamped at the point 10e.
  • the bender actuator 10 may be etched out of a substrate (not shown) such that a cavity (not shown) is formed beneath it.
  • the free end 10f can be excited to oscillate over a region B.
  • a vertically arranged diaphragm element 22 is provided opposite the free end 10f. This diaphragm element is preferably at least as large or larger than the range of movement B of the free end 10f.
  • the screen elements 22 preferably extend on the front and/or rear side of the actuator, ie viewed from the plane E1 (substrate plane) into a lower plane and a higher plane (eg perpendicular to the substrate). Between the diaphragm element 22 and the free end 10f there is a gap 14' comparable to the gap 14 from Fig. 1a intended.
  • the screen element 22 makes it possible to keep the width of the provided decoupling gaps 14' approximately the same even in the deflected state (cf. B). Thus, in this configuration with the adjacent edges, there are no significant openings due to deflection, such as in 1c shown.
  • FIG. 1c shows an actuator 10, which is also clamped at the point 10e. Opposite is any adjacent structure 23 with no vertical extension and no movement. A deflection of the actuator 10 results in an opening in the area of the free end 10f of the actuator. This opening is given the reference “o". Depending on the deflection, these opening cross sections 14o can be significantly larger than the decoupling slots (cf. Fig. 1a and 1b ) or generally a coupling slot in the idle state. The opening can allow air to flow between the front and back, resulting in an acoustic short circuit.
  • the side surface of the screen element 22 or the screen element 22 can be adapted to the movement of the actuator 10 in the deflection range B.
  • a concave shape would be conceivable.
  • Both the structure 1 from Fig. 1a as well as structure 1' Fig. 1b makes it possible to prevent the acoustic short circuit by providing means that keep the decoupling gap 14 or 14' approximately constant over the entire range of movement.
  • a piezoelectric material may be used.
  • 2 shows three different cross sections of possible actuator elements in the representations ac.
  • a unimorph structure is shown.
  • a passive layer 10p, 12p and a piezoelectric layer 10pe or 12pe are also applied here.
  • Figure 2b shows a bimorph structure.
  • two piezoelectric layers 10pe_1 or 12pe_1 and 10pe_2 or 12pe_2 and a passive intermediate layer 10p or 12p are provided.
  • piezo actuators from the Figures 2a to 2c have in common that they consist of at least two layers, namely a piezoelectric layer 10pe or 12pe and another layer, such as. B. a passive layer 10p, 12p or a further piezoelectric layer 10pe_2, 12pe_2 is formed.
  • the piezoelectric layers 10pe, 12pe, 10pe_1, 12pe_1, 10pe_2, 12pe_2 can be designed as multilayer systems with additional separating layers (cf. the layers 10p, 12p) and/or be formed from any number of sublayers (cf. dashed lines).
  • the contact is made, for example, by flat or interdigital electrodes.
  • a thermal drive can also be used, which can have a multi-layer structure analogous to the piezoelectric actuators.
  • the structure of a thermal drive then corresponds to the structure as it is in relation to Fig. 2a-c is explained for piezoelectric layers, with thermally active layers being used instead of piezoelectric layers.
  • Figure 3a shows an actuator arrangement with four actuators 10', 11', 12' and 13'. Each of these actuators 10' to 13' is triangular and clamped on one side along the hypotenuse. The triangles are right angled according to one embodiment Triangles such that the perpendicular vertices of the actuators 10' to 13' all meet at one point. As a result, the feedback gaps 14 extend between the legs.
  • the individual actuators 10' to 13' can also be further subdivided, as indicated by the dashed lines. With subdivision, of course, the clamping is no longer along the hypotenuse, but along one of the legs, while the decoupling gaps then extend along the hypotenuse and along the other leg.
  • the triangular configuration enables the adjacent free ends (separated by the respective column 14) to experience as equal a deflection as possible.
  • Figure 3b shows in principle the top view of the embodiment Fig. 1a , It being indicated here that both the actuator 10 and the actuator 12, e.g. B. can be subdivided along the axes of symmetry (cf. dashed line).
  • 3c shows a further embodiment in which the entire sound transducer is arranged in the form of a segment of a circle and has a total of four 90° segments as actuators 10" to 13", which in turn are separated from one another by the separating gaps 14.
  • the individual actuators 10" to 13" can in turn be further subdivided, as indicated by the dashed lines.
  • the separating columns 14 preferably extend along the lines of symmetry. In the case of the exemplary embodiments with more than two actuators, this means that the separating columns, according to a preferred exemplary embodiment, meet at the center of gravity of the overall surface of the sound transducer.
  • 3d shows (top view) another version of a micromechanical sound transducer with four (rectangular or square here) actuators 10′′′, 11′′′, 12′′′ and 13′′′ arranged in the form of four quadrants of a rectangle or square.
  • the four actuators 10′′′ to 13′′′ are separated from one another by two separating gaps 14 crossing one another.
  • Each of the actuators 10′′′ to 13′′′ is clamped across the corner, ie on two sides at the outer edge.
  • Referring to 4 shows the influence of the gap width.
  • 4 shows the resulting sound pressure level SPL over a frequency range from 500 Hz to 20 kHz for four different gap widths (5 ⁇ m, 10 ⁇ m, 25 ⁇ m and 50 ⁇ m).
  • the reduction in the sound pressure level SPL is negligible for a gap width of less than 10 ⁇ m and the structure behaves acoustically like a closed membrane.
  • the influence of the gap width decreases significantly.
  • the present systems are characterized by a significantly higher efficiency as a result of the decoupling of the individual actuators. The latter manifests itself in very high deflections and sound pressure levels.
  • figure 5 1 shows a structure of a micromechanical sound transducer 1′′ with two actuators 10* and 12*.
  • the two actuators 10* and 12* each comprise an inner stage and an outer stage.
  • the actuator 10* has a first actuator element 10a* (outer stage) and a second actuator element 10i* (inner stage)
  • the actuator 12* comprises the actuator element 12a* and the actuator element 12i*.
  • the outer steps 10a* and 12a* are always clamped, namely over the areas 10e* and 12e*.
  • the opposite end of actuators 10a* and 12a* is referred to as the free end.
  • the inner steps 10i* and 12i* are coupled to this free end by means of optional connecting elements 17.
  • the coupling takes place in such a way that the coupling is again implemented via one end of the inner actuator elements 10i* or 12i*, namely in such a way that the opposite ends of the inner actuators 10i* or 12i* serve as free ends.
  • the actuator 10* or 12* is constructed in such a way that the inner stage 10i* (or 12i*) is connected in series with the outer stage 10a* (12a*).
  • a decoupling gap 14* is formed between the free ends of elements 10i* and 12i*. This is not necessarily designed for all exemplary embodiments in the same way as the decoupling gap, which in connection with the above exemplary embodiments (cf. Fig. 1a ) was explained.
  • the actuators 10* and 12* are only separated from one another by a decoupling gap 14 a few micrometers wide and are preferably designed in such a way that adjacent structure edges (free edges of the inner elements 10e* and 12e*) experience the same deflection as possible (synchronously or in phase) from the plane E1 (in which the actuators 10* and 12* or the clamping areas 10e* and 12e* are arranged) during operation.
  • a connection of the inner elements 10i* and 12i* in the region of the gap shown would be possible, for example by means of a flexible material.
  • the individual cascaded stages can rest on a frame 19.
  • the frame 19 is arranged in such a way that the clamped ends of the inner steps 10i* and 12i* rest on the same frame 19.
  • the frame 19 is preferably arranged in such a way that it lies in the area of the connection points (cf. connection elements 17). The frame makes it possible to suppress parasitic vibration modes and unwanted mechanical deformations.
  • a micromechanical sound transducer with only one actuator eg the actuator 10*
  • This actuator can, for example, oscillate freely with respect to a fixed end, so that a gap is formed between them, or it can also be flexibly connected to a fixed end.
  • a screen such as that used in Fig. 1b is explained, conceivable.
  • Figure 6a 1 shows a micromechanical sound transducer with four actuators 10*' to 13*', each of the actuators 10*' to 13*' having two actuator elements 10a*' or 10i*' to 13i*' or 13a*'.
  • the inner elements 10i*' to 13i*' each have a triangular shape (in terms of area), while the outer elements 10a*' to 13a*' have a trapezoidal shape (in terms of area).
  • the smaller leg of the trapezoidal actuator 10a*' to 13a*' is connected to the hypotenuse leg of the triangular actuator 10i*' to 13i*' via connecting elements 17.
  • the optional connecting elements are preferably arranged at the corners of the trapezoid or triangle.
  • FIG. 12 essentially shows the electromechanical sound transducer in a plan view figure 5 with the inner actuators 10i* and 12i* and the outer actuators 10a* and 12a*.
  • connecting elements 17 are provided at the corners of the rectangular inner and outer elements 10i*, 10a*, 12i* and 12a*.
  • Figure 6c 1 shows the cascaded actuators 10*" to 13*", starting from the micromechanical sound transducer in the shape of a segment of a circle, each actuator having an inner actuator element and an outer actuator element.
  • the inner actuator elements 10i*" to 13i*" are designed as elements in the shape of segments of a circle, while the outer elements 10a*" to 13a*" are designed as segments of a circular disk. The connection is again made via connecting elements 17.
  • separating gaps 15 can also be provided between the inner actuators (for example 10i*' and 10a*'), which are only bridged by the connecting elements 17.
  • the outer steps e.g. 10a* and 12a* in Figure 6b
  • the connecting elements can be designed as mechanical spring elements or joints.
  • the actuators can also be subdivided further, so that any number of actuators per actuator element 10* or 12* are created (cf. dashed line).
  • the actuators of the outer stage deflect the inner stage out of the plane, with the actuators of the inner stage exerting a further deflection.
  • the result is a deflected structure that behaves acoustically like a closed membrane due to the high viscous losses in the decoupling slots.
  • the overall cascaded structure can also have three or more stages.
  • the different stages can be controlled either with identical or different drive signals.
  • the stages can be operated in different frequency ranges and z.
  • B. form a multi-way transducer with a particularly small footprint.
  • FIG. 7 shows a plot of simulated sound pressure across the frequency range, broken down by inner and outer stage.
  • the outer stage serves in particular the low frequency range (maximum sound pressure at around 1500 Hz) while the inner stage serves the higher frequency range (maximum sound pressure at around 10000 Hz).
  • a MEMS sound transducer with a chip size of 1x1 cm was assumed and measured at a distance of 10 cm.
  • FIG. 8 illustrates the concept of cascading using a concrete two-tier design as an example.
  • Figure 8a the top view is shown, where in Figure 8b an enlarged detail of the connection area is shown.
  • the two-piece design has outer actuators 10a* ⁇ and inner actuators 10i* ⁇ .
  • this is in Figure 8a illustrated design from the design Figure 8a comparable.
  • the decoupling slots 14 are marked with solid lines.
  • respective decoupling slots 14 are also provided between the individual stages.
  • Figure 8a In contrast to Figure 6a is here with the design from Figure 8a also additionally illustrates the frame structure 19*', which is smaller in terms of lateral dimensions than the lateral dimensions of all internal steps 10e*'.
  • folded springs serve as connecting elements 17*', the intermediate spaces of which are filled with decoupled filling structures 17f*', e.g. B. are provided from a material of spring or actuator. Analogously to this, the intermediate spaces 14 between the actuators of both stages also have such filling structures 17f*'.
  • FIG. 10 The configuration off Figure 10a is similar to the configuration from Fig. 1b , the screen element 22 provided opposite the actuator 10 clamped on one side (cf. clamp 10e) not only being provided in the region of the free end 10f, but also extending along the sides of the actuator, i.e. along the entire decoupling slot 14'.
  • the screen elements arranged at the side are identified by the reference symbols 22s.
  • Figure 10b is based on a transducer configuration with two opposing actuators 10 and 12, as z. Am Figure 3b is shown. This is it again around cantilevered actuators (cf. clamping 10e or 12e).
  • Both the embodiment Figure 10a as well as the embodiment Figure 10b enables a good fluidic separation of the front and rear sides in the structures shown here with discontinuous deflection profiles through the use of the laterally arranged screen elements 22s.
  • Figure 10c shows another variant, in which four actuators 10"", 11"", 12"” and 13"" extend from a central surface 16.
  • the four actuators 10" to 13" are each trapezoidal and are clamped on one side opposite the surface 16 via their short side.
  • the four actuators 10" to 13" are separated from one another by four diagonally arranged separating gaps 14 (which extend as an extension of the diagonals of the surface 16), so that the long side of the actuators 10" to 13" can oscillate freely.
  • a (circumferential) vertically formed screen element 22s is provided along the long side of the trapezoidal actuators 10"" to 13"".
  • the micromechanical sound transducer shown here has eight sound transducers 1, as they are, for example, in relation to Fig. 1a were explained on. These eight sound transducers 1 are arranged in two rows and four columns. As a result, a large-area expansion and thus a high sound pressure can be achieved. If one assumes that each actuator of the sound transducer 1 has a base area of 5 ⁇ 5 mm, then a “diaphragm area” of 200 mm 2 , so to speak, is realized.
  • the sound converter shown in this way can be scaled as desired, so that sound converter sizes of, for example, 1 cm in length or more (generally in the range from 1 mm to 50 cm) can also be achieved.
  • the individual actuators explained above can be provided with sensors.
  • the sensors enable the actual deflection of the actuators to be determined. These sensors are typically connected to the controller for the actuators, so that the control signal for the individual actuators is readjusted around a feedback loop in such a way that the individual actuators oscillate in phase.
  • the purpose of the sensors can also be to detect non-linearities and to distort the signal during activation in such a way that non-linearities can be compensated for or reduced.
  • the position is preferably detected using the piezoelectric effect.
  • one or more areas of the piezoelectric layer on the actuators can be provided with separate sensor electrodes, via which a voltage or charge signal that is approximately proportional to the deflection can be picked up.
  • multiple piezoelectric layers can also be implemented, with at least one layer being used partially for position detection.
  • a combination of different piezoelectric materials is also possible, arranged either one above the other or next to each other (e.g. PZT for actuators, AIN for sensors).
  • piezoelectric sensor elements it is also possible to integrate thin-film strain gauges or additional electrodes for capacitive position detection. If the actuator structures are made of silicon, piezoresistive silicon resistors can also be directly integrated.
  • Such converters can be operated, for example, with a first natural mode of 10 Hz to 300 kHz.
  • the excitation frequency is chosen statically up to 300 kHz, for example.
  • the actuator structures described are suitable for areas of application in which sound in a frequency range between 10 Hz and 300 kHz is to be generated with the smallest possible component volumes ( ⁇ 10 cm 3 ). This primarily applies to miniaturized sound transducers for wearables, smartphones, tablets, laptops, headphones, hearing aids, but also ultrasonic transducers. Overall, other applications in which fluids are displaced (e.g. fluid mechanical and aerodynamic drive and guidance structures, inkjets) can also be considered.
  • Exemplary embodiments create a miniaturized device for the displacement of gases and liquids with at least one bending actuator that can be deflected out of plane, characterized in that the device contains narrow opening slits with such a high flow resistance that the device operates in the acoustic and ultrasonic frequency range (20 Hz to 300 Hz). kHz) behaves almost like a closed membrane in terms of flow.
  • the device can include the following features: decoupling slots in the actuator materials, the total length of which makes up a maximum of 5% of the total actuator surface and has an average length-to-width ratio of more than 10.
  • the device can be designed in such a way that openings occurring in the deflected state make up less than 10% of the entire actuator surface, so that a high level of fluidic separation between the front and rear sides is achieved even without a closed membrane.
  • the device can have two or more actuators located opposite one another and separated from one another.
  • the actuators can be driven piezoelectrically, electrostatically, thermally, electromagnetically or by means of a combination of several principles.
  • the device it would also be conceivable for the device to be designed with two or more actuator stages coupled via connecting elements.
  • the device it would also be conceivable for the device to have two or more actuator stages, which are controlled with separate signals and thus form a two-way or multi-way sound transducer.
  • each actuator element 10a*, 12a*, 10i* and 12i* is an active, individually controllable element. This can be actuated, for example, piezoelectrically or with another principle explained here.
  • the device has a frame structure for stiffening and mode decoupling.
  • the actuators were explained in particular as cantilever actuators. At this point it should be pointed out that two-sided restraints (cf. 3d ) or generally multi-sided restraints would be conceivable.
  • the device can have sensor elements for position detection and control.
  • the device for generating sound or ultrasound in air (gaseous medium) and that means in the range from 20 Hz to 300 kHz can be designed.
  • Other areas of application are the generation and control of air flow, e.g. B. for cooling.
  • FIG. 11 a possible manufacturing process of the above sound transducers explained.
  • the embodiment shown here from the Fig. 11a-d enables the production of the exemplary embodiment, as is the case, for example, in Fig. 1b is shown.
  • the exemplary embodiments from the other figures, in particular from FIG Fig. 1a detectable.
  • a passive layer 50p is applied to a substrate 48 before a piezoelectric layer 50pe with two electrodes 50e is then provided.
  • the substrate 48 may be an SOI (Silicon on Insulator) wafer comprising an SI substrate.
  • the electrodes 50e, the PZT 50pe and the insulating layer 50p are then structured. This results, for example, in the trenches 50g in the piezoelectric layer 50pe.
  • the structuring can be done by wet or dry etching. Depending on the desired product design, either the step of structuring or introducing the trench 50g is carried out in such a way that it only has minimal dimensions in order to produce the product with a result Fig. 1a to produce or have larger dimensions, so that the intermediate product shown here is then developed in the direction of the product from 1b.
  • a small trench 50g is applied and then the in 11c shown step skipped to then, as in Figure 11d shown, to open the back using a single or multi-stage etching process and to release the movable structures.
  • the substrate below the passivation layer 50p is removed, in particular in the area aligned with the structuring piezoelectric actuators 50pe. This creates the cavity 48c.
  • 11c 12 illustrates the application of the vertically extending screen elements 57.
  • the lateral position of the trenches 57 can be selected such that they are aligned with areas of the structured passivation layer 50p, so that, for example, the vertical screen element 75 extends the wall of a trench in the passive layer 50p.
  • the screen elements 57 can be applied, for example, by galvanic deposition and preferably in such a way that the screen elements 57 protrude from the layer of the piezoelectric elements 50p.
  • FIG. 1a explains the one- or multi-step etching of the back of the substrate 48 in order to produce the cavity 48c. As illustrated here, individual areas of the substrate 48 can remain so that the frame 48f is formed within the cavity 48c. This frame corresponds to the example in figure 5 explained frame 19.
  • MEMS technologies can be adopted in the manufacturing steps explained, so that the product explained above can be manufactured using conventional manufacturing methods.
  • aspects have been described in the context of a device, it is understood that these aspects also represent a description of the corresponding method, so that a block or a component of a device is also to be understood as a corresponding method step or as a feature of a method step. Similarly, aspects described in connection with or as a method step also constitute a description of a corresponding block or detail or feature of a corresponding device.
  • the panel structure 22* consists of several segments 22a*, 22b* and 22c*.
  • the segment 22a* extends out of the substrate from the substrate plane (plane of the reference point 10e) in which the bending actuator 10 lies, for example, in the rest position, while the segment 22b* lies in this same plane of the reference point 10e.
  • the segment 22c* lies in the substrate or extends into the substrate from the substrate surface. All segments 22a*, 22b*, 22c* shown can have different geometries according to exemplary embodiments, ie longitudinal and transverse extensions as well as variable cross sections.
  • segment 22a*, 22b* and 22c* also have different materials or material characteristics.
  • segment 22c* and 22b* may be formed by the substrate itself while segment 22a* is grown.
  • middle position in the above and following exemplary embodiments does not necessarily have to correspond to the rest position, but can also be shifted up or down as desired (electrically or mechanically prestressed).
  • Figure 13b shows a further form of the panel structure, here the panel structure 22**.
  • the screen structure 22 ** or in particular the segment that extends out of the substrate plane has a beveled cross section that extends towards the actuator 10 .
  • the result of this is that the gap 14 ′ has a relatively constant width regardless of the position of the actuator 10 .
  • the background to this is that the side of the panel structure 22**, which is directly opposite the actuator 10, extends approximately along the movement path (circular path around the fixed point 10e).
  • the panel 22** can be beveled either only upwards and/or also downwards.
  • the asymmetrical structure shown here is therefore only an example, so that of course the lower segment of the diaphragm structure 22** can also be beveled in an analogous manner in order to achieve a symmetrical structure.
  • This exemplary embodiment of the diaphragm structure 22** with the beveled inner side has the advantage that a widening of the gap can be reduced or compensated for with larger amplitudes.
  • a bevel can e.g. B. be realized by adjusting the resist profile or the etching process.
  • FIG 13c shows a further development of the diaphragm structure 22** Figure 13b , namely the diaphragm structure 22***.
  • the panel structure 22*** has a curved/rounded inside. This rounding extends along the arc-shaped movement path of the actuator 10 or the free end 10f of the actuator 10. Even if the rounded inside is only shown on the side extending out of the substrate, this rounded inside can of course also be on the panel structure side in FIG Substrate level present. Analogous to the embodiment Figure 13b the widening of the gap at large amplitudes is reduced or compensated for by the aperture structure 22*** with the rounded inner side. A rounding can from a manufacturing point of view z. B. be realized by adjusting the resist profile or the etching profile.
  • Figure 13d 12 shows a further screen structure, namely the screen structure 22****.
  • the cross section at the end of the screen structure 22**** has a widening or an overhang, which serves as a mechanical stop for the actuator 10 or the free end 10f of the actuator. This stop advantageously enables mechanical overload protection.
  • Figure 13e shows another screen structure 22*****, in which the screen structure 22***** is constructed asymmetrically.
  • the background to this is that there are actuators 10 that are primarily deflected on one side, so that a vertical extension of the screen 22 ***** extends in one direction, here in the direction out of the substrate plane. Even if the deflection of the actuator 10 or the extension of the diaphragm structure 22***** upwards (out of the substrate plane) is shown here, this can of course also be the other way around according to exemplary embodiments, ie that both elements extend into the substrate.
  • the shift in the rest position of the actuator can be implemented by an electrical offset in the control signal or a mechanical projection (e.g. layer stress in actuator layers).
  • Fig. 13f shows an example of an aperture structure 22****** with a small extent.
  • the panel structure 22****** can be implemented as flat if the deflection of the actuator (10) is small.
  • the height of the screen 22****** is in the range of the actuator thickness.
  • FIG. 13g shows an example of a screen structure 22*******, which consists on the one hand of a substrate area 23s and the actual screen element 22*******.
  • the upper panel structure 22******* can e.g. B. as a galvanically constructed metal or as a polymer (SU8, BCB, ....) or made of glass or silicon.
  • the lower screen structure 23s consists primarily of the substrate (e.g. silicon or glass) itself and can be provided with additional layers in accordance with further exemplary embodiments.
  • Fig. 13h shows another panel structure without an additionally applied element. It is assumed here that the bending actuator 10 oscillates in particular into the substrate plane, so that a screen element which protrudes from the substrate plane can be dispensed with. In this case, therefore, the screen element consists of the substrate element 23s, which forms the lower screen structure.
  • the rest position of the actuator 10 can be shifted downwards via mechanical prestressing or an electrical offset, so that the diaphragm element 23s formed here is sufficient.
  • the actuator can only be deflected downwards, so that an upwards aperture is not required, and the manufacturing effort is then reduced.
  • Figure 13i shows a further screen structure 22********, which essentially consists of a thin layer applied to the substrate element 23s.
  • the layer thickness of the screen element 22******** can be in the range of the actuator thickness.
  • the substrate 23s can (but does not have to) additionally act as a screen structure and end flush with the screen structure 22******** or also have an offset.
  • FIG. 14a to 14c further exemplary embodiments are explained in which the micromechanical sound transducer is expanded by a further substrate 220a, 220b and 220c (cover).
  • the further substrate 220a, 220b, 220c forms the screen structure.
  • FIG. 14a shows a substrate 220a designed as a cover, which is placed on a substrate 23s above a cavity 23k of the bending actuator 10, so that the bending actuator 10 can oscillate within the cover 220a or within the space defined by the cover interior 220a and the cavity 23.
  • the lid 220a is arranged on the side opposite to the free end such that the inner side wall of the lid 220a is separated from the end 10e by the gap 140.
  • FIG. since the lid 220a is fully closed, the bending actuator 10 emits the sound through the cavity 23k, for example.
  • 14a represents a cross section through the substrate 220a, wherein the further substrate extends, for example, in a circle or in an angle around the bending actuator 10 in order to create a (rear) volume or generally a cover for it.
  • the cover 220a can be produced, for example, by a second structured substrate (ie a substrate with a cavity) (cf. reference number 221k). This second substrate is then applied to the substrate with the bending actuator 10, so that the cavity 221k is aligned with the cavity 23 at least in some areas (in the area of the gap 140).
  • Figure 14b shows a further exemplary embodiment with a modified cover 220b, with the rest of the construction being based on the same actuator 10 and the substrate 23s.
  • the cover 220b differs from the cover 220a in that it has optional sound openings 222o and 222s.
  • the sound opening 222o or the plurality of sound openings 222o is provided on the main surface of the lid 220b, while the opening 222s is provided on the side.
  • it is also sufficient for an opening either the opening 222o or the opening 222s is provided.
  • the enclosed volume of air in the cavity 221k can be ventilated through these openings 222o and 222s.
  • the openings can serve to allow sound to escape or allow pressure equalization.
  • Several openings can together form one or more lattice structures that protect the actuator from mechanical impact and dust.
  • Figure 14c shows another sound transducer with a cover 220c, which has an opening 222o.
  • the bending actuator is provided on a further substrate 230s which has a lateral opening 232s.
  • the substrate 230s is applied to a further substrate 233s or a cover 233s, so that the cavity 230k is closed off.
  • This further substrate 233s can also have optional sound openings 233o.
  • the volume is essentially formed by the cavities 221k and 230k and is open via at least one or more openings.
  • the openings can be used to let out sound or allow pressure equalization. Multiple openings can cooperate to form one or more lattice structures that protect actuator 10 from mechanical impact and dust.
  • the actuator is provided with the reference number 100 or 100_1 to 100_4, while the cover plate is provided with the reference number 225.
  • a coupling slot which is provided with the reference number 140, always extends between the actuator and the screen.
  • the actuator geometry can be combined with one another as desired (e.g. Fig 15f with rounded or triangular actuators).
  • Figure 15a 10 shows a top view of a rounded actuator 100 while FIG Figure 15b 10 shows a plan view of a triangular actuator 100.
  • FIG. Identical or different actuators 100 can be combined with one another as desired, for example based on 15c, 15d and 15e is shown.
  • Figure 15c 10 shows triangular actuators 100_1 to 100_4, which together describe a quadrangular area, the four actuators 100_1 to 100_4 being separated from one another by a diaphragm structure 225 arranged in the shape of a cross.
  • the slot 145 is again provided between the actuators 100_1 to 100_4 and the panel structure 225 .
  • arrangements with 3, 5, 6 . . . actuators would also be conceivable.
  • the total area does not necessarily have to be square, but can also be polygonal.
  • Figure 15d shows two opposite square actuators 100_5 and 100_6, which describe a square.
  • the square actuators 100_5 and 100_6 each form three free corners, which are delimited by the H-shaped screen 225 with the associated slot 140 .
  • Figure 15e shows four circular segment-shaped actuators 100_7 to 100_10, which are similar to Figure 15c are separated from each other by a cross-shaped aperture 225 with slot 140.
  • the hypotenuse of each triangular actuator 100_1 to 100_4 is constrained, while in the embodiment off Figure 15e the circle segment arcs 100_7 to 100_10 are firmly clamped in each case.
  • arrangements with 3, 5, 6 . . . actuators would also be conceivable.
  • the total area does not necessarily have to be square, but can also be polygonal.
  • Fig. 15f combines, for example, three differently shaped, but each square actuators 100_11 to 100_13, which are each clamped on one of the four sides, with three of the four sides forming free ends.
  • a labyrinth-shaped screen 225 is provided between the free ends, which separates the actuators 100_11 to 100_13 using the slots 140 .
  • All actuators 100_11 to 100_13 have, for example, different sizes (areas) and can thus be designed for different frequency ranges.
  • Fig. 15g Figure 12 shows two actuators 100_14 and 100_15, the first 100_14 being a square small actuator.
  • the other, larger actuator 100_15 is also square, but has a recess 100_15a for the other actuator 100_14.
  • the recess 100_15a is arranged in such a way that both actuators are clamped on the same side.
  • By one provided between the second actuators 100_14 and 100_15 Slot 140, these actuators 100_14 and 100_15 can be decoupled in their movement.
  • the larger actuator 100_15 can be used for the low-frequency range, for example, while the inner actuator 100_14 can be used for the high-frequency range.
  • FIG. 15h shows a similar structure of the actuators 100_14 and 100_15, wherein in addition to the separation by means of the slot 140 of the two actuators 100_14 and 100_15, a further screen 225 is also provided.
  • Both embodiments ( Figures 15g and 15h ) have in common that at least along the free ends of the large actuator 100_15 with the recess 100_15a, in which the small actuator 100_14 is arranged, the screens 225 together with the slot 140 are arranged.
  • Such an internal nesting or provision of larger and smaller actuators generally makes it possible to cover different frequency ranges with different actuators.
  • FIG. 16 shows a schematic top view of a bending actuator 10** clamped on two or more sides (compare areas 10e1 and 10e2), which has at least one free side 10f** (here 2). As explained above, this free side 10f** can be acoustically separated by an opposite screen 22** (here 2, corresponding to the variants explained) with a gap 14** in between.
  • a sound converter for emitting sound (loudspeaker) should be created, which is why a bending actuator was always spoken of.
  • the principle can also be reversed, so that a microphone is not formed by the sound transducer in accordance with the invention, in which the bending transducer (cf. bending actuator) is designed to be excited, e.g. by air, to oscillate (e.g. vertically) in order to Depending on this, to output an electrical signal (generally to detect the acoustic waves from the environment).
  • a component is thus created which comprises both loudspeaker and microphone on the basis of the concepts explained above.
  • the two devices can be formed on the same substrate, which is advantageous from a manufacturing point of view.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Pressure Sensors (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
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US11350217B2 (en) 2022-05-31
WO2018215669A2 (de) 2018-11-29
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JP2023029908A (ja) 2023-03-07
CN111034223A (zh) 2020-04-17
WO2018215669A3 (de) 2019-01-24
CN116668926A (zh) 2023-08-29
EP4247006A2 (de) 2023-09-20
JP2020522178A (ja) 2020-07-27
EP3632135A2 (de) 2020-04-08
EP4247005A2 (de) 2023-09-20
US20200100033A1 (en) 2020-03-26
JP7303121B2 (ja) 2023-07-04
EP4247006A3 (de) 2023-12-27

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