EP4247005A3 - Mikromechanischer schallwandler - Google Patents

Mikromechanischer schallwandler Download PDF

Info

Publication number
EP4247005A3
EP4247005A3 EP23189032.8A EP23189032A EP4247005A3 EP 4247005 A3 EP4247005 A3 EP 4247005A3 EP 23189032 A EP23189032 A EP 23189032A EP 4247005 A3 EP4247005 A3 EP 4247005A3
Authority
EP
European Patent Office
Prior art keywords
bending transducer
free end
transducer
acoustic transducer
bending
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP23189032.8A
Other languages
English (en)
French (fr)
Other versions
EP4247005A2 (de
Inventor
Fabian STOPPEL
Bernhard Wagner
Shanshan Gu-Stoppel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP4247005A2 publication Critical patent/EP4247005A2/de
Publication of EP4247005A3 publication Critical patent/EP4247005A3/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms
    • H04R7/06—Plane diaphragms comprising a plurality of sections or layers
    • H04R7/10—Plane diaphragms comprising a plurality of sections or layers comprising superposed layers in contact
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/26—Damping by means acting directly on free portion of diaphragm or cone
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/02—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2440/00—Bending wave transducers covered by H04R, not provided for in its groups
    • H04R2440/01—Acoustic transducers using travelling bending waves to generate or detect sound
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10—General applications
    • H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Circuit For Audible Band Transducer (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)

Abstract

Ein mikromechanischer Schallwandler umfasst entsprechend einem ersten Aspekt einen ersten Biegewandler mit einem freien Ende und einem zweiten Biegewandler mit einem freien Ende, die in einer gemeinsamen Ebene angeordnet sind, wobei das freie Ende des ersten Biegewandlers von dem freien Ende des zweiten Biegewandlers durch einen Spalt getrennt ist. Der zweite Biegewandler wird phasengleich zu der vertikalen Schwingung des ersten Biegewandlers angeregt. Ein mikromechanischer Schallwandler umfasst gemäß einem zweiten Aspekt einen ersten Biegewandler, der vertikal zur Schwingung angeregt wird und einen vertikal zu dem ersten Biegewandler erstreckendes Blendenelement, das durch einen Spalt von einem freien Ende des ersten Biegewandlers getrennt ist.
EP23189032.8A 2017-05-26 2018-05-28 Mikromechanischer schallwandler Pending EP4247005A3 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017208911.3A DE102017208911A1 (de) 2017-05-26 2017-05-26 Mikromechanischer Schallwandler
EP18729366.7A EP3632135B1 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler
PCT/EP2018/063961 WO2018215669A2 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP18729366.7A Division EP3632135B1 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler

Publications (2)

Publication Number Publication Date
EP4247005A2 EP4247005A2 (de) 2023-09-20
EP4247005A3 true EP4247005A3 (de) 2023-12-06

Family

ID=62530200

Family Applications (3)

Application Number Title Priority Date Filing Date
EP23189032.8A Pending EP4247005A3 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler
EP23189034.4A Pending EP4247006A3 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler
EP18729366.7A Active EP3632135B1 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler

Family Applications After (2)

Application Number Title Priority Date Filing Date
EP23189034.4A Pending EP4247006A3 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler
EP18729366.7A Active EP3632135B1 (de) 2017-05-26 2018-05-28 Mikromechanischer schallwandler

Country Status (6)

Country Link
US (1) US11350217B2 (de)
EP (3) EP4247005A3 (de)
JP (2) JP7303121B2 (de)
CN (2) CN111034223A (de)
DE (1) DE102017208911A1 (de)
WO (1) WO2018215669A2 (de)

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DE102019201744B4 (de) 2018-12-04 2020-06-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems-schallwandler
EP3675522A1 (de) * 2018-12-28 2020-07-01 Sonion Nederland B.V. Miniaturlautsprecher ohne wesentliche akustische leckage
JP2020136800A (ja) * 2019-02-15 2020-08-31 新日本無線株式会社 圧電素子
DE102019116080A1 (de) * 2019-06-13 2020-12-17 USound GmbH MEMS-Schallwandler mit einer aus Polymer ausgebildeten Membran
DE102019218769A1 (de) * 2019-12-03 2020-11-19 Robert Bosch Gmbh Mikromechanisches Bauteil für eine Aktor- und/oder Sensorvorrichtung
JP7433870B2 (ja) 2019-12-04 2024-02-20 エルジー ディスプレイ カンパニー リミテッド 表示装置及び情報処理装置
US11202138B2 (en) * 2020-03-05 2021-12-14 Facebook Technologies, Llc Miniature high performance MEMS piezoelectric transducer for in-ear applications
CN111328005B (zh) * 2020-03-10 2021-09-10 瑞声声学科技(深圳)有限公司 压电式mems麦克风
CN115428175A (zh) 2020-04-30 2022-12-02 株式会社村田制作所 压电装置
US11399228B2 (en) * 2020-07-11 2022-07-26 xMEMS Labs, Inc. Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer
US11323797B2 (en) * 2020-07-11 2022-05-03 xMEMS Labs, Inc. Acoustic transducer, wearable sound device and manufacturing method of acoustic transducer
US20230209241A1 (en) * 2020-07-11 2023-06-29 xMEMS Labs, Inc. Venting device
US11972749B2 (en) * 2020-07-11 2024-04-30 xMEMS Labs, Inc. Wearable sound device
US11884535B2 (en) * 2020-07-11 2024-01-30 xMEMS Labs, Inc. Device, package structure and manufacturing method of device
CN213342677U (zh) * 2020-09-27 2021-06-01 瑞声科技（南京）有限公司 一种压电式麦克风
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US11943585B2 (en) * 2021-01-14 2024-03-26 xMEMS Labs, Inc. Air-pulse generating device with common mode and differential mode movement
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JP7452476B2 (ja) 2021-03-10 2024-03-19 株式会社デンソー 圧電素子、圧電装置、および圧電素子の製造方法
DE102021202573B3 (de) 2021-03-16 2022-07-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mems-schallwandler mit ausnehmungen und auskragungen
DE102021203360A1 (de) 2021-04-01 2022-10-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mems-schallwandler
US20240022859A1 (en) * 2021-05-11 2024-01-18 xMEMS Labs, Inc. Package structure, apparatus and forming methods thereof
US11711653B2 (en) 2021-05-11 2023-07-25 xMEMS Labs, Inc. Sound producing cell and manufacturing method thereof
US20220408195A1 (en) * 2021-06-17 2022-12-22 Skyworks Solutions, Inc. Acoustic devices with residual stress compensation
CN113365196B (zh) * 2021-07-05 2023-06-02 瑞声开泰科技(武汉)有限公司 Mems扬声器及mems扬声器制造方法
WO2023010247A1 (zh) * 2021-08-02 2023-02-09 天津大学 压电mems扬声器及其设计方法、电子设备
CN113852897A (zh) * 2021-08-02 2021-12-28 天津大学 压电mems扬声器及其设计方法、电子设备
DE102021130035A1 (de) * 2021-11-17 2023-05-17 USound GmbH MEMS-Schallwandler mit einer gekrümmten Kontur eines Kragarmelements
CN114339552A (zh) * 2021-12-31 2022-04-12 瑞声开泰科技(武汉)有限公司 一种发声装置
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DE102022203173A1 (de) 2022-03-31 2023-10-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein MEMS-Schallwandler
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DE102006005048A1 (de) * 2005-03-01 2006-09-07 Denso Corp., Kariya Ultraschallsensor mit Sendeeinrichtung und Empfangseinrichtung für Ultraschallwellen
EP2362686A2 (de) * 2010-02-26 2011-08-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung Schallwandler zum Einsetzen in ein Ohr
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Also Published As

Publication number Publication date
CN116668926A (zh) 2023-08-29
WO2018215669A3 (de) 2019-01-24
EP4247005A2 (de) 2023-09-20
WO2018215669A2 (de) 2018-11-29
US20200100033A1 (en) 2020-03-26
JP2023029908A (ja) 2023-03-07
EP3632135B1 (de) 2023-08-02
JP7303121B2 (ja) 2023-07-04
JP2020522178A (ja) 2020-07-27
EP4247006A3 (de) 2023-12-27
EP4247006A2 (de) 2023-09-20
US11350217B2 (en) 2022-05-31
EP3632135A2 (de) 2020-04-08
DE102017208911A1 (de) 2018-11-29
CN111034223A (zh) 2020-04-17

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