EP3526565A1 - Capteur de force et de couple, module récepteur de force pour un tel capteur de force et de couple et robot comprenant un tel capteur de force et de couple - Google Patents

Capteur de force et de couple, module récepteur de force pour un tel capteur de force et de couple et robot comprenant un tel capteur de force et de couple

Info

Publication number
EP3526565A1
EP3526565A1 EP17777916.2A EP17777916A EP3526565A1 EP 3526565 A1 EP3526565 A1 EP 3526565A1 EP 17777916 A EP17777916 A EP 17777916A EP 3526565 A1 EP3526565 A1 EP 3526565A1
Authority
EP
European Patent Office
Prior art keywords
force
piezoelectric
transducer
evaluation unit
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP17777916.2A
Other languages
German (de)
English (en)
Inventor
Christoph Sonderegger
Simon Eichmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kistler Holding AG
Original Assignee
Kistler Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Holding AG filed Critical Kistler Holding AG
Publication of EP3526565A1 publication Critical patent/EP3526565A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D15/00—Control of mechanical force or stress; Control of mechanical pressure
    • G05D15/01—Control of mechanical force or stress; Control of mechanical pressure characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D17/00—Control of torque; Control of mechanical power
    • G05D17/02—Control of torque; Control of mechanical power characterised by the use of electric means

Definitions

  • Force and torque sensor driver module for such a force and torque sensor and robot with such a force and torque sensor
  • the invention relates to a force and moment sensor according to the preamble of the independent claim.
  • the invention also relates to a
  • the invention also relates to a robot with such a force and moment sensor.
  • Robotics is a megatrend. Increasingly, robots are taking over complex processes such as the joining of components. This requires sensors to detect a joining force.
  • a triaxial joining force can be described with six components of one force and one moment.
  • Such a joining force can be determined by a force and moment sensor.
  • the force and moment sensor is arranged in the force flow between a tool and a robot arm of the robot, for example in a wrist of the robot arm.
  • the force and moment sensor detects the joining force and transmits the detected joining force corresponding output signals via an interface of a bus system to a robot controller of the robot.
  • a force and moment sensor for detecting a force is disclosed in document US2016 / 0109311A1.
  • piezoelectric force transducers are mechanically attached to four side surfaces of a square base plate.
  • the piezoelectric force transducers are mechanically biased with a clamping force against boundary surfaces of a first and second carrier, an effective direction of the clamping force is perpendicular to the boundary surfaces.
  • the piezoelectric force transducers are arranged at the same distance to a reference point in the center of the base plate.
  • Two piezoelectric force transducers each lie on one axis. The two axes are normal to the side surfaces of the base plate and perpendicular to each other.
  • a first carrier is attached to the piezoelectric force transducers of the first axis and a second carrier is attached to the piezoelectric force transducers of the second axis.
  • the four piezoelectric force sensors detect three components of the force acting on the boundary surfaces of the first and second carrier. From the known distance of the four piezoelectric force transducer to the reference point, three components of a moment can be calculated, which acts on the base plate in the coordinate system.
  • the force and torque sensor thus provides a total of six components.
  • Each piezoelectric force transducer has three piezoelectric transducer elements.
  • the piezoelectric transducer elements are crystallographically oriented so that a force acting on them electric polarization charges generated, the number of which is proportional to the magnitude of the force.
  • a piezoelectric transducer element detects the component of a normal force and two piezoelectric transducer elements detect two components of thrust forces.
  • the four force transducers thus generate measuring signals in the form of electrical polarization charges for a detected force.
  • Each piezoelectric force transducer has a charge ⁇ amplifier and an analog-to-digital converter.
  • the charge amplifier individually amplifies the electrical polarization charges of the three piezoelectric transducer elements and the analog-to-digital converter individually converts the three amplified electrical polarization charges into three digital output signals. For twelve piezoelectric elements on ⁇ participants thus twelve digital output signals are formed.
  • the document DE102012005555B3 teaches a measuring plate with a plurality of piezoelectric force transducers arranged in a row. Each piezoelectric force transducer is associated with a pressure piece, the force to be detected acts on the pressure pieces on the piezoelectric force transducer. Each piezoelectric force transducer has two piezoelectric pickup elements, a piezoelectric pickup element for detecting a pressing force, and a piezoelectric pickup element for detecting a pushing force. The piezoelectric transducer elements of each piezoelectric force transducer lie in pairs one above the other in recesses of the measuring plate. The total of eight piezoelectric transducer elements form eight measuring signals, which via electrical connections to four Sockets are transmitted. Signal cables can be connected to the sockets in order to transmit the measuring signals to an external evaluation unit.
  • a first object of the present invention is to further develop such a force and moment sensor, so that it has the smallest possible spatial Ab ⁇ measurements, so that it can be arranged in the carpal of the robot arm without hindering the robot in complex operations.
  • a second object of the force and torque sensor is to be mechanically as robust as possible, in particular to have a high load capacity for bending moments.
  • Another object of the force and torque sensor is to be as inexpensive as possible, so as to contribute to the manufacturing cost of the robot only to a small extent.
  • Yet another task of the force and torque sensor is to ensure a high level of occupational safety so that the robot and a person can work in a common space.
  • At least one of the objects is achieved by the features of the independent claim.
  • the invention relates to a force and torque sensor with four piezoelectric force sensors and a base plate; wherein the four piezoelectric force transducers detect a force and generate measurement signals for a detected force; wherein the force and moment sensor comprises a cover plate, which cover plate has a boundary surface at which boundary surface the force to be detected acts; wherein the force and torque sensor has an evaluation unit, which evaluation unit measuring signals of the piezoelectric
  • the base plate has at least one cavity for the piezoelectric force transducer and for the evaluation unit, in which cavity the piezoelectric force transducer and the evaluation unit are arranged; and wherein the base plate and cover plate are mechanically connected to a housing.
  • the force and moment sensor according to the invention has four piezoelectric force transducers and also an evaluation unit for evaluating the measurement signals of the piezoelectric force transducers in a cavity of a base plate. And the force to be detected acts on a boundary surface of a cover plate.
  • a base plate and a cover plate For the recording of the piezoelectric force transducer and the force attack so only two components are needed, a base plate and a cover plate. Base plate and cover plate are connected to a housing.
  • two supports and one base plate are required for this, according to the document DE102012005555B3 a measuring plate and four pressure pieces are required for this purpose.
  • each piezoelectric force transducer has a plurality of piezoelectric transducer elements; that each piezoelectric force transducer ⁇ detected with at least one first piezoelectric transducer element exactly one component of a normal force; and that each piezoelectric force transducer with at least one second piezoelectric pickup element detects exactly one component of a thrust force.
  • the force and torque sensor according to the invention has only eight piezoelectric transducer elements. This is a 33.3% reduction in the number of piezoelectric pickup elements. However, the force and torque sensor also determines three components of a force and three components of a moment. The reduction in the number of piezoelectric transducer elements results in a further reduction in the size of the force and torque sensor. And the manufacturing costs of the force and torque sensor drop drastically.
  • the invention also relates to a force transducer module for the force and torque sensor, wherein four piezoelectric force transducer, which are electrically contacted via electrical conductors with an evaluation, form the force transducer module.
  • the force transducer module combines the functions force detection, measurement signal generation and measurement signal evaluation. It has small spatial dimensions and can be in the cavity of the base plate of the force and Arrange torque sensor. As a result, the production of force and torque sensor is particularly cost, because after the load cell is arranged in the cavity, only the base plate and cover plate must be mechanically connected to a housing.
  • the invention also relates to a robot having such a force and moment sensor, wherein a boundary surface of a base plate of the force and moment sensor is mechanically connected to a surface of a carpal of the robot; and wherein the boundary surface of the cover plate of the force and moment sensor is mechanically connected to a tool.
  • each piezoelectric force transducer is mechanically biased with a clamping force against the boundary surface of the cover plate, wherein an effective direction of the clamping force is normal to the boundary surface; and wherein a bending moment of the tool acts as a normal force on the piezoelectric force transducer.
  • the clamping force only to a breaking point, above the breaking point, there is damage and breakage of the piezoelectric material.
  • a high clamping force is not necessary because the bending moment of the tool acts as a normal force which is parallel to the clamping force.
  • the force and torque sensor according to the invention therefore does not have to be mechanically prestressed with a high clamping force and can thus be loaded with significantly higher bending moments.
  • the force and moment sensor of the robot has two force transducer modules; wherein first piezoelectric force transducers of a first force transducer module detect a force a first time and generate first measurement signals for the first detected force; and wherein second piezoelectric force transducers of a second force transducer module capture the same force a second time and generate second measured signals for the second detected force.
  • the force and moment sensor of the robot has two
  • Force transducer modules on; wherein a first evaluation unit of a first force transducer module evaluates the first measurement signals and provides as the first digital output signals; wherein a second evaluation of a second force transducer module evaluates second measurement signals and as provides second digital output signals; wherein the force and moment sensor transmits the first digital output signals via a bus system to a robot controller of the robot; wherein the force and moment sensor transmits the second digital output signals via the bus system to the robot controller of the robot; and wherein the robot controller of the robot compares the transmitted first digital output signals with the transmitted second digital output signals.
  • FIG. 1 is an exploded view of a portion of a first embodiment of a force and moment sensor with a force transducer module
  • FIG. 2 is an exploded view of a portion of a second embodiment of a force and moment sensor with two force transducer modules;
  • Fig. 3 is a cross-section through part of the second
  • Fig. 4 is a plan view of a portion of one embodiment of a force transducer module for the force and moment sensor of Fig. 1 or 2;
  • Fig. 5 is a view of a part of the imple mentation form of
  • FIG. 6 shows a view of a part of an embodiment of a robot with the force and moment sensor according to FIG. 1 or 2. Ways to carry out the invention
  • a center 0 of the force and moment sensor 1 is located at the origin of a rectangular coordinate system with the coordinates x, Y Z.
  • the center 0 of the force and moment sensor 1 is also the center 0 of the base plate 2 and is also called center 0.
  • a direction along a z-axis is also called a longitudinal direction, a direction in an xy-plane is called a radial direction.
  • Base plate 2 and cover plate 3 have a greater extent in the xy plane than in the longitudinal direction.
  • Base plate 2 and the cover plate 3 have in the xy plane a circular cross section of 150mm diameter preferably less than / equal to 100mm diameter.
  • the base plate 2 has a thickness of 30mm in the longitudinal direction, preferably less than / equal to 20mm.
  • the cover plate 3 has a thickness of 10 mm in the longitudinal direction, preferably less than or equal to 5 mm.
  • the base plate 2 and top plate 3 can also have a non-circular cross-section as ⁇ have a polygonal cross-section.
  • the base plate 2 is cup-shaped, the cover plate 3 is deckeriförmig.
  • a lateral edge of the base plate 2 bounds the housing in the radial direction.
  • the lateral edge of the base plate 2 is closed and has no passages.
  • a boundary surface 24 of the base plate 2 limits the Housing in the longitudinal direction.
  • the boundary surface 24 of the base plate 2 is not closed, it has a plurality of passages for biasing elements 5 to 5 ⁇ ⁇ ⁇ .
  • a boundary surface 31 of the cover plate 3 limits the housing in the longitudinal direction.
  • the boundary surface 31 of the cover plate 3 is closed and has no passages.
  • a radially outer edge of the cover plate 3 is flush with the lateral edge of the base plate 2.
  • the base plate 2 has at least one cavity 21 to 21 ⁇ ⁇ ⁇ , 22.
  • the cavity 21 to 21 ⁇ ⁇ ⁇ , 22 is disposed on one of the cover plate 3 facing side of the base plate 2.
  • components of the force and torque sensor 1 are arranged in the cavity 21 to 21 ⁇ ⁇ ⁇ , 22.
  • the base plate 2 and the cover plate 3 are made of mechanically resistant material.
  • the base plate 2 and the cover plate 3 are mechanically connected together to form a housing.
  • the mechanical connection via biasing elements 5 to 5 ⁇ ⁇ ⁇ preferably non-positively by screw.
  • the biasing element 5 to 5 ⁇ ⁇ ⁇ may be bolt-shaped.
  • the cover plate 3 has on one of the base plate 2 side facing thread for the screw.
  • four biasing elements 5 to 5 ⁇ ⁇ ⁇ protrude through four passages of the base plate 2 and can be screwed into four threads of the cover plate 3.
  • the screwed biasing elements 5 to 5 ⁇ ⁇ ⁇ biases the base plate 2 and the cover plate 3 against each other.
  • a bolt head of each biasing element is 5 to 5 ⁇ ⁇ ⁇ on the base plate 2 on.
  • each bolt head lies in a recess of the base plate 2 and protrudes not beyond the boundary surface 24 of the base plate 2 addition.
  • the mechanical connection is gas-tight and waterproof.
  • the gas-tight and watertight sealing takes place via sealing elements 13a, 13b to 13b ⁇ 13c.
  • the housing protects the components in the cavity 21 to 21 ⁇ ⁇ ⁇ , 22 from shocks and impacts that occur during operation.
  • the housing protects the components in the cavity 21 to 21 ⁇ ⁇ ⁇ , 22 but also from harmful environmental influences such as impurities (dust, moisture, etc.
  • the housing protects the components in the cavity 21 to 21 ⁇ ⁇ ⁇ , 22 against electrical and electromagnetic interference effects in the form of electromagnetic radiation.
  • the base plate 2 has a plurality of cavities 21 to 21 ⁇ ⁇ ⁇ for a plurality of piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ .
  • Each cavity 21 to 21 ⁇ ⁇ ⁇ of the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ is arranged at a radial distance r with respect to the center O.
  • the cavities 21 to 21 ⁇ ⁇ ⁇ of the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ are also radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ called.
  • the radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ are arranged at the same radial distance r to the center O.
  • the radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ are identical.
  • each radially spaced cavity 21 to 21 has ⁇ ⁇ ⁇ ⁇ circular cross-section.
  • Two radially spaced cavities 21, 21 ⁇ ⁇ lie on the x-axis and two radially spaced cavities 21 ⁇ , 21 ⁇ ⁇ ⁇ lie on the y-axis.
  • Two directly adjacent radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ have a Distance a up.
  • Each radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ receives at least one piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ .
  • each radially spaced cavity 21 to 21 ⁇ ⁇ has exactly one piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ .
  • each radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ receives exactly two piezoelectric force transducers 4 to 4 ⁇ ⁇ ⁇ .
  • the two piezoelectric force sensors 4 to 4 ⁇ ⁇ ⁇ are arranged one above the other along the z-axis.
  • the base plate 2 has a cavity 22 for an evaluation unit 6.
  • the cavity 22 of the evaluation unit 6 is arranged in the center 0.
  • the cavity 22 of the evaluation unit 6 is also called the central cavity 22.
  • the central cavity 22 accommodates exactly one evaluation unit 6.
  • the central cavity 22 accommodates exactly two evaluation units 6.
  • the two evaluation units 6 are arranged one above the other along the z-axis.
  • the central cavity 22 is cross-shaped and has four radially extending legs. Two directly adjacent legs are perpendicular to each other. With respect to the center 0, the four legs are offset by 45 ° to the four radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ .
  • a radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ is arranged.
  • the space available in the base plate 2 is optimally utilized.
  • Two directly adjacent legs meet in a transition area.
  • the base plate 2 has a Through opening 23 to 23 ⁇ ⁇ ⁇ on.
  • the passage openings 23 to 23 ⁇ ⁇ ⁇ of the base plate 2 are identical.
  • Each passage opening 23 to 23 ⁇ ⁇ ⁇ of the base plate 2 extends in the radial direction from the central cavity 22 to a radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ .
  • the cavities 21 to 21 ⁇ ⁇ ⁇ , 22 are thus connected via the through holes 23 to 23 ⁇ ⁇ ⁇ spatially connected.
  • each piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ exactly two piezoelectric transducer elements 8, 8 ⁇ .
  • Each piezoelectric transducer element 8, 8 ⁇ is disc-shaped and consists of piezoelectric material such as quartz (S1O 2 single crystal), calcium gallo-germanate (Ca 3 Ga 2 Ge 4 0i 4 or CGG), langasite
  • the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ have a greater extent in the xy plane than in the longitudinal direction.
  • Each piezoelectric pickup element 8, 8 ⁇ has a circular cross-section of 20mm diameter preferably less than or equal to 10mm diameter.
  • Each piezoelectric transducer element 8, 8 ⁇ has in longitudinal direction a thickness of less than / equal to 1.0mm, preferably less than / equal to 0.8mm.
  • Each piezoelectric pickup element 8, 8 ⁇ is crystallographically oriented so that it has a high sensitivity to a force F to be detected.
  • the detection of the force F takes place dynamically with measuring frequencies in the kHz range.
  • a high sensitivity is defined such that the piezoelectric transducer element 8, 8 ⁇ as many electrical polarization charges Q for a change in the Force F generated.
  • the force F has force components Fx, Fy, Fz, wherein the indices x, y, z indicate element surfaces of a piezoelectric pickup element 8, 8 ⁇ on which the force components Fx, Fy, Fz act.
  • the indices x, y, z correspond to the coordinates x, y, z.
  • the force F acts either as a normal force or as a thrust force on the element surfaces.
  • a normal force acts along an axis of action which is parallel to the surface normal of the element surface.
  • a pushing force acts along an axis of action, which is perpendicular to the surface normal of the element surface.
  • Each piezoelectric pickup element 8, 8 ⁇ has the z-axis as surface normal.
  • a first piezoelectric pickup element 8 is crystallographically oriented such that electrical polarization charges Qz are generated on element surfaces whose surface normal is parallel to the z-axis of the normal force Fz.
  • a second piezoelectric transducer element 8 is crystallographically oriented such that electrical polarization charges Qx or Qy are generated on element surfaces whose surface normal is perpendicular to the x-axis of the thrust Fx or perpendicular to the y-axis of the thrust Fy.
  • the second piezoelectric pickup element 8 ⁇ is aligned with crystallographic orientation of high sensitivity along the x-axis.
  • the second piezoelectric pickup element 8 ⁇ is aligned with crystallographic orientation of high sensitivity along the y-axis.
  • One and the same second piezoelectric pickup element 8 ⁇ can thus be in the xy plane either for detecting the Shear force Fx with crystallographic orientation of high sensitivity along the x-axis or for detecting the thrust force Fy with crystallographic orientation of high sensitivity along the y-axis order, so it must be arranged only rotated by 90 °.
  • Each piezoelectric pickup element 8, 8 ⁇ has two element surfaces. The electric polarization charges Q on the element surfaces of each piezoelectric pickup element 8, 8 ⁇ have opposite signs.
  • the skilled person may also use a differently shaped piezoelectric pickup element.
  • the piezoelectric transversal effect it can use a rod-shaped shaped piezoelectric pickup element which is cut crystallographically so oriented that electrical polarization charges Qz are generated on element surfaces whose surface normal is perpendicular to the z-axis of the normal force Fz.
  • each piezoelectric force transducer 4 to 4 ⁇ ⁇ a plurality of pickup electrodes 9, 9 ⁇ and a plurality of counter electrodes 10 to 10 ⁇ ⁇ .
  • the pickup electrodes 9, 9 ⁇ and the counter electrodes 10 to 10 ⁇ ⁇ are made of electrically conductive material such as aluminum, copper, gold, etc. and grab the electric polarization charges Q from the element surfaces of the piezoelectric pickup elements 8, 8 ⁇ .
  • the transducer electrodes 9, 9 ⁇ and the counter electrodes 10 to 10 ⁇ ⁇ lie in the xy plane and have a circular cross-section of 20mm diameter preferably less than or equal to 10mm diameter.
  • the transducer electrodes 9, 9 have ⁇ in the longitudinal direction of a thickness of 0.2 mm /, preferably less than or equal to 0.05mm.
  • the counterelectrodes 10 to 10 ⁇ ⁇ have a thickness of less than or equal to 2.0 mm, preferably less than or equal to 1.0 mm in the longitudinal direction.
  • Each piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ has at least a first piezoelectric
  • the embodiment of the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ according to FIG. 3 has exactly two first piezoelectric transducer elements 8 for detecting the normal force Fz and exactly two second piezoelectric transducer elements 8 ⁇ for detecting the thrust force Fx or Fy.
  • the first two piezoelectric transducer elements 8 are arranged in pairs, and the two second piezoelectric transducer elements 8 ⁇ are arranged in pairs.
  • Transducer elements 8 ⁇ arranged. A first
  • Pickup electrode 9 is located with respect to the z-axis between element surfaces of the two first piezoelectric transducer elements 8. And a second pickup electrode 9 ⁇ is located with respect to the z-axis between element surfaces of the two second piezoelectric transducer elements 8 ⁇ .
  • a first counterelectrode 10 abuts against an upper element surface of a first piezoelectric pickup element 8 facing away from the first pickup electrode 9 with respect to the z axis.
  • a second counter electrode 10 is arranged ⁇ ⁇ with respect to the z-axis between the two first piezoelectric transducer elements 8 and the two second piezoelectric transducer elements.
  • the second counter electrode 10 ⁇ is located on a side facing away from the first pickup electrode 9 with respect to the z-axis element surface of a first piezoelectric pickup 8 and it is located on a side facing away from the second pickup electrode 9 with respect to the z-axis upper surface of a second piezoelectric pickup element eighth ⁇ on.
  • a third counterelectrode 10 ⁇ ⁇ is located on a side facing away from the second pickup electrode 9 ⁇ with respect to the z-axis lower element surface of a second piezoelectric pickup element 8 ⁇ .
  • the voltage applied to the transducer electrodes 9, 9 ⁇ element surfaces of the piezoelectric transducer elements 8, 8 ⁇ have opposite signs and are connected via the transducer electrodes 9, 9 ⁇ electrically connected in parallel.
  • the voltage applied to the counter electrode 10 element surfaces of the piezoelectric transducer elements 8, 8 ⁇ have opposite signs and are connected in parallel electrically via the counter electrodes 10 to 10 ⁇ .
  • the pickup electrodes 9, 9 ⁇ and the counter electrodes 10 to 10 ⁇ ⁇ respectively sum electric polarization charges Q with the same Sign on.
  • the counter electrodes 10 to 10 ⁇ ⁇ are at the same ground potential as the housing of the force and moment sensor. 1
  • Pickup electrodes 9, 9 ⁇ and the counter electrodes 10 to 10 ⁇ ⁇ are tapped by electrical conductors 11 to 11 ⁇ ⁇ .
  • the electrical conductors 11 to 11 ⁇ ⁇ are wire-shaped and made of electrically conductive material such as aluminum, copper, gold, etc.
  • a first electrical conductor 11 picks up electric polarization charges Q of the first pick-up electrode 9.
  • a second electrical conductor 11 ⁇ picks up electric polarization charges Q of the second pick-up electrode 9 ⁇ .
  • a third electrical conductor 11 ⁇ intercepts electrical polarization charges Q of the counter electrodes 10 to 10 ⁇ ⁇ .
  • the electrical polarization charges Q are derived via the electrical conductors 11 to 11 ⁇ ⁇ to the evaluation unit 6.
  • Each piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ is mechanically biased by a biasing element 5 to 5 ⁇ ⁇ ⁇ .
  • the biasing member 5 to 5 ⁇ ⁇ ⁇ biases the radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ of the base plate 2 arranged piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ with a clamping force against the cover plate 3 mechanically before.
  • each biasing element 5 to 5 ⁇ ⁇ ⁇ protrude through a passage of the base plate 2 and is screwed with a thread of the cover plate 3.
  • each passage is centrally located in a radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ .
  • a mounted in the base plate 2 sleeve is the passage of radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ separated.
  • the sleeve separates the radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ from the biasing element 5 to 5 ⁇ ⁇ ⁇ .
  • the mechanical bias ensures a very good electrical contact between the piezoelectric transducer elements 8, 8 ⁇ and the transducer electrodes 9, 9 ⁇ and counter electrodes 10 to 10 ⁇ ⁇ of the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ , so that no non-contacted areas with local high electrical Stress and electrical leakage currents occur and also surface roughness on the contact surfaces close, resulting in excellent linearity of the force and torque sensor 1.
  • the linearity is a deviation of the proportionality between the electric polarization charges Q and the force component Fx, Fy, Fz to be detected.
  • Base plate 2 is gas-tight and watertight sealed by at least one sealing element 13a, 13b to 13b ⁇ 13c.
  • the sealing element 13a, 13b to 13b ⁇ 13c is made of plastic, metal, etc.
  • the force and moment sensor 1 an annular sealing element 13a on.
  • the annular sealing element 13 a is arranged between the lateral edge of the base plate 2 and the radially outer edge of the cover plate 3.
  • the force and moment sensor 1 has a plurality of disk-shaped sealing elements 13b to 13b-13c.
  • First disk-shaped sealing elements 13b to 13 ⁇ ⁇ ⁇ denote a plurality of radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ from.
  • a second disk-shaped sealing element 13.3 seals the central cavity 22.
  • the disc-shaped sealing elements 13b to 13b ⁇ 13c are materially contacted with edges of the cavities 21 to 21 ⁇ ⁇ ⁇ , 22.
  • the material bond is made by welding, diffusion bonding, thermocompression bonding, soldering, etc.
  • the evaluation unit 6 is mechanically connected to the base plate 2, preferably by positive engagement or adhesion or adhesion. An expansion of the evaluation unit 6 in the xy plane is greater than in the longitudinal direction.
  • the evaluation unit 6 is disk-shaped with a diameter of less than 150 mm, preferably less than 100 mm. In the embodiments according to FIGS. 1, 2 and 4, the evaluation unit 6 is a cross-shaped disk. A thickness of the evaluation unit 6 in the longitudinal direction is less than / equal to 20mm.
  • the evaluation unit 6 has an electrical circuit board.
  • the electrical circuit board is made of electrically insulating carrier material such as polytetrafluoroethylene, polyimide, Al 2 O 3 ceramic, hydrocarbon ceramic laminates, etc.
  • the electrical circuit board is equipped with electronic components such as electrical resistors, electrical capacitors, semiconductor elements, processors, etc.
  • the electrical circuit board has electrical signal conductors.
  • the electrical signal conductors are made of electrically conductive material such as pure metals, nickel alloys, cobalt alloys, iron alloys, etc.
  • the electrical signal conductors are flat on the substrate of the electrical circuit board and connect the electronic components electrically with each other.
  • the electrical conductors 11 to 11 ⁇ of the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ are guided on the electrical circuit board.
  • the electrical conductors 11 to 11 ⁇ ⁇ of a piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ protrude from the radially outer cavity 21 to 21 ⁇ ⁇ ⁇ of the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ through a through hole 23 to 23 ⁇ ⁇ ⁇ of the base plate 2 in
  • ends of the electrical conductors 11 to 11 ⁇ ⁇ are contacted on an electrically remote from the lower boundary surface side of the electrical circuit board with electrical signal conductors.
  • the electrical conductors 11 to 11 ⁇ ⁇ are easily accessible in the central cavity 22 for a tool contacting.
  • the electrical conductors 11 to 11 ⁇ ⁇ cohesively contacted with electrical signal conductors.
  • the material is closed by welding, diffusion bonding, thermocompression bonding, soldering, etc.
  • the through holes 23 to 23 ⁇ ⁇ ⁇ of the base plate 2 thus enable a simple, rapid and secure electrical contacting of the electrical conductors 11 to 11 ⁇ ⁇ of a piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ with the electrical circuit board of the evaluation unit. 6
  • the evaluation unit 6 has as electronic components at least one charge amplifier and at least one analog-to-digital converter.
  • the evaluation unit 6 for each piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ at least one charge amplifier and at least one analog-to-digital converter.
  • the evaluation unit 6 evaluates the measurement signals of the piezoelectric force transducer. 4 to 4 ⁇ ⁇ ⁇ off.
  • a first charge amplifier amplifies electric polarization charges Q from the first piezoelectric pickup element 8
  • a first analog to digital converter digitizes the amplified electric polarization charges Q from the first piezoelectric pickup element 8.
  • a second charge amplifier amplifies electric polarization charges Q from the second piezoelectric pickup element 8 ⁇ and a first analogue-to-digital converter. Digital converter digitizes the amplified electric polarization charges Q from the second piezoelectric pickup element 8 ⁇ .
  • piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ which are electrically contacted via electrical conductors 11 to 11 ⁇ ⁇ with an evaluation unit 6, form a force transducer module 14, 14 ⁇ .
  • a force transducer module 14, 14 ⁇ In the embodiment of FIG.
  • the force and torque sensor 1 two Kraftaufrichmodule 14, 14 ⁇ .
  • the base plate 2 has a Kraftaufrichmodul 14, 14 ⁇ in the longitudinal direction ⁇ such a small extent to that in the base plate 2, two Kraftaufrichmodule 14, blank 14 ⁇ arranged in longitudinal direction one above the other.
  • base plate 2 and cover plate 3 for both imple mentation of the force and moment sensor 1 have the same spatial dimensions.
  • the force and moment sensor 1 has only one force transducer module 14, only one piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ is arranged in each radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ .
  • the counter electrodes 10 to 10 ⁇ ⁇ are then made so thick in the longitudinal direction, that the radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ are completely filled.
  • the force and moment sensor 1 has two force transducer modules 14, 14 ⁇ , two piezoelectric force transducers 4 to 4 ⁇ ⁇ ⁇ of each load cell module 14, 14 ⁇ lie in each radially spaced cavity 21 to 21 ⁇ ⁇ ⁇ one above the other and are on counter electrodes 10 to 10 ⁇ ⁇ at the same earth potential. So that the force to be detected can act on the piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ , the counter electrodes 10 to 10 ⁇ ⁇ are then designed so thin in the longitudinal direction, that the radially spaced cavities 21 to 21 ⁇ ⁇ ⁇ are completely filled.
  • the central cavity 22 In the central cavity 22 are two evaluation units 6 of the Kraftaufêtmodule 14, 14 ⁇ superimposed and spatially objected to each other.
  • the two force transducer modules 14, 14 ⁇ detect the same force independently.
  • the two force transducer modules 14, 14 ⁇ evaluate measurement signals independently.
  • the evaluation unit 6 can use the digitized electrical polarization charges Qx to Qx ⁇ ⁇ ⁇ , Qy to Qy ⁇ ⁇ ⁇ , Qz to Qz ⁇ ⁇ ⁇ eight piezoelectric force transducers 4 to 4 ⁇ ⁇ ⁇ calculate three components Fx, Fy, Fz of a force F and three components Mx, My, Mz of a moment M.
  • the formulas are:
  • Mx a / 2 * (+ Qz + Qz) - a / 2 * (+ ⁇ 2 ⁇ ⁇ ⁇ + ⁇ 2 ⁇ ⁇ ⁇ ⁇ )
  • My a / 2 * (+ ⁇ 2 ⁇ ⁇ + ⁇ 2 ⁇ ⁇ ⁇ ) - a / 2 * (+ Qz + ⁇ 2 ⁇ ⁇ ⁇ ⁇ )
  • Mz a / 2 * (+ Qy Qx + Qy ⁇ + '' + Qx '')
  • the evaluation unit 6 generates digital output signals for the calculated three components Fx, Fy, Fz of the force F and the calculated three components Mx, My, Mz of the moment M and provides the digital output signals. With the digital output signals of six components, a triaxial joining force can be described.
  • the evaluation unit 6 has an interface ⁇ socket 7. At the interface socket 7, an interface connector of a bus system such as Ethercat, Ethernet Powerlink, etc. can be electrically connected.
  • a bus system such as Ethercat, Ethernet Powerlink, etc.
  • the evaluation unit 6 communicates with a robot controller of the robot via the bus system and transmits the provided digital output signals to the robot controller of the robot.
  • the communication takes place in real time with a bus rate of at least 1 kHz, preferably of at least 4 kHz.
  • Bus rate and measuring frequency are selected so that the measuring frequency is greater than the bus rate.
  • 6 shows part of an embodiment of a robot 15 with a force and moment sensor 1.
  • the robot 15 has a robot arm.
  • the robotic arm can perform complex operations such as joining components.
  • the force and moment sensor 1, 1 ⁇ is arranged in a carpal of a robot arm.
  • the boundary surface 24 of the base plate 2 of the force and moment sensor 1 is mechanically connected to a surface of the wrist of the robot 15.
  • the mechanical connection is preferably non-positively by screw.
  • a tool 16 with which the robot 15 carries out complex machining or even simple work is mechanically connected to the boundary surface 31 of the cover plate 3 of the force and moment sensor 1.
  • the mechanical connection is preferably non-positively by screw.
  • the tool 16 may form a lever arm, which acts on a force F, so that a bending moment arises, which acts along the z-axis as a normal force on the boundary surface 31 of the cover plate 3 of the force and moment sensor 1.
  • This normal force acts parallel to the biasing force of the piezoelectric force transducer 4 4 ⁇ ⁇ ⁇ .
  • the force and moment sensor 1 can detect the force F redundant.
  • two Kraftaufrichmodule 14, 14 ⁇ with four piezoelectric force transducer 4 to 4 ⁇ ⁇ ⁇ in four cavities 21 to 21 ⁇ ⁇ ⁇ of the base plate 2 is arranged ,
  • a first force transducer module 14 has first piezoelectric force sensors 4 to 4 ⁇ ⁇ ⁇ , which a force F a first Times and generate for the first time detected force F first measurement signals.
  • a second ⁇ Kraftaufrichmodul 14 has second piezoelectric force transducers 4 to 4 ⁇ ⁇ ⁇ , which detect the same force F a second time and generate second metering signals for the detected force F for the second time.
  • the redundant detection of the force by means of two Kraftaufrichmodule 14, 14 ⁇ takes place at the same time.
  • the Kraftaufrichmodule 14, 14 ⁇ detect the same force independently.
  • Each load cell module 14, 14 ⁇ has an evaluation unit 6. In the central cavity 22, two evaluation units 6 of the two Kraftaufrichmodule 14, 14 ⁇ are arranged.
  • the first measurement signals of the first detected force F are transmitted via electrical conductors 11 to 11 ⁇ ⁇ to a first evaluation unit 6 of the first load cell module 14 14.
  • the second measurement signals of the force F detected for the second time are transmitted via electrical conductors 11 to 11 ⁇ ⁇ to a second evaluation unit 6 of the second force transducer module 14 ⁇ .
  • the first evaluation unit 6 evaluates the first measurement signals of the force F detected for the first time and provides first digital output signals for this purpose.
  • the second evaluation unit 6 evaluates the second measurement signals of the force F detected for the second time and provides second digital output signals for this purpose.
  • the Kraftaufrichmodule 14, 14 ⁇ evaluate the measurement signals of the first detected force F and the second time detected force F independently.
  • the force and moment sensor 1 transmits the first digital output signals of the first detected force F and the second digital output signals of the second detected force F via the bus system to the Robot control of the robot 15.
  • the robot controller may compare the transmitted first digital output signals of the first detected force F with the transmitted second digital output signals of the second detected force.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur de force et de couple (1) comprenant quatre éléments récepteurs de force (4 à 4''') piézoélectriques et une plaque de base (2) ; les quatre éléments récepteurs de force (4 à 4''') piézoélectriques détectant une force et des signaux de mesure étant produits pour une force F détectée ; le capteur de force et de couple (1) comprenant une plaque de recouvrement (3), laquelle plaque de recouvrement (3) comprend une surface de délimitation (31), surface de délimitation (31) sur laquelle agit la force à détecter ; le capteur de force et de couple (1) comprenant une unité d'évaluation (6), laquelle unité d'évaluation (6) évalue les signaux de mesure des éléments récepteurs de force (4 à 4''') piézoélectriques ; la plaque de base (2) comprenant au moins une cavité (21 à 21''', 22) pour les éléments récepteurs de force (4 à 4''') piézoélectriques et pour l'unité d'évaluation (6), cavités (21 à 21''', 22) dans lesquelles sont disposés les éléments récepteurs de force (4 à 4''') piézoélectriques et l'unité d'évaluation (6) ; et la plaque de base (2) et la plaque de recouvrement (3) étant reliées mécaniquement à un boîtier.
EP17777916.2A 2016-10-17 2017-10-05 Capteur de force et de couple, module récepteur de force pour un tel capteur de force et de couple et robot comprenant un tel capteur de force et de couple Withdrawn EP3526565A1 (fr)

Applications Claiming Priority (2)

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EP16194160 2016-10-17
PCT/EP2017/075296 WO2018073012A1 (fr) 2016-10-17 2017-10-05 Capteur de force et de couple, module récepteur de force pour un tel capteur de force et de couple et robot comprenant un tel capteur de force et de couple

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EP3526565A1 true EP3526565A1 (fr) 2019-08-21

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US (1) US20190242768A1 (fr)
EP (1) EP3526565A1 (fr)
JP (1) JP6735419B2 (fr)
KR (1) KR102191285B1 (fr)
CN (1) CN109844480A (fr)
WO (1) WO2018073012A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT520901B1 (de) * 2018-01-24 2019-11-15 Avl List Gmbh Messvorrichtung und Verfahren zur Bestimmung einer Kraft und/oder eines Drehmoments an einer drehmomentübertragenden Welle
CN110887587B (zh) * 2019-12-30 2024-05-14 济南大学 一种大量程压电薄膜三维力传感器及其测量方法
AT523511B1 (de) * 2020-01-29 2021-10-15 Piezocryst Advanced Sensorics Strukturiertes, piezoelektrisches Sensorelement
US11644375B2 (en) * 2020-09-03 2023-05-09 GM Global Technology Operations LLC Insertion force measurement system
CN115199689B (zh) * 2022-07-19 2024-02-20 北京航空航天大学 一种基于压电材料的磁吸式半主动振动控制装置

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH472668A (de) * 1967-09-05 1969-05-15 Kistler Instrumente Ag Einrichtung mit einer Mehrkomponenten-Piezomesszelle
FR2451807A1 (fr) * 1979-03-22 1980-10-17 Renault Manipulateur six axes
JPS6034295A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
CA1259816A (fr) * 1984-09-29 1989-09-26 Kazuo Asakawa Dispositif detecteur de forces
US4640138A (en) * 1985-03-06 1987-02-03 Mts Systems Corporation Multiple axis load sensitive transducer
DE3611336A1 (de) * 1986-04-04 1987-10-15 Deutsche Forsch Luft Raumfahrt Kraft-drehmoment-fuehler
US4821584A (en) * 1988-03-15 1989-04-18 The United States Of America As Represented By The United States Department Of Energy Piezoelectric film load cell robot collision detector
EP0342253B1 (fr) * 1988-05-18 1993-01-13 Kistler Instrumente AG Montage d'un capteur de force dans une plate-forme de mesure
DE4014521C2 (de) * 1990-05-07 1997-06-12 Ringspann Gmbh Vorrichtung zur Messung des Drehmomentes
CH680752A5 (fr) * 1990-05-31 1992-10-30 Kistler Instrumente Ag
CH680689A5 (fr) * 1990-05-31 1992-10-15 Kistler Instrumente Ag
US5445036A (en) * 1994-06-15 1995-08-29 The University Of British Columbia Torque sensor
KR100199691B1 (ko) * 1997-05-19 1999-06-15 김동진 6분력 로드셀
JP3261653B2 (ja) * 1999-07-07 2002-03-04 独立行政法人産業技術総合研究所 指装着型６軸力覚センサ
FR2812356B1 (fr) * 2000-07-28 2002-12-06 Roulements Soc Nouvelle Roulement comprenant au moins une zone de deformation elastique et ensemble de freinage le comprenant
JP2006275979A (ja) * 2005-03-30 2006-10-12 National Institute Of Information & Communication Technology センサ素子、センサ装置、対象物移動制御装置、対象物判別装置
JP2008541091A (ja) * 2005-05-12 2008-11-20 ザ ティムケン カンパニー 荷重感知機能を備えたホイールエンド
DE102005043429A1 (de) * 2005-05-19 2006-11-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Schwingungsentkopplung
DE102006040034A1 (de) * 2006-08-23 2008-03-20 Stäubli Tec-Systems GmbH Kupplungssystem
US7743672B2 (en) * 2008-06-06 2010-06-29 Kulite Semiconductor Products, Inc. Multiple axis load cell controller
KR101115418B1 (ko) * 2009-11-09 2012-02-16 한국표준과학연구원 힘센서를 이용한 6축 힘센서 구조 및 그 구조에 의한 힘 및 모멘트 측정방법
KR20120119172A (ko) * 2011-04-20 2012-10-30 한국로봇융합연구원 다축 힘토크 센서
CN102288334B (zh) * 2011-07-28 2014-07-30 济南大学 一种并联式压电六维大力传感器
CN103765181A (zh) * 2011-09-01 2014-04-30 株式会社安川电机 力传感器和机器人
CH705675A1 (de) * 2011-10-20 2013-04-30 Kistler Holding Ag Hohlprofil-Aufnehmer.
DE102012005555B3 (de) 2012-03-21 2013-08-22 Audi Ag Messplatte mit Sensoren
ITTO20120890A1 (it) * 2012-10-11 2014-04-12 Fond Istituto Italiano Di Tecnologia Unita' elettronica di misura per un dispositivo polimorfico per la misura di forze, e dispositivo polimorfico includente la medesima
US8726740B1 (en) * 2012-12-13 2014-05-20 King Fahd University Of Petroleum And Minerals Multi-axis dynamometer
WO2014110682A1 (fr) * 2013-01-18 2014-07-24 Robotiq Inc. Capteur de force/couple, appareil et procédé pour apprentissage et fonctionnement de robot
GB2511101B (en) * 2013-02-22 2017-05-10 Transense Tech Plc Torque measurement flexplates
JP2014163815A (ja) * 2013-02-26 2014-09-08 Seiko Epson Corp 力検出装置およびロボット
JP2014196924A (ja) * 2013-03-29 2014-10-16 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および移動体
CN103196594B (zh) * 2013-04-10 2015-09-09 济南大学 一种轮辐式并联压电六维力传感器及测量方法
JP6163900B2 (ja) * 2013-06-13 2017-07-19 セイコーエプソン株式会社 力検出装置およびロボット
US9778119B2 (en) * 2013-10-05 2017-10-03 Bertec Limited Load transducer and force measurement assembly using the same
JP2015087281A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、および部品加工装置
JP6252241B2 (ja) * 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
JP6248709B2 (ja) * 2014-03-04 2017-12-20 セイコーエプソン株式会社 力検出装置およびロボット
JP6476730B2 (ja) * 2014-10-21 2019-03-06 セイコーエプソン株式会社 力検出装置及びロボット
MX369224B (es) * 2014-12-17 2019-10-31 Norgren Automation Solutions Llc Aparato y método para detectar múltiples piezas de trabajo.
JP6105674B2 (ja) * 2015-05-28 2017-03-29 ファナック株式会社 ロボットと人間との接触力を監視するロボットシステム
JP5853121B1 (ja) * 2015-09-24 2016-02-09 株式会社ワコー 力覚センサ
US10078026B2 (en) * 2015-12-31 2018-09-18 Michael Vinogradov-Nurenberg Multi-component force-torque sensing device with reduced cross-talk for twist-compression testing machine
US10274386B2 (en) * 2016-06-20 2019-04-30 X Development Llc Retroreflective multi-axis force torque sensor
EP3513300A4 (fr) * 2016-09-16 2020-06-03 Verb Surgical Inc. Capteur à degrés de liberté multiples
JP6501746B2 (ja) * 2016-10-07 2019-04-17 キヤノン株式会社 変位測定装置、ロボット、ロボットアーム及び物品の製造方法
DE102016012324A1 (de) * 2016-10-17 2018-04-19 Franka Emika Gmbh Drehmomentsensorvorrichtung und Verfahren zum Erfassen von Drehmomenten
US10486314B1 (en) * 2016-11-01 2019-11-26 University Of South Florida Sensor assembly and robotic system including an orthoplanar spring having multiple legs

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JP6735419B2 (ja) 2020-08-05
WO2018073012A1 (fr) 2018-04-26
CN109844480A (zh) 2019-06-04
KR102191285B1 (ko) 2020-12-16
JP2019530880A (ja) 2019-10-24
US20190242768A1 (en) 2019-08-08
KR20190047036A (ko) 2019-05-07

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