EP3514266A4 - GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE WITH EPITAXIAL LAYER - Google Patents
GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE WITH EPITAXIAL LAYER Download PDFInfo
- Publication number
- EP3514266A4 EP3514266A4 EP18806264.0A EP18806264A EP3514266A4 EP 3514266 A4 EP3514266 A4 EP 3514266A4 EP 18806264 A EP18806264 A EP 18806264A EP 3514266 A4 EP3514266 A4 EP 3514266A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- semiconductor substrate
- compound semiconductor
- group iii
- epitaxial layer
- iii
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 title 2
- 239000004065 semiconductor Substances 0.000 title 2
- 239000000758 substrate Substances 0.000 title 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/42—Gallium arsenide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02019—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/30—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface
- H01L29/34—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by physical imperfections; having polished or roughened surface the imperfections being on the surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Recrystallisation Techniques (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017019722 | 2017-05-26 | ||
PCT/JP2018/017452 WO2018216440A1 (ja) | 2017-05-26 | 2018-05-01 | Iii-v族化合物半導体基板およびエピタキシャル層付iii-v族化合物半導体基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3514266A1 EP3514266A1 (en) | 2019-07-24 |
EP3514266A4 true EP3514266A4 (en) | 2022-05-11 |
Family
ID=64395646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP18806264.0A Pending EP3514266A4 (en) | 2017-05-26 | 2018-05-01 | GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE WITH EPITAXIAL LAYER |
Country Status (6)
Country | Link |
---|---|
US (2) | US10964786B2 (zh) |
EP (1) | EP3514266A4 (zh) |
JP (1) | JP6477990B1 (zh) |
CN (2) | CN110234801B (zh) |
TW (1) | TWI679733B (zh) |
WO (1) | WO2018216440A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3514266A4 (en) | 2017-05-26 | 2022-05-11 | Sumitomo Electric Industries, Ltd. | GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE WITH EPITAXIAL LAYER |
JP7327714B1 (ja) | 2022-09-16 | 2023-08-16 | 住友電気工業株式会社 | ヒ化ガリウム単結晶基板およびその製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006016249A (ja) * | 2004-07-01 | 2006-01-19 | Sumitomo Electric Ind Ltd | AlxGayIn1−x−yN基板とAlxGayIn1−x−yN基板の洗浄方法 |
US20120292747A1 (en) * | 2011-05-18 | 2012-11-22 | Sumitomo Electric Industries, Ltd. | Compound semiconductor substrate |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4519846A (en) | 1984-03-08 | 1985-05-28 | Seiichiro Aigo | Process for washing and drying a semiconductor element |
JPH05291228A (ja) * | 1992-04-07 | 1993-11-05 | Fujitsu Ltd | ウェーハ洗浄装置及び洗浄方法 |
JPH07211688A (ja) * | 1993-05-17 | 1995-08-11 | Japan Energy Corp | 化合物半導体基板の製造方法 |
US6352592B1 (en) * | 1998-01-16 | 2002-03-05 | Silicon Valley Group, Thermal Systems Llc | Free floating shield and semiconductor processing system |
US6287178B1 (en) | 1999-07-20 | 2001-09-11 | International Business Machines Corporation | Wafer carrier rinsing mechanism |
WO2001033618A1 (fr) * | 1999-10-29 | 2001-05-10 | Matsushita Electric Industrial Co., Ltd. | Procede de nettoyage de substrat et procede de fabrication de dispositif semi-conducteur |
JP4350364B2 (ja) * | 2002-12-12 | 2009-10-21 | 昭和電工株式会社 | 洗浄剤組成物、半導体ウェーハの洗浄方法および製造方法 |
EP1748481B1 (en) * | 2004-05-19 | 2015-04-22 | Nippon Mining & Metals Co., Ltd. | Wafer storage container |
CN100428419C (zh) * | 2004-12-08 | 2008-10-22 | 中国电子科技集团公司第四十六研究所 | 一种砷化镓晶片清洗方法 |
JP2007005472A (ja) * | 2005-06-22 | 2007-01-11 | Sumitomo Electric Ind Ltd | 基板の表面処理方法およびiii−v族化合物半導体の製造方法 |
EP1739213B1 (de) * | 2005-07-01 | 2011-04-13 | Freiberger Compound Materials GmbH | Vorrichtung und Verfahren zum Tempern von III-V-Wafern sowie getemperte III-V-Halbleitereinkristallwafer |
KR100691212B1 (ko) * | 2006-11-17 | 2007-03-12 | 애플티(주) | 반도체 웨이퍼 세정장치 및 이를 이용한 반도체 웨이퍼제조 장치 |
JP2009137776A (ja) * | 2007-12-04 | 2009-06-25 | Sumitomo Electric Ind Ltd | GaAs半導体基板およびその製造方法、ならびにIII−V族化合物半導体デバイスおよびその製造方法 |
JP4697272B2 (ja) | 2008-07-18 | 2011-06-08 | 住友電気工業株式会社 | Iii−v族化合物半導体基板の製造方法およびエピタキシャルウエハの製造方法 |
JP5471001B2 (ja) * | 2009-04-20 | 2014-04-16 | 住友電気工業株式会社 | インジウムリン基板の製造方法、エピタキシャルウエハの製造方法、インジウムリン基板およびエピタキシャルウエハ |
JP5218476B2 (ja) * | 2010-06-03 | 2013-06-26 | 住友電気工業株式会社 | 半導体素子、光学センサ装置および半導体素子の製造方法 |
JP2012218951A (ja) * | 2011-04-05 | 2012-11-12 | Jvc Kenwood Corp | 半導体基板及び半導体基板の製造方法 |
CN102456549B (zh) | 2011-11-08 | 2014-06-25 | 北京通美晶体技术有限公司 | 磷化铟晶片及其表面清洗方法 |
JP5991036B2 (ja) * | 2012-06-13 | 2016-09-14 | 住友電気工業株式会社 | 受光素子および光学装置 |
JP6229933B2 (ja) * | 2013-09-27 | 2017-11-15 | 株式会社Screenホールディングス | 処理カップ洗浄方法、基板処理方法および基板処理装置 |
EP3514266A4 (en) | 2017-05-26 | 2022-05-11 | Sumitomo Electric Industries, Ltd. | GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOSITE SEMICONDUCTOR SUBSTRATE WITH EPITAXIAL LAYER |
-
2018
- 2018-05-01 EP EP18806264.0A patent/EP3514266A4/en active Pending
- 2018-05-01 CN CN201880009481.9A patent/CN110234801B/zh active Active
- 2018-05-01 CN CN202011621874.0A patent/CN112838122A/zh active Pending
- 2018-05-01 JP JP2018548010A patent/JP6477990B1/ja active Active
- 2018-05-01 WO PCT/JP2018/017452 patent/WO2018216440A1/ja unknown
- 2018-05-01 US US16/342,618 patent/US10964786B2/en active Active
- 2018-05-18 TW TW107116939A patent/TWI679733B/zh active
-
2020
- 2020-10-26 US US17/080,165 patent/US11444161B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006016249A (ja) * | 2004-07-01 | 2006-01-19 | Sumitomo Electric Ind Ltd | AlxGayIn1−x−yN基板とAlxGayIn1−x−yN基板の洗浄方法 |
US20120292747A1 (en) * | 2011-05-18 | 2012-11-22 | Sumitomo Electric Industries, Ltd. | Compound semiconductor substrate |
Non-Patent Citations (1)
Title |
---|
See also references of WO2018216440A1 * |
Also Published As
Publication number | Publication date |
---|---|
US11444161B2 (en) | 2022-09-13 |
US20200052075A1 (en) | 2020-02-13 |
CN110234801B (zh) | 2021-01-12 |
EP3514266A1 (en) | 2019-07-24 |
CN112838122A (zh) | 2021-05-25 |
US10964786B2 (en) | 2021-03-30 |
WO2018216440A1 (ja) | 2018-11-29 |
TW201901862A (zh) | 2019-01-01 |
US20210057527A1 (en) | 2021-02-25 |
JP6477990B1 (ja) | 2019-03-06 |
CN110234801A (zh) | 2019-09-13 |
TWI679733B (zh) | 2019-12-11 |
JPWO2018216440A1 (ja) | 2019-06-27 |
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